公开(公告)号：US08553371B2

公开(公告)日：2013-10-08

申请号：US12954508

申请日：2010-11-24

Applicant: Honglin Zhu ,  Liubo Hong ,  Hicham M. Sougrati ,  Quang Le ,  Jui-Lung Li ,  Chando Park

Inventor： Honglin Zhu ,  Liubo Hong ,  Hicham M. Sougrati ,  Quang Le ,  Jui-Lung Li ,  Chando Park

IPC: G11B5/39

CPC classification number: G11B5/3163 ,  G01R33/098 ,  G11B5/3909 ,  G11B5/3929 ,  G11B5/3932

Abstract: Embodiments herein generally relate to TMR readers and methods for their manufacture. The embodiments discussed herein disclose TMR readers that utilize a structure that avoids use of the DLC layer over the sensor structure and over the hard bias layer. The capping structure over the sensor structure functions as both a protective layer for the sensor structure and a CMP stop layer. The hard bias capping structure functions as both a protective structure for the hard bias layer and as a CMP stop layer. The capping structures that are free of DLC reduce the formation of notches in the second shield layer so that second shield layer is substantially flat.

Abstract translation: 本文的实施方案通常涉及TMR读取器及其制造方法。 本文讨论的实施例公开了TMR读取器，其利用了避免在传感器结构上以及硬偏置层上使用DLC层的结构。 传感器结构上的封盖结构用作传感器结构的保护层和CMP停止层。 硬偏置封盖结构既用作硬偏置层的保护结构又用作CMP停止层。 没有DLC的封盖结构减少了第二屏蔽层中的凹口的形成，使得第二屏蔽层基本上是平的。

公开(公告)号：US20130001187A1

公开(公告)日：2013-01-03

申请号：US13172739

申请日：2011-06-29

Applicant: Quang Le ,  Shin Funada ,  Jui-Lung Li

Inventor： Quang Le ,  Shin Funada ,  Jui-Lung Li

IPC: G11B5/127 ,  C23F1/00 ,  B05D5/12

CPC classification number: G03F7/20 ,  B82Y10/00 ,  G11B5/3169 ,  G11B5/3909 ,  G11B2005/3996

Abstract: A method for manufacturing a magnetic sensor using an electrical lapping guide deposited and patterned simultaneously with a hard bias structure of the sensor material. The method includes depositing a sensor material, and patterning and ion milling the sensor material to define a track width of the sensor. A magnetic, hard bias material is then deposited and a second patterning and ion milling process is performed to simultaneously define the back edge of an electrical lapping guide and a back edge of the sensor.

Abstract translation: 一种用传感器材料的硬偏置结构沉积和图案化的电研磨导向器制造磁传感器的方法。 该方法包括沉积传感器材料，以及图案化和离子铣削传感器材料以限定传感器的轨道宽度。 然后沉积磁性，硬偏置材料，并且执行第二图案化和离子铣削工艺以同时限定电研磨引导件的后边缘和传感器的后边缘。

公开(公告)号：US08252516B2

公开(公告)日：2012-08-28

申请号：US12261241

申请日：2008-10-30

Applicant: Quang Le ,  Jui-Lung Li

Inventor： Quang Le ,  Jui-Lung Li

IPC: G11B5/127

CPC classification number: G01R33/093 ,  B82Y25/00 ,  G11B5/3116 ,  G11B5/398 ,  Y10T29/49032 ,  Y10T29/49043

Abstract: Embodiments of the invention operate to narrow the track width of a read head used in a disk drive. In one embodiment, a magnetic read head has a track width of about 40 nm or less. The read head is fabricated by a method that includes fabricating a film stack from a substrate, a sensor material, a stop material, a first release material, a mask material, and a photo resist material. The mask material may include a masking substrate material and a second release material. The film stack is processed by forming a read head image in the photo resist material, removing portions of the film stack that lie outside the read head image of the photo resist material, stripping the film stack to remove the photo resist, mask and first release materials, and milling the sensor material according to the read head image.

