摘要:
A flash memory device and a method of manufacturing the flash memory device having high reliability in which a gate stack is formed on a tunnel oxide formed on a substrate and a layer of oxide is formed on the surfaces of the gate stack and exposed surfaces of the substrate. Nitrogen is diffused into the layer of oxide.
摘要:
A method of manufacturing a flash memory device with a controllable amount of gate edge lifting including etching the ends of the tunnel oxide forming a cavity at each end of the tunnel oxide and anisotropically depositing and etching an oxide to form spacers on the sides of the gate stack. The spacers have a predetermined thickness that controls the amount of gate edge lifting. The predetermined thickness is determined during a characterization procedure that can be a computer modeling procedure or it can be determined empirically.
摘要:
A method for making a ULSI MOSFET chip includes forming a MOSFET gate stack on a substrate, with a tunnel oxide layer being sandwiched between the gate stack and substrate. To prevent thickening of the tunnel oxide layer into a “gate edge lifting” profile during subsequent oxidation-causing steps, at least one protective barrier film is deposited or grown over the gate stack and tunnel oxide layer immediately after gate stack formation. Then, subsequent steps, including forming source and drain regions for the gate stack, can be undertaken without causing thickening of the tunnel oxide layer.
摘要:
A method for making a ULSI MOSFET chip includes forming a MOSFET gate stack on a substrate, with a tunnel oxide layer being sandwiched between the gate stack and substrate. To prevent thickening of the tunnel oxide layer into a “gate edge lifting” profile during subsequent oxidation-causing steps, at least one protective barrier film is deposited or grown over the gate stack and tunnel oxide layer immediately after gate stack formation. Then, subsequent steps, including forming source and drain regions for the gate stack, can be undertaken without causing thickening of the tunnel oxide layer.
摘要:
A memory cell that includes a substrate that has a first region and a second region with a channel therebetween, wherein the first region generates hot carriers. The memory cell further includes a gate above the channel and a charge trapping region that contains a first amount of charge. A current limiter that limits the number of the generated hot carriers that can flow into the channel, wherein the current limiter does not control the voltage of the second region.
摘要:
A method and apparatus for reducing band-to-band currents during the erasure of a flash EEPROM memory cell is provided. The apparatus has a back biasing connection on the substrate at which a biasing voltage is applied during erasure of the flash EEPROM memory cell. The method of applying the biasing voltage to the back biasing connection during erasure of the flash EEPROM memory cell reduces band-to-band current between the source region and the substrate during erasure of the flash memory cell. This reduction provides for gate size reduction in flash memory cells without inducing detrimental short channel effects.
摘要:
A method and apparatus for reducing band-to-band currents during the erasure of a flash EEPROM memory cell is provided. The apparatus has a back biasing connection on the substrate at which a biasing voltage is applied during erasure of the flash EEPROM memory cell. The method of applying the biasing voltage to the back biasing connection during erasure of the flash EEPROM memory cell reduces band-to-band current between the source region and the substrate during erasure of the flash memory cell. This reduction provides for gate size reduction in flash memory cells without inducing detrimental short channel effects.
摘要:
A microfluidic liquid stream configuration system is provided including providing a substrate; forming a first co-planar electrode and a second co-planar electrode on the substrate; applying a dielectric layer, with a controlled surface energy, on the first co-planar electrode and the second co-planar electrode; forming an input reservoir on the first co-planar electrode and a second co-planar electrode; supplying a liquid in the input reservoir for analysis; and imposing an electric field, an electric field gradient, or a combination thereof on the liquid for respectively driving surface charge or dipole moments in the liquid for configuring a liquid stream.
摘要:
An electrospray device for a mass spectrometry system is described. The electrospray device comprises a body portion and a tip portion extending from the body portion. The tip portion comprises a polymeric material. The electrospray device also comprises a hydrophobic coating substantially selectively covering the tip portion.
摘要:
A microfluidic structure having an electrostatic sealing device is disclosed. The electrostatic sealing device includes a first electrode and a second electrode opposite the first electrode. At least one of the electrodes has an elastic layer facing the other electrode. The second electrode is capable of moving toward the first electrode and forming a seal with the first electrode in response to a voltage difference between the two electrodes. The electrostatic sealing device eliminates the need for mechanical components that are traditionally used for generating a mechanical force between two components of a microfluidic structure and thus reduces complexity of the microfluidic structure and possible interference with optical interrogation of the microfluidic structure. Moreover, the seal can be established or removed simply by turning the voltage on or off. The electrostatic sealing device can also be used as a valve, a pump, or a combination thereof, to control fluid flow in the microchannels of a microfluidic structure.