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公开(公告)号：US20190057848A1
公开(公告)日：2019-02-21
申请号：US15678962
申请日：2017-08-16
Applicant: Sputtering Components, Inc.
Inventor： Patrick Lawrence Morse , Daniel Theodore Crowley
Abstract: A magnet bar assembly for a rotary target cathode comprises a support structure, a magnet bar structure movably attached to the support structure and including a plurality of magnets, and a positioning mechanism operatively coupled to the support structure and the magnet bar structure. The positioning mechanism is configured to move the magnet bar structure between a retracted position and a deployed position while inside a magnetic target material cylinder. The retracted position substantially reduces a magnetic force between the magnets and a magnetic target material of a target cylinder when the magnet bar assembly is inserted into the target cylinder or removed from the target cylinder. The deployed position substantially increases the magnetic force between the magnets and the magnetic target material when the magnet bar assembly is in the target cylinder, and allows a magnetic field from the magnet bar structure to penetrate through the magnetic target material.
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公开(公告)号：US20140246312A1
公开(公告)日：2014-09-04
申请号：US14263250
申请日：2014-04-28
Applicant: Sputtering Components, Inc.
Inventor： Daniel Theodore Crowley , Patrick Lawrence Morse , John Robert German , William A. Meredith, JR.
CPC classification number: H01J37/3455 , C23C14/35 , C23C14/52 , H01J37/34 , H01J37/3444 , H01J37/345 , H01J37/3479
Abstract: A magnetron assembly for a rotary target cathode comprises an elongated support structure, a magnet bar structure movably positioned below the support structure, and a plurality of drive modules coupled to the support structure. The drive modules each include a motorized actuation mechanism operatively coupled to the magnet bar structure. A controller and battery module is coupled to the support structure and is in operative communication with the drive modules. The controller and battery module includes an electronic controller and at least one rechargeable battery. The battery is configured to energize each motorized actuation mechanism and the electronic controller. One or more power generation modules is coupled to the support structure and in electrical communication with the battery, such that electrical energy output from the power generation modules recharges the battery.
Abstract translation: 用于旋转靶阴极的磁控管组件包括细长的支撑结构，可移动地定位在支撑结构下方的磁棒结构以及耦合到支撑结构的多个驱动模块。 驱动模块各自包括可操作地联接到磁棒结构的电动致动机构。 控制器和电池模块耦合到支撑结构并与驱动模块进行操作性通信。 控制器和电池模块包括电子控制器和至少一个可充电电池。 电池被配置成为每个电动致动机构和电子控制器通电。 一个或多个发电模块耦合到支撑结构并与电池电连通，使得从发电模块输出的电能为电池充电。
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公开(公告)号：US20140246310A1
公开(公告)日：2014-09-04
申请号：US14019877
申请日：2013-09-06
Applicant: Sputtering Components, Inc.
Inventor： Daniel Theodore Crowley , Patrick Lawrence Morse , John Robert German
IPC: C23C14/35
CPC classification number: H01J37/3455 , H01J37/345 , H01J37/347 , H01J37/3476 , H01J37/3479
Abstract: A magnetron assembly for a rotary target cathode comprises a rigid support structure, a magnet bar structure movably attached to the rigid support structure, and at least one actuation mechanism coupled to the rigid support structure and configured to change a distance of the magnet bar structure from a surface of a rotatable target cylinder. The magnetron assembly also includes a position indicating mechanism operative to measure a position of the magnet bar structure relative to the surface of the rotatable target cylinder. A communications device is configured to receive command signals from outside of the magnetron assembly and transmit information signals to outside of the magnetron assembly.
Abstract translation: 用于旋转目标阴极的磁控管组件包括刚性支撑结构，可移动地附接到刚性支撑结构的磁棒结构，以及耦合到刚性支撑结构并被配置为改变磁棒结构与其之间的距离的至少一个致动机构 可旋转目标气缸的表面。 磁控管组件还包括位置指示机构，其可操作以测量磁棒结构相对于可旋转目标气缸的表面的位置。 通信设备被配置为从磁控管组件的外部接收命令信号，并将信息信号发送到磁控管组件的外部。
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公开(公告)号：USRE46599E1
公开(公告)日：2017-11-07
申请号：US15365512
申请日：2016-11-30
Applicant: SPUTTERING COMPONENTS, INC.
