公开(公告)号：US08048773B2

公开(公告)日：2011-11-01

申请号：US12729983

申请日：2010-03-23

申请人： Shunpei Yamazaki ,  Masaki Koyama ,  Kosei Noda ,  Kenichiro Makino ,  Hideto Ohnuma ,  Kosei Nei

发明人： Shunpei Yamazaki ,  Masaki Koyama ,  Kosei Noda ,  Kenichiro Makino ,  Hideto Ohnuma ,  Kosei Nei

IPC分类号： H01L21/30 ,  H01L21/46

CPC分类号： H01L27/1274 ,  C30B13/24 ,  C30B29/06 ,  C30B31/22 ,  C30B33/02 ,  C30B33/06 ,  H01L21/02532 ,  H01L21/0262 ,  H01L21/02675 ,  H01L21/76254 ,  H01L27/1214 ,  H01L27/1218 ,  H01L27/1281 ,  H01L29/66772

摘要： A single crystal semiconductor separated from a single crystal semiconductor substrate is formed partly over a supporting substrate with a buffer layer provided therebetween. The single crystal semiconductor is separated from the single crystal semiconductor substrate by irradiation with accelerated ions, formation of a fragile layer by the ion irradiation, and heat treatment. A non-single crystal semiconductor layer is formed over the single crystal semiconductor and irradiated with a laser beam to be crystallized, whereby an SOI substrate is manufactured.

摘要翻译： 从单晶半导体衬底分离的单晶半导体部分地在支撑衬底上形成，其间设置有缓冲层。 通过照射加速离子，通过离子照射形成脆性层，进行热处理，将单晶半导体与单晶半导体基板分离。 在单晶半导体上形成非单晶半导体层，并照射待结晶的激光束，由此制造SOI衬底。

公开(公告)号：US20100248444A1

公开(公告)日：2010-09-30

申请号：US12729983

申请日：2010-03-23

申请人： Shunpei Yamazaki ,  Masaki Koyama ,  Kosei Noda ,  Kenichiro Makino ,  Hideto Ohnuma ,  Kosei Nei

发明人： Shunpei Yamazaki ,  Masaki Koyama ,  Kosei Noda ,  Kenichiro Makino ,  Hideto Ohnuma ,  Kosei Nei

IPC分类号： H01L21/762 ,  C30B1/02

CPC分类号： H01L27/1274 ,  C30B13/24 ,  C30B29/06 ,  C30B31/22 ,  C30B33/02 ,  C30B33/06 ,  H01L21/02532 ,  H01L21/0262 ,  H01L21/02675 ,  H01L21/76254 ,  H01L27/1214 ,  H01L27/1218 ,  H01L27/1281 ,  H01L29/66772

摘要： A single crystal semiconductor separated from a single crystal semiconductor substrate is formed partly over a supporting substrate with a buffer layer provided therebetween. The single crystal semiconductor is separated from the single crystal semiconductor substrate by irradiation with accelerated ions, formation of a fragile layer by the ion irradiation, and heat treatment. A non-single crystal semiconductor layer is formed over the single crystal semiconductor and irradiated with a laser beam to be crystallized, whereby an SOI substrate is manufactured.

摘要翻译： 从单晶半导体衬底分离的单晶半导体部分地在支撑衬底上形成，其间设置有缓冲层。 通过照射加速离子，通过离子照射形成脆性层，进行热处理，将单晶半导体与单晶半导体基板分离。 在单晶半导体上形成非单晶半导体层，并照射待结晶的激光束，由此制造SOI衬底。

公开(公告)号：US09496138B2

公开(公告)日：2016-11-15

申请号：US13535523

申请日：2012-06-28

申请人： Masaki Koyama ,  Kosei Nei ,  Akihisa Shimomura ,  Suguru Hondo ,  Toru Hasegawa

发明人： Masaki Koyama ,  Kosei Nei ,  Akihisa Shimomura ,  Suguru Hondo ,  Toru Hasegawa

