-
公开(公告)号：US20060145075A1
公开(公告)日：2006-07-06
申请号：US11296641
申请日：2005-12-08
申请人： Shohei Terada , Kazutoshi Kaji , Tatsumi Hirano , Gyeong-su Park , Se-ahn Song , Jong-bong Park
发明人： Shohei Terada , Kazutoshi Kaji , Tatsumi Hirano , Gyeong-su Park , Se-ahn Song , Jong-bong Park
IPC分类号： G21K7/00
CPC分类号： G01N23/2251 , G01B15/02
摘要： A method for evaluating thin films comprises the steps of inputting measurement conditions, generating electron beams from an electron source to condense the electron beams to a specimen by a condenser lens, enlarging the electron beams transmitted by the specimen with imaging lenses to image an enlarged image of the specimen, acquiring elemental maps of the specimen with an element analyzer to display the acquired elemental maps, measuring a length of the elemental maps, and correcting the measurement conditions. Disclosed is an evaluating apparatus that implements the above evaluating method.
-
2.发明授权Standard sample for transmission electron microscope (TEM) elemental mapping and TEM elemetal mapping method using the same 有权标准样品用透射电子显微镜（TEM）元素测绘和TEM电子测绘法使用该方法公开(公告)号：US07053372B2
公开(公告)日：2006-05-30
申请号：US11034721
申请日：2005-01-14
申请人： Gyeong-su Park , Kazutoshi Kaji , Jong-bong Park , Shohei Terada , Tatsumi Hirano , Se-ahn Song
发明人： Gyeong-su Park , Kazutoshi Kaji , Jong-bong Park , Shohei Terada , Tatsumi Hirano , Se-ahn Song
CPC分类号： G01N23/083 , H01J2237/2516
摘要： A standard sample for transmission electron microscopy (TEM) elemental mapping and a TEM elemental mapping method using the same are provided. The standard sample includes a substrate; a first crystalline thin film containing heavy atoms formed on the substrate; a first amorphous thin film having oxides or nitrides containing light atoms and having a thickness of 1–5 nm or 6–10 nm formed on the first crystalline thin film; a second crystalline thin film containing heavy atoms formed on the first amorphous thin film. The standard sample can be used to correct TEM, EDS and EELS mapping results of a multi-layered nanometer-sized thin film and to optimize mapping conditions.
摘要翻译： 提供了用于透射电子显微镜（TEM）元素映射的标准样品和使用其的TEM元素映射方法。 标准样品包括底物; 含有形成在基材上的重原子的第一晶体薄膜; 在第一结晶薄膜上形成具有含有轻质原子并具有1-5nm或6-10nm厚度的氧化物或氮化物的第一非晶薄膜; 含有形成在第一非晶薄膜上的重原子的第二晶体薄膜。 标准样品可用于校正多层纳米尺寸薄膜的TEM，EDS和EELS映射结果，并优化测绘条件。
-
3.发明申请Standard sample for transmission electron microscope (TEM) elemental mapping and TEM elemetal mapping method using the same 有权标准样品用透射电子显微镜（TEM）元素测绘和TEM电子测绘法使用该方法公开(公告)号：US20050184233A1
公开(公告)日：2005-08-25
申请号：US11034721
申请日：2005-01-14
申请人： Gyeong-su Park , Kazutoshi Kaji , Jong-bong Park , Shohei Terada , Tatsumi Hirano , Se-ahn Song
发明人： Gyeong-su Park , Kazutoshi Kaji , Jong-bong Park , Shohei Terada , Tatsumi Hirano , Se-ahn Song
CPC分类号： G01N23/083 , H01J2237/2516
摘要： A standard sample for transmission electron microscopy (TEM) elemental mapping and a TEM elemental mapping method using the same are provided. The standard sample includes a substrate; a first crystalline thin film containing heavy atoms formed on the substrate; a first amorphous thin film having oxides or nitrides containing light atoms and having a thickness of 1-5 nm or 6-10 nm formed on the first crystalline thin film; a second crystalline thin film containing heavy atoms formed on the first amorphous thin film. The standard sample can be used to correct TEM, EDS and EELS mapping results of a multi-layered nanometer-sized thin film and to optimize mapping conditions.
