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公开(公告)号:US20240431122A1
公开(公告)日:2024-12-26
申请号:US18623732
申请日:2024-04-01
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Hongjun LEE , Kiseok LEE , Hyungeun CHOI , Keunnam KIM , Incheol NAM
IPC: H10B80/00 , G11C11/4091 , H01L23/00 , H01L25/00 , H01L25/065 , H01L25/18
Abstract: A semiconductor device includes a lower chip structure, and an upper chip structure on the lower chip structure. The lower chip structure includes a memory structure, a lower interconnection structure electrically connected to the memory structure, and a lower bonding pad electrically connected to the lower interconnection structure. The upper chip structure includes an upper base, a peripheral transistor on the upper base, a first upper interconnection structure electrically connected to the peripheral transistor, on the upper base, a through-via penetrating through the upper base and electrically connected to the first upper interconnection structure, an upper bonding pad bonded to the lower bonding pad, below the upper base, and an intermediate connection structure electrically connecting the upper bonding pad and the through-via, between the upper base and the lower chip.
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公开(公告)号:US20230320076A1
公开(公告)日:2023-10-05
申请号:US17983489
申请日:2022-11-09
Applicant: Samsung Electronics Co., LTD.
Inventor: HYO-SUB KIM , Kseok LEE , Myeong-Dong LEE , Jongmin KIM , Hui-Jung KIM , Jihun LEE , Hongjun LEE
IPC: H01L27/108 , G11C5/06
CPC classification number: H01L27/10814 , G11C5/063
Abstract: A semiconductor memory device includes: a device isolation pattern provided on a substrate to provide a first active portion and a second active portion; a first storage node pad disposed on the first active portion; a second storage node pad disposed on the second active portion; a pad separation pattern disposed between the first and second storage node pads; a word line disposed in the substrate to cross the first and second active portions; a bit line disposed on the pad separation pattern and crossing the word line; a buffer layer disposed on the pad separation pattern; and a mask polysilicon pattern interposed between the buffer layer and the bit line, wherein a side surface of the mask polysilicon pattern is substantially aligned to a side surface of the bit line, and the mask polysilicon pattern is vertically overlapped with the pad separation pattern.
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公开(公告)号:US20240341081A1
公开(公告)日:2024-10-10
申请号:US18388295
申请日:2023-11-09
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Hongjun LEE , Keunnam KIM , Seungmuk KIM , Kiseok LEE
CPC classification number: H10B12/315 , G11C5/063 , H10B12/482 , H10B12/485 , H10B12/488 , H10B12/50
Abstract: A semiconductor device which includes a semiconductor substrate having a cell area and a peripheral area, the peripheral area including a first area and a second area adjacent to each other, first transistors on the first area, a first wiring layer on the first transistors, a first pad on the second area and a portion of the first area, a first contact plug between the first wiring layer and the first area, a second contact plug between the first pad and the first area, a second pad on the first wiring layer, a third contact plug between the second pad and the first wiring layer, and a plurality of first capacitors on the second pad and that vertically overlap the first transistors, thus reliability and electrical characteristics of the semiconductor device may be increased.
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公开(公告)号:US20240268101A1
公开(公告)日:2024-08-08
申请号:US18471900
申请日:2023-09-21
Applicant: Samsung Electronics Co., Ltd.
Inventor: SangJae PARK , Seung-Bo KO , Keunnam KIM , Jongmin KIM , Hui-Jung KIM , Taejin PARK , Chan-Sic YOON , Kiseok LEE , Myeong-Dong LEE , Hongjun LEE
IPC: H10B12/00
CPC classification number: H10B12/482 , H10B12/05 , H10B12/34 , H10B12/485 , H10B12/488
Abstract: A semiconductor device includes first and second active patterns extending in a first direction and being adjacent to each other in a second direction, the first and second active patterns, each of which includes first and second edges spaced apart from each other in the first direction, a first storage node pad and a first storage node contact sequentially provided on the first edge of the first active pattern, a second storage node pad and a second storage node contact sequentially provided on the second edge of the second active pattern, and a fence pattern between the first and the second storage node contacts. Bottom and top surfaces of the first storage node contact are located at first and second levels, respectively. In a third direction, a width of the fence pattern at the first level is less than a width of the fence pattern at the second level.
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公开(公告)号:US20240276712A1
公开(公告)日:2024-08-15
申请号:US18435263
申请日:2024-02-07
Applicant: Samsung Electronics Co., Ltd.