Inventor： Daniel Theodore Crowley , William A. Meredith, Jr.
CPC classification number: C23C14/35 , C23C14/354 , H01J37/3405 , H01J37/342 , H01J37/345 , H01J37/3452 , H01J37/347 , H01J37/3482
Abstract: In one embodiment, a magnetron assembly comprises a plurality of magnets and a yoke configured to hold the plurality of magnets in at least four independent linear arrays. The plurality of magnets is arranged in the yoke so as to form a pattern comprising an outer portion and an inner portion. The outer portion substantially surrounds the perimeter of the inner portion. The magnets used to form the outer portion have a first polarity and the magnets used to form the inner portion having a second polarity. The outer portion of the pattern comprises a pair of elongated sections that are substantially parallel to one another. The outer portion of the pattern comprises a pair of turnaround sections, wherein each turnaround section substantially spans respective ends of the pair of elongated sections and wherein each turnaround section comprises a plurality of magnets having the first polarity. Other embodiments are described.
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公开(公告)号：US09406487B2
公开(公告)日：2016-08-02
申请号：US14138833
申请日：2013-12-23
Applicant: Sputtering Components, Inc.
Inventor： Daniel Theodore Crowley , Patrick Lawrence Morse , William A. Meredith, Jr. , John Robert German , Michelle Lynn Neal
CPC classification number: H01J37/3405 , H01J37/3417 , H01J37/3438 , H01J37/3444 , H01J37/345
Abstract: One embodiment is directed to a plasma source comprising a body in which a cavity is formed and at least two self-contained magnetron assemblies disposed within the cavity. The magnetron assemblies are mutually electrically isolated from each other and from the body. In one implementation of such an embodiment, the self-contained magnetron assemblies comprise closed-drift magnetron assemblies. Other embodiments are disclosed.
Abstract translation: 一个实施例涉及一种等离子体源，包括其中形成空腔的主体和设置在空腔内的至少两个独立的磁控管组件。 磁控管组件彼此电气隔离并与主体相互隔离。 在这种实施例的一个实现中，独立的磁控管组件包括闭合漂移磁控管组件。 公开了其他实施例。
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Patent Agency Ranking
公开(公告)号：US09312108B2
公开(公告)日：2016-04-12
申请号：US14263250
申请日：2014-04-28
Applicant: Sputtering Components, Inc.
Inventor： Daniel Theodore Crowley , Patrick Lawrence Morse , John Robert German , William A. Meredith, Jr.
CPC classification number: H01J37/3455 , C23C14/35 , C23C14/52 , H01J37/34 , H01J37/3444 , H01J37/345 , H01J37/3479
Abstract: A magnetron assembly for a rotary target cathode comprises an elongated support structure, a magnet bar structure movably positioned below the support structure, and a plurality of drive modules coupled to the support structure. The drive modules each include a motorized actuation mechanism operatively coupled to the magnet bar structure. A controller and battery module is coupled to the support structure and is in operative communication with the drive modules. The controller and battery module includes an electronic controller and at least one rechargeable battery. The battery is configured to energize each motorized actuation mechanism and the electronic controller. One or more power generation modules is coupled to the support structure and in electrical communication with the battery, such that electrical energy output from the power generation modules recharges the battery.
