公开(公告)号：US20150228840A1

公开(公告)日：2015-08-13

申请号：US14615216

申请日：2015-02-05

Applicant: SEIKO EPSON CORPORATION

Inventor： Satoshi TAKENAKA

IPC: H01L31/16 ,  G01N21/3581

CPC classification number: H01L31/16 ,  G01N21/3581 ,  H01L31/0224 ,  H01L31/09

Abstract: A photoconductive antenna that generates a terahertz wave by irradiation with a light pulse, includes: a carrier generation layer that has carriers formed therein by irradiation with the light pulse; and a first electrode and a second electrode, located above the carrier generation layer, which apply a voltage to the carrier generation layer, wherein the carrier generation layer includes a protruding portion which is irradiated with the light pulse.

Abstract translation: 通过用光脉冲照射产生太赫兹波的光电导天线包括：通过用光脉冲照射形成载流子的载流子生成层; 以及位于载体产生层上方的第一电极和第二电极，其向载体产生层施加电压，其中载流子产生层包括用光脉冲照射的突出部分。

公开(公告)号：US20150340560A1

公开(公告)日：2015-11-26

申请号：US14818585

申请日：2015-08-05

Applicant: SEIKO EPSON CORPORATION

Inventor： Satoshi TAKENAKA

IPC: H01L33/30 ,  G01J3/28 ,  H01L31/16

CPC classification number: H01L33/30 ,  G01J3/2823 ,  G01J5/10 ,  G01J2005/0077 ,  G01N21/3586 ,  G02F2202/12 ,  G02F2203/13 ,  H01L31/03046 ,  H01L31/09 ,  H01L31/105 ,  H01L31/16 ,  H01L31/1844 ,  H01L33/0004

Abstract: A photoconductive antenna is adapted to generate terahertz waves when irradiated by pulsed light. The photoconductive antenna includes a semiconductor layer, a first conductive layer, a second conductive layer, a first electrode and a second electrode. The first conductive layer is disposed on a first surface of the semiconductor layer. The second conductive layer is disposed on the first surface of the semiconductor layer with a prescribed gap being formed between the first conductive layer and the second conductive layer. The first electrode is electrically connected to the first conductive layer. The second electrode is electrically connected to the second conductive layer. The first conductive layer contains a first conductive type impurity. The second conductive layer contains a second conductive type impurity. The semiconductor layer has a carrier density lower than a carrier density of the first conductive layer or a carrier density of the second conductive layer.

Abstract translation: 光电导天线适于在用脉冲光照射时产生太赫兹波。 光电导天线包括半导体层，第一导电层，第二导电层，第一电极和第二电极。 第一导电层设置在半导体层的第一表面上。 第二导电层设置在半导体层的第一表面上，在第一导电层和第二导电层之间形成规定的间隙。 第一电极电连接到第一导电层。 第二电极电连接到第二导电层。 第一导电层含有第一导电型杂质。 第二导电层含有第二导电型杂质。 半导体层的载流子密度低于第一导电层的载流子密度或第二导电层的载流子密度。

公开(公告)号：US20150241005A1

公开(公告)日：2015-08-27

申请号：US14629130

申请日：2015-02-23

Applicant: SEIKO EPSON CORPORATION

Inventor： Satoshi TAKENAKA

IPC: F21K99/00 ,  G01N21/59 ,  G01N21/55

CPC classification number: G01N21/3581

Abstract: A photoconductive antenna that generates a terahertz wave by irradiation with a light pulse, includes: a carrier generation layer that has carriers formed therein by irradiation with the light pulse, and is constituted by a semi-insulating substrate; an insulating layer, located on the carrier generation layer, which is capable of transmitting the light pulse; and a first electrode and a second electrode, located above the carrier generation layer, which apply a voltage to the carrier generation layer, wherein the insulating layer is provided on a region which is irradiated with the light pulse between the first electrode and the second electrode in a plan view.

