公开(公告)号：US20100068509A1

公开(公告)日：2010-03-18

申请号：US12258220

申请日：2008-10-24

申请人： Qing Ma ,  Nathan Franklin ,  Li-Peng Wang ,  Robert Chen

发明人： Qing Ma ,  Nathan Franklin ,  Li-Peng Wang ,  Robert Chen

IPC分类号： B32B9/00 ,  C23C14/34 ,  C23C16/40 ,  B05D3/10 ,  B32B5/00 ,  B05D3/02

CPC分类号： G11B9/02 ,  B82Y10/00 ,  C23C14/025 ,  C23C14/08 ,  C23C16/0272 ,  C23C16/40 ,  C30B23/02 ,  C30B25/02 ,  C30B29/16 ,  C30B29/32 ,  C30B33/02 ,  G11B9/1472 ,  G11B9/149 ,  Y10T428/265

摘要： Provided herein are media for storing information and methods of forming such media. A strontium ruthenate (SRO) layer is provided. In certain embodiments, a titanium terminated (Ti-terminated) surface is formed on the SRO layer, and a lead zirconate titanate (PZT) layer is formed on the Ti-terminated surface. In other embodiments, a Ti-terminated surface is formed on the SRO layer, a lead titanate (PTO) layer is formed on the Ti-terminated surface, and a PZT layer is formed on the PTO layer. Preferably, the PZT layer is grown on the Ti-terminated surface, or the PTO layer, by step-flow or layer-by-layer growth, so that the resulting media has an atomically smooth surface.

摘要翻译： 这里提供了用于存储信息的介质和形成这种介质的方法。 提供锶酸锶（SRO）层。 在某些实施方案中，在SRO层上形成钛封端（Ti封端）表面，并且在Ti封端的表面上形成锆钛酸铅（PZT）层。 在其它实施方案中，在SRO层上形成Ti终止的表面，在Ti封端的表面上形成钛酸铅（PTO）层，并在PTO层上形成PZT层。 优选地，PZT层通过阶梯流或逐层生长在Ti封端的表面或PTO层上生长，使得所得介质具有原子光滑的表面。

公开(公告)号：US20090003030A1

公开(公告)日：2009-01-01

申请号：US11772194

申请日：2007-06-30

申请人： Qing Ma ,  Valluri R. Rao ,  Li-Peng Wang ,  Nathan Franklin

发明人： Qing Ma ,  Valluri R. Rao ,  Li-Peng Wang ,  Nathan Franklin

IPC分类号： G11C11/22 ,  G11C11/34

CPC分类号： G11C11/22

摘要： Methods and arrangements for data storage are discussed. Embodiments include applying a first voltage between a tip and an electrode, thereby forming a polarized domain in a ferroelectric material between 1 nanometer (nm) and 50 nm in thickness. The embodiments may also include applying another voltage through the tip, thereby generating a current responsive to an orientation of the polarized domain. The embodiments may also include measuring the current and determining the orientation of the polarized domain, based upon the measuring.

摘要翻译： 讨论了数据存储的方法和布置。 实施例包括在尖端和电极之间施加第一电压，从而在厚度在1nm（nm）到50nm之间的铁电材料中形成极化畴。 实施例还可以包括通过尖端施加另一电压，从而产生响应于偏振域的取向的电流。 实施例还可以包括基于测量来测量电流并确定极化畴的取向。

公开(公告)号：US08068405B2

公开(公告)日：2011-11-29

申请号：US11772194

申请日：2007-06-30

申请人： Qing Ma ,  Valluri R. Rao ,  Li-Peng Wang ,  Nathan Franklin

发明人： Qing Ma ,  Valluri R. Rao ,  Li-Peng Wang ,  Nathan Franklin

IPC分类号： G11B9/02

CPC分类号： G11C11/22

摘要： Methods and arrangements for data storage are discussed. Embodiments include applying a first voltage between a tip and an electrode, thereby forming a polarized domain in a ferroelectric material between 1 nanometer (nm) and 50 nm in thickness. The embodiments may also include applying another voltage through the tip, thereby generating a current responsive to an orientation of the polarized domain. The embodiments may also include measuring the current and determining the orientation of the polarized domain, based upon the measuring.

