公开(公告)号：US20090321801A1

公开(公告)日：2009-12-31

申请号：US12553428

申请日：2009-09-03

申请人： Shinichiro HAYASHI ,  Toru Nasu

发明人： Shinichiro HAYASHI ,  Toru Nasu

IPC分类号： H01L27/06 ,  H01G4/06 ,  B05D5/12 ,  H01L21/8239

CPC分类号： H01L21/02356 ,  C23C16/40 ,  C23C16/56 ,  H01L21/02197 ,  H01L21/02205 ,  H01L21/02271 ,  H01L21/31691 ,  H01L27/11502 ,  H01L27/11507 ,  H01L28/55 ,  H01L28/65

摘要： A capacitor insulating film is composed of a ferroelectric film formed on a substrate and containing an element functioning as a crystal nucleus which allows the growth of a crystal in a random crystal orientation.

摘要翻译： 电容绝缘膜由在基板上形成的铁电体膜构成，并且含有作为晶核的元素，其能够以随机的晶体取向生长晶体。

公开(公告)号：US20110027542A1

公开(公告)日：2011-02-03

申请号：US12710396

申请日：2010-02-23

申请人： Shinichirou NAGAI ,  Shusaku KARUISHI ,  Tomonori HARADA ,  Hironori KAWASHIMA ,  Shinichiro HAYASHI ,  Manabu KISHIDA

发明人： Shinichirou NAGAI ,  Shusaku KARUISHI ,  Tomonori HARADA ,  Hironori KAWASHIMA ,  Shinichiro HAYASHI ,  Manabu KISHIDA

IPC分类号： G03F7/20 ,  G03B27/54 ,  G03B27/32 ,  B32B5/00

CPC分类号： G03B27/32 ,  G03F7/7005 ,  G03F7/70141 ,  G03F7/7035 ,  G03F7/70791 ,  G03F9/7003 ,  G03F9/7038 ,  G03F9/7088 ,  Y10T428/24802

摘要： An exposure method includes the steps of: detecting an alignment mark of a work W and an alignment mark of a mask M by an alignment camera 152; calculating a positional shift amount between the mask M and the work W and a distortion amount of the work W, based on a shift amount between both the alignment marks detected by the alignment camera 152; adjusting an alignment between the work W and the mask M, based on the calculated positional shift amount; and correcting a curvature of a plane mirror 166 for reflecting a light beam of exposure light from a light source 161, based on the calculated distortion amount, at the same timing as the alignment adjustment step or at a different timing from the alignment adjustment step.

摘要翻译： 曝光方法包括以下步骤：通过对准照相机152检测作品W的对准标记和掩模M的对准标记; 基于由对准摄像机152检测到的两个对准标记之间的偏移量，计算掩模M和工件W之间的位置偏移量和工件W的失真量; 基于所计算的位置偏移量来调整工件W和掩模M之间的对准; 并且在与对准调整步骤相同的定时或者与对准调整步骤不同的时刻，基于计算出的失真量来校正用于反射来自光源161的曝光光束的平面镜166的曲率。

公开(公告)号：US20100025586A1

公开(公告)日：2010-02-04

申请号：US12511016

申请日：2009-07-28

申请人： Yuichi OGAWA ,  Shinichiro HAYASHI ,  Eiji KATO

发明人： Yuichi OGAWA ,  Shinichiro HAYASHI ,  Eiji KATO

IPC分类号： G01N21/00 ,  G01R27/04 ,  G01J5/02

CPC分类号： G01N21/3581 ,  G01N21/95692 ,  H01L31/0232 ,  H01L31/101

摘要： There is provided a measuring apparatus including a space arrangement structure that includes space regions surrounded by conductors in a plane, an electromagnetic wave emitter that emits electromagnetic waves towards an object held by the space arrangement structure, and an electromagnetic wave detector that measures the electromagnetic waves that have passed through the space arrangement structure. Here, characteristics of the object are measured by measuring the electromagnetic waves that have passed through the space arrangement structure. The electromagnetic waves emitted from the electromagnetic wave emitter towards the space arrangement structure are incident on the plane containing the space regions at an angle, and the electromagnetic waves that have passed through the space arrangement structure are measured.

