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公开(公告)号：US07088758B2
公开(公告)日：2006-08-08
申请号：US10956784
申请日：2004-10-01
申请人： Richard L. Sandstrom , William N. Partlo , Daniel J. W. Brown , Thomas A. Yager , Alexander I. Ershov , Robert J. Rafac , German E. Rylov
发明人： Richard L. Sandstrom , William N. Partlo , Daniel J. W. Brown , Thomas A. Yager , Alexander I. Ershov , Robert J. Rafac , German E. Rylov
IPC分类号： H01S3/22
CPC分类号： G01J1/429 , B23K26/0622 , B23K2101/40 , G01J9/02 , G02B26/002 , G02B26/0875 , G03F7/70041 , G03F7/70575 , H01S3/005 , H01S3/0057 , H01S3/1055 , H01S3/225
摘要： An apparatus and method are disclosed for operating a narrow band short pulse duration gas discharge laser output light pulse beam producing system, producing a beam comprising laser output light pulses at a selected pulse repetition rate, which may comprise: a dispersive center wavelength selection optic selecting at least one center wavelength for each pulse determined at least in part by the angle of incidence of the laser light pulse beam containing the respective pulse on the dispersive wavelength selection optic; a tuning mechanism operative to select at least one angle of incidence of a first spatially defined portion of the laser light pulse beam containing the respective pulse upon the dispersive center wavelength selection optic; and, the tuning mechanism comprising a variably refractive optical element defining a plurality of refractive angular displacements of the first spatially defined portion of the laser light pulse beam passing through the variably refractive optical element at one of a plurality of positions of incidence of the laser light pulse beam on the variably refractive optical element. The variably refractive optical element may comprise: a first generally flat face defining a surface of incidence for the laser light pulse beam; and, a second multifaceted or curved face defining a plurality of generally flat surfaces of exit or a continuously varying surface of exit for the laser light beam. Other aspects of pulse parameter metrology and pulse modulation control, including in response to signals from the utilization tool are disclosed, e.g., relating to proper dose control with differing center wavelength spectra.
摘要翻译： 公开了一种用于操作窄带短脉冲持续时间气体放电激光输出光脉冲束产生系统的装置和方法，产生包括选定脉冲重复频率的激光输出光脉冲的光束，其可以包括：色散中心波长选择光学选择 用于每个脉冲的至少一个中心波长至少部分地由分散波长选择光学器件上包含相应脉冲的激光束的入射角确定; 调谐机构，用于在色散中心波长选择光学器件上选择包含相应脉冲的激光束脉冲光束的第一空间限定部分的至少一个入射角; 并且所述调谐机构包括可变折射光学元件，所述可变折射光学元件限定所述激光束的所述第一空间限定部分的多个折射角位移通过所述可变折射光学元件在所述激光的入射的多个位置中的一个位置 脉冲光束在可变折射光学元件上。 可变折射光学元件可以包括：限定用于激光束脉冲束的入射面的第一大致平坦的面; 以及限定用于激光束的出口的多个大致平坦的表面或出口的连续变化的表面的第二多面或弯曲面。 脉冲参数测量和脉冲调制控制的其它方面包括响应来自利用工具的信号，例如涉及具有不同中心波长光谱的适当剂量控制。
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公开(公告)号：US08014432B2
公开(公告)日：2011-09-06
申请号：US12724681
申请日：2010-03-16
IPC分类号： H01S3/22
CPC分类号： H01S3/225 , H01S3/02 , H01S3/0804 , H01S3/0805 , H01S3/08059 , H01S3/08072 , H01S3/08081 , H01S3/0835 , H01S3/10092 , H01S3/1053 , H01S3/235 , H01S3/2366
摘要： A laser includes a regenerative ring resonator that includes a discharge chamber having electrodes and a gain medium between the electrodes for producing a laser beam; a partially-reflective optical coupler, and a beam modification optical system in the path of the laser beam. The beam modification optical system transversely expands a profile of the laser beam such that the near field laser beam profile uniformly fills each aperture within the laser and such that the regenerative ring resonator remains either conditionally stable or marginally unstable when operating the laser at powers that induce thermal lenses in optical elements inside the regenerative ring resonator.
