FLEXIBLE SUBSTRATE PROCESSING APPARATUS
    8.
    发明申请
    FLEXIBLE SUBSTRATE PROCESSING APPARATUS 有权
    柔性基板加工设备

    公开(公告)号:US20130134051A1

    公开(公告)日:2013-05-30

    申请号:US13680269

    申请日:2012-11-19

    IPC分类号: C25D11/00

    摘要: To provide a flexible substrate processing apparatus which allows the stable reduction of an oxide contained in a film-like structure body formed on a flexible substrate. The apparatus has a substrate carrying-out portion where a flexible substrate on which a film-like structure body is formed is unwound; a reduction treatment portion where an oxide contained in the film-like structure body formed on the flexible substrate is electrochemically reduced; a washing portion where the flexible substrate and the film-like structure body are washed; a drying portion where the flexible substrate and the film-like structure body are dried; and a substrate carrying-in portion where the flexible substrate on which the film-like structure body is formed is taken up.

    摘要翻译: 提供一种柔性基板处理装置,其能够稳定地还原形成在柔性基板上的膜状结构体中所含的氧化物。 该装置具有:其上形成有薄膜状结构体的柔性基板的基板搬出部, 减少处理部分,其中形成在柔性基板上的膜状结构体中所含的氧化物被电化学还原; 洗涤部分,其中柔性基底和膜状结构体被洗涤; 将柔性基板和膜状结构体干燥的干燥部; 以及其上形成有薄膜状结构体的柔性基板的基板搬入部。