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13 条记录 (耗时 0.032 秒)

    Mixing of materials in an integrated circuit manufacturing equipment
    1.
    发明授权
    Mixing of materials in an integrated circuit manufacturing equipment 有权
    在集成电路制造设备中混合材料

    公开(公告)号：US06758591B1

    公开(公告)日：2004-07-06

    申请号：US10104710

    申请日：2002-03-22

    申请人： Peter Krotov ,  Colin F. Smith ,  Randy Hall ,  Sooyun Joh

    发明人： Peter Krotov ,  Colin F. Smith ,  Randy Hall ,  Sooyun Joh

    IPC分类号： B01F1302

    CPC分类号： C23C16/45512 ,  B01F5/0068 ,  C23C16/4481

    摘要： In one embodiment, a mixing device includes a nozzle that is disposed tangent to a wall of a chamber. Gas flowing from the nozzle rotates in the chamber forming a vortex. Another gas may be flown near a middle portion of the chamber, thereby uniformly mixing the two gases. In another embodiment, an evaporation and mixing device includes a nozzle configured to impart rotation to a gas flowing into a chamber. An injector flows a liquid material near a middle portion of the chamber, thereby mixing the gas and the liquid material. A heater may be employed to help evaporate the liquid material.

    摘要翻译： 在一个实施例中，混合装置包括与腔的壁相切设置的喷嘴。 从喷嘴流出的气体在室内旋转形成涡流。 另外的气体可以在室的中间部分附近流动，从而均匀地混合两种气体。 在另一个实施例中，蒸发和混合装置包括被配置为向流入室中的气体赋予旋转的喷嘴。 喷射器在室的中间部分附近流动液体材料，从而混合气体和液体材料。 可以使用加热器来帮助蒸发液体材料。

    Steam Generator for a Nuclear Reactor
    2.
    发明申请
    Steam Generator for a Nuclear Reactor 有权

    公开(公告)号：US20130279643A1

    公开(公告)日：2013-10-24

    申请号：US13451759

    申请日：2012-04-20

    申请人： John T. Groome ,  Sooyun Joh ,  James Allan Nylander

    发明人： John T. Groome ,  Sooyun Joh ,  James Allan Nylander

    IPC分类号： G21C15/16

    CPC分类号： G21C15/16 ,  F22B1/162 ,  G21C1/322 ,  G21D1/006 ,  Y02E30/40

    摘要： A steam generator for a nuclear reactor comprises plenums proximate with a first plane, wherein the first plane intersects a bottom portion of a riser column of a reactor vessel. The steam generator may further comprise plenums proximate with a second plane, approximately parallel with the first plane, wherein the second plane intersects a top portion of the riser column of the reactor vessel. The steam generator may further include a plurality of steam generator tubes that convey coolant from a plenum located proximate with the first plane to one of the plenums proximate with the second plane.

    Flexible gas mixing manifold
    3.
    发明授权
    Flexible gas mixing manifold 有权
    柔性气体混合歧管

    公开(公告)号：US08291935B1

    公开(公告)日：2012-10-23

    申请号：US12384623

    申请日：2009-04-07

    申请人： Neil J. Merritt ,  Kevin D. Jennings ,  George A. Gilbert ,  David E. Bowser ,  Sooyun Joh

    发明人： Neil J. Merritt ,  Kevin D. Jennings ,  George A. Gilbert ,  David E. Bowser ,  Sooyun Joh

    IPC分类号： F16K11/20

    CPC分类号： F16K27/003 ,  H01L21/67017 ,  Y10T137/87249 ,  Y10T137/8766

    摘要： Each of plurality of gas sources flows to a different one of a plurality of separate source gas flow paths. Then, a source gas is distributed directly from each of plurality of separate source gas flow paths to a plurality of separate gas mixture flow paths, thereby distributing a plurality of source gases to each of different flow paths. A plurality of separate gas mixture streams is generated by flowing a plurality of source gases in each of a plurality of separate gas mixture flow paths. In some embodiments, each of a plurality of separate source gas flow paths comprises a gas distribution duct, and each of a plurality of gas mixture flow paths comprises a gas mixing conduit. In some embodiments, a gas distribution duct includes a plurality of gas distribution ports and a gas source port connectable to a gas source. In some embodiments, a gas mixing conduit comprises a plurality of gas inlet holes, a gas mixing region, and a gas outlet hole. Each of the gas inlet holes is connectable to a gas distribution duct and is operable to conduct a source gas into the gas mixing region. A plurality of gases is mixed in the mixing region to form a gas mixture. A gas manifold is operable to mix a plurality of source gases in a plurality of gas mixing conduits to generate a plurality of gas mixtures having different gas compositions and flow rates.

