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1.发明申请Method and system to measure characteristics of a film disposed on a substrate 有权测量设置在基板上的膜的特性的方法和系统公开(公告)号：US20050185169A1
公开(公告)日：2005-08-25
申请号：US10782187
申请日：2004-02-19
CPC分类号： G03F7/0002 , B29C43/003 , B29C2043/025 , B81C1/0046 , B81C99/004 , B82Y10/00 , B82Y40/00 , G01N21/8422 , G03F7/70625 , G03F7/7065
摘要： The present invention is directed to providing a method and system to measure characteristics of a film disposed on a substrate. The method includes identifying a plurality of processing regions on the film; measuring characteristics of a subset of the plurality of processing regions, defining measured characteristics; determining a variation of one of the measured characteristics; and associating a cause of the variations based upon a comparison of the one of the measured characteristics to measured characteristics associated with the remaining processing regions of the subset. The system carries out the aforementioned method.
摘要翻译： 本发明旨在提供一种测量设置在基底上的膜的特性的方法和系统。 该方法包括识别胶片上的多个处理区域; 测量所述多个处理区域的子集的特征，定义测量的特征; 确定测量特征之一的变化; 并且基于所测量的特征之一与与所述子集的剩余处理区域相关联的测量特征的比较来将所述变化的原因相关联。 系统执行上述方法。
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公开(公告)号：US20070026542A1
公开(公告)日：2007-02-01
申请号：US11470829
申请日：2006-09-07
IPC分类号： H01L21/00
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00 , C03C17/3417 , C03C2217/77 , C03C2218/31 , C03C2218/328
摘要： The present invention is directed to a method forming conductive templates that includes providing a substrate; forming a mesa on the substrate; and forming a plurality of recessions and projections on the mesa with a nadir of the recessions comprising electrically conductive material and the projections comprising electrically insulative material. It is desired that the mesa be substantially transparent to a predetermined wavelength of radiation, for example ultraviolet radiation. As a result, it is desired to form the electrically conductive material from a material that allows ultraviolet radiation to propagate therethrough. In the present invention indium tin oxide is a suitable material from which to form the electrical conductive material.
摘要翻译： 本发明涉及一种形成导电模板的方法，其包括提供衬底; 在基板上形成台面; 以及在所述台面上形成多个凹陷和突出部，其中所述凹陷的最低点包括导电材料，并且所述突起包括电绝缘材料。 期望台面对于预定波长的辐射例如紫外线辐射基本上是透明的。 结果，期望由允许紫外线辐射传播的材料形成导电材料。 在本发明中，氧化铟锡是形成导电材料的合适材料。
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公开(公告)号：US20060172549A1
公开(公告)日：2006-08-03
申请号：US11108208
申请日：2005-04-18
申请人： Byung-Jin Choi , Anshuman Cherala , Yeong-jun Choi , Mario Meissl , Sidlgata Sreenivasan , Norman Schumaker , Xiaoming Lu , Ian McMackin , Daniel Babbs
发明人： Byung-Jin Choi , Anshuman Cherala , Yeong-jun Choi , Mario Meissl , Sidlgata Sreenivasan , Norman Schumaker , Xiaoming Lu , Ian McMackin , Daniel Babbs
IPC分类号： H01L21/31 , H01L21/469
CPC分类号： H01L21/6875 , B82Y10/00 , B82Y40/00 , G03F7/0002 , H01L21/6838 , Y10S977/887
摘要： The present invention is directed towards a method of separating a mold, included in a template, from a layer disposed on a substrate, the method including, inter alia, applying a separation force to the template to separate the template from the layer; and facilitating localized deformation in the substrate to reduce the separation force required to achieve separation.