Abstract translation: 通过用光脉冲照射产生太赫兹波的光电导天线包括：通过照射光脉冲形成在其中的载流子的载流子生成层，由半绝缘基板构成; 绝缘层，位于载体产生层上，能够传输光脉冲; 以及位于所述载体产生层上方的第一电极和第二电极，所述第一电极和第二电极向所述载流子产生层施加电压，其中所述绝缘层设置在所述第一电极和所述第二电极之间的所述光脉冲的照射区域上 在平面图中。

公开(公告)号：US20150180204A1

公开(公告)日：2015-06-25

申请号：US14576675

申请日：2014-12-19

Applicant: Seiko Epson Corporation

Inventor： Satoshi TAKENAKA ,  Yuji KURACHI

IPC: H01S5/183

CPC classification number: H01S5/183 ,  G04F5/145 ,  H01S5/02276 ,  H01S5/0425 ,  H01S5/0623 ,  H01S5/0687 ,  H01S5/18311 ,  H01S5/18338 ,  H01S5/18347 ,  H01S5/1835 ,  H01S5/18352 ,  H01S5/18355 ,  H01S5/18372 ,  H01S5/3201 ,  H01S2301/176

Abstract: A vertical cavity surface emitting laser includes: a substrate; a laminated body which is provided over the substrate; an electrode of which at least a portion is provided over the laminated body; and a pad which is connected to the electrode, wherein the laminated body includes a first mirror layer provided over the substrate, an active layer provided over the first mirror layer, and a second mirror layer provided over the active layer, in a plan view, the laminated body includes a first distortion imparting portion, a second distortion imparting portion, and a resonance portion which is provided between the first distortion imparting portion and the second distortion imparting portion and resonates light generated in the active layer, and in the plan view, the pad is provided in a position that is not overlapped with at least one of the first distortion imparting portion and the second distortion imparting portion.

Abstract translation: 垂直腔表面发射激光器包括：衬底; 设置在基板上的层叠体; 在层叠体上设置有至少一部分的电极; 以及连接到所述电极的焊盘，其中所述层叠体包括设置在所述基板上的第一反射镜层，设置在所述第一镜面层上的有源层，以及设置在所述有源层上的第二镜像层， 层叠体包括第一变形赋予部，第二变形赋予部，以及设置在第一变形赋予部和第二变形赋予部之间的谐振部，并且谐振在有源层中产生的光，在俯视图中， 衬垫设置在与第一变形赋予部和第二变形赋予部中的至少一个不重叠的位置。

公开(公告)号：US20150014532A1

公开(公告)日：2015-01-15

申请号：US14504643

申请日：2014-10-02

Applicant: SEIKO EPSON CORPORATION

Inventor： Satoshi TAKENAKA

IPC: H01L33/30 ,  G01J5/10

CPC classification number: H01L33/30 ,  G01J3/2823 ,  G01J5/10 ,  G01J2005/0077 ,  G01N21/3586 ,  G02F2202/12 ,  G02F2203/13 ,  H01L31/03046 ,  H01L31/09 ,  H01L31/105 ,  H01L31/16 ,  H01L31/1844 ,  H01L33/0004

Abstract: A photoconductive antenna includes a semiconductor layer, and first and second electrodes. The semiconductor layer includes a first conductive region and a second conductive region constituting portions of a surface of the semiconductor layer disposed on a side to which the pulsed light is irradiated, and a third conductive region disposed between the first and second conductive regions. The first conductive region contains a first conductive type impurity and the second conductive region contains a second conductive type impurity. The third conductive region has a carrier density lower than a carrier density of the first conductive region or a carrier density of the second conductive region. The first electrode and the second electrode are disposed on the side to which the pulsed light is irradiated. The third conductive region is configured and arranged to be irradiated by the pulsed light.

