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    Polyelectrolyte nanolayers as diffusion barriers in semiconductor devices
    2.
    发明申请
    Polyelectrolyte nanolayers as diffusion barriers in semiconductor devices 有权
    聚电解质纳米粒子作为半导体器件中的扩散阻挡层

    公开(公告)号：US20050001317A1

    公开(公告)日：2005-01-06

    申请号：US10866005

    申请日：2004-06-11

    申请人： Ramanath Ganapathiraman ,  Ravindra Kane ,  Gopal Pethuraja

    发明人： Ramanath Ganapathiraman ,  Ravindra Kane ,  Gopal Pethuraja

    IPC分类号： H01L21/288 ,  H01L21/312 ,  H01L21/3205 ,  H01L21/768 ,  H01L23/532 ,  H01L21/20

    CPC分类号： H01L21/02118 ,  H01L21/02282 ,  H01L21/288 ,  H01L21/312 ,  H01L21/32051 ,  H01L21/76829 ,  H01L21/76832 ,  H01L21/76841 ,  H01L23/53238 ,  H01L23/5329 ,  H01L23/53295 ,  H01L2221/1078 ,  H01L2924/0002 ,  H01L2924/00

    摘要： The present invention provides a diffusion barrier useful in an integrated circuit, which serves to prevent the migration of material from a conductive layer to the underlying substrate and further provides improved adhesion of the conductive layer to the substrate. The diffusion barrier comprises a polymer which is a polyelectrolyte, having both cationic and anionic groups along its backbone chain. Preferred polyelectolyte barriers are polyethyleneimine (PEI) and polyacrylic acid (PAA). Other polyelectrolytes may be used, such as those that contain SH— OH— aromatic groups, or those that can interact with either the metal or the adjacent layers via covalent interactions and cross-linking (e.g., POMA, PSMA). The polymeric layer may be applied in two coatings, so that the amine side chains contact the dielectric (e.g. silicon) substrate and the acidic groups are adjacent to the overlying metallic interconnect (e.g. copper). The diffusion barrier may be made thin, preferably less than 5 nm thick, which is advantageous in devices having high aspect ratios.

    摘要翻译： 本发明提供了在集成电路中有用的扩散阻挡层，其用于防止材料从导电层迁移到下面的衬底，并进一步提供导电层与衬底的改善的粘合性。 扩散阻挡层包括聚合物，其是聚电解质，沿其主链具有阳离子和阴离子基团。 优选的聚电解质屏障是聚乙烯亚胺（PEI）和聚丙烯酸（PAA）。 可以使用其它聚电解质，例如含有SH-OH-芳族基团的聚电解质，或者可以通过共价相互作用和交联（例如，POMA，PSMA）与金属或相邻层相互作用的那些。 聚合物层可以施加在两个涂层中，使得胺侧链接触电介质（例如硅）衬底，并且酸性基团与上覆的金属互连（例如铜）相邻。 可以使扩散阻挡层变薄，优选小于5nm厚，这在具有高纵横比的器件中是有利的。

    Imprinting a substrate for separation of a target molecule from a fluid medium
    5.
    发明申请
    Imprinting a substrate for separation of a target molecule from a fluid medium 审中-公开
    印制用于从流体介质分离靶分子的底物

    公开(公告)号：US20070128423A1

    公开(公告)日：2007-06-07

    申请号：US10524509

    申请日：2003-08-13

    申请人： Georges Belfort ,  Mina Han ,  Ravindra Kane

    发明人： Georges Belfort ,  Mina Han ,  Ravindra Kane

    IPC分类号： C08F2/46 ,  B05D3/02 ,  B32B3/26

    CPC分类号： B01J20/30 ,  B01J20/28035 ,  B01J20/3057 ,  B01J20/3204 ,  B01J20/321 ,  B01J20/3212 ,  B01J20/3225 ,  B01J20/3248 ,  B01J20/3251 ,  B01J20/3255 ,  B01J20/3272 ,  B01J20/3274 ,  B01J20/3282 ,  G01N33/543 ,  G01N2600/00 ,  Y10T428/249953

    摘要： The present invention is directed to a method of producing a substrate suitable for separation of a target molecule from a fluid medium. This method includes providing an emulsion comprising a water phase in an oil phase, where the oil phase contains a polymerizable monomer and the water phase contains the target molecule. The substrate, having pores extending from one side of the substrate to another side of the substrate, is coated with the emulsion, and the monomer in the emulsion coated substrate is then polymerized. The water and target molecule are removed from the polymerized, emulsion coated substrate. As a result, the substrate is imprinted with the target molecule and, therefore, is suitable for separation of the target molecule from a fluid medium. The resulting article and its use are also disclosed.

    摘要翻译： 本发明涉及一种制备适合于从流体介质中分离靶分子的底物的方法。 该方法包括提供在油相中含有水相的乳液，其中油相含有可聚合单体，水相含有靶分子。 具有从衬底的一侧延伸到衬底的另一侧的孔的衬底涂覆有乳液，然后将乳液涂覆的衬底中的单体聚合。 水和目标分子从聚合的乳液涂覆的基底上去除。 结果，底物被靶分子印迹，因此适用于从流体介质中分离靶分子。 还公开了所得物品及其用途。