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公开(公告)号：US07675300B2
公开(公告)日：2010-03-09
申请号：US11957835
申请日：2007-12-17
申请人： Christof Baur , Robert J. Folaron , Adam Hartman , Philip C. Foster , Jay C. Nelson , Richard E. Stallcup, II
发明人： Christof Baur , Robert J. Folaron , Adam Hartman , Philip C. Foster , Jay C. Nelson , Richard E. Stallcup, II
IPC分类号： G01R31/305 , G01R31/02 , G01R31/26
CPC分类号： G01N1/28 , G01N1/32 , G01R31/307 , H01J37/3056 , H01J2237/20 , H01J2237/2008 , H01J2237/206 , H01J2237/24592 , H01J2237/2594 , H01J2237/28 , H01J2237/2817 , H01J2237/31745
摘要： An apparatus including a positioner control device, a measuring device and a control routine. The positioner control device is communicatively coupled to a chamber of a charged particle beam device (CPBD) and is configured to individually manipulate each of a plurality of probes within the CPBD chamber to establish contact between ones of the plurality of probes and corresponding ones of a plurality of contact points of a sample positioned in the CPBD chamber. The measuring device is communicatively coupled to the CPBD and the positioner control device and is configured to perform one of a measurement and a detection of a characteristic associated with one of the plurality of contact points. The control routine is configured to at least partially automate control of at least one of the CPBD, the positioner control device and the measuring device.
摘要翻译： 一种包括定位器控制装置，测量装置和控制程序的装置。 定位器控制装置通信地耦合到带电粒子束装置（CPBD）的腔室，并且被配置为单独地操作CPBD室内的多个探针中的每一个，以建立多个探针中的一个探针和 位于CPBD室中的样品的多个接触点。 测量装置通信地耦合到CPBD和定位器控制装置，并被配置为执行与多个接触点之一相关联的特性的测量和检测中的一个。 控制程序被配置为至少部分地自动化对CPBD，定位器控制装置和测量装置中的至少一个的控制。
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公开(公告)号：US07285778B2
公开(公告)日：2007-10-23
申请号：US11063692
申请日：2005-02-23
CPC分类号： G01N1/28 , G01N1/32 , G01R31/307 , H01J37/3056 , H01J2237/20 , H01J2237/2008 , H01J2237/206 , H01J2237/24592 , H01J2237/2594 , H01J2237/28 , H01J2237/2817 , H01J2237/31745
摘要： A method including directing a first electrical signal to at least one of a plurality of probes each positioned within a chamber of a charged particle beam device. At least one of the plurality of probes is exposed to a charged particle beam of the charged particle beam device, and a second electrical signal is compared to the first electrical signal to determine a characteristic associated with the at least one of the plurality of probes.
摘要翻译： 一种方法，包括将第一电信号引导到多个探针中的至少一个，每个探针定位在带电粒子束装置的腔室内。 将多个探针中的至少一个暴露于带电粒子束装置的带电粒子束，并将第二电信号与第一电信号进行比较，以确定与多个探针中的至少一个探针相关联的特性。
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公开(公告)号：US07319336B2
公开(公告)日：2008-01-15
申请号：US11064127
申请日：2005-02-23
申请人： Christof Baur , Robert J. Folaron , Adam Hartman , Philip C. Foster , Jay C. Nelson , Richard E. Stallcup, II
发明人： Christof Baur , Robert J. Folaron , Adam Hartman , Philip C. Foster , Jay C. Nelson , Richard E. Stallcup, II
IPC分类号： G01R31/305 , G01R31/02 , G01R31/26
CPC分类号： G01N1/28 , G01N1/32 , G01R31/307 , H01J37/3056 , H01J2237/20 , H01J2237/2008 , H01J2237/206 , H01J2237/24592 , H01J2237/2594 , H01J2237/28 , H01J2237/2817 , H01J2237/31745
摘要： An apparatus including a positioner control device, a measuring device and a control routine. The positioner control device is communicatively coupled to a chamber of a charged particle beam device (CPBD) and is configured to individually manipulate each of a plurality of probes within the CPBD chamber to establish contact between ones of the plurality of probes and corresponding ones of a plurality of contact points of a sample positioned in the CPBD chamber. The measuring device is communicatively coupled to the CPBD and the positioner control device and is configured to perform one of a measurement and a detection of a characteristic associated with one of the plurality of contact points. The control routine is configured to at least partially automate control of at least one of the CPBD, the positioner control device and the measuring device.