Abstract translation: 光电导天线包括半导体层以及第一和第二电极。 半导体层包括第一导电区域和第二导电区域，该第二导电区域构成设置在照射脉冲光的一侧的半导体层的表面的部分，以及设置在第一和第二导电区域之间的第三导电区域。 第一导电区域包含第一导电类型杂质，第二导电区域包含第二导电类型杂质。 第三导电区域具有低于第一导电区域的载流子密度或第二导电区域的载流子密度的载流子密度。 第一电极和第二电极设置在照射脉冲光的一侧。 第三导电区域被配置和布置成被脉冲光照射。

公开(公告)号：US20140240510A1

公开(公告)日：2014-08-28

申请号：US14192592

申请日：2014-02-27

Applicant: SEIKO EPSON CORPORATION

Inventor： Satoshi TAKENAKA

IPC: G01N21/17 ,  H04N5/33

CPC classification number: H04N5/33 ,  G01N21/3581

Abstract: A photo conductive antenna irradiated with light pulse and generating terahertz wave includes a first layer formed by a semi-insulating substrate, a second layer located on the first layer and formed using a material having lower carrier mobility than carrier mobility of the semi-insulating substrate, a first electrode and a second electrode located on the second layer and applying a voltage to the first layer, a first region in which the second layer is formed on the first layer, and a second region in which the second layer is formed on the first layer, wherein the second region is located between the first electrode and the second electrode in a plan view, and the light pulse is applied to the second region.

Abstract translation: 照射光脉冲并产生太赫兹波的光导电天线包括由半绝缘衬底形成的第一层，位于第一层上的第二层，并且使用具有比半绝缘衬底的载流子迁移率低的载流子迁移率的材料形成 位于所述第二层上的第一电极和第二电极，并向所述第一层施加电压，在所述第一层上形成有所述第二层的第一区域和在所述第二层上形成所述第二层的第二区域 第一层，其中第二区域在俯视图中位于第一电极和第二电极之间，并且光脉冲被施加到第二区域。

公开(公告)号：US20150214415A1

公开(公告)日：2015-07-30

申请号：US14609310

申请日：2015-01-29

Applicant: SEIKO EPSON CORPORATION

Inventor： Satoshi TAKENAKA

IPC: H01L31/16 ,  G01N21/3581

CPC classification number: G01N21/3581 ,  G01N2201/0696

Abstract: A photoconductive antenna that generates a terahertz wave by irradiation with a light pulse, includes: a first layer that has carriers formed therein by irradiation with the light pulse; a second layer, located above the first layer, which has carrier mobility larger than carrier mobility of the first layer; and a first electrode and a second electrode, located above the second layer, which apply a voltage to the second layer.

Abstract translation: 通过用光脉冲照射产生太赫兹波的光电导天线包括：通过照射光脉冲形成在其中的载流子的第一层; 位于第一层上方的第二层，其具有大于第一层的载流子迁移率的载流子迁移率; 以及位于第二层上方的第一电极和第二电极，其向第二层施加电压。

公开(公告)号：US20140252231A1

公开(公告)日：2014-09-11

申请号：US14201542

申请日：2014-03-07

Applicant: SEIKO EPSON CORPORATION

Inventor： Hiroto TOMIOKA ,  Satoshi TAKENAKA

IPC: G01N21/89

CPC classification number: G01N21/89 ,  G01N21/3581 ,  G01N21/9508

Abstract: A specimen inspection apparatus includes: a terahertz wave generation unit which generates a terahertz wave; a transportation unit which includes a transportation surface on which specimens as inspection objects are loaded and is configured so as to transport the specimens in an in-plane direction of the transportation surface; an irradiation direction changing unit which changes an irradiation direction of a terahertz wave which is emitted from the terahertz wave generation unit and is emitted to the specimens loaded on the transportation surface; and a terahertz wave detection unit which detects a terahertz wave which is emitted to the specimens loaded on the transportation surface to transmit therethrough or be reflected thereby, wherein the irradiation direction changing unit changes the irradiation direction by changing a position of the terahertz wave generation unit.

