Method of forming oxidized film on SOI substrate
    7.
    发明授权
    Method of forming oxidized film on SOI substrate 有权
    在SOI衬底上形成氧化膜的方法

    公开(公告)号:US06420281B2

    公开(公告)日:2002-07-16

    申请号:US09729778

    申请日:2000-12-06

    IPC分类号: H01L21324

    CPC分类号: H01L21/84 H01L27/1203

    摘要: One or more capacitors are formed using thermally oxidized films formed on a silicon layer of an SOI substrate. The capacitors may be formed alone or together with other semiconductor elements on a single SOI substrate. A diffuse layer having an impurity in a high density is first formed on the silicon layer, and then an oxidized film is formed on the diffused layer by thermal oxidation. Then, contaminants in the oxidized film are driven-out under a high temperature heat treatment, thereby to improve quality of the oxidized film, such as durability against a high voltage. Plural capacitors may be formed using oxidized films having a respectively different thickness, by repeating thermal oxidation and removal of the oxidized film.

    摘要翻译: 使用形成在SOI衬底的硅层上的热氧化膜形成一个或多个电容器。 电容器可以单独形成或与单个SOI衬底上的其它半导体元件一起形成。 首先在硅层上形成具有高密度杂质的扩散层,然后通过热氧化在扩散层上形成氧化膜。 然后,在高温热处理下将氧化膜中的污染物排出,从而提高氧化膜的质量,例如耐高压的耐久性。 可以通过重复热氧化和去除氧化膜来形成具有不同厚度的氧化膜的多个电容器。

    Semiconductor device and method of manufacturing the same
    8.
    发明授权
    Semiconductor device and method of manufacturing the same 有权
    半导体装置及其制造方法

    公开(公告)号:US07298020B2

    公开(公告)日:2007-11-20

    申请号:US10797081

    申请日:2004-03-11

    IPC分类号: H01L29/00

    摘要: A wire (12) is formed on an insulating film (10) on a semiconductor substrate (1). The wire (12) is covered by silicon nitride film (14), inorganic SOG film (20) and TEOS film (21). A thin film resistance element (30) of chromium silicon (CrSi) is formed on the upper surface of the TEOS film (21). The acute angle (taper angle) at which a line connecting the local maximum and minimum points of a step on the upper surface of the TEOS film (21) beneath the area where the thin film resistance element (30) is formed intersects to the surface of the substrate (1) is set to 10° or less.

    摘要翻译: 在半导体衬底(1)上的绝缘膜(10)上形成导线(12)。 线(12)由氮化硅膜(14),无机SOG膜(20)和TEOS膜(21)覆盖。 在TEOS膜(21)的上表面上形成有铬硅(CrSi)的薄膜电阻元件(30)。 连接薄膜电阻元件(30)形成区域下方的TEOS薄膜(21)的上表面上的台阶的局部最大值和最小点的线的锐角(锥角)与表面 的基板(1)设定为10°以下。

    Polypropylene flexifilamentary fiber containing 0.1 to 10 weight percent
of an organic spreading agent and nonwoven fabric made therefrom
    10.
    发明授权
    Polypropylene flexifilamentary fiber containing 0.1 to 10 weight percent of an organic spreading agent and nonwoven fabric made therefrom 失效
    聚丙烯柔性纤维含有0.1〜10重量%的有机铺展剂和由其制成的无纺布

    公开(公告)号:US5512357A

    公开(公告)日:1996-04-30

    申请号:US43973

    申请日:1993-04-07

    摘要: The present invention relates to a polypropylene three-dimensional plexifilamentary fiber, a method of manufacturing same, and a nonwoven fabric composed of the above fiber.The plexifilamentary fiber in accordance with the present invention has a three-dimensional plexifilamentary structure, and is characterized in that the fiber has a microwave birefringence of 0.07 or more. As a result, a dimensional stability under heating of the plexifilamentary fiber in accordance with the present invention is extremely high. Moreover, it is possible to obtain a plexifilamentary fiber having a high spreadability by adding a spreading agent to the plexifilamentary fiber. A nonwoven fabric made of such plexifilamentary fiber has a high thermal dimensional stability, and as a result, the nonwoven fabric in accordance with the present can be usefully used in a wrapping material having a heat resistance and air permeability, apparel having heat resistance and moisture permeability, a heat resistance paper, and engineering and building materials or the like.

    摘要翻译: 聚丙烯三维丛状纤维及其制造方法技术领域本发明涉及聚丙烯三维丛状纤维,及其制造方法。 根据本发明的丛状纤维具有三维丛状结构,其特征在于,所述纤维的微波双折射为0.07以上。 结果,根据本发明的丛状纤维的加热下的尺寸稳定性非常高。 此外,通过向丛状纤维增加铺展剂,可以获得具有高铺展性的丛状纤维。 由这种丛状纤维制成的无纺布具有高的热尺寸稳定性,结果,根据本发明的无纺布可以有效地用于具有耐热性和透气性的包装材料,具有耐热性和水分的衣服 透气性,耐热性纸,以及工程和建筑材料等。