摘要:
A sputtering target comprising a substrate and a target material formed on the substrate, wherein the target material comprises a metal oxide of the chemical formula MOx as the main component, wherein MOx is a metal oxide which is deficient in oxygen as compared with the stoichiometric composition, and M is at least one metal selected from the group consisting of Ti, Nb, Ta, Mo, W, Zr and Hf, a process for its production, and a method for forming a film having a high refractive index.
摘要:
A ceramics rotatable magnetron sputtering cathode target comprising a cylindrical target holder and a ceramics layer as a target to be sputtered, formed on the outer surface of the target holder, wherein at least one layer selected from the group consisting of a layer of a metal or alloy having a thermal expansion coefficient of an intermediate level between the thermal expansion coefficients of the ceramics layer and the target holder, and a layer of a metal or alloy having a thermal expansion coefficient approximating to the thermal expansion coefficient of the ceramics layer, is formed as an undercoat between the ceramics layer and the target holder.
摘要:
A sputtering target comprising a substrate and a target material formed on the substrate, wherein the target material comprises a metal oxide of the chemical formula MOx as the main component, wherein MOx is a metal oxide which is deficient in oxygen as compared with the stoichiometric composition, and M is at least one metal selected from the group consisting of Ti, Nb, Ta, Mo, W, Zr and Hf, a process for its production, and a method for forming a film having a high refractive index.
摘要:
A sputtering target comprising a substrate and a target material formed on the substrate, wherein the target material comprises a metal oxide of the chemical formula MOx as the main component, wherein MOx is a metal oxide which is deficient in oxygen as compared with the stoichiometric composition, and M is at least one metal selected from the group consisting of Ti, Nb, Ta, Mo, W, Zr and Hf, a process for its production, and a method for forming a film having a high refractive index.
摘要:
A sputtering target comprising a substrate and a target material formed on the substrate, wherein the target material comprises a metal oxide of the chemical formula MOx as the main component, wherein MOx is a metal oxide which is deficient in oxygen as compared with the stoichiometric composition, and M is at least one metal selected from the group consisting of Ti, Nb, Ta, Mo, W, Zr and Hf, a process for its production, and a method for forming a film having a high refractive index.
摘要:
A transparent conductive film of a zinc oxide type containing gallium and silicon, which contains silicon in an amount of from 0.01 to 1.5 mol % in terms of SiO.sub.2.
摘要:
The present invention has an object to provide an integrated circuit device having a Cu wiring, using a barrier layer which facilitates planarization. The present invention relates to an integrated circuit device having a Cu wiring layer, a barrier layer therefor and a dielectric layer, wherein the barrier layer is represented by a compositional formula of TaOxNy (the range of x being 0
摘要:
A transparent conductive film of a zinc oxide type containing gallium and silicon, which contains silicon in an amount of from 0.01 to 1.5 mol % in terms of SiO.sub.2.
摘要:
An information processing apparatus and method for reducing an unnecessary waiting time in a depacketizing process and enabling processing to be easily performed at high speeds applicable to, for example, an encoding apparatus. An analysis unit compares input image data with image data of one previous picture read out from a storage unit. On the basis of the analysis result, a concealment header generation unit generates a concealment header that is referred to by a receiving apparatus at the time of an error concealment process. On the basis of the concealment header, a loss analysis unit performs error concealment for the occurrence of a transmission error by suitably using encoded data stored in a storage unit.
摘要:
An object of the invention is to recover the capability of an exhaust gas purification apparatus provided in an exhaust passage of an internal combustion engine with improved reliability. According to the invention there are provided recovery control execution unit for executing a recovery control in which the temperature of the exhaust gas purification apparatus is raised by supply of reducing agent to a precatalyst to thereby recover the capability of the exhaust gas purification apparatus and prohibition range setting unit for setting a recovery control prohibition range that is an operation range of the internal combustion engine in which execution of the recovery control by the recovery control execution unit is prohibited. The higher the degree of deterioration of the precatalyst is, the higher the maximum values of the engine torque and the engine revolution number in the recovery control prohibition range are set to be.