摘要翻译： 一种包括定位器控制装置，测量装置和控制程序的装置。 定位器控制装置通信地耦合到带电粒子束装置（CPBD）的腔室，并且被配置为单独地操作CPBD室内的多个探针中的每一个，以建立多个探针中的一个探针和 位于CPBD室中的样品的多个接触点。 测量装置通信地耦合到CPBD和定位器控制装置，并被配置为执行与多个接触点之一相关联的特性的测量和检测中的一个。 控制程序被配置为至少部分地自动化对CPBD，定位器控制装置和测量装置中的至少一个的控制。
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公开(公告)号：US07326293B2
公开(公告)日：2008-02-05
申请号：US11089814
申请日：2005-03-25
申请人： John N. Randall , Jingping Peng , Jun-Fu Liu , George D. Skidmore , Christof Baur , Richard E. Stallcup, II , Robert J. Folaron
发明人： John N. Randall , Jingping Peng , Jun-Fu Liu , George D. Skidmore , Christof Baur , Richard E. Stallcup, II , Robert J. Folaron
IPC分类号： C30B19/08
摘要： A patterned layer is formed by removing nanoscale passivating particle from a first plurality of nanoscale structural particles or by adding nanoscale passivating particles to the first plurality of nanoscale structural particles. Each of a second plurality of nanoscale structural particles is deposited on each of corresponding ones of the first plurality of nanoscale structural particles that is not passivated by one of the plurality of nanoscale passivating particles.
摘要翻译： 通过从第一多个纳米尺度结构颗粒中去除纳米尺度钝化颗粒或通过将纳米尺度钝化颗粒添加到第一多个纳米尺度结构颗粒中而形成图案层。 第二多个纳米尺度结构颗粒中的每一个沉积在第一多个纳米尺度结构颗粒中的相应的一个纳米级结构颗粒中，其不被多个纳米级钝化颗粒之一钝化。
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5.发明授权Systems and method for picking and placing of nanoscale objects utilizing differences in chemical and physical binding forces 失效利用化学和物理结合力的差异来挑选和放置纳米级物体的系统和方法公开(公告)号：US06987277B2
公开(公告)日：2006-01-17
申请号：US10684120
申请日：2003-10-10
IPC分类号： B82B3/00
CPC分类号： B82B3/00 , B82Y40/00 , Y10S977/849 , Y10S977/85 , Y10S977/852 , Y10S977/858
摘要： A method for manipulating a nanoscale object deposited on a substrate. The surface of the substrate is passive. A target position is formed on the passive surface by the action of the tip of a scanning probe microscope. The nanoscale object is picked from its initial position by the tip of the scanning probe microscope, then placed and released at the target position.
摘要翻译： 一种用于操纵沉积在衬底上的纳米级物体的方法。 基板的表面是被动的。 通过扫描探针显微镜的尖端的作用，在被动面上形成目标位置。 通过扫描探针显微镜的尖端从其初始位置拾取纳米级物体，然后放置并释放在目标位置。
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公开(公告)号：US06812460B1
公开(公告)日：2004-11-02
申请号：US10680339
申请日：2003-10-07
IPC分类号： H01J3726
CPC分类号： B82B3/00 , G01Q80/00 , Y10S977/851 , Y10S977/858
摘要： A method of nano-manipulation, including providing a nano-scale object movably positioned over a substrate and positioning a probe of a scanning probe microscope proximate the nano-scale object. The probe is then moved across the substrate along a gyrating path proximate the nano-scale object to reposition the nano-scale object.
摘要翻译： 一种纳米操作的方法，包括提供可移动地定位在衬底上的纳米级物体，并将扫描探针显微镜的探针定位在纳米尺度物体附近。 然后将探针沿着靠近纳米尺度物体的旋转路径跨越衬底移动，以重新定位纳米尺度物体。
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