公开(公告)号：US20150001076A1

公开(公告)日：2015-01-01

申请号：US14318321

申请日：2014-06-27

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Fabrizio Porro ,  Valeria Casuscelli ,  Francesco Foncellino ,  Giovanna Salzillo ,  Luigi Giuseppe Occhipinti

IPC: G01N27/26 ,  G01N33/00

CPC classification number: G01N27/26 ,  G01N27/4045 ,  G01N33/0027

Abstract: It is described an integrated gas sensor device comprising a silicon substrate and an oxide layer on the silicon substrate, as well as a working electrode, a counter electrode and a reference electrode, on the oxide layer, the working electrode and the counter electrode having respective active area exposed to an environmental air through at least a plurality of first openings and a plurality of second openings in the oxide layer in correspondence of the working electrode and of the counter electrode, further comprising an electrolyte layer portion and a hydrogel layer portion on the electrolyte layer portion, the electrolyte and hydrogel layer portions having a same size, suitable to cover at least the working, counter and reference electrodes, the hydrogel layer portion acting as a “quasi solid state” water reservoir.

Abstract translation: 描述了一种集成气体传感器装置，其包括在硅衬底上的硅衬底和氧化物层，以及在氧化物层上的工作电极，对电极和参考电极，工作电极和对电极具有相应的 活性区域通过工作电极和对电极的对应于氧化物层中的至少多个第一开口和多个第二开口暴露于环境空气，还包括电解质层部分和水凝胶层部分 电解质层部分，电解质和水凝胶层部分具有相同的尺寸，适合于至少覆盖工作电极，反作用电极和参比电极，水凝胶层部分用作“准固态”储水器。

公开(公告)号：US09746439B2

公开(公告)日：2017-08-29

申请号：US14318321

申请日：2014-06-27

Applicant: STMicroelectronics S.r.l.

Inventor： Fabrizio Porro ,  Valeria Casuscelli ,  Francesco Foncellino ,  Giovanna Salzillo ,  Luigi Giuseppe Occhipinti

IPC: G01N27/00 ,  G01N27/26 ,  G01N27/404 ,  G01N33/00

CPC classification number: G01N27/26 ,  G01N27/4045 ,  G01N33/0027

Abstract: It is described an integrated gas sensor device comprising a silicon substrate and an oxide layer on the silicon substrate, as well as a working electrode, a counter electrode and a reference electrode, on the oxide layer, the working electrode and the counter electrode having respective active area exposed to an environmental air through at least a plurality of first openings and a plurality of second openings in the oxide layer in correspondence of the working electrode and of the counter electrode, further comprising an electrolyte layer portion and a hydrogel layer portion on the electrolyte layer portion, the electrolyte and hydrogel layer portions having a same size, suitable to cover at least the working, counter and reference electrodes, the hydrogel layer portion acting as a “quasi solid state” water reservoir.

公开(公告)号：US10696597B2

公开(公告)日：2020-06-30

申请号：US15192648

申请日：2016-06-24

Applicant: STMicroelectronics S.R.L.

Inventor： Angela Cimmino ,  Giovanna Salzillo ,  Valeria Casuscelli ,  Andrea Di Matteo

IPC: C04B35/49 ,  C04B35/622 ,  C04B35/624 ,  C04B35/626 ,  C04B35/64 ,  C04B35/468 ,  C09D1/00 ,  C04B35/634 ,  C04B35/632 ,  C04B35/465 ,  C09D7/61 ,  C09D5/03

Abstract: The present disclosure relates to a precursor solution for the preparation of a ceramic of the BZT-αBXT type, where X is selected from Ca, Sn, Mn, and Nb, and α is a molar fraction selected in the range between 0.10 and 0.90, said solution comprising: 1) at least one barium precursor compound; 2) a precursor compound selected from the group consisting of at least one calcium compound, at least one tin compound, at least one manganese compound, and at least one niobium compound; 3) at least one anhydrous precursor compound of zirconium; 4) at least one anhydrous precursor compound of titanium; 5) a solvent selected from the group consisting of a polyol and mixtures of a polyol and a secondary solvent selected from the group consisting of alcohols, carboxylic acids, esters, ketones, ethers, and mixtures thereof; and 6) a chelating agent, as well as method of using the same.

公开(公告)号：US10186654B2

公开(公告)日：2019-01-22

申请号：US15163230

申请日：2016-05-24

Applicant: STMicroelectronics S.r.l.