摘要翻译： 激光器包括再生环形谐振器，其包括具有电极的放电室和用于产生激光束的电极之间的增益介质; 部分反射光耦合器，以及激光束路径中的光束修改光学系统。 光束修改光学系统横向扩展激光束的轮廓，使得近场激光束轮廓均匀地填充激光器内的每个孔径，使得再生环形谐振器在以诱导的功率操作激光器时保持条件稳定或边缘不稳定 再生环形谐振器内的光学元件的热透镜。
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公开(公告)号：US20110069733A1
公开(公告)日：2011-03-24
申请号：US12724681
申请日：2010-03-16
IPC分类号： H01S3/08
CPC分类号： H01S3/225 , H01S3/02 , H01S3/0804 , H01S3/0805 , H01S3/08059 , H01S3/08072 , H01S3/08081 , H01S3/0835 , H01S3/10092 , H01S3/1053 , H01S3/235 , H01S3/2366
摘要： A laser includes a regenerative ring resonator that includes a discharge chamber having electrodes and a gain medium between the electrodes for producing a laser beam; a partially-reflective optical coupler, and a beam modification optical system in the path of the laser beam. The beam modification optical system transversely expands a profile of the laser beam such that the near field laser beam profile uniformly fills each aperture within the laser and such that the regenerative ring resonator remains either conditionally stable or marginally unstable when operating the laser at powers that induce thermal lenses in optical elements inside the regenerative ring resonator.
摘要翻译： 激光器包括再生环形谐振器，其包括具有电极的放电室和用于产生激光束的电极之间的增益介质; 部分反射光耦合器，以及激光束路径中的光束修改光学系统。 光束修改光学系统横向扩展激光束的轮廓，使得近场激光束轮廓均匀地填充激光器内的每个孔径，使得再生环形谐振器在以诱导的功率操作激光器时保持条件稳定或边缘不稳定 再生环形谐振器内的光学元件的热透镜。
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4.发明授权Method and apparatus for bandwidth measurement and bandwidth parameter calculation for laser light 有权用于激光的带宽测量和带宽参数计算的方法和装置公开(公告)号：US07684046B2
公开(公告)日：2010-03-23
申请号：US11973599
申请日：2007-10-08
申请人： Robert J. Rafac
发明人： Robert J. Rafac
CPC分类号： G01J3/02 , G01J3/0205 , G01J3/027 , G01J3/28 , G01J3/45
摘要： A bandwidth meter method and apparatus for measuring the bandwidth of a spectrum of light emitted from a laser input to the bandwidth meter is disclosed, which may comprise an optical bandwidth monitor providing a first output representative of a first parameter which is indicative of the bandwidth of the light emitted from the laser and a second output representative of a second parameter which is indicative of the bandwidth of the light emitted from the laser; and, an actual bandwidth calculation apparatus utilizing the first output and the second output as part of a multivariable equation employing predetermined calibration variables specific to the optical bandwidth monitor, to calculate an actual bandwidth parameter. The actual bandwidth parameter may comprise a spectrum full width at some percent of the maximum within the full width of the spectrum of light emitted from the laser or a width between two points on the spectrum enclosing some percentage of the energy of the full spectrum of the spectrum of light emitted from the laser. The apparatus and method may be implemented in a laser lithography light source and/or in an integrated circuit lithography tool.
摘要翻译： 公开了一种用于测量从激光输入到带宽计的发射光谱的带宽的带宽测量仪方法和装置，其可以包括光带宽监视器，其提供表示第一参数的第一输出，第一参数指示 从激光器发射的光和表示从激光器发射的光的带宽的第二参数的第二输出; 以及使用第一输出和第二输出的实际带宽计算装置作为使用光带宽监视器特有的预定校准变量的多变量方程的一部分来计算实际带宽参数。 实际带宽参数可以包括在从激光器发射的光的光谱的全宽度内的最大值的百分之几处的光谱全宽度，或包含光谱的全光谱的一定百分比的能量的光谱上的两个点之间的宽度 从激光发射的光谱。 该装置和方法可以在激光光刻光源和/或集成电路光刻工具中实现。
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公开(公告)号：US20110205512A1
公开(公告)日：2011-08-25
申请号：US12860288
申请日：2010-08-20
IPC分类号： G03B27/54
CPC分类号： G03F7/70575 , G03F7/70525
摘要： A method of controlling a spectral property of a light beam includes directing a light beam to a lithography exposure apparatus configured to create a pattern on a wafer; receiving information representative of a spectral property of the light beam; receiving information representative of an optical imaging condition of the lithography exposure apparatus; estimating a characteristic value of the light beam based on the received spectral property information and the received optical imaging condition information; determining whether the estimated light beam characteristic value matches a target light beam characteristic value; and if it is determined that the estimated light beam characteristic value does not match the target light beam characteristic value, adjusting the spectral property of the light beam.