摘要翻译： 讨论了数据存储的方法和布置。 实施例包括在尖端和电极之间施加第一电压，从而在厚度在1nm（nm）到50nm之间的铁电材料中形成极化畴。 实施例还可以包括通过尖端施加另一电压，从而产生响应于偏振域的取向的电流。 实施例还可以包括基于测量来测量电流并确定极化畴的取向。

公开(公告)号：US20120263626A1

公开(公告)日：2012-10-18

申请号：US13464847

申请日：2012-05-04

申请人： Li-Peng Wang ,  Qing Ma

发明人： Li-Peng Wang ,  Qing Ma

IPC分类号： G01N27/00 ,  B23P15/00 ,  C30B33/08

CPC分类号： G01N30/6095 ,  B82Y15/00 ,  B82Y30/00 ,  G01N29/022 ,  G01N29/036 ,  G01N2030/025 ,  G01N2291/0224 ,  G01N2291/0255 ,  G01N2291/0256 ,  G01N2291/0423 ,  G01N2291/0426 ,  Y10T29/49117

摘要： An apparatus, according to one aspect, may include a chromatograph and a bulk acoustic resonator. The chromatograph may include a channel that is defined at least partially in a monolithic substrate. The channel may have an inlet to receive a sample and an outlet. A chromatography material may be included in the channel. The bulk acoustic resonator may have a first electrode and a second electrode that has a chemically functionalized surface. The chemically functionalized surface may be included in a chamber that is defined at least partially in the monolithic substrate and that is coupled with the outlet of the channel. Methods of making and using such apparatus, and systems including such apparatus, are also disclosed.

摘要翻译： 根据一个方面的装置可以包括色谱仪和体声波谐振器。 色谱仪可以包括至少部分地限定在整体式衬底中的通道。 通道可以具有用于接收样品和出口的入口。 色谱材料可以包括在通道中。 体声波谐振器可以具有第一电极和具有化学官能化表面的第二电极。 化学官能化的表面可以包括在至少部分地限定在整体式衬底中并且与通道的出口耦合的室中。 还公开了制造和使用这种装置的方法，以及包括这种装置的系统。

公开(公告)号：US08264941B2

公开(公告)日：2012-09-11

申请号：US11964580

申请日：2007-12-26

申请人： Quan Anh Tran ,  Byong M. Kim ,  Robert N. Stark ,  Nathan R. Franklin ,  Qing Ma ,  Valluri Rao ,  Donald E. Adams ,  Li-Peng Wang ,  Yevgeny V. Anoikin

发明人： Quan Anh Tran ,  Byong M. Kim ,  Robert N. Stark ,  Nathan R. Franklin ,  Qing Ma ,  Valluri Rao ,  Donald E. Adams ,  Li-Peng Wang ,  Yevgeny V. Anoikin

IPC分类号： G11B9/02

CPC分类号： G11B9/02 ,  B82Y10/00 ,  G11B9/1409

摘要： An arrangement, a method and a system to read information stored in a layer of ferroelectric media. The arrangement includes a layer including a ferroelectric media having one or more ferroelectric domains holding bit charges, a domain corresponding to information; a probe having a tip, wherein the media and the tip are adapted to move relative to one another such that the tip scans the ferroelectric domains of the media while applying a contact force to the domains to generate a direct piezoelectric effect within the domains; and circuitry coupled to the tip and adapted to generate a signal in response to an electrical coupling between the tip and the domains while scanning the tip in contact with the domains, the signal corresponding to a readout signal for ferroelectric bit charges stored in the media.