Abstract translation: 样本检查装置包括：产生太赫兹波的太赫兹波生成单元; 运输单元，其包括输送表面，在该输送表面上加载作为检查对象的样本，并且被构造成沿所述输送表面的面内方向输送所述样本; 照射方向改变单元，其改变从太赫兹波发生单元发射并发射到装载在运送表面上的样本的太赫兹波的照射方向; 以及太赫兹波检测单元，其检测发射到装载在所述输送面上的试样的太赫兹波，以将其传输通过或由其反射，其中所述照射方向改变单元通过改变所述太赫兹波产生单元的位置来改变所述照射方向 。

公开(公告)号：US20150180213A1

公开(公告)日：2015-06-25

申请号：US14574813

申请日：2014-12-18

Applicant: Seiko Epson Corporation

Inventor： Satoshi TAKENAKA ,  Yuji KURACHI ,  Shoji ONO

IPC: H01S5/42

CPC classification number: H01S5/423 ,  G04F5/145 ,  H01S5/02276 ,  H01S5/0425 ,  H01S5/0623 ,  H01S5/0687 ,  H01S5/18311 ,  H01S5/18338 ,  H01S5/18347 ,  H01S5/1835 ,  H01S5/18352 ,  H01S5/18355 ,  H01S5/18372 ,  H01S5/3201 ,  H01S2301/176

Abstract: A vertical cavity surface emitting laser includes: a laminated body; an insulation layer which is provided over at least a portion of the laminated body; an electrode of which at least a portion is provided over the laminated body; a pad; and a wiring which connects the electrode and the pad, wherein the laminated body includes a first mirror layer, an active layer, and a second mirror layer, the laminated body includes a first distortion imparting portion, a second distortion imparting portion, and a resonance portion which is provided between the first distortion imparting portion and the second distortion imparting portion, in a plan view, the electrode is provided so as to cover at least a portion of the resonance portion, in the plan view, a width of the wiring is greater than a width of the first distortion imparting portion and is smaller than a width of the electrode.

Abstract translation: 垂直腔表面发射激光器包括：层叠体; 绝缘层，设置在所述层叠体的至少一部分上; 在层叠体上设置有至少一部分的电极; 垫子 以及连接电极和焊盘的布线，其中层叠体包括第一反射镜层，有源层和第二镜面层，层叠体包括第一变形赋予部，第二变形赋予部和共振 设置在第一变形赋予部分和第二变形赋予部分之间的部分，在平面图中设置电极以覆盖谐振部分的至少一部分，在平面图中，布线的宽度为 大于第一变形赋予部分的宽度并且小于电极的宽度。

公开(公告)号：US20150180209A1

公开(公告)日：2015-06-25

申请号：US14573622

申请日：2014-12-17

Applicant: Seiko Epson Corporation

Inventor： Satoshi TAKENAKA ,  Yuji KURACHI

IPC: H01S5/183

CPC classification number: H01S5/18313 ,  H01S5/0425 ,  H01S5/18308 ,  H01S5/18311 ,  H01S5/18327 ,  H01S5/18338 ,  H01S5/18341 ,  H01S5/18347 ,  H01S5/1835 ,  H01S5/18352 ,  H01S5/18355 ,  H01S5/3201 ,  H01S2301/176

Abstract: A vertical cavity surface emitting laser includes: a substrate; a first mirror layer which is provided over the substrate; an active layer which is provided over the first mirror layer; a second mirror layer which is provided over the active layer; a first electrode and a second electrode which are electrically connected to the first mirror layer and are separated from each other; and a third electrode which is electrically connected to the second mirror layer, wherein the first mirror layer, the active layer, and the second mirror layer configure a laminated body, the laminated body includes a resonance portion which resonates light generated in the active layer, in a plan view, an insulation layer surrounding the laminated body is provided, and in the plan view, the insulation layer is provided between the first electrode and the second electrode.

Abstract translation: 垂直腔表面发射激光器包括：衬底; 设置在所述基板上的第一镜层; 设置在所述第一镜层上的有源层; 设置在有源层上的第二镜层; 电连接到第一镜层并彼此分离的第一电极和第二电极; 和与第二镜层电连接的第三电极，其中第一镜层，有源层和第二镜层构成层叠体，所述层叠体包括谐振部，其使在有源层中产生的光共振， 在平面图中，设置有围绕层叠体的绝缘层，并且在俯视图中，绝缘层设置在第一电极和第二电极之间。