摘要翻译： 控制光束的光谱特性的方法包括将光束引导到被配置为在晶片上产生图案的光刻曝光装置; 接收表示光束的光谱特性的信息; 接收表示所述光刻曝光装置的光学成像条件的信息; 基于所接收的光谱特性信息和所接收的光学成像条件信息来估计光束的特征值; 确定所估计的光束特性值是否与目标光束特性值匹配; 并且如果确定估计光束特性值与目标光束特性值不匹配，则调整光束的光谱特性。
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6.发明授权Method and apparatus for bandwidth measurement and bandwidth parameter calculation for laser light 有权用于激光的带宽测量和带宽参数计算的方法和装置公开(公告)号：US07304748B2
公开(公告)日：2007-12-04
申请号：US10789328
申请日：2004-02-27
申请人： Robert J. Rafac
发明人： Robert J. Rafac
IPC分类号： G01B9/02
CPC分类号： G01J1/4257 , G01J3/02 , G01J3/0205 , G01J3/027 , G01J3/26 , G01J3/28 , G01J3/45
摘要： A bandwidth meter method and apparatus for measuring the bandwidth of a spectrum of light emitted from a laser input to the bandwidth meter is disclosed, which may comprise an optical bandwidth monitor providing a first output representative of a first parameter which is indicative of the bandwidth of the light emitted from the laser and a second output representative of a second parameter which is indicative of the bandwidth of the light emitted from the laser; and, an actual bandwidth calculation apparatus utilizing the first output and the second output as part of a multivarible equation employing predetermined calibration variables specific to the optical bandwidth monitor, to calculate an actual bandwidth parameter. The apparatus and method may be implemented in a laser lithography light source and/or in an integrated circuit lithography tool.
摘要翻译： 公开了一种用于测量从激光输入到带宽计的发射光谱的带宽的带宽测量仪方法和装置，其可以包括光带宽监视器，其提供表示第一参数的第一输出，第一参数指示 从激光器发射的光和表示从激光器发射的光的带宽的第二参数的第二输出; 以及使用第一输出和第二输出的实际带宽计算装置作为使用光带宽监视器特有的预定校准变量的多元方程的一部分来计算实际带宽参数。 该装置和方法可以在激光光刻光源和/或集成电路光刻工具中实现。
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公开(公告)号：US20120162657A1
公开(公告)日：2012-06-28
申请号：US13411600
申请日：2012-03-04
申请人： Robert J. Rafac , Scot T. Smith
发明人： Robert J. Rafac , Scot T. Smith
IPC分类号： G01J3/45
CPC分类号： G01J3/02 , G01J1/4257 , G01J3/0205 , G01J3/027 , G01J3/0291 , G01J3/0297 , G01J3/1256 , G01J3/26 , G01J9/02 , G01J2009/0249 , G01J2009/0257 , G02B5/04 , G02B5/284 , G02B27/48 , G03F7/70025 , G03F7/70583 , H01S3/005
摘要： A method includes directing a portion of a laser beam output from a laser along a secondary beam path toward a detector, the secondary beam path being distinct from a main beam path of the laser beam; generating a bandwidth selective interference pattern of the laser beam on the detector; detecting, at the detector, a width of a fringe within the interference pattern to thereby measure measuring a bandwidth of the laser beam; and homogenizing the laser beam traveling along the secondary beam path prior to generation of the bandwidth selective interference pattern. The homogenizing includes diffusing the laser beam; and introducing a time dependent, position dependent, or both time and position dependent random modulation to the wavefront of the laser beam to reduce fluctuations in the detected fringe width and to reduce the influence of spatial coherence of the laser beam on the detected interference pattern.