Abstract translation: 用于旋转靶阴极的磁控管组件包括细长的支撑结构，可移动地定位在支撑结构下方的磁棒结构以及耦合到支撑结构的多个驱动模块。 驱动模块各自包括可操作地联接到磁棒结构的电动致动机构。 控制器和电池模块耦合到支撑结构并与驱动模块进行操作性通信。 控制器和电池模块包括电子控制器和至少一个可充电电池。 电池被配置成为每个电动致动机构和电子控制器通电。 一个或多个发电模块耦合到支撑结构并与电池电连通，使得从发电模块输出的电能为电池充电。
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公开(公告)号：US20250054728A1
公开(公告)日：2025-02-13
申请号：US18366437
申请日：2023-08-07
Inventor： Ken Nauman , Masahiro Watanabe , Sarah Williams , Michael S. Thornton , Michael Meyer
Abstract: An apparatus comprises a vacuum chamber configured to produce a substantially atmospheric vacuum environment for plasma processing; a radio frequency (RF) power supply located outside of the vacuum chamber; an RF matching network operatively coupled to the RF power supply; and a plurality of electrodes mounted within the vacuum chamber, the plurality of electrodes configured to receive RF power signals from the RF power supply through the RF matching network. The RF power signals are simultaneously delivered to the plurality of electrodes during a sputtering operation. The plurality of electrodes and a set of electrical components are operative to manage the inductive and capacitive reactance for coupling the RF power signals to provide more desirable plasma coupling during the sputtering operation.
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公开(公告)号：US20170278685A1
公开(公告)日：2017-09-28
申请号：US15507207
申请日：2015-08-28
Applicant: Sputtering Components, Inc.
Inventor： Daniel Theodore Crowley , Patrick Lawrence Morse
IPC: H01J37/34
Abstract: A rotary sputtering cathode assembly is provided that comprises a rotatable target cylinder having a first end and an opposing second end. A first power transfer apparatus is configured to carry radio frequency power to the first end of the target cylinder, and a second power transfer apparatus is configured to carry radio frequency power to the second end of the target cylinder. Radio frequency power signals are simultaneously delivered to both of the first and second ends of the target cylinder during a sputtering operation.
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公开(公告)号：US20160064191A1
公开(公告)日：2016-03-03
申请号：US14939759
申请日：2015-11-12
Applicant: Sputtering Components, Inc.
Inventor： Patrick Lawrence Morse
CPC classification number: H01J37/32055 , C23C14/3485 , C23C14/35 , H01J37/32027 , H01J37/32146 , H01J37/3405 , H05H1/24 , H05H1/50 , H05H2001/4682
Abstract: One embodiment is directed to an apparatus including a plasma source and operation electronics coupled to the plasma source. The plasma source includes at least two electrodes configured to generate plasma. The operation electronics are configured to generate plasma with the at least two electrodes and apply an ion flux modification bias to the at least two electrodes.
Abstract translation: 一个实施例涉及一种包括等离子体源和耦合到等离子体源的操作电子装置的装置。 等离子体源包括构造成产生等离子体的至少两个电极。 操作电子设备被配置为利用至少两个电极产生等离子体，并且对至少两个电极施加离子通量修正偏压。
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公开(公告)号：US20140061029A1
公开(公告)日：2014-03-06
申请号：US14016693
申请日：2013-09-03
Applicant: Sputtering Components, Inc.
Inventor： Patrick Lawrence Morse
IPC: C23C14/35
CPC classification number: C23C14/35 , H01J37/3405 , H01J37/342 , H01J37/345 , H01J37/3452
Abstract: One embodiment is directed to a magnetron assembly comprising a plurality of magnets, and a yoke configured to hold the plurality of magnets in at least four straight, parallel, independent linear arrays. The plurality of magnets is arranged in the yoke so as to form a pattern comprising an outer portion and an inner portion, wherein the outer portion substantially surrounds the perimeter of the inner portion. The end portions of the linear array comprise a pair of turnaround sections, wherein each turnaround section substantially spans respective ends of the pair of elongated sections of the outer portion. The magnets in each turnaround section are arranged to form at least two or more different curves in the magnetic field that are offset from each along the target rotation axis.
Abstract translation: 一个实施例涉及包括多个磁体的磁控管组件，以及被配置为将多个磁体保持在至少四个直的，平行的独立线性阵列中的磁轭。 多个磁体布置在磁轭中以形成包括外部部分和内部部分的图案，其中外部部分基本上围绕内部部分的周边。 线性阵列的端部包括一对转向部分，其中每个转向部分基本上跨过外部部分的一对细长部分的相应端部。 每个转向部分中的磁体被布置成在磁场中形成至少两个或更多个沿着目标旋转轴线偏移的不同曲线。
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