利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

15 条记录 (耗时 0.02 秒)

    Electrostatic chuck
    7.
    发明授权
    Electrostatic chuck 失效
    静电吸盘

    公开(公告)号：US06687113B2

    公开(公告)日：2004-02-03

    申请号：US09840691

    申请日：2001-04-20

    申请人： Shinji Saito ,  Toshihiko Hanamachi ,  Takashi Kayamoto

    发明人： Shinji Saito ,  Toshihiko Hanamachi ,  Takashi Kayamoto

    IPC分类号： B23B3128

    CPC分类号： B23Q3/154 ,  H01L21/6831 ,  H01L21/6833 ,  H02N13/00 ,  Y10T279/23

    摘要： An electrostatic chuck comprising a ceramic chuck body having an adsorption face and an electrode for applying a potential to the adsorption face, the chuck body including a ceramic consisting mainly of MgO. The ceramic that consists mainly of MgO is doped with one or more additives selected from a group including TiC, TiO2, ZrO2, V2O5, Nb2O5, Ta2O5, Co3O4, Cr2O3, and NiO so that its electrical resistivity in a working temperature region ranges from 1×108 to 1×1012 &OHgr;·cm. This electrostatic chuck is highly resistant to a corrosive environment such as fluoride plasma.

    摘要翻译： 一种静电吸盘，包括具有吸附面的陶瓷卡盘体和用于向吸附面施加电位的电极，卡盘主体包括主要由MgO组成的陶瓷。 主要由MgO组成的陶瓷掺杂有选自TiC，TiO2，ZrO2，V2O5，Nb2O5，Ta2O5，Co3O4，Cr2O3和NiO的一种或多种添加剂，使得其在工作温度范围内的电阻率范围为1×10 8至1×10 12Ω·cm。 这种静电卡盘对诸如氟化物等离子体的腐蚀性环境具有很高的抵抗力。

    METHOD OF MANUFACTURING PLATE WITH PASSAGE, PLATE WITH PASSAGE, TEMPERATURE ADJUSTMENT PLATE, COLD PLATE, AND SHOWER PLATE
    8.
    发明申请
    METHOD OF MANUFACTURING PLATE WITH PASSAGE, PLATE WITH PASSAGE, TEMPERATURE ADJUSTMENT PLATE, COLD PLATE, AND SHOWER PLATE 审中-公开
    通向板材，通风板，温度调节板，冷板和淋浴板的制造方法

    公开(公告)号：US20130112383A1

    公开(公告)日：2013-05-09

    申请号：US13808783

    申请日：2011-07-06

    申请人： Toshihiko Hanamachi

    发明人： Toshihiko Hanamachi

    IPC分类号： B23P15/26 ,  F28F3/12

    CPC分类号： B23P15/26 ,  C23C16/45565 ,  C23C16/4586 ,  C23C24/04 ,  F28F3/12 ,  H01L21/67109 ,  Y10T29/4935

    摘要： A plate with a passage and the like capable of shortening a process time than a previous one and of suppressing leakage from or contamination to the passage are provided. The plate with the passage is a plate in which the passage for causing a fluid to circulate therein is formed, and includes a body plate formed of a metal or an alloy and in which a groove serving as the passage is provided, a cover plate that covers the groove, and a deposition layer that is formed such that metal or alloy powder is accelerated with a gas and is sprayed on the body plate and the cover plate in a solid phase, and covers the cover plate.

    摘要翻译： 提供了能够缩短处理时间而不是先前的通路等并且抑制通道的泄漏或污染的板。 具有通道的板形成有用于使流体在其中循环的通道的板，并且包括由金属或合金形成的主体板，其中设置有用作通道的槽，盖板，其中 覆盖凹槽，以及沉积层，其形成为使得金属或合金粉末被气体加速并且以固相的形式喷涂在主体板和盖板上并覆盖盖板。

    Layered ceramic/metallic assembly, and an electrostatic chuck using such an assembly
    9.
    发明授权
    Layered ceramic/metallic assembly, and an electrostatic chuck using such an assembly 失效
    层状陶瓷/金属组件和使用这种组件的静电卡盘

    公开(公告)号：US06535371B1

    公开(公告)日：2003-03-18

    申请号：US09299807

    申请日：1999-04-26

    申请人： Takashi Kayamoto ,  Toshihiko Hanamachi ,  Tadashi Inokuchi ,  Ryusuke Adachi

    发明人： Takashi Kayamoto ,  Toshihiko Hanamachi ,  Tadashi Inokuchi ,  Ryusuke Adachi

    IPC分类号： H02H2300

    CPC分类号： H01L21/67103 ,  H01L21/6833 ,  H01L21/68757 ,  H05B3/143

    摘要： A combination of a ceramic layer essentially consisting of magnesia ceramic material and a metallic layer is proposed for a layered assembly for use in applications such as electrostatic chucks which are subjected to thermal stress. A combination of magnesia ceramic material and ferritic stainless steel is preferred because of the similarities of the thermal expansion coefficients of these materials. When a larger difference in the thermal expansion coefficients exists between the selected combination of materials, a damper layer having an intermediate thermal expansion coefficient may be used so as to accommodate the difference in the thermal expansion of the two layers.

    摘要翻译： 提出了一种基本上由氧化镁陶瓷材料和金属层组成的陶瓷层的组合用于分层组件，用于诸如受到热应力的静电卡盘的应用。 由于这些材料的热膨胀系数的相似性，因此优选氧化镁陶瓷材料和铁素体不锈钢的组合。 当选择的材料组合之间存在较大的热膨胀系数差时，可以使用具有中间热膨胀系数的阻尼层，以适应两层热膨胀的差异。

    Heating apparatus
    10.
    发明授权
    Heating apparatus 失效
    加热装置

    公开(公告)号：US06376808B2

    公开(公告)日：2002-04-23

    申请号：US09847844

    申请日：2001-05-01

    申请人： Toshihiro Tachikawa ,  Toshihiko Hanamachi

    发明人： Toshihiro Tachikawa ,  Toshihiko Hanamachi

    IPC分类号： H05B368

    CPC分类号： H01L21/67103 ,  H05B3/06 ,  H05B3/68

    摘要： A heater plate and a support structure are provided in a chamber. First terminals are arranged on the reverse side of the heater plate. The support structure is provided with second terminals in positions opposite to the first terminals, individually. The first and second terminals are coupled mechanically and electrically to one another by means of springy joint members of an electrically-conductive material. The joint members are removably attached to the first and second terminals. The heater plate can be separated from the support structure by disengaging the joint members from the first or second terminals.

    摘要翻译： 加热板和支撑结构设置在室中。 第一端子布置在加热器板的背面。 支撑结构分别设置有与第一端子相对的位置的第二端子。 第一和第二端子通过导电材料的弹性接头构件彼此机械地和电气地连接。 接合构件可拆卸地附接到第一和第二端子。 通过使联接构件与第一或第二端子脱离，加热板可以与支撑结构分离。