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公开(公告)号：US10048418B2
公开(公告)日：2018-08-14
申请号：US14846471
申请日：2015-09-04
发明人： Sung-Won Cho , Jung-Ha Son , Su-Bin Bae , Yun-Jong Yeo , Joo-Hyung Lee
IPC分类号： G02B5/30 , C09K13/00 , C23F4/00 , H01L21/311 , H01L21/308 , H01L21/3105 , H01L21/3065 , H01L21/306 , B81C1/00 , G02F1/1335 , G03F7/004
摘要： A method of manufacturing a polarizer includes forming a first layer on a base substrate, forming a first partition wall layer on the first layer, forming a second partition wall layer on the first partition wall, forming a plurality of first partition wall patterns and a plurality of second partition walls disposed on the first partition wall patterns by etching the first partition wall and the second partition wall at the same time, forming a block copolymer layer on the first layer on which the plurality of first partition wall patterns are formed, forming a plurality of fine patterns from the block copolymer layer, and patterning the first layer using the fine patterns and the second partition wall patterns as a mask.
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公开(公告)号：US20160138169A1
公开(公告)日：2016-05-19
申请号：US14718127
申请日：2015-05-21
发明人： Jung-Ha SON , Su-Bin Bae , Yu-Gwang Jeong , Lei Xie , Yun-Jong Yeo , Joo-Hyung Lee
IPC分类号： C23F1/02
CPC分类号： G03F7/0002 , C23F1/02 , G02F1/133536 , G02F2001/133548 , G02F2202/36 , H01L21/0337 , H01L21/32139
摘要： A method of forming a fine pattern includes providing a first metal layer on a base substrate, providing a first passivation layer on the first metal layer, providing a mask pattern on the first passivation layer, providing a partitioning wall pattern having a reverse taper shape by etching the first passivation layer, coating a composition having a block copolymer between the partitioning wall patterns adjacent each other, providing a self-aligned pattern by heating the composition, and providing a metal pattern by etching the first metal layer using the self-aligned pattern as a mask.
摘要翻译： 形成精细图案的方法包括在基底基板上提供第一金属层，在第一金属层上提供第一钝化层，在第一钝化层上提供掩模图案，通过以下步骤提供具有倒锥形的分隔壁图案： 蚀刻第一钝化层，在彼此相邻的分隔壁图案之间涂覆具有嵌段共聚物的组合物，通过加热组合物提供自对准图案，以及通过使用自对准图案蚀刻第一金属层来提供金属图案 作为面具。
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3.发明申请公开(公告)号：US20140218644A1
公开(公告)日：2014-08-07
申请号：US14251282
申请日：2014-04-11
发明人： Dae-Cheol KIM , Sung-Ryul Kim , Yun-Jong Yeo , Hong-Kee Chin , Ki-Hun Jeong
IPC分类号： G02F1/1368 , G02F1/1333
CPC分类号： G02F1/1368 , G02F1/13338 , G02F2001/13312 , H01L31/1136 , H01L31/12
摘要： A display device includes an infrared sensing transistor and a visible sensing transistor. The visible sensing transistor includes a semiconductor on a substrate; an ohmic contact on the semiconductor; an etch stopping layer on the ohmic contact; a source electrode and a drain electrode on the etch stopping layer; a passivation layer on the source electrode and the drain electrode; and a gate electrode on the passivation layer. The etch stopping layer may be composed of the same material as the source electrode and the drain electrode. The infrared sensing transistor is similar to the visible sensing transistor except the etch stopping layer is absent.
