MEASURING APPARATUS FOR SEMICONDUCTOR DEVICE AND MEASURING METHOD USING THE SAME

    公开(公告)号:US20240353484A1

    公开(公告)日:2024-10-24

    申请号:US18591091

    申请日:2024-02-29

    IPC分类号: G01R31/28

    CPC分类号: G01R31/2891 G01R31/2893

    摘要: A measuring apparatus for a semiconductor device includes a lower frame that provides a lower measurement space configured for performing a first measurement process, a lower measuring portion in the lower frame and configured to measure the first semiconductor substrate on a lower substrate stage, a lower vibration damping portion configured to offset a first vibration of the lower measuring portion with respect to a ground, an upper frame that provides an upper measurement space configured for performing a second measurement process, an upper measuring portion in the upper frame to measure a second semiconductor substrate=on an upper substrate stage, an upper vibration damping portion configured to offset a second vibration of the upper measuring portion with respect to the ground, and a plurality of support structures that support the upper frame such that the upper frame is spaced apart from the lower frame.

    Vanishing point extraction devices and methods of extracting vanishing point

    公开(公告)号:US11557052B2

    公开(公告)日:2023-01-17

    申请号:US17173803

    申请日:2021-02-11

    发明人: Jinhyuk Choi

    IPC分类号: G06K9/00 G06T7/536 G06V20/56

    摘要: Vanishing point extraction includes obtaining a straight line including a vanishing point of a first image; obtaining a plurality of sample points in the first image based on processing the first image according to an object included in the first image and the straight line including the vanishing point of a first image, such that the plurality of sample points are determined as pixels in the first image having coordinates that overlap with coordinates of pixels of both the straight line and the object included in the first image; obtaining at least one matching point, in a second image, that corresponds to at least one sample point of the plurality of sample points in the first image the second image generated subsequently to the first image being generated; and obtaining a vanishing point of the second image based on the at least one matching point of the second image.