Inventor: Hongjun LEE , Keunnam KIM , Kiseok LEE
CPC classification number: H10B12/482 , H01L29/7827
Abstract: A semiconductor device may include a substrate, a bit line structure, first and second gate electrodes spaced apart from each other, and first and second gate dielectric layers. The substrate may include a first upper active region and a second upper active region spaced apart from each other and protruding upwardly from a lower active region, a first vertical active pillar protruding upwardly from the first upper active region, and a second vertical active pillar protruding upwardly from the second upper active region. The bit line structure may be between the first and second upper active regions. The first and second gate electrodes respectively may surround channel regions of the first and second vertical active pillars. First and second gate dielectric layers respectively may be between the first vertical active pillar and the first gate electrode and between the second vertical active pillar and the second gate electrode.
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公开(公告)号:US20220122986A1
公开(公告)日:2022-04-21
申请号:US17398136
申请日:2021-08-10
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Sukhwa JANG , Kanguk KIM , Hyunsuk NOH , Yeongshin PARK , Sangkyu SUN , Sunyoung LEE , Sohyang LEE , Hongjun LEE , Hosun JUNG , Jeongmin JIN , Jeonghee CHOI , Jinseo CHOI , Cera HONG
IPC: H01L27/108
Abstract: A method of manufacturing a semiconductor device includes forming a lower structure including a plurality of transistors, forming a conductive layer on the lower structure, forming first preliminary pad mask patterns and wiring mask patterns on the conductive layer, forming pad mask patterns by patterning the first preliminary pad mask patterns while protecting the wiring mask patterns, and etching the conductive layer using the pad mask patterns and the wiring mask patterns as an etching mask to form pad patterns and wiring patterns.
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公开(公告)号:US20240268129A1
公开(公告)日:2024-08-08
申请号:US18370940
申请日:2023-09-21
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Hongjun LEE , Keunnam KIM , Hui-Jung KIM , Seokhan PARK , Kiseok LEE , Moonyoung JEONG , Jay-Bok CHOI , Hyungeun CHOI , Jinwoo HAN
IPC: H10B80/00 , H01L23/00 , H01L25/00 , H01L25/065 , H01L25/18
CPC classification number: H10B80/00 , H01L24/08 , H01L24/80 , H01L25/0657 , H01L25/18 , H01L25/50 , H01L2224/08145 , H01L2224/80895 , H01L2224/80896 , H01L2225/06541 , H01L2924/1431 , H01L2924/1436
Abstract: Disclosed are semiconductor devices and their fabrication methods. The semiconductor device comprises a lower substrate, a lower dielectric structure on the lower substrate, a memory cell structure between the lower substrate and the lower dielectric structure, a lower bonding pad in the lower dielectric structure, an upper dielectric structure on the lower dielectric structure, an upper substrate on the upper dielectric structure, a transistor between the upper substrate and the upper dielectric structure, and an upper bonding pad in the upper dielectric structure. A top surface of the lower bonding pad is in contact with a bottom surface of the upper bonding pad. The lower bonding pad and the upper bonding pad overlap the memory cell structure.
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公开(公告)号:US20240268102A1
公开(公告)日:2024-08-08
申请号:US18471583
申请日:2023-09-21
Applicant: Samsung Electronics Co., Ltd.
Inventor: Kiseok LEE , Seung-Bo KO , Jongmin KIM , Hui-Jung KIM , SangJae PARK , Taejin PARK , Chan-Sic YOON , Myeong-Dong LEE , Hongjun LEE , Minju KANG , Keunnam KIM
IPC: H10B12/00
CPC classification number: H10B12/485 , H10B12/482 , H10B12/488
Abstract: A semiconductor device includes first and second active patterns extending in a first direction and arranged in a second direction intersecting the first direction, each of the first and second active patterns including first and second edge portions spaced apart from each other in the first direction, a first storage node pad and a first storage node contact sequentially provided on the first edge portion of the first active pattern, and a second storage node pad and a second storage node contact sequentially provided on the second edge portion of the second active pattern. Each of the first and second storage node contacts includes a metal material.
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公开(公告)号:US20220352173A1
公开(公告)日:2022-11-03
申请号:US17558728
申请日:2021-12-22
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Hongjun LEE , Kyungsun RYU , Dongjun LEE , Jin-Seong LEE
IPC: H01L27/108
Abstract: A semiconductor device includes bit lines extending in a first direction on a substrate, a lower contact connected to the substrate between two adjacent ones of the bit lines, a landing pad on the lower contact, and an insulating structure surrounding a sidewall of the landing pad, the insulating structure including a first insulating pattern having a top surface at a lower level than a top surface of the landing pad, and a second insulating pattern on the top surface of the first insulating pattern.
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