摘要翻译： 读取存储在铁电介质层中的信息的布置，方法和系统。 该布置包括具有一个或多个保持位电荷的铁电畴的铁电介质的层，对应于信息的畴; 具有尖端的探针，其中介质和尖端适于相对于彼此移动，使得尖端扫描介质的铁电畴，同时向畴施加接触力以在畴内产生直接压电效应; 以及耦合到所述尖端并且适于响应于所述尖端和所述域之间的电耦合而产生信号的电路，同时扫描与所述区域接触的尖端，所述信号对应于存储在所述介质中的铁电位电荷的读出信号。

公开(公告)号：US20100190267A1

公开(公告)日：2010-07-29

申请号：US12750586

申请日：2010-03-30

申请人： Li-Peng Wang ,  Qing Ma

发明人： Li-Peng Wang ,  Qing Ma

IPC分类号： G01N30/00

CPC分类号： G01N30/6095 ,  B82Y15/00 ,  B82Y30/00 ,  G01N29/022 ,  G01N29/036 ,  G01N2030/025 ,  G01N2291/0224 ,  G01N2291/0255 ,  G01N2291/0256 ,  G01N2291/0423 ,  G01N2291/0426 ,  Y10T29/49117

摘要： An apparatus, according to one aspect, may include a chromatograph and a bulk acoustic resonator. The chromatograph may include a channel that is defined at least partially in a monolithic substrate. The channel may have an inlet to receive a sample and an outlet. A chromatography material may be included in the channel. The bulk acoustic resonator may have a first electrode and a second electrode that has a chemically functionalized surface. The chemically functionalized surface may be included in a chamber that is defined at least partially in the monolithic substrate and that is coupled with the outlet of the channel. Methods of making and using such apparatus, and systems including such apparatus, are also disclosed.

摘要翻译： 根据一个方面的装置可以包括色谱仪和体声波谐振器。 色谱仪可以包括至少部分地限定在整体式衬底中的通道。 通道可以具有用于接收样品和出口的入口。 色谱材料可以包括在通道中。 体声波谐振器可以具有第一电极和具有化学官能化表面的第二电极。 化学官能化的表面可以包括在至少部分地限定在整体式衬底中并且与通道的出口耦合的室中。 还公开了制造和使用这种装置的方法，以及包括这种装置的系统。

公开(公告)号：US20090021975A1

公开(公告)日：2009-01-22

申请号：US11778571

申请日：2007-07-16

申请人： Valluri Ramana Rao ,  Li-Peng Wang ,  Qing Ma ,  Byong Man Kim

发明人： Valluri Ramana Rao ,  Li-Peng Wang ,  Qing Ma ,  Byong Man Kim

IPC分类号： G11C11/12 ,  B32B15/04 ,  H01L21/62

CPC分类号： G11B9/02 ,  Y10S977/947

摘要： A media for an information storage device comprises a substrate of single-crystal silicon, a buffer layer of an epitaxial single crystal insulator formed over the substrate, a bottom electrode layer of an epitaxial single crystal conductor formed over the buffer layer, a ferroelectric layer of an epitaxial single crystal ferroelectric material formed over the bottom electrode layer, and an overlayer of an epitaxial single crystal material formed over the ferroelectric layer. Dipole charges generally having a first orientation exist at an interface between the bottom electrode layer and the ferroelectric layer includes, while dipole charges generally having a second orientation opposite the first orientation exist at an interface between the ferroelectric layer and the overlayer includes.

摘要翻译： 用于信息存储装置的介质包括单晶硅衬底，形成在衬底上的外延单晶绝缘体的缓冲层，形成在缓冲层上的外延单晶导体的底电极层，形成在缓冲层上的铁电层 形成在底部电极层上的外延单晶铁电材料，以及形成在铁电体层上的外延单晶材料的覆层。 通常具有第一取向的偶极电荷存在于底电极层和铁电层之间的界面处，其中通常具有与第一取向相反的第二取向的偶极电荷存在于铁电层和覆层之间的界面处。

公开(公告)号：US07332061B2

公开(公告)日：2008-02-19

申请号：US10816560

申请日：2004-03-30

申请人： Li-Peng Wang ,  Qing Ma

发明人： Li-Peng Wang ,  Qing Ma

IPC分类号： C23C14/35

CPC分类号： C23C14/3471 ,  C23C14/345 ,  H01J37/32706

摘要： A method and system for forming FBAR filters for different frequency bands with film stacks of different thicknesses, where at least some layers of different thicknesses are formed substantially at the same time, during a process operation are described herein.