摘要翻译： 显示装置包括红外感测晶体管和可见感测晶体管。 可见感测晶体管包括在衬底上的半导体; 半导体上的欧姆接触; 在欧姆接触上的蚀刻停止层; 蚀刻停止层上的源电极和漏电极; 源电极和漏电极上的钝化层; 和钝化层上的栅电极。 蚀刻停止层可以由与源电极和漏电极相同的材料构成。 除了不存在蚀刻停止层之外，红外感测晶体管类似于可见感测晶体管。
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公开(公告)号：US09406630B2
公开(公告)日：2016-08-02
申请号：US14579542
申请日：2014-12-22
发明人： Joo-Han Kim , Ki-Yong Song , Dong-Ju Yang , Hee-Joon Kim , Yeo-Geon Yoon , Sung-Hen Cho , Chang-Hoon Kim , Jae-Hong Kim , Yu-Gwang Jeong , Ki-Yeup Lee , Sang-Gab Kim , Yun-Jong Yeo , Shin-Il Choi , Ji-Young Park
IPC分类号： H01L23/00 , G02F1/1362 , H01L27/12
CPC分类号： H01L24/05 , G02F1/136227 , H01L27/12 , H01L27/1214 , H01L27/124 , H01L2224/04042 , H01L2924/14 , H01L2924/1426 , H01L2924/00
摘要： A contact portion of wiring and a method of manufacturing the same are disclosed. A contact portion of wiring according to an embodiment includes: a substrate; a conductive layer disposed on the substrate; an interlayer insulating layer disposed on the conductive layer and having a contact hole; a metal layer disposed on the conductive layer and filling the contact hole; and a transparent electrode disposed on the interlayer insulating layer and connected to the metal layer, wherein the interlayer insulating layer includes a lower insulating layer and an upper insulating layer disposed on the lower insulating layer, the lower insulating layer is undercut at the contact hole, and the metal layer fills in the portion where the lower insulating layer is undercut.
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公开(公告)号：US09365933B2
公开(公告)日：2016-06-14
申请号：US14718127
申请日：2015-05-21
发明人： Jung-Ha Son , Su-Bin Bae , Yu-Gwang Jeong , Lei Xie , Yun-Jong Yeo , Joo-Hyung Lee
IPC分类号： C23F1/02 , H01L21/033 , G03F7/00
CPC分类号： G03F7/0002 , C23F1/02 , G02F1/133536 , G02F2001/133548 , G02F2202/36 , H01L21/0337 , H01L21/32139
摘要： A method of forming a fine pattern includes providing a first metal layer on a base substrate, providing a first passivation layer on the first metal layer, providing a mask pattern on the first passivation layer, providing a partitioning wall pattern having a reverse taper shape by etching the first passivation layer, coating a composition having a block copolymer between the partitioning wall patterns adjacent each other, providing a self-aligned pattern by heating the composition, and providing a metal pattern by etching the first metal layer using the self-aligned pattern as a mask.
摘要翻译： 形成精细图案的方法包括在基底基板上提供第一金属层，在第一金属层上提供第一钝化层，在第一钝化层上提供掩模图案，通过以下步骤提供具有倒锥形的分隔壁图案： 蚀刻第一钝化层，在彼此相邻的分隔壁图案之间涂覆具有嵌段共聚物的组合物，通过加热组合物提供自对准图案，以及通过使用自对准图案蚀刻第一金属层来提供金属图案 作为面具。
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6.发明授权公开(公告)号：US09128341B2
公开(公告)日：2015-09-08
申请号：US14251282
申请日：2014-04-11
发明人： Dae-Cheol Kim , Sung-Ryul Kim , Yun-Jong Yeo , Hong-Kee Chin , Ki-Hun Jeong
IPC分类号： H01L29/04 , G02F1/1368 , H01L31/113 , H01L31/12 , G02F1/1333 , G02F1/133
CPC分类号： G02F1/1368 , G02F1/13338 , G02F2001/13312 , H01L31/1136 , H01L31/12
摘要： A display device includes an infrared sensing transistor and a visible sensing transistor. The visible sensing transistor includes a semiconductor on a substrate; an ohmic contact on the semiconductor; an etch stopping layer on the ohmic contact; a source electrode and a drain electrode on the etch stopping layer; a passivation layer on the source electrode and the drain electrode; and a gate electrode on the passivation layer. The etch stopping layer may be composed of the same material as the source electrode and the drain electrode. The infrared sensing transistor is similar to the visible sensing transistor except the etch stopping layer is absent.