Inventor： Maria Fortuna Bevilacqua ,  Flavio Francesco Villa ,  Rossana Scaldaferri ,  Valeria Casuscelli ,  Andrea Di Matteo ,  Dino Faralli

IPC: H01L41/09 ,  H01L41/053 ,  H01L41/22 ,  H01L41/113 ,  H01L41/047 ,  H02N2/18 ,  H01L41/187 ,  H01L41/25 ,  H01L41/29 ,  H01L41/332

Abstract: A MEMS piezoelectric device includes a monolithic semiconductor body having first and second main surfaces extending parallel to a horizontal plane formed by first and second horizontal axes. A housing cavity is arranged within the monolithic semiconductor body. A membrane is suspended above the housing cavity at the first main surface. A piezoelectric material layer is arranged above a first surface of the membrane with a proof mass coupled to a second surface, opposite to the first surface, along the vertical axis. An electrode arrangement is provided in contact with the piezoelectric material layer. The proof mass causes deformation of the piezoelectric material layer in response to environmental mechanical vibrations. The proof mass is coupled to the membrane by a connection element arranged, in a central position, between the membrane and the proof mass in the direction of the vertical axis.

公开(公告)号：US20170186940A1

公开(公告)日：2017-06-29

申请号：US15163230

申请日：2016-05-24

Applicant: STMicroelectronics S.r.l.

Inventor： Maria Fortuna Bevilacqua ,  Flavio Francesco Villa ,  Rossana Scaldaferri ,  Valeria Casuscelli ,  Andrea Di Matteo ,  Dino Faralli

IPC: H01L41/113 ,  H01L41/053 ,  H01L41/332 ,  H01L41/25 ,  H01L41/29 ,  H01L41/047 ,  H01L41/187

CPC classification number: H01L41/1138 ,  H01L41/047 ,  H01L41/053 ,  H01L41/1134 ,  H01L41/1876 ,  H01L41/22 ,  H01L41/25 ,  H01L41/29 ,  H01L41/332 ,  H02N2/186

Abstract: A MEMS piezoelectric device includes a monolithic semiconductor body having first and second main surfaces extending parallel to a horizontal plane formed by first and second horizontal axes. A housing cavity is arranged within the monolithic semiconductor body. A membrane is suspended above the housing cavity at the first main surface. A piezoelectric material layer is arranged above a first surface of the membrane with a proof mass coupled to a second surface, opposite to the first surface, along the vertical axis. An electrode arrangement is provided in contact with the piezoelectric material layer. The proof mass causes deformation of the piezoelectric material layer in response to environmental mechanical vibrations. The proof mass is coupled to the membrane by a connection element arranged, in a central position, between the membrane and the proof mass in the direction of the vertical axis.

公开(公告)号：US20170152186A1

公开(公告)日：2017-06-01

申请号：US15192648

申请日：2016-06-24

Applicant: STMicroelectronics S.R.L.

Inventor： Angela Cimmino ,  Giovanna Salzillo ,  Valeria Casuscelli ,  Andrea Di Matteo

IPC: C04B35/468 ,  B05D3/00 ,  C04B35/64 ,  C09D1/00 ,  C04B35/622

CPC classification number: C04B35/4682 ,  C04B35/465 ,  C04B35/49 ,  C04B35/62222 ,  C04B35/624 ,  C04B35/6264 ,  C04B35/62675 ,  C04B35/62685 ,  C04B35/6325 ,  C04B35/63444 ,  C04B35/63488 ,  C04B2235/3208 ,  C04B2235/3215 ,  C04B2235/3232 ,  C04B2235/3234 ,  C04B2235/3244 ,  C04B2235/3251 ,  C04B2235/3262 ,  C04B2235/3293 ,  C04B2235/441 ,  C04B2235/449 ,  C04B2235/72 ,  C04B2235/768 ,  C04B2235/81 ,  C09D1/00 ,  C09D5/03 ,  C09D7/61

Abstract: The present disclosure relates to a precursor solution for the preparation of a ceramic of the BZT-αBXT type, where X is selected from Ca, Sn, Mn, and Nb, and a is a molar fraction selected in the range between 0.10 and 0.90, said solution comprising: 1) at least one barium precursor compound; 2) a precursor compound selected from the group consisting of at least one calcium compound, at least one tin compound, at least one manganese compound, and at least one niobium compound; 3) at least one anhydrous precursor compound of zirconium; 4) at least one anhydrous precursor compound of titanium; 5) a solvent selected from the group consisting of a polyol and mixtures of a polyol and a secondary solvent selected from the group consisting of alcohols, carboxylic acids, esters, ketones, ethers, and mixtures thereof; and 6) a chelating agent, as well as method of using the same.

公开(公告)号：US20140251805A1

公开(公告)日：2014-09-11

申请号：US14200576

申请日：2014-03-07

Applicant: STMicroelectronics S.r.l.