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公开(公告)号：US20050106321A1
公开(公告)日：2005-05-19
申请号：US10714088
申请日：2003-11-14
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00
摘要： The present invention is directed to a method for dispensing a plurality of spaced-apart droplets of liquid a substrate that features minimizing the distance liquid in the droplets must travel to reach an adjacent droplet to form a contiguous lay of the liquid on the substrate. As a result, when patterning the droplets with a patterned template, the time required to fill the features of the pattern and to cover the substrate is minimized. This increases the throughput of the imprinting process. To that end, the method includes disposing a plurality of spaced-apart droplets on the substrate, each of which has a unit volume associated therewith. A spacing between adjacent droplets of a subset of the plurality of droplets is selected to be a function of a smallest unit volume associated with the subset.
摘要翻译： 本发明涉及一种用于分配液体的多个间隔开的液滴的方法，其特征在于使液滴中的液体必须行进的距离最小化以到达相邻的液滴，以在基底上形成液体的连续层。 结果，当用图案化模板图案化液滴时，填充图案的特征和覆盖基底所需的时间被最小化。 这增加了压印过程的吞吐量。 为此，该方法包括在衬底上设置多个间隔开的液滴，每个液滴具有与其相关的单位体积。 选择多个液滴的子集的相邻液滴之间的间隔是与该子集相关联的最小单位体积的函数。
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公开(公告)号：US20070114686A1
公开(公告)日：2007-05-24
申请号：US11565393
申请日：2006-11-30
申请人： Byung-Jin Choi , Sidlgata Sreenivasan , Ian McMackin , Pankaj Lad
发明人： Byung-Jin Choi , Sidlgata Sreenivasan , Ian McMackin , Pankaj Lad
IPC分类号： B29D11/00
CPC分类号： G03F7/70875 , B29C33/20 , B29C43/003 , B29C43/021 , B29C43/36 , B29C43/58 , B29C2043/025 , B29C2043/3233 , B29C2043/3488 , B29C2043/5841 , B29D11/00365 , G03B27/62 , G03F7/707
摘要： The present invention is directed towards a method and a system of expelling a gas positioned between a substrate and a mold, the substrate and the mold further having a liquid positioned therebetween.
摘要翻译： 本发明涉及排出位于基底和模具之间的气体的方法和系统，所述基底和模具进一步具有位于其间的液体。
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公开(公告)号：US20050098534A1
公开(公告)日：2005-05-12
申请号：US10706537
申请日：2003-11-12
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00 , C03C17/3417 , C03C2217/77 , C03C2218/31 , C03C2218/328
摘要： The present invention is directed to a method forming conductive templates that includes providing a substrate; forming a mesa on the substrate; and forming a plurality of recessions and projections on the mesa with a nadir of the recessions comprising electrically conductive material and the projections comprising electrically insulative material. It is desired that the mesa be substantially transparent to a predetermined wavelength of radiation, for example ultraviolet radiation. As a result, it is desired to form the electrically conductive material from a material that allows ultraviolet radiation to propagate therethrough. In the present invention indium tin oxide is a suitable material from which to form the electrical conductive material.
摘要翻译： 本发明涉及一种形成导电模板的方法，其包括提供衬底; 在基板上形成台面; 以及在所述台面上形成多个凹陷和突出部，其中所述凹陷的最低点包括导电材料，并且所述突起包括电绝缘材料。 期望台面对于预定波长的辐射例如紫外线辐射基本上是透明的。 结果，期望由允许紫外线辐射传播的材料形成导电材料。 在本发明中，氧化铟锡是形成导电材料的合适材料。
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公开(公告)号：US20070247608A1
公开(公告)日：2007-10-25
申请号：US11694612
申请日：2007-03-30
IPC分类号： G03B27/62
CPC分类号： G03B27/62 , B82Y10/00 , B82Y40/00 , G03B27/42 , G03F7/0002 , G03F9/00 , G03F9/7042 , G03F9/7076 , G03F9/7084
摘要： The present invention is directed towards a choice of the shape of the patterned fields for Level 0 (patterned by imprint or photolithography or e-beam, etc.) and Level 1 (patterned by imprint) such that these shapes when tessellated together eliminate the open areas causes by the moats.