摘要翻译： 显示装置包括红外感测晶体管和可见感测晶体管。 可见感测晶体管包括在衬底上的半导体; 半导体上的欧姆接触; 在欧姆接触上的蚀刻停止层; 蚀刻停止层上的源电极和漏电极; 源电极和漏电极上的钝化层; 和钝化层上的栅电极。 蚀刻停止层可以由与源电极和漏电极相同的材料构成。 除了不存在蚀刻停止层之外，红外感测晶体管类似于可见感测晶体管。
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公开(公告)号：US10151973B2
公开(公告)日：2018-12-11
申请号：US14886673
申请日：2015-10-19
发明人： Yun-Jong Yeo , Jung-Ha Son , Joo-Hyung Lee , Dae-Young Lee
摘要： An imprint lithography method includes disposing a mask layer on a base substrate in first and in second areas, reducing a thickness of the mask layer in the first area, disposing a first planarization layer on the mask layer in the first and second areas, forming a first imprint pattern on the first planarization layer, forming a first planarization layer pattern by etching the first planarization layer using the first imprint pattern, forming a first mask pattern in the first area by etching the mask layer using the first planarization layer pattern, diposing a second planarization layer on the first mask pattern and the mask layer in the first and second areas, forming a second imprint pattern on the second planarization layer, forming a second planarization layer pattern by etching the planarization layer using the second imprint pattern, and forming a second mask pattern in the second area.
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公开(公告)号：US10082924B2
公开(公告)日：2018-09-25
申请号：US15136451
申请日：2016-04-22
发明人： Ji-Hun Kim , Hyun-Min Cho , Yun-Jong Yeo
CPC分类号： G06F3/047 , G06F3/044 , G06F2203/04103 , G06F2203/04111 , G06F2203/04112
摘要： A touch screen panel including a touch electrode disposed on a base substrate, the touch electrode including a plurality of mesh patterns formed by crossing of metal wirings. The mesh patterns include a main electrode pattern and a buffer pattern overlapping the main electrode pattern, the buffer pattern having a thickness greater than 20% of a thickness of the main electrode pattern and less than 30% of a thickness of the main electrode pattern.
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公开(公告)号：US09519182B2
公开(公告)日：2016-12-13
申请号：US14644757
申请日：2015-03-11
发明人： Jung-Ha Son , Joo-Hyung Lee , Yun-Jong Yeo
IPC分类号： G02F1/1335 , G02F1/1343 , G02F1/1368 , G02F1/1362 , G02F1/1341 , H01L27/12
CPC分类号： G02F1/133514 , G02F1/1341 , G02F1/134309 , G02F1/13439 , G02F1/136209 , G02F1/136286 , G02F1/1368 , G02F2001/134372 , G02F2001/136222 , G02F2203/10 , H01L27/124 , H01L27/1259
摘要： A display panel includes a first substrate comprising a plurality of pixel areas, a second substrate facing the first substrate, a liquid crystal layer interposed between the first substrate and the second substrate, a thin film transistor comprising a gate electrode disposed on the first substrate, a semiconductor pattern overlapping with the gate electrode, a source electrode and a drain electrode overlapping with the semiconductor pattern and spaced apart from each other, a plasmonic color filter to which a common voltage is configured to be applied, and comprising a same material as the gate electrode, disposed on a same layer as the gate electrode, and comprising a plurality of holes through which light is configured to be transmitted and a pixel electrode to which a gray scale voltage is configured to be applied, and overlapping with the plasmonic color filter, and electrically connected to the drain electrode.
摘要翻译： 显示面板包括：包括多个像素区域的第一基板;面对第一基板的第二基板;插入在第一基板和第二基板之间的液晶层;薄膜晶体管，包括设置在第一基板上的栅极; 与栅电极重叠的半导体图案，与半导体图案重叠并且彼此间隔开的源电极和漏电极，配置有施加公共电压的等离子体激元滤色器，并且包括与 栅极电极，设置在与栅极电极相同的层上，并且包括多个孔，通过该孔构成透射光;以及像素电极，灰阶电压被配置为施加到其上，并与等离子体激元滤色器重叠 并且电连接到漏电极。
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