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    Methods and systems for electroplating wafers
    1.
    发明申请
    Methods and systems for electroplating wafers 审中-公开
    电镀晶圆的方法和系统

    公开(公告)号：US20060191784A1

    公开(公告)日：2006-08-31

    申请号：US11069800

    申请日：2005-02-28

    申请人： Robert Hitzfeld ,  Jennifer Loo ,  Murali Ramasubramanian

    发明人： Robert Hitzfeld ,  Jennifer Loo ,  Murali Ramasubramanian

    IPC分类号： C25D17/00 ,  C25D5/20 ,  C25D5/02

    CPC分类号： C25D17/001 ,  C25D3/38 ,  C25D5/08 ,  C25D21/12 ,  H01L21/2885

    摘要： Improved methods and systems for electroplating wafers are described herein. The method includes the acts of introducing a wafer which is coupled to an electrode into an electroplating cell having a counter electrode; maintaining a flow of a plating solution through the cell for electroplating the wafer; removing the wafer from the cell; stopping the flow of the plating solution through the cell; maintaining a volume of plating solution within the cell sufficient to keep the counter electrode submerged during stoppage of flow; removing the plating solution within the cell; and repeating the above steps for a subsequent wafer. By stopping the flow of plating solution after completion of plating one or more wafers, a consumption rate of additives enhancing electroplating properties is reduced, a production rate of breakdown products produced during electroplating is reduced, plating solution useable life is increased, and a need for plating solution analysis is reduced.

    摘要翻译： 本文描述了用于电镀晶片的改进的方法和系统。 该方法包括将与电极耦合的晶片引入具有对电极的电镀单元中的动作; 保持电镀溶液流过用于电镀晶片的电池; 从电池中取出晶片; 停止电镀溶液通过电池的流动; 保持电池内的电镀液体积足以使反电极在流动停止期间淹没; 去除细胞内的电镀液; 并重复上述步骤以用于随后的晶片。 通过在一个或多个晶片的电镀完成之后停止电镀溶液的流动，降低电镀性能的添加剂的消耗速率降低，电镀期间产生的击穿产物的生产率降低，电镀溶液的使用寿命增加， 电镀液分析减少。

    Method for reducing pole height loss in the formation of a write pole for a magnetic write head
    2.
    发明申请
    Method for reducing pole height loss in the formation of a write pole for a magnetic write head 失效
    降低写入磁头写磁极的磁极高度损失的方法

    公开(公告)号：US20060070232A1

    公开(公告)日：2006-04-06

    申请号：US10957038

    申请日：2004-09-30

    申请人： Daniel Bedell ,  Jennifer Loo ,  Aron Pentek ,  Murali Ramasubramanian

    发明人： Daniel Bedell ,  Jennifer Loo ,  Aron Pentek ,  Murali Ramasubramanian

    IPC分类号： G11B5/187

    CPC分类号： G11B5/3163 ,  G11B5/187 ,  Y10T29/49021 ,  Y10T29/49041 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

    摘要： A method for reducing plated pole height loss in the formation of a write pole for a magnetic write head is disclosed. The method includes forming a conductive layer on a thin film substrate, forming a photoresist layer on the conductive layer and forming a trench in the photoresist layer. A thick seed layer is then placed on the trench and on the photoresist layer surface using a collimator. Moreover, the process includes plating while applying a voltage to the thin film substrate where the electrically isolated seed layer is removed and the trench is filled with plating material, removing the photoresist layer, and removing the exposed portions of the conductive layer on the thin film substrate.

    摘要翻译： 本发明公开了一种在形成写磁头写磁极时降低电极高度损耗的方法。 该方法包括在薄膜基板上形成导电层，在导电层上形成光致抗蚀剂层，并在光刻胶层中形成沟槽。 然后使用准直器将厚的种子层放置在沟槽和光致抗蚀剂层表面上。 此外，该方法包括电镀，同时向薄膜基板施加电压，其中去除电隔离种子层，并且沟槽填充有电镀材料，去除光致抗蚀剂层，以及去除薄膜上的导电层的暴露部分 基质。

    Three-dimensional batteries and methods of manufacturing the same
    3.
    发明授权
    Three-dimensional batteries and methods of manufacturing the same 有权
    三维电池及其制造方法

