Electrostatic chuck
    4.
    发明授权
    Electrostatic chuck 失效
    静电吸盘

    公开(公告)号:US06687113B2

    公开(公告)日:2004-02-03

    申请号:US09840691

    申请日:2001-04-20

    IPC分类号: B23B3128

    摘要: An electrostatic chuck comprising a ceramic chuck body having an adsorption face and an electrode for applying a potential to the adsorption face, the chuck body including a ceramic consisting mainly of MgO. The ceramic that consists mainly of MgO is doped with one or more additives selected from a group including TiC, TiO2, ZrO2, V2O5, Nb2O5, Ta2O5, Co3O4, Cr2O3, and NiO so that its electrical resistivity in a working temperature region ranges from 1×108 to 1×1012 &OHgr;·cm. This electrostatic chuck is highly resistant to a corrosive environment such as fluoride plasma.

    摘要翻译: 一种静电吸盘,包括具有吸附面的陶瓷卡盘体和用于向吸附面施加电位的电极,卡盘主体包括主要由MgO组成的陶瓷。 主要由MgO组成的陶瓷掺杂有选自TiC,TiO2,ZrO2,V2O5,Nb2O5,Ta2O5,Co3O4,Cr2O3和NiO的一种或多种添加剂,使得其在工作温度范围内的电阻率范围为1×10 8至1×10 12Ω·cm。 这种静电卡盘对诸如氟化物等离子体的腐蚀性环境具有很高的抵抗力。

    Conductive member
    5.
    发明授权
    Conductive member 有权
    导电部件

    公开(公告)号:US09070487B2

    公开(公告)日:2015-06-30

    申请号:US13977968

    申请日:2011-12-26

    CPC分类号: H01B5/02 C23C24/04 H01B1/02

    摘要: A conductive member disposed as a power supply line and the like includes: a first conductive material and a second conductive material, at least one of which includes a conductive material having electrical resistance lower than that of aluminum; and a metal film formed by depositing powder including a metal, which is accelerated together with a gas and sprayed, in a sold state, onto a surface of a butting part, where the first conductive material and the second conductive material are butted against each other.

    摘要翻译: 设置为电源线等的导电部件包括:第一导电材料和第二导电材料,其至少一个包括具有比铝的电阻低的导电材料; 以及金属膜,其通过沉积包括金属的粉末形成,所述金属与气体一起被加速并以销售状态喷射到对接部分的表面上,其中所述第一导电材料和所述第二导电材料彼此抵接 。

    CONDUCTIVE MEMBER
    6.
    发明申请
    CONDUCTIVE MEMBER 有权
    导电会员

    公开(公告)号:US20130292152A1

    公开(公告)日:2013-11-07

    申请号:US13977968

    申请日:2011-12-26

    IPC分类号: H01B5/02

    CPC分类号: H01B5/02 C23C24/04 H01B1/02

    摘要: A conductive member disposed as a power supply line and the like includes: a first conductive material and a second conductive material, at least one of which includes a conductive material having electrical resistance lower than that of aluminum; and a metal film formed by depositing powder including a metal, which is accelerated together with a gas and sprayed, in a sold state, onto a surface of a butting part, where the first conductive material and the second conductive material are butted against each other.

    摘要翻译: 设置为电源线等的导电部件包括:第一导电材料和第二导电材料,其至少一个包括具有比铝的电阻低的导电材料; 以及金属膜,其通过沉积包括金属的粉末形成,所述金属与气体一起被加速并以销售状态喷射到对接部分的表面上,其中所述第一导电材料和所述第二导电材料彼此抵接 。

    BRAZING MATERIAL FOR BONDING IN ATMOSPHERE, BONDED ARTICLE, AND CURRENT COLLECTING MATERIAL
    8.
    发明申请
    BRAZING MATERIAL FOR BONDING IN ATMOSPHERE, BONDED ARTICLE, AND CURRENT COLLECTING MATERIAL 审中-公开
    用于在大气中粘合的粘合材料,粘结物品和电流收集材料