Abstract translation: 本发明的实施例用于缩小磁盘驱动器中使用的读取头的磁道宽度。 在一个实施例中，磁读头具有约40nm或更小的轨道宽度。 读取头通过包括从基底，传感器材料，止挡材料，第一释放材料，掩模材料和光致抗蚀剂材料制造薄膜叠层的方法制造。 掩模材料可以包括掩蔽衬底材料和第二释放材料。 通过在光致抗蚀剂材料中形成读头图像来处理胶片堆叠，去除位于光致抗蚀剂材料的读取头图像之外的膜堆叠的部分，剥离胶片堆叠以除去光致抗蚀剂，掩模和第一释放 材料，并根据读头图像铣削传感器材料。

公开(公告)号：US07969684B2

公开(公告)日：2011-06-28

申请号：US11391942

申请日：2006-03-28

Applicant: Quang Le ,  Jui-Lung Li

Inventor： Quang Le ,  Jui-Lung Li

IPC: G11B5/127 ,  G11B5/11

CPC classification number: G11B5/1278 ,  G11B5/3116 ,  G11B5/315 ,  G11B5/3163

Abstract: A perpendicular write head having a wrap around trailing shield for reducing stray field writing and adjacent track interference. The trailing shield is notched, having an un-notched portion directly behind (trailing) the write pole and first and second notched portions that extend laterally to either side. The un-notched portion of the trailing shield is located adjacent to the trailing edge of the write pole and is separated from the trailing edge of the write pole by a trailing shield notch. The notched portions are separated from the trailing edge of the write gap by a notch depth, measured along the trailing direction, the notch depth as measured in the trailing direction being larger than the trailing shield distance. The notch depth as measured in the trailing direction is preferably 25-50 nm larger than the trailing shield gap distance.

Abstract translation: 垂直写头，其具有围绕后屏蔽的卷绕，用于减少杂散场写入和相邻轨道干涉。 后屏蔽被切口，具有直写在后面（后面）写入极的未切口部分，以及横向延伸到任一侧的第一和第二切口部分。 后屏蔽的未切口部分位于与写极的后缘相邻并且通过后屏蔽切口与写极的后缘分离。 切口部分从写入间隙的后缘与沿着拖尾方向测量的切口深度分开，在后沿方向上测量的切口深度大于尾部屏蔽距离。 在拖尾方向上测量的凹口深度优选比后屏蔽间隙距离大25-50nm。

公开(公告)号：US20110146061A1

公开(公告)日：2011-06-23

申请号：US12645323

申请日：2009-12-22

Applicant: Shin Funada ,  Quang Le ,  Thomas L. Leong ,  Jui-Lung Li ,  Chang-Man Park ,  Ning Shi ,  Hicham M. Sougrati

Inventor： Shin Funada ,  Quang Le ,  Thomas L. Leong ,  Jui-Lung Li ,  Chang-Man Park ,  Ning Shi ,  Hicham M. Sougrati

IPC: G11B5/127

CPC classification number: G11B5/3163 ,  G11B5/112 ,  G11B5/3912 ,  G11B5/398 ,  Y10T29/49032 ,  Y10T29/49041 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052 ,  Y10T29/49067

Abstract: A method for manufacturing a magnetoresistive sensor that results in the sensor having a very flat top magnetic shield. The process involves depositing a plurality of sensor layers and then depositing a thin high density carbon CMP stop layer over the sensor layers and forming a mask over the CMP stop layer. An ion milling is performed to define the sensor. Then a thin insulating layer and magnetic hard bias layer are deposited. A chemical mechanical polishing is performed to remove the mask and a reactive ion etching is performed to remove the remaining carbon CMP stop layer. Because the CMP stop layer is very dense and hard, it can be made very thin. This means that when it is removed by reactive ion etching, there is very little notching over the sensor, thereby allowing the upper shield (deposited there-over) to be very thin.

Abstract translation: 一种用于制造磁阻传感器的方法，其导致传感器具有非常平坦的顶部磁屏蔽。 该过程包括沉积多个传感器层，然后在传感器层上沉积薄的高密度碳CMP停止层，并在CMP停止层上形成掩模。 执行离子铣削来定义传感器。 然后沉积薄的绝缘层和磁性硬偏置层。 进行化学机械抛光以除去掩模，并执行反应离子蚀刻以除去剩余的碳CMP停止层。 因为CMP停止层非常致密且硬，所以可以使其非常薄。 这意味着当通过反应离子蚀刻去除时，在传感器上几乎没有凹口，从而允许上部屏蔽（沉积在其上）非常薄。