摘要翻译： 提供了用于透射电子显微镜（TEM）元素映射的标准样品和使用其的TEM元素映射方法。 标准样品包括底物; 含有形成在基材上的重原子的第一晶体薄膜; 在第一结晶薄膜上形成具有含有轻质原子并具有1-5nm或6-10nm厚度的氧化物或氮化物的第一非晶薄膜; 含有形成在第一非晶薄膜上的重原子的第二晶体薄膜。 标准样品可用于校正多层纳米尺寸薄膜的TEM，EDS和EELS映射结果，并优化测绘条件。
-
公开(公告)号：US07544935B2
公开(公告)日：2009-06-09
申请号：US11296641
申请日：2005-12-08
申请人： Shohei Terada , Kazutoshi Kaji , Tatsumi Hirano , Gyeong-su Park , Se-ahn Song , Jong-bong Park
发明人： Shohei Terada , Kazutoshi Kaji , Tatsumi Hirano , Gyeong-su Park , Se-ahn Song , Jong-bong Park
IPC分类号： G01N23/04
CPC分类号： G01N23/2251 , G01B15/02
摘要： A method for evaluating thin films comprises the steps of inputting measurement conditions, generating electron beams from an electron source to condense the electron beams to a specimen by a condenser lens, enlarging the electron beams transmitted by the specimen with imaging lenses to image an enlarged image of the specimen, acquiring elemental maps of the specimen with an element analyzer to display the acquired elemental maps, measuring a length of the elemental maps, and correcting the measurement conditions. Disclosed is an evaluating apparatus that implements the above evaluating method.
摘要翻译： 一种评估薄膜的方法包括以下步骤：输入测量条件，从电子源产生电子束，通过聚光透镜将电子束聚集到样本，扩大由成像透镜透射的电子束成像放大图像 通过元素分析仪获取样本的元素图，以显示所获取的元素图，测量元素图的长度，以及校正测量条件。 公开了实现上述评价方法的评价装置。
-
公开(公告)号：US08436301B2
公开(公告)日：2013-05-07
申请号：US13133653
申请日：2009-11-11
IPC分类号： H01J37/26
CPC分类号： H01J37/05 , H01J37/153 , H01J37/244 , H01J2237/2446
摘要： In a spectral image formed by two orthogonal axes, one of which is an axis of the amount of energy loss and the other of which is an axis of positional information, by the use of an electron spectrometer and a transmission electron microscope, distortion in the spectral image of a sample to be analyzed is corrected with high efficiency and high accuracy by comparing electron beam positions calculated from a two-dimensional electron beam position image formed by the two orthogonal axes (the axis of the amount of energy loss and the axis of positional information) with reference electron beam positions, and calculating amounts of the distortion based on the differences of the electron beam positions. Method and apparatus are offered which correct distortion in a spectral image with high efficiency and high accuracy, the image being formed by the two orthogonal axes (the axis of the amount of energy loss and the axis of positional information).
摘要翻译： 在由两个正交轴形成的光谱图像中，其中一个是能量损失量的轴，另一个是位置信息的轴，通过使用电子光谱仪和透射电子显微镜，在 通过比较从由两个正交轴形成的二维电子束位置图像计算的电子束位置（能量损失量的轴和能量损失的轴线），以高效率和高精度来校正要分析的样本的光谱图像 位置信息），以及基于电子束位置的差异计算失真量。 提供了以高效率和高精度校正光谱图像失真的方法和装置，该图像由两个正交轴（能量损失量的轴和位置信息的轴）形成。
-
公开(公告)号：US08410457B2
公开(公告)日：2013-04-02
申请号：US13015115
申请日：2011-01-27
IPC分类号： G01N21/00
CPC分类号： H01J37/185 , H01J37/20 , H01J2237/055 , H01J2237/057 , H01J2237/20221 , H01J2237/204 , H01J2237/2802
摘要： A sample transfer device is provided which can insert to a charged particle beam apparatus a sample to be observed and analyzed under irradiation of a charged particle beam while suppressing to a minimum the time to expose the sample to the atmospheric environment. The sample transfer device for transferring the sample to be observed and analyzed by irradiating the charged particle beam comprises an expansible hollow member capable of accommodating a sample holder mounting the sample, a fixing member for fixing the sample holder within the expansible hollow member, and a sealing member communicating with the interior of the expansible hollow member to open/close an opening through which the sample holder passes.
摘要翻译： 提供了一种样品转移装置，其可以在带电粒子束的照射下插入到带电粒子束装置中的待观察和分析的样品，同时抑制将样品暴露于大气环境的时间最小化。 用于通过照射带电粒子束来传送待观察和分析的样品的样品转移装置包括能够容纳安装样品的样品架的可膨胀中空构件，用于将样品架固定在可膨胀中空构件内的固定构件，以及 密封构件与可膨胀中空构件的内部连通以打开/关闭样品保持器通过的开口。
-
公开(公告)号：US08338798B2
公开(公告)日：2012-12-25
申请号：US12817725
申请日：2010-06-17
申请人： Shohei Terada , Tatsumi Hirano
发明人： Shohei Terada , Tatsumi Hirano
IPC分类号： H01J37/20
CPC分类号： H01J37/26 , H01J37/20 , H01J2237/2008 , H01J2237/24564
摘要： A sample holder capable of holding samples is provided which comprises a plurality of probes in contact with a sample, fine movement mechanisms for moving the plural probes, and a driver connected to the fine movement mechanisms, wherein the plural fine movement mechanisms move the plural probes independently of one another and the driver moves the plural probes simultaneously.