摘要翻译： 本文描述了一种用于形成具有不同厚度的薄膜叠层的不同厚度的FBAR滤光器的方法和系统，其中在处理操作期间基本上同时形成至少一些不同厚度的层。

公开(公告)号：US20060001329A1

公开(公告)日：2006-01-05

申请号：US10882510

申请日：2004-06-30

申请人： Valluri Rao ,  Qing Ma ,  Quan Tran ,  Dong Shim ,  Li-Peng Wang

发明人： Valluri Rao ,  Qing Ma ,  Quan Tran ,  Dong Shim ,  Li-Peng Wang

IPC分类号： H01L41/08

CPC分类号： H03H9/02102 ,  H03H2009/02196

摘要： A film bulk acoustic resonator (FBAR) comprises a piezoelectric film sandwiched between a top electrode and a bottom electrode. A temperature sensor is provided to sense a temperature to determine a temperature induced frequency drift for the FBAR. A voltage controller operatively connected to the temperature sensor supplies a direct current (DC) bias voltage to the FBAR to induce an opposite voltage induced frequency drift to compensate for the temperature induced frequency drift.

摘要翻译： 薄膜体声波谐振器（FBAR）包括夹在顶部电极和底部电极之间的压电薄膜。 提供温度传感器以感测温度以确定FBAR的温度感应频率漂移。 可操作地连接到温度传感器的电压控制器向FBAR提供直流（DC）偏置电压以引起相反的电压感应频率漂移以补偿温度引起的频率漂移。

公开(公告)号：US20050148065A1

公开(公告)日：2005-07-07

申请号：US10749529

申请日：2003-12-30

申请人： Yuegang Zhang ,  Andrew Berlin ,  Qing Ma ,  Li-Peng Wang ,  Valluri Rao ,  Mineo Yamakawa

发明人： Yuegang Zhang ,  Andrew Berlin ,  Qing Ma ,  Li-Peng Wang ,  Valluri Rao ,  Mineo Yamakawa

IPC分类号： G01N29/02 ,  G01N29/036 ,  G01N29/34 ,  G01N33/543 ,  C12M1/34

CPC分类号： G01N33/54373 ,  B82Y15/00 ,  B82Y30/00 ,  G01N27/126 ,  G01N29/022 ,  G01N29/036 ,  G01N29/2437 ,  G01N29/348 ,  G01N33/0031 ,  G01N2291/02466 ,  G01N2291/0255 ,  G01N2291/0256 ,  G01N2291/0426 ,  Y10T436/11 ,  Y10T436/143333 ,  Y10T436/144444 ,  Y10T436/25375

摘要： Systems and methods for detecting the presence of biomolecules in a sample using biosensors that incorporate resonators which have functionalized surfaces for reacting with target biomolecules. In one embodiment, a device includes a piezoelectric resonator having a functionalized surface configured to react with target molecules, thereby changing the mass and/or charge of the resonator which consequently changes the frequency response of the resonator. The resonator's frequency response after exposure to a sample is compared to a reference, such as the frequency response before exposure to the sample, a stored baseline frequency response or a control resonator's frequency response.

摘要翻译： 使用包含具有功能化表面以与靶生物分子反应的共振器的生物传感器来检测样品中存在生物分子的系统和方法。 在一个实施例中，器件包括压电谐振器，其具有被配置为与靶分子反应的官能化表面，从而改变谐振器的质量和/或电荷，从而改变谐振器的频率响应。 将曝光后的谐振器频率响应与参考值进行比较，例如在暴露于采样之前的频率响应，存储的基准频率响应或控制谐振器的频率响应。