    公开(公告)号：US08999558B2

    公开(公告)日：2015-04-07

    申请号：US12013388

    申请日：2008-01-11

    申请人： Harrold Jones Rust, III ,  Ashok Lahiri ,  Murali Ramasubramanian ,  Robert Spotnitz

    发明人： Harrold Jones Rust, III ,  Ashok Lahiri ,  Murali Ramasubramanian ,  Robert Spotnitz

    IPC分类号： H01M10/04 ,  H01M4/04 ,  H01M6/40

    CPC分类号： H01M10/0472 ,  H01M4/0402 ,  H01M4/0423 ,  H01M4/0426 ,  H01M4/0428 ,  H01M4/0438 ,  H01M4/0457 ,  H01M4/049 ,  H01M6/40

    摘要： Various methods and apparatus relating to three-dimensional battery structures and methods of manufacturing them are disclosed and claimed. In certain embodiments, a three-dimensional battery comprises a battery enclosure, and a first structural layer within the battery enclosure, where the first structural layer has a first surface, and a first plurality of conductive protrusions extend from the first surface. A first plurality of electrodes is located within the battery enclosure, where the first plurality of electrodes includes a plurality of cathodes and a plurality of anodes, and wherein the first plurality of electrodes includes a second plurality of electrodes selected from the first plurality of electrodes, each of the second plurality of electrodes being in contact with the outer surface of one of said first plurality of conductive protrusions. Some embodiments relate to processes of manufacturing energy storage devices with or without the use of a backbone structure or layer.

    摘要翻译： 公开并要求保护与三维电池结构及其制造方法有关的各种方法和装置。 在某些实施例中，三维电池包括电池外壳和电池外壳内的第一结构层，其中第一结构层具有第一表面，并且第一多个导电突起从第一表面延伸。 第一多个电极位于电池外壳内，其中第一多个电极包括多个阴极和多个阳极，并且其中第一多个电极包括从第一多个电极中选择的第二多个电极， 所述第二多个电极中的每一个与所述第一多个导电突起中的一个的外表面接触。 一些实施例涉及在使用或不使用骨架结构或层的情况下制造能量存储装置的过程。

    Electrodes for three-dimensional lithium batteries and methods of manufacturing thereof
    5.
    发明授权
    Electrodes for three-dimensional lithium batteries and methods of manufacturing thereof 有权
    三维锂电池用电极及其制造方法

    公开(公告)号：US08865345B1

    公开(公告)日：2014-10-21

    申请号：US12013394

    申请日：2008-01-11

    申请人： Murali Ramasubramanian ,  Ashok Lahiri

    发明人： Murali Ramasubramanian ,  Ashok Lahiri

    IPC分类号： H01M4/04 ,  H01M2/02 ,  C25D13/12

    CPC分类号： C23C18/1653 ,  C25D5/022 ,  C25D13/12 ,  H01M4/386 ,  H01M10/0525

    摘要： Various methods, systems, and apparatus for implementing aspects of the use of alloy anodes in three-dimensional lithium-ion batteries are disclosed, while accounting for volume change that occurs in these alloy anodes during charging and discharging. A three-dimensional lithium-ion battery according to certain embodiments comprises a battery enclosure, and an anode protruding from a first surface within the enclosure, with the anode having a first state and an expanded state, where the volume occupied by said anode is larger in the expanded state than in the first state. A first cathode is separated from the anode along a first direction, and a second cathode is separated from the anode along a second direction. A separator contacts the first cathode, the second cathode, and a portion of the anode. A gap is provided between the anode and the separator, the gap being larger in the first state than in the expanded state.

    摘要翻译： 公开了用于实现三维锂离子电池中合金阳极的使用方面的各种方法，系统和装置，同时考虑了在充电和放电期间在这些合金阳极中发生的体积变化。 根据某些实施例的三维锂离子电池包括电池外壳和从外壳中的第一表面突出的阳极，阳极具有第一状态和膨胀状态，其中由所述阳极占据的体积较大 处于扩张状态，处于第一状态。 第一阴极沿着第一方向与阳极分离，并且第二阴极沿着第二方向与阳极分离。 分离器接触第一阴极，第二阴极和阳极的一部分。 在阳极和隔板之间设置间隙，第一状态下的间隙大于膨胀状态。