    公开(公告)号:US20130040226A1

    公开(公告)日:2013-02-14

    申请号:US13642770

    申请日:2011-04-27

    摘要: A brazing alloy for bonding in air, in which the melting point is reduced so as to perform brazing at a low temperature without using flux even in air, is provided. In addition, a bonded article and a current collecting material, each of which is bonded with the brazing alloy and has preferable gas sealing characteristics and superior bonding strength, are provided. The brazing alloy for bonding in air includes Ag and B as essential components. The amount of Ag is not less than 50 vol. % and less than 92 vol. %, and the amount of B is greater than 8 vol. % and not more than 50% vol. %. The amounts of Ag and B are adjusted so that the total of the amounts of Ag and B is 100% including inevitable impurities.

    摘要翻译: 提供了一种用于在空气中粘合的钎焊合金,其中熔点降低,以便在低温下进行钎焊,而不使用甚至在空气中的焊剂。 此外,提供了与钎焊合金结合并具有优选的气体密封特性和优异的接合强度的接合体和集电材料。 用于在空气中粘合的钎焊合金包括Ag和B作为必要组分。 Ag的量不小于50体积%。 %且小于92体积 %,B量大于8体积%。 %且不超过50%体积。 %。 调整Ag和B的量,使得Ag和B的量的总量为100%,包括不可避免的杂质。

    Ceramic member, probe holder, and method of manufacturing ceramic member
    9.
    发明授权
    Ceramic member, probe holder, and method of manufacturing ceramic member 有权
    陶瓷构件,探针架,以及陶瓷构件的制造方法

    公开(公告)号:US08806969B2

    公开(公告)日:2014-08-19

    申请号:US12309537

    申请日:2007-07-23

    IPC分类号: C03C10/00 G01D21/00

    摘要: To provide a ceramic member having a thermal expansion coefficient close to that of silicon and has satisfactory workability, a probe holder formed by using this ceramic member, and a method of manufacturing the ceramic member. For this purpose, at least mica and silicon dioxide are mixed and an external force oriented in one direction is caused to act on this mixed mixture to sinter the mixture. It is more preferable that, in the mixture, a volume content of the mica is 70 to 90 volume % and a volume content of the silicon dioxide is 10 to 30 volume %.

    摘要翻译: 为了提供具有接近于硅的热膨胀系数的陶瓷构件,并且具有令人满意的可加工性,通过使用该陶瓷构件形成的探针保持架以及陶瓷构件的制造方法。 为此目的,至少将云母和二氧化硅混合,并使在一个方向上取向的外力作用于该混合混合物以烧结混合物。 更优选的是,在混合物中,云母的体积含量为70〜90体积%,二氧化硅的体积含量为10〜30体积%。

    Liquid crystal display device
    10.
    发明授权
    Liquid crystal display device 失效
    液晶显示装置

    公开(公告)号:US08520167B2

    公开(公告)日:2013-08-27

    申请号:US13038728

    申请日:2011-03-02

    IPC分类号: G02F1/1335 F21V7/00 F21V11/00

    摘要: A liquid crystal display device of an embodiment has: a semiconductor laser diode emitting a first laser beam; a first reflecting unit configured to reflect the first laser beam and form a second laser beam having a one-dimensionally spread distribution; and a second reflecting unit configured to reflect the second laser beam and form a third laser beam having a two-dimensionally spread distribution. The device also has: an optical switch using liquid crystal, the optical switch being configured to control passage and blocking of the third laser beam; and a first scattering unit scattering the third laser beam.

    摘要翻译: 实施例的液晶显示装置具有:发射第一激光束的半导体激光二极管; 第一反射单元,被配置为反射第一激光束并形成具有一维扩展分布的第二激光束; 以及第二反射单元,被配置为反射第二激光束并形成具有二维扩散分布的第三激光束。 该装置还具有:使用液晶的光开关,该光开关被配置为控制第三激光束的通过和阻塞; 以及散射第三激光束的第一散射单元。