摘要翻译： 一种方法包括将从激光器输出的激光束的一部分沿着次级光束路径引向检测器，次级光束路径与激光束的主光束路径不同; 在检测器上产生激光束的带宽选择性干涉图案; 在检测器处检测干涉图案内的边缘的宽度，从而测量测量激光束的带宽; 并且在产生带宽选择干涉图案之前均匀化沿着次级光束路径行进的激光束。 均质化包括扩散激光束; 并且将与时间有关的位置依赖性或时间和位置相关随机调制引入到激光束的波前以减少检测到的条纹宽度的波动并减少激光束的空间相干性对检测到的干涉图案的影响。
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8.发明授权Methods and apparatus for bandwidth measurement and bandwidth parameter calculation for laser light 有权用于激光的带宽测量和带宽参数计算的方法和装置公开(公告)号：US07639364B2
公开(公告)日：2009-12-29
申请号：US11973448
申请日：2007-10-08
申请人： Robert J. Rafac
发明人： Robert J. Rafac
IPC分类号： G01B9/02
CPC分类号： G01J3/02 , G01J3/0205 , G01J3/027 , G01J3/28 , G01J3/45
摘要： A bandwidth meter method and apparatus for measuring the bandwidth of a spectrum of light emitted from a laser input to the bandwidth meter is disclosed, which may comprise an optical bandwidth monitor providing a first output representative of a first parameter which is indicative of the bandwidth of the light emitted from the laser and a second output representative of a second parameter which is indicative of the bandwidth of the light emitted from the laser; and, an actual bandwidth calculation apparatus utilizing the first output and the second output as part of a multivariable equation employing predetermined calibration variables specific to the optical bandwidth monitor, to calculate an actual bandwidth parameter. The actual bandwidth parameter may comprise a spectrum full width at some percent of the maximum within the full width of the spectrum of light emitted from the laser or a width between two points on the spectrum enclosing some percentage of the energy of the full spectrum of the spectrum of light emitted from the laser. The apparatus and method may be implemented in a laser lithography light source and/or in an integrated circuit lithography tool.
摘要翻译： 公开了一种用于测量从激光输入到带宽计的发射光谱的带宽的带宽测量仪方法和装置，其可以包括光带宽监视器，其提供表示第一参数的第一输出，第一参数表示第 从激光器发射的光和表示从激光器发射的光的带宽的第二参数的第二输出; 以及使用第一输出和第二输出的实际带宽计算装置作为使用光带宽监视器特有的预定校准变量的多变量方程的一部分来计算实际带宽参数。 实际带宽参数可以包括在从激光器发射的光的光谱的全宽度内的最大值的百分之几处的光谱全宽度，或者包含光谱的全光谱的一部分能量百分比的光谱上的两个点之间的宽度 从激光发射的光谱。 该装置和方法可以在激光光刻光源和/或集成电路光刻工具中实现。
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公开(公告)号：US08520186B2
公开(公告)日：2013-08-27
申请号：US12860288
申请日：2010-08-20
CPC分类号： G03F7/70575 , G03F7/70525
摘要： A method of controlling a spectral property of a light beam includes directing a light beam to a lithography exposure apparatus configured to create a pattern on a wafer; receiving information representative of a spectral property of the light beam; receiving information representative of an optical imaging condition of the lithography exposure apparatus; estimating a characteristic value of the light beam based on the received spectral property information and the received optical imaging condition information; determining whether the estimated light beam characteristic value matches a target light beam characteristic value; and if it is determined that the estimated light beam characteristic value does not match the target light beam characteristic value, adjusting the spectral property of the light beam.
摘要翻译： 控制光束的光谱特性的方法包括将光束引导到被配置为在晶片上产生图案的光刻曝光装置; 接收表示光束的光谱特性的信息; 接收表示所述光刻曝光装置的光学成像条件的信息; 基于所接收的光谱特性信息和所接收的光学成像条件信息来估计光束的特征值; 确定所估计的光束特性值是否与目标光束特性值匹配; 并且如果确定估计光束特性值与目标光束特性值不匹配，则调整光束的光谱特性。
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10.发明授权公开(公告)号：US07733494B2
公开(公告)日：2010-06-08
申请号：US11394513
申请日：2006-03-31
申请人： Robert J. Rafac
发明人： Robert J. Rafac
IPC分类号： G01B9/02
CPC分类号： G01J3/02 , G01J3/027 , G01J3/26 , G01J3/2803 , G01J9/0246
摘要： A method and apparatus for estimating bandwidth of laser output light is described which may include a dispersive element producing a dispersed output having a plurality of spectrum images from at least a portion of the laser output light. An array of light detecting elements is oriented to receive the dispersed output together with a shifting mechanism that moves the array, the dispersed output, or both, relative to each other. Electronics may be provided for determining the widths of at least two spectrum images at different phases of registration between the spectrum images and light detector elements and for averaging the widths to estimate a laser output bandwidth. The-spectrum images formed by the laser output light may be under-sampled, e.g., in the spatial or time domains.
摘要翻译： 描述了用于估计激光输出光的带宽的方法和装置，其可以包括产生具有来自激光输出光的至少一部分的多个光谱图像的分散输出的色散元件。 光检测元件的阵列被定向为接收分散的输出以及相对于彼此移动阵列，分散的输出或两者的移动机构。 可以提供电子装置用于确定在光谱图像和光检测器元件之间的不同注册阶段的至少两个光谱图像的宽度，并且用于平均宽度以估计激光输出带宽。 由激光输出光形成的光谱图像可以在例如空间或时域中被低采样。
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