    RHODIUM SULFATE PRODUCTION FOR RHODIUM PLATING
    7.
    发明申请
    RHODIUM SULFATE PRODUCTION FOR RHODIUM PLATING 审中-公开
    硫酸钠生产硫酸钠

    公开(公告)号：US20080063594A1

    公开(公告)日：2008-03-13

    申请号：US11531558

    申请日：2006-09-13

    申请人： Michael J. Armstrong ,  Gregory M. Omweg ,  Murali Ramasubramanian

    发明人： Michael J. Armstrong ,  Gregory M. Omweg ,  Murali Ramasubramanian

    IPC分类号： C01B17/96

    CPC分类号： C01G55/00 ,  C01P2004/03 ,  C01P2006/40 ,  C01P2006/42 ,  C25D3/50

    摘要： Rhodium solutions, methods for plating structures using such rhodium solutions, and rhodium plated structures are described. The rhodium solutions can contain an increased concentration of rhodium in the form of a monomer sulfate salt. The rhodium solutions can be formed under conditions of controlled pH and controlled temperatures that increase the uniformity of the chemical composition from one rhodium solution to another. As a result, the shelf life of the rhodium solutions and plating baths using these rhodium solutions can be increased. Rhodium platings formed from these solutions can contain a low degree of dendrites, or even no dendrites. The rhodium platings can also exhibit less internal stress and can be less susceptible to cracking.

    摘要翻译： 描述了铑溶液，使用这种铑溶液的电镀结构的方法和镀铑结构。 铑溶液可以含有增加浓度的单体硫酸盐形式的铑。 铑溶液可以在受控的pH和受控温度的条件下形成，这增加了化学成分从一种铑溶液到另一种铑溶液的均匀性。 结果，可以增加使用这些铑溶液的铑溶液和电镀浴的保存期限。 由这些溶液形成的铑电镀可以含有低度的枝晶，甚至不含枝晶。 铑镀层也可以表现出更小的内应力，并且不易开裂。

    Magnetic head for hard disk drive having improved magnetic shield for MR sensor
    8.
    发明申请
    Magnetic head for hard disk drive having improved magnetic shield for MR sensor 失效
    用于硬盘驱动器的磁头具有改进的MR传感器磁屏蔽

    公开(公告)号：US20060002022A1

    公开(公告)日：2006-01-05

    申请号：US10883141

    申请日：2004-06-30

    申请人： Michael Feldbaum ,  John Kim ,  Murali Ramasubramanian ,  Howard Zolla

    发明人： Michael Feldbaum ,  John Kim ,  Murali Ramasubramanian ,  Howard Zolla

    IPC分类号： G11B5/17 ,  G11B5/147 ,  G11B5/127 ,  G11B5/33 ,  H04R31/00

    CPC分类号： G11B5/127 ,  G11B5/3163 ,  Y10T29/49043 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

    摘要： A first magnetic shield layer of the read head sensor is deposited upon a slider substrate surface. A patterned photoresist is then photolithographically fabricated upon the first magnetic shield layer with openings that are formed alongside the location at which the read sensor will be fabricated. An ion milling step is performed to create pockets within the surface of the magnetic shield layer at the location of the openings in the photoresist layer. The photoresist layer is then removed, and a fill layer is deposited across the surface of the magnetic shield layer in a depth greater than the depth of the pocket. Thereafter, a polishing step is conducted to remove portions of the fill layer down to the surface of the magnetic shield layer. A G1 insulation layer is deposited and a magnetic head sensor element is then fabricated upon the insulation layer.

    摘要翻译： 读头传感器的第一磁屏蔽层沉积在滑块基板表面上。 然后将图案化的光致抗蚀剂光刻地制造在具有开口的第一磁屏蔽层上，该开口沿着读取传感器将被制造的位置形成。 执行离子铣削步骤以在光致抗蚀剂层中的开口的位置处在磁屏蔽层的表面内产生凹坑。 然后去除光致抗蚀剂层，并且以大于凹穴深度的深度横跨磁屏蔽层的表面沉积填充层。 此后，进行抛光步骤以将填充层的部分向下移动到磁屏蔽层的表面。 沉积G1绝缘层，然后在绝缘层上制造磁头传感器元件。