摘要翻译： 本发明涉及用于0级（通过压印或光刻或电子束等图案化）和1级（通过印记图案化）的图案化场的形状的选择，使得这些形状在细分时一起消除开路 地区由护城河引起。
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8.发明申请公开(公告)号：US20050270312A1
公开(公告)日：2005-12-08
申请号：US11143092
申请日：2005-06-02
申请人： Pankaj Lad , Ian McMackin , Van Truskett , Norman Schumaker , Sidlgata Sreenivasan , Duane Voth , Philip Schumaker , Edward Fletcher
发明人： Pankaj Lad , Ian McMackin , Van Truskett , Norman Schumaker , Sidlgata Sreenivasan , Duane Voth , Philip Schumaker , Edward Fletcher
CPC分类号： B82Y10/00 , B41J3/28 , B82Y40/00 , G03F7/0002 , H01L51/0004
摘要： The present invention is directed to a method for dispensing a total volume of liquid on a substrate, the method including, inter alia, disposing a plurality of spaced-apart droplets on a region of the substrate, each having an unit volume associated therewith, with an aggregate volume of the droplets in the region being a function of a volume of a pattern to be formed thereat.
摘要翻译： 本发明涉及一种用于在基底上分配总体积的液体的方法，该方法尤其包括在衬底区域上设置多个间隔开的液滴，每个液滴具有与之相关联的单位体积，与 该区域中的液滴的总体积是要在其上形成的图案的体积的函数。
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公开(公告)号：US20060062867A1
公开(公告)日：2006-03-23
申请号：US11126946
申请日：2005-05-11
IPC分类号： B29C35/08
CPC分类号： G03F7/0002 , B29C35/0888 , B29C59/022 , B29C59/026 , B29C2035/0827 , B29C2059/023 , B81C1/0046 , B82Y10/00 , B82Y30/00 , B82Y40/00 , H01L21/0271
摘要： The present invention is directed to a template having a body including a surface with first and second regions. The first region has first wetting characteristics for a given material and the second region has second wetting characteristics for the given material. The first wetting characteristics differ from the second wetting characteristics. Specifically, the first region is formed from a surface treatment layer with a first surface energy to provide the first wetting characteristics. The second region is exposed portions of the body, typically quartz of fused silica, having a second surface energy associated therewith. The second surface energy is greater than the first surface energy to provide the second region with the second wetting characteristics.
摘要翻译： 本发明涉及一种具有主体的模板，该主体包括具有第一和第二区域的表面。 第一区域对于给定材料具有第一润湿特性，并且第二区域对于给定材料具有第二润湿特性。 第一润湿特性与第二润湿特性不同。 具体地说，第一区域由具有第一表面能的表面处理层形成，以提供第一润湿特性。 第二区域是具有与其相关联的第二表面能的身体的暴露部分，通常为熔融石英的石英。 第二表面能大于第一表面能量，以向第二区域提供第二润湿特性。
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公开(公告)号：US20050061773A1
公开(公告)日：2005-03-24
申请号：US10645306
申请日：2003-08-21
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00 , C23F1/08
摘要： The present invention provides a method for patterning a substrate with a template having a mold that features positioning conformable material between the substrate and the mold and filling a volume defined between the mold and the substrate with the conformable material through capillary action between the conformable material and one of the mold and the substrate. Thereafter, the conformable material is solidified. Specifically, the distance between the mold and the substrate is controlled to a sufficient degree to attenuate, if not avoid, compressive forces between the mold and the substrate. As a result, upon initial contact of the mold with the conformable material, spontaneous capillary filling of the volume between the mold and the substrate occurs.
摘要翻译： 本发明提供了一种用模板图案化模板的方法，该模板具有在基板和模具之间具有定位适形材料的模具，并且通过适形材料之间的毛细管作用在适形材料之间填充限定在模具和基板之间的体积， 模具和基材之一。 此后，使适形材料固化。 具体地说，模具和基板之间的距离被控制到足够的程度以减小模具和基板之间的压缩力（如果不是避免的话）。 结果，在模具与适形材料初次接触时，发生模具和基板之间的体积的自发毛细管填充。
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