公开(公告)号：US20100149688A1

公开(公告)日：2010-06-17

申请号：US12333094

申请日：2008-12-11

Applicant: Quang Le ,  Jui-Lung Li

Inventor： Quang Le ,  Jui-Lung Li

IPC: G11B5/127

CPC classification number: G11B5/1278 ,  G11B5/1871 ,  G11B5/3116 ,  G11B5/3163

Abstract: Perpendicular-magnetic-recording head with leading-edge taper of a planarized stepped-pole layer having greater recess distance than a flare point of a main-pole layer. The perpendicular-magnetic-recording head includes a write element including the main-pole layer having the flare point recessed a first distance from a pole tip of the main-pole layer at an air-bearing surface below the air-bearing surface. The write element includes the stepped-pole layer magnetically coupled with the main-pole layer across an interface between the main-pole layer and the stepped-pole layer. The stepped-pole layer has the leading-edge taper recessed a second distance from the pole tip of the main-pole layer at an air-bearing surface below the air-bearing surface. The second distance of the leading-edge taper is greater than the first distance of the flare point. A surface of the stepped-pole layer is planarized with the interface between the main-pole layer and the stepped-pole layer substantially flat over the leading-edge taper.

Abstract translation: 垂直磁记录头，其具有比主极层的扩张点更大的凹陷距离的平坦化阶梯极层的前缘锥形。 垂直磁记录头包括写入元件，该写入元件包括具有在空气轴承表面下方的空气轴承表面处与主极层的极尖之间第一距离的扩口的主极层。 写元件包括跨越主极层和阶梯极层之间的界面与主极层磁耦合的阶梯极层。 阶梯极层具有在空气轴承表面下方的空气轴承表面处从主极层的极端部延伸第二距离的前缘锥形。 前缘锥形的第二距离大于喇叭口的第一距离。 阶梯极层的表面被平坦化，主极层和台阶极层之间的界面在前缘锥形上基本平坦。

公开(公告)号：US20100091407A1

公开(公告)日：2010-04-15

申请号：US12646879

申请日：2009-12-23

Applicant: Christian Rene Bonhote ,  Thomas Dudley Boone, JR. ,  Quang Le ,  Jui-Lung Li ,  Jeffrey S. Lille ,  Scott Arthur MacDonald ,  Neil Leslie Robertson ,  Xhavin Sinha ,  Petrus Antonius Van Der Heijden

Inventor： Christian Rene Bonhote ,  Thomas Dudley Boone, JR. ,  Quang Le ,  Jui-Lung Li ,  Jeffrey S. Lille ,  Scott Arthur MacDonald ,  Neil Leslie Robertson ,  Xhavin Sinha ,  Petrus Antonius Van Der Heijden

IPC: G11B5/60 ,  G11B5/127

CPC classification number: G11B5/3146 ,  G11B5/11 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/315 ,  G11B5/3166 ,  G11B5/3169

Abstract: A magnetic write head for data recording having a magnetic write pole with a stepped magnetic shell structure that defines a secondary flare point. The secondary flare point defined by the magnetic shell portion can be more tightly controlled with respect to its distance from the air bearing surface (ABS) of the write head than can a traditional flare point that is photolithographically on the main pole structure. This allows the effective flare point of the write head to be moved much closer to the ABS than would otherwise be possible using currently available tooling and photolithography techniques. The write head also includes a non-magnetic spacer layer formed over the magnetic shell structure that is recessed from the ABS by a distance that is greater than that of the magnetic shell portion. A magnetic shield is formed over the magnetic shell and non-magnetic spacer.

Abstract translation: 一种用于数据记录的磁写头，具有限定二次闪光点的阶梯状磁性壳结构的磁性写入极。 由磁性壳体部分限定的次级火炬点可以相对于与写入磁头的空气轴承表面（ABS）的距离比在主极结构上光刻的传统闪光点更加严格地控制。 这使得使用当前可用的工具和光刻技术可以使写入头的有效喇叭点移动得更接近ABS。 写头还包括形成在磁性壳结构上的非磁性间隔层，其从ABS凹陷的距离大于磁性壳部分的距离。 在磁性壳体和非磁性间隔物上形成磁屏蔽。