摘要翻译： 提供了能够保持样品的样品保持器，其包括与样品接触的多个探针，用于移动多个探针的微细移动机构和连接到微动机构的驱动器，其中多个微动机构使多个探针 彼此独立，并且驾驶员同时移动多个探测器。
-
公开(公告)号：US20110240854A1
公开(公告)日：2011-10-06
申请号：US13133653
申请日：2009-11-11
IPC分类号： G01N23/00 , H01J37/153
CPC分类号： H01J37/05 , H01J37/153 , H01J37/244 , H01J2237/2446
摘要： In a spectral image formed by two orthogonal axes, one of which is an axis of the amount of energy loss and the other of which is an axis of positional information, by the use of an electron spectrometer and a transmission electron microscope, distortion in the spectral image of a sample to be analyzed is corrected with high efficiency and high accuracy by comparing electron beam positions calculated from a two-dimensional electron beam position image formed by the two orthogonal axes (the axis of the amount of energy loss and the axis of positional information) with reference electron beam positions, and calculating amounts of the distortion based on the differences of the electron beam positions. Method and apparatus are offered which correct distortion in a spectral image with high efficiency and high accuracy, the image being formed by the two orthogonal axes (the axis of the amount of energy loss and the axis of positional information).
摘要翻译： 在由两个正交轴形成的光谱图像中，其中一个是能量损失量的轴，另一个是位置信息的轴，通过使用电子光谱仪和透射电子显微镜，在 通过比较从由两个正交轴形成的二维电子束位置图像计算的电子束位置（能量损失量的轴和能量损失的轴线），以高效率和高精度来校正要分析的样本的光谱图像 位置信息），以及基于电子束位置的差异计算失真量。 提供了以高效率和高精度校正光谱图像失真的方法和装置，该图像由两个正交轴（能量损失量的轴和位置信息的轴）形成。
-
公开(公告)号：US20110180724A1
公开(公告)日：2011-07-28
申请号：US13015115
申请日：2011-01-27
IPC分类号： G21K5/08
CPC分类号： H01J37/185 , H01J37/20 , H01J2237/055 , H01J2237/057 , H01J2237/20221 , H01J2237/204 , H01J2237/2802
摘要： A sample transfer device is provided which can insert to a charged particle beam apparatus a sample to be observed and analyzed under irradiation of a charged particle beam while suppressing to a minimum the time to expose the sample to the atmospheric environment. The sample transfer device for transferring the sample to be observed and analyzed by irradiating the charged particle beam comprises an expansible hollow member capable of accommodating a sample holder mounting the sample, a fixing member for fixing the sample holder within the expansible hollow member, and a sealing member communicating with the interior of the expansible hollow member to open/close an opening through which the sample holder passes.
摘要翻译： 提供了一种样品转移装置，其可以在带电粒子束的照射下插入到带电粒子束装置中的待观察和分析的样品，同时抑制将样品暴露于大气环境的时间最小化。 用于通过照射带电粒子束来传送待观察和分析的样品的样品转移装置包括能够容纳安装样品的样品架的可膨胀中空构件，用于将样品架固定在可膨胀中空构件内的固定构件，以及 密封构件与可膨胀中空构件的内部连通以打开/关闭样品保持器通过的开口。
-
公开(公告)号：US20100320396A1
公开(公告)日：2010-12-23
申请号：US12817725
申请日：2010-06-17
申请人： Shohei TERADA , Tatsumi Hirano
发明人： Shohei TERADA , Tatsumi Hirano
CPC分类号： H01J37/26 , H01J37/20 , H01J2237/2008 , H01J2237/24564
摘要： A sample holder capable of holding samples is provided which comprises a plurality of probes in contact with a sample, fine movement mechanisms for moving the plural probes, and a driver connected to the fine movement mechanisms, wherein the plural fine movement mechanisms move the plural probes independently of one another and the driver moves the plural probes simultaneously.
摘要翻译： 提供了能够保持样品的样品保持器，其包括与样品接触的多个探针，用于移动多个探针的微细移动机构和连接到微动机构的驱动器，其中多个微动机构使多个探针 彼此独立，并且驾驶员同时移动多个探测器。
-
-
-
-
-
-
-
-
-
搜索结果
23 条记录 (耗时 0.031 秒)
