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公开(公告)号：US09362093B2
公开(公告)日：2016-06-07
申请号：US14138833
申请日：2013-12-23
Applicant: Sputtering Components, Inc.
Inventor： Daniel Theodore Crowley , Patrick Lawrence Morse , William A. Meredith, Jr. , John Robert German , Michelle Lynn Neal
Abstract: One embodiment is directed to a plasma source comprising a body in which a cavity is formed and at least two self-contained magnetron assemblies disposed within the cavity. The magnetron assemblies are mutually electrically isolated from each other and from the body. In one implementation of such an embodiment, the self-contained magnetron assemblies comprise closed-drift magnetron assemblies. Other embodiments are disclosed.
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公开(公告)号：USRE46599E1
公开(公告)日：2017-11-07
申请号：US15365512
申请日：2016-11-30
Applicant: SPUTTERING COMPONENTS, INC.
Inventor： Daniel Theodore Crowley , William A. Meredith, Jr.
CPC classification number: C23C14/35 , C23C14/354 , H01J37/3405 , H01J37/342 , H01J37/345 , H01J37/3452 , H01J37/347 , H01J37/3482
Abstract: In one embodiment, a magnetron assembly comprises a plurality of magnets and a yoke configured to hold the plurality of magnets in at least four independent linear arrays. The plurality of magnets is arranged in the yoke so as to form a pattern comprising an outer portion and an inner portion. The outer portion substantially surrounds the perimeter of the inner portion. The magnets used to form the outer portion have a first polarity and the magnets used to form the inner portion having a second polarity. The outer portion of the pattern comprises a pair of elongated sections that are substantially parallel to one another. The outer portion of the pattern comprises a pair of turnaround sections, wherein each turnaround section substantially spans respective ends of the pair of elongated sections and wherein each turnaround section comprises a plurality of magnets having the first polarity. Other embodiments are described.
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公开(公告)号：US09406487B2
公开(公告)日：2016-08-02
申请号：US14138833
申请日：2013-12-23
Applicant: Sputtering Components, Inc.
Inventor： Daniel Theodore Crowley , Patrick Lawrence Morse , William A. Meredith, Jr. , John Robert German , Michelle Lynn Neal
CPC classification number: H01J37/3405 , H01J37/3417 , H01J37/3438 , H01J37/3444 , H01J37/345
Abstract: One embodiment is directed to a plasma source comprising a body in which a cavity is formed and at least two self-contained magnetron assemblies disposed within the cavity. The magnetron assemblies are mutually electrically isolated from each other and from the body. In one implementation of such an embodiment, the self-contained magnetron assemblies comprise closed-drift magnetron assemblies. Other embodiments are disclosed.
Abstract translation: 一个实施例涉及一种等离子体源，包括其中形成空腔的主体和设置在空腔内的至少两个独立的磁控管组件。 磁控管组件彼此电气隔离并与主体相互隔离。 在这种实施例的一个实现中，独立的磁控管组件包括闭合漂移磁控管组件。 公开了其他实施例。
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公开(公告)号：US09312108B2
公开(公告)日：2016-04-12
申请号：US14263250
申请日：2014-04-28
Applicant: Sputtering Components, Inc.
Inventor： Daniel Theodore Crowley , Patrick Lawrence Morse , John Robert German , William A. Meredith, Jr.
CPC classification number: H01J37/3455 , C23C14/35 , C23C14/52 , H01J37/34 , H01J37/3444 , H01J37/345 , H01J37/3479
Abstract: A magnetron assembly for a rotary target cathode comprises an elongated support structure, a magnet bar structure movably positioned below the support structure, and a plurality of drive modules coupled to the support structure. The drive modules each include a motorized actuation mechanism operatively coupled to the magnet bar structure. A controller and battery module is coupled to the support structure and is in operative communication with the drive modules. The controller and battery module includes an electronic controller and at least one rechargeable battery. The battery is configured to energize each motorized actuation mechanism and the electronic controller. One or more power generation modules is coupled to the support structure and in electrical communication with the battery, such that electrical energy output from the power generation modules recharges the battery.
Abstract translation: 用于旋转靶阴极的磁控管组件包括细长的支撑结构，可移动地定位在支撑结构下方的磁棒结构以及耦合到支撑结构的多个驱动模块。 驱动模块各自包括可操作地联接到磁棒结构的电动致动机构。 控制器和电池模块耦合到支撑结构并与驱动模块进行操作性通信。 控制器和电池模块包括电子控制器和至少一个可充电电池。 电池被配置成为每个电动致动机构和电子控制器通电。 一个或多个发电模块耦合到支撑结构并与电池电连通，使得从发电模块输出的电能为电池充电。
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