Inventor： Giovanna Salzillo ,  Rossana Scaldaferri ,  Valeria Casuscelli ,  Luigi Giuseppe Occhipinti

IPC: G01N27/30

CPC classification number: G01N27/302 ,  G01N27/3335 ,  G01N27/4167

Abstract: The present disclosure relates to a sensor for detecting hydrogen ions in an aqueous solution comprising a support, a reference electrode, a working electrode and a counter electrode supported by said support, the reference electrode being made of a material comprising silver and silver chloride, the counter electrode being made of a conductive material. The working electrode comprises a substrate and a layer made of an inherently electrically conductive polymer of the polythiophene or polyaniline (PANI) or polypyrrole class.

Abstract translation: 本发明涉及一种用于检测水溶液中氢离子的传感器，包括载体，参比电极，工作电极和由所述载体支撑的对电极，参比电极由包含银和氯化银的材料制成， 对电极由导电材料制成。 工作电极包括基底和由聚噻吩或聚苯胺（PANI）或聚吡咯类的固有导电聚合物制成的层。

公开(公告)号：US20140084519A1

公开(公告)日：2014-03-27

申请号：US14030888

申请日：2013-09-18

Applicant: Fondazione Istituto Italiano di Tecnologia ,  STMicroelectronics S.r.l.

Inventor： Fabrizio Porro ,  Antonio Scognamiglio ,  Raffaele Vecchione ,  Valeria Casuscelli ,  Andrea Di Matteo ,  Luigi Giuseppe Occhipinti ,  Paolo Netti

IPC: B29C59/02 ,  B29C59/00

CPC classification number: B29C59/02 ,  B29C35/0888 ,  B29C37/0003 ,  B29C37/0053 ,  B29C59/002 ,  B29C59/14 ,  B29C2035/0827 ,  B29C2059/145 ,  B29K2995/0093 ,  G03F7/0002

Abstract: The present disclosure relates to mold components and imprint lithography techniques applied on the basis of organic mold materials in order to form polymer microstructure elements. It has been recognized that adapting surface characteristics of at least one mold component may significantly enhance performance of the lithography process, in particular with respect to suppressing residual polymer material, which in conventional strategies may have to be removed on the basis of an additional etch process.

Abstract translation: 本公开涉及基于有机模具材料应用的模具部件和压印光刻技术，以形成聚合物微结构元件。 已经认识到，适应至少一个模具部件的表面特性可以显着提高光刻工艺的性能，特别是关于抑制残余聚合物材料的性能，其在常规策略中可能必须基于额外的蚀刻工艺去除 。

公开(公告)号：US11417827B2

公开(公告)日：2022-08-16

申请号：US16215821

申请日：2018-12-11

Applicant: STMicroelectronics S.r.l.

Inventor： Maria Fortuna Bevilacqua ,  Flavio Francesco Villa ,  Rossana Scaldaferri ,  Valeria Casuscelli ,  Andrea Di Matteo ,  Dino Faralli

IPC: H01L41/00 ,  H01L41/113 ,  H01L41/047 ,  H01L41/22 ,  H02N2/18 ,  H01L41/053 ,  H01L41/187 ,  H01L41/25 ,  H01L41/29 ,  H01L41/332

Abstract: A MEMS piezoelectric device includes a monolithic semiconductor body having first and second main surfaces extending parallel to a horizontal plane formed by first and second horizontal axes. A housing cavity is arranged within the monolithic semiconductor body. A membrane is suspended above the housing cavity at the first main surface. A piezoelectric material layer is arranged above a first surface of the membrane with a proof mass coupled to a second surface, opposite to the first surface, along the vertical axis. An electrode arrangement is provided in contact with the piezoelectric material layer. The proof mass causes deformation of the piezoelectric material layer in response to environmental mechanical vibrations. The proof mass is coupled to the membrane by a connection element arranged, in a central position, between the membrane and the proof mass in the direction of the vertical axis.

公开(公告)号：US20170322170A1

公开(公告)日：2017-11-09

申请号：US15658171

申请日：2017-07-24

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Fabrizio Porro ,  Valeria Casuscelli ,  Francesco Foncellino ,  Giovanna Salzillo ,  Luigi Giuseppe Occhipinti

IPC: G01N27/26 ,  G01N33/00 ,  G01N27/404

CPC classification number: G01N27/26 ,  G01N27/4045 ,  G01N33/0027

Abstract: It is described an integrated gas sensor device comprising a silicon substrate and an oxide layer on the silicon substrate, as well as a working electrode, a counter electrode and a reference electrode, on the oxide layer, the working electrode and the counter electrode having respective active area exposed to an environmental air through at least a plurality of first openings and a plurality of second openings in the oxide layer in correspondence of the working electrode and of the counter electrode, further comprising an electrolyte layer portion and a hydrogel layer portion on the electrolyte layer portion, the electrolyte and hydrogel layer portions having a same size, suitable to cover at least the working, counter and reference electrodes, the hydrogel layer portion acting as a “quasi solid state” water reservoir.