摘要翻译： 提供了一种测量装置，包括：空间布置结构，包括由平面内的导体包围的空间区域;朝向由所述空间布置结构保持的物体发射电磁波的电磁波发射器;以及测量电磁波的电磁波检测器 已经通过了空间布置结构。 这里，通过测量已经通过空间排列结构的电磁波来测量物体的特性。 从电磁波发射器朝向空间配置结构发射的电磁波以一定角度入射在包含空间区域的平面上，并且测量已经通过空间布置结构的电磁波。

公开(公告)号：US20120235043A1

公开(公告)日：2012-09-20

申请号：US13485686

申请日：2012-05-31

申请人： Yuichi OGAWA ,  Shinichiro HAYASHI ,  Eiji KATO

发明人： Yuichi OGAWA ,  Shinichiro HAYASHI ,  Eiji KATO

IPC分类号： G01J5/00

CPC分类号： G01N21/3581 ,  G01N21/95692 ,  H01L31/0232 ,  H01L31/101

摘要： There is provided a measuring apparatus including a space arrangement structure that includes space regions surrounded by conductors in a plane, an electromagnetic wave emitter that emits electromagnetic waves towards an object held by the space arrangement structure, and an electromagnetic wave detector that measures the electromagnetic waves that have passed through the space arrangement structure. Here, characteristics of the object are measured by measuring the electromagnetic waves that have passed through the space arrangement structure. The electromagnetic waves emitted from the electromagnetic wave emitter towards the space arrangement structure are incident on the plane containing the space regions at an angle, and the electromagnetic waves that have passed through the space arrangement structure are measured.

摘要翻译： 提供了一种测量装置，包括：空间布置结构，包括由平面内的导体包围的空间区域;朝向由所述空间布置结构保持的物体发射电磁波的电磁波发射器;以及测量电磁波的电磁波检测器 已经通过了空间布置结构。 这里，通过测量已经通过空间排列结构的电磁波来测量物体的特性。 从电磁波发射器朝向空间配置结构发射的电磁波以一定角度入射在包含空间区域的平面上，并且测量已经通过空间布置结构的电磁波。

公开(公告)号：US20090273429A1

公开(公告)日：2009-11-05

申请号：US12428714

申请日：2009-04-23

申请人： Atsushi NAKAMURA ,  Shinichiro HAYASHI ,  Teruhito OHNISHI

发明人： Atsushi NAKAMURA ,  Shinichiro HAYASHI ,  Teruhito OHNISHI

IPC分类号： H01F5/00 ,  H05K3/02

CPC分类号： H01F17/0006 ,  H01F2017/0053 ,  H01F2017/0073 ,  H05K1/165 ,  H05K3/107 ,  Y10T29/4902 ,  Y10T29/49155

摘要： An inductor includes a flat substrate and a conductor in a spiral shape having a plurality of turns. The plane on which the conductor is formed is substantially in parallel with a principal surface of the substrate. The turns of the conductor are equally spaced from each other in a direction parallel to the plane on which the conductor is formed. An outer one of the turns of the conductor is wider and thinner than an inner one of the turns of the conductor. A level of at least one of a top and a bottom of the conductor differs from one turn to another in a cross section vertical to the plane on which the conductor is formed.

摘要翻译： 电感器包括平坦基板和具有多个匝的螺旋形状的导体。 其上形成导体的平面基本上与衬底的主表面平行。 导体的匝在与形成导体的平面平行的方向上彼此等间隔。 导体的外圈之一比导体的匝数更宽和更薄。 导体的顶部和底部中的至少一个的水平面与垂直于其上形成有导体的平面的横截面不同于另一个。

公开(公告)号：US20090108405A1

公开(公告)日：2009-04-30

申请号：US12257700

申请日：2008-10-24

申请人： Itaru OOTANI ,  Shinichiro HAYASHI ,  Shinji NISHIURA

发明人： Itaru OOTANI ,  Shinichiro HAYASHI ,  Shinji NISHIURA

IPC分类号： H01L29/92 ,  H01L21/02

CPC分类号： H01L27/0805 ,  H01L23/5223 ,  H01L28/60 ,  H01L2924/0002 ,  H01L2924/00

摘要： A conductive film embedded in a predetermined region on an upper surface of an insulation film and metallic wirings embedded so as to penetrate through the conductive film and protrudes into the insulation film constitute a lower electrode of an MIM capacitor.

摘要翻译： 嵌入在绝缘膜的上表面上的预定区域中的导电膜和嵌入以穿透导电膜并突出到绝缘膜中的金属布线构成MIM电容器的下电极。