    摘要翻译： 多个气体源中的每一个流到多个单独的源气体流动路径中的不同的一个。 然后，源气体从多个单独的源气体流动路径中的每一个直接分配到多个单独的气体混合物流动路径，从而将多个源气体分配到每个不同的流动路径。 通过在多个单独的气体混合物流动路径中的每一个中流动多个源气体来产生多个单独的气体混合物流。 在一些实施例中，多个单独的源气体流动路径中的每一个包括气体分配管道，并且多个气体混合物流动路径中的每一个包括气体混合管道。 在一些实施例中，气体分配管道包括多个气体分配端口和可连接到气体源的气体源端口。 在一些实施例中，气体混合管道包括多个气体入口孔，气体混合区域和气体出口孔。 每个气体入口孔可连接到气体分配管道，并且可操作以将源气体导入气体混合区域。 在混合区域中混合多种气体以形成气体混合物。 气体歧管可操作以混合多个气体混合管道中的多个源气体，以产生具有不同气体组成和流速的多个气体混合物。

    Apparatus and method for dielectric deposition
    7.
    发明授权
    Apparatus and method for dielectric deposition 有权
    电介质沉积的设备和方法

    公开(公告)号：US08765232B2

    公开(公告)日：2014-07-01

    申请号：US13347598

    申请日：2012-01-10

    申请人： Stephen Edward Savas ,  Sai Mantripragada ,  Sooyun Joh ,  Allan B. Wiesnoski ,  Carl Galewski

    发明人： Stephen Edward Savas ,  Sai Mantripragada ,  Sooyun Joh ,  Allan B. Wiesnoski ,  Carl Galewski

    IPC分类号： C23F1/00 ,  H05H1/24

    CPC分类号： C23C16/503 ,  C23C16/45574 ,  C23C16/45578 ,  C23C16/509 ,  C23C16/54 ,  C23C16/545 ,  H01J37/32036 ,  H01J37/32532

    摘要： The disclosed invention includes apparatus and methods that may be used for plasma-based deposition of thin layers of material on separate or continuous web substrates at very low temperatures with very low defect density. It achieves superior control of gas phase chemistry by controlling the sequence of introduction of gaseous components. It also has substantially independent control over the rate of chemical processes in the gas and of the amount of power and energy of ion bombardment. Such control enables high quality single and multi-layer films to be deposited cost effectively and uniformly over larger areas under very low temperature conditions.

    摘要翻译： 所公开的发明包括可以用于在非常低的缺陷密度的非常低的温度下在分离的或连续的纸幅基材上等离子体沉积薄层材料的装置和方法。 通过控制气体组分的引入顺序，可以实现气相化学的优异控制。 它还对气体中的化学过程速率和离子轰击的功率和能量的量具有实质上独立的控制。 这种控制使得高质量的单层和多层薄膜能够在非常低的温度条件下成本有效且均匀地沉积在较大的区域上。

    Uniform fluid distribution and exhaust system for a chemical-mechanical planarization device
    9.
    发明申请
    Uniform fluid distribution and exhaust system for a chemical-mechanical planarization device 失效

    公开(公告)号：US20050070214A1

    公开(公告)日：2005-03-31

    申请号：US10671841

    申请日：2003-09-25

    申请人： Dave Marquardt ,  Sooyun Joh ,  David Cohen ,  Edward McInerney

    发明人： Dave Marquardt ,  Sooyun Joh ,  David Cohen ,  Edward McInerney

    IPC分类号： B24B37/04 ,  B24B57/02 ,  B24D13/14 ,  B24B5/00

    CPC分类号： B24B37/26 ,  B24B57/02 ,  B24D13/147

    摘要： An assembly for a chemical-mechanical polishing process includes a platen having an outer edge, a top surface, and at least one inlet for introducing fluid to the top surface; a manifold system, entrenched in the top surface and in communication with the at least one inlet, for channeling the fluid about the top surface; a polishing pad having a top pad surface, and a plurality of fluid delivery through-holes for introducing the fluid from the manifold system to the top pad surface; and a fluid distribution system, entrenched in the top pad surface and in communication with the through-holes, for substantially uniformly distributing the fluid about the top pad surface. The fluid distribution system includes a set of intersecting first grooves defining an array of lands, each of the first grooves having a first cross sectional area. The fluid distribution system also includes a plurality of second grooves disposed within each of the lands and communicating with the first grooves, each of the second grooves having a second cross sectional area that is smaller than the first cross sectional area.

    Steam generator for a nuclear reactor
    10.
    发明授权
    Steam generator for a nuclear reactor 有权
    用于核反应堆的蒸汽发生器

    公开(公告)号：US09230697B2

    公开(公告)日：2016-01-05

    申请号：US13451759

    申请日：2012-04-20

    申请人： John T. Groome ,  Sooyun Joh ,  James Allan Nylander

    发明人： John T. Groome ,  Sooyun Joh ,  James Allan Nylander

    IPC分类号： G21C19/28 ,  G21C15/16 ,  G21D1/00 ,  F22B1/16 ,  G21C1/32

    CPC分类号： G21C15/16 ,  F22B1/162 ,  G21C1/322 ,  G21D1/006 ,  Y02E30/40

    摘要： A steam generator for a nuclear reactor comprises plenums proximate with a first plane, wherein the first plane intersects a bottom portion of a riser column of a reactor vessel. The steam generator may further comprise plenums proximate with a second plane, approximately parallel with the first plane, wherein the second plane intersects a top portion of the riser column of the reactor vessel. The steam generator may further include a plurality of steam generator tubes that convey coolant from a plenum located proximate with the first plane to one of the plenums proximate with the second plane.

    摘要翻译： 用于核反应堆的蒸汽发生器包括靠近第一平面的增压室，其中第一平面与反应器容器的提升塔的底部相交。 蒸汽发生器还可以包括与第二平面接近的增压室，大致平行于第一平面，其中第二平面与反应器容器的提升塔的顶部相交。 蒸汽发生器还可以包括多个蒸汽发生器管，其将冷却剂从位于第一平面附近的集气室输送到靠近第二平面的一个通风室。