公开(公告)号：US20070230046A1

公开(公告)日：2007-10-04

申请号：US11391942

申请日：2006-03-28

Applicant: Quang Le ,  Jui-Lung Li

Inventor： Quang Le ,  Jui-Lung Li

IPC: G11B5/147

CPC classification number: G11B5/1278 ,  G11B5/3116 ,  G11B5/315 ,  G11B5/3163

Abstract: A perpendicular write head having a wrap around trailing shield for reducing stray field writing and adjacent track interference. The trailing shield is notched, having an un-notched portion directly behind (trailing) the write pole and first and second notched portions that extend laterally to either side. The un-notched portion of the trailing shield is located adjacent to the trailing edge of the write pole and is separated from the trailing edge of the write pole by a trailing shield notch. The notched portions are separated from the trailing edge of the write gap by a notch depth, measured along the trailing direction, the notch depth as measured in the trailing direction being larger than the trailing shield distance. The notch depth as measured in the trailing direction is preferably 25-50 nm larger than the trailing shield gap distance.

Abstract translation: 垂直写头，其具有围绕后屏蔽的卷绕，用于减少杂散场写入和相邻轨道干涉。 后屏蔽被切口，具有直写在后面（后面）写入极的未切口部分，以及横向延伸到任一侧的第一和第二切口部分。 后屏蔽的未切口部分位于与写极的后缘相邻并且通过后屏蔽切口与写极的后缘分离。 切口部分从写入间隙的后缘与沿着拖尾方向测量的切口深度分开，在后沿方向上测量的切口深度大于尾部屏蔽距离。 在拖尾方向上测量的凹口深度优选比后屏蔽间隙距离大25-50nm。

公开(公告)号：US07120988B2

公开(公告)日：2006-10-17

申请号：US10672896

申请日：2003-09-26

Applicant: Quang Le ,  Edward Hin Pong Lee ,  Jui-Lung Li ,  Aron Pentek ,  Nian-Xiang Sun

Inventor： Quang Le ,  Edward Hin Pong Lee ,  Jui-Lung Li ,  Aron Pentek ,  Nian-Xiang Sun

IPC: G11B5/127 ,  C23C14/00

CPC classification number: G11B5/1278 ,  G11B5/112 ,  Y10T29/49021 ,  Y10T29/49032 ,  Y10T29/49041 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052 ,  Y10T29/49067

Abstract: A method and materials to fabricate a trailing shield write pole that resolve the problems of controlling the write gap and preventing damages to the write gap or pole during fabrication of the subsequent structure. This process also introduces a CMP assisted lift-off process to remove re-deposition and fencing (increase yields) and a method to create dishing in the top of the write pole. Moreover, also included in this disclosure are suitable materials that can function as an ion mill transfer layer, CMP layer, and RIEable layer.

Abstract translation: 一种用于制造后屏蔽写入极的方法和材料，其解决了在后续结构的制造期间控制写入间隙并防止对写入间隙或极的损坏的问题。 该过程还引入CMP辅助剥离过程以去除再沉积和栅栏（增加产量）以及在写柱顶部产生凹陷的方法。 此外，本公开中还包括可用作离子磨转移层，CMP层和可分离层的合适材料。

公开(公告)号：US20060165959A1

公开(公告)日：2006-07-27

申请号：US11044777

申请日：2005-01-26

Applicant: Zvonimir Bandic ,  A. Erpelding ,  Jordan Katine ,  Quang Le ,  Kim Lee ,  Jui-Lung Li ,  Michael Rooks

Inventor： Zvonimir Bandic ,  A. Erpelding ,  Jordan Katine ,  Quang Le ,  Kim Lee ,  Jui-Lung Li ,  Michael Rooks

IPC: B32B3/00

CPC classification number: G11B5/865 ,  G11B5/855 ,  Y10T428/24612

Abstract: A contact magnetic transfer (CMT) master template has a flexible plastic film with a planarized top or upper surface containing magnetic islands separated from one another by nonmagnetic regions. The flexible plastic film is secured at its perimeter to a silicon annulus that provides rigid support at the perimeter of the film. The plastic film is preferably polyimide that has recesses filled with the magnetic material that form the pattern of magnetic islands. The upper surfaces of the islands and the upper surfaces of the nonmagnetic regions form a continuous planar surface. The nonmagnetic regions are formed of chemical-mechanical-polishing (CMP) stop layer material that remains after a CMP process has planarized the upper surface of the plastic film.