Display device
    5.
    发明授权
    Display device 有权
    显示设备

    公开(公告)号:US09196633B2

    公开(公告)日:2015-11-24

    申请号:US12556704

    申请日:2009-09-10

    摘要: A protective circuit includes a non-linear element which includes a gate electrode, a gate insulating layer covering the gate electrode, a first oxide semiconductor layer overlapping with the gate electrode over the gate insulating layer, and a first wiring layer and a second wiring layer whose end portions overlap with the gate electrode over the first oxide semiconductor layer and in which a conductive layer and a second oxide semiconductor layer are stacked. Over the gate insulating layer, oxide semiconductor layers with different properties are bonded to each other, whereby stable operation can be performed as compared with Schottky junction. Thus, the junction leakage can be reduced and the characteristics of the non-linear element can be improved.

    摘要翻译: 保护电路包括非线性元件,其包括栅电极,覆盖栅电极的栅极绝缘层,与栅极绝缘层上的栅电极重叠的第一氧化物半导体层,以及第一布线层和第二布线层 其端部与第一氧化物半导体层上的栅电极重叠,并且其中层叠有导电层和第二氧化物半导体层。 在栅极绝缘层上,具有不同性质的氧化物半导体层彼此结合,由此可以进行与肖特基结的稳定操作。 因此,可以降低结漏电,提高非线性元件的特性。

    Semiconductor device and method for manufacturing the same
    6.
    发明授权
    Semiconductor device and method for manufacturing the same 有权
    半导体装置及其制造方法

    公开(公告)号:US09130043B2

    公开(公告)日:2015-09-08

    申请号:US12893513

    申请日:2010-09-29

    申请人: Kengo Akimoto

    发明人: Kengo Akimoto

    IPC分类号: H01L29/786 H01L27/12

    摘要: An object is to provide a method for manufacturing a highly reliable semiconductor device which includes a thin film transistor using an oxide semiconductor and having stable electric characteristics. In manufacture of a semiconductor device in which an oxide semiconductor is used for a channel formation region, after an oxide semiconductor film is formed, a conductive film including a metal, a metal compound, or an alloy that can absorb or adsorb moisture, a hydroxy group, or hydrogen is formed to overlap with the oxide semiconductor film with an insulating film provided therebetween. Then, heat treatment is performed in the state where the conductive film is exposed; in such a manner, activation treatment for removing moisture, oxygen, hydrogen, or the like adsorbed onto a surface of or in the conductive film is performed.

    摘要翻译: 本发明的目的是提供一种用于制造高可靠性的半导体器件的方法,该半导体器件包括使用氧化物半导体并具有稳定的电特性的薄膜晶体管。 在使用氧化物半导体用于沟道形成区域的半导体器件的制造中,在形成氧化物半导体膜之后,可以使用能够吸收或吸附水分的金属,金属化合物或合金的导电膜,羟基 组或氢形成为与氧化物半导体膜重叠,其间设置有绝缘膜。 然后,在导电膜露出的状态下进行热处理; 以这种方式,执行吸附在导电膜表面上或导电膜中的水分,氧气,氢气等的活化处理。