IPC分类号： H01L21/36 ,  H01L21/02 ,  H01L29/786 ,  H01L29/66

CPC分类号： H01L21/02565 ,  H01L21/02422 ,  H01L21/02488 ,  H01L21/02554 ,  H01L21/02631 ,  H01L21/02686 ,  H01L29/66969 ,  H01L29/78603 ,  H01L29/78606 ,  H01L29/7869

摘要： In an oxide semiconductor film formed over an insulating surface, an amorphous region remains in the vicinity of the interface with the base, which is thought to cause a variation in the characteristics of a transistor and the like. A base surface or film touching the oxide semiconductor film is formed of a material having a melting point higher than that of a material used for the oxide semiconductor film. Accordingly, a crystalline region is allowed to exist in the vicinity of the interface with the base surface or film touching the oxide semiconductor film. An insulating metal oxide is used for the base surface or film touching the oxide semiconductor film. The metal oxide used here is an aluminum oxide, gallium oxide, or the like that is a material belonging to the same group as the material of the oxide semiconductor film.

摘要翻译： 在形成在绝缘表面上的氧化物半导体膜中，非晶区保持在与基极的界面附近，这被认为是导致晶体管等的特性的变化。 接触氧化物半导体膜的基底表面或膜由熔点高于用于氧化物半导体膜的材料的熔点形成。 因此，与接触氧化物半导体膜的基面或膜的界面附近存在结晶区域。 绝缘金属氧化物用于接触氧化物半导体膜的基底表面或膜。 这里使用的金属氧化物是与氧化物半导体膜的材料相同的材料的氧化铝，氧化镓等。

公开(公告)号：US08216914B2

公开(公告)日：2012-07-10

申请号：US12872222

申请日：2010-08-31

申请人： Masaki Koyama ,  Kosei Nei ,  Toru Hasegawa ,  Junpei Momo ,  Eiji Higa

发明人： Masaki Koyama ,  Kosei Nei ,  Toru Hasegawa ,  Junpei Momo ,  Eiji Higa

IPC分类号： H01L21/46 ,  H01L21/30 ,  H01L21/84 ,  H01L21/00

CPC分类号： H01L21/76254 ,  H01L21/02052 ,  H01L21/268

摘要： An object is to provide a method for manufacturing an SOI substrate including a semiconductor film with high planarity and high crystallinity. After a single crystal semiconductor film is formed over an insulating film by a separation step, a natural oxide film existing on a surface of the semiconductor film is removed and the semiconductor film is irradiated with first laser light and second laser light under an inert gas atmosphere or a reduced-pressure atmosphere. The number of shots of the first laser light that is emitted to an arbitrary point in the semiconductor film is greater than or equal to 7, preferably greater than or equal to 10 and less than or equal to 100. The number of shots of the second laser light that is emitted to an arbitrary point in the semiconductor film is greater than 0 and less than or equal to 2.

摘要翻译： 本发明的目的是提供一种制造包括具有高平坦度和高结晶度的半导体膜的SOI衬底的方法。 在通过分离步骤在绝缘膜上形成单晶半导体膜之后，去除存在于半导体膜表面上的自然氧化膜，并在惰性气体气氛下用第一激光和第二激光照射半导体膜 或减压气氛。 发射到半导体膜中的任意点的第一激光的照射次数大于或等于7，优选大于或等于10并且小于或等于100.第二次的照射次数 发射到半导体膜中的任意点的激光大于0且小于或等于2。

公开(公告)号：US08377804B2

公开(公告)日：2013-02-19

申请号：US12568761

申请日：2009-09-29

申请人： Junpei Momo ,  Kosei Nei ,  Hiroaki Honda ,  Masaki Koyama ,  Akihisa Shimomura

发明人： Junpei Momo ,  Kosei Nei ,  Hiroaki Honda ,  Masaki Koyama ,  Akihisa Shimomura

IPC分类号： H01L21/20 ,  H01L21/30

CPC分类号： H01L29/78603 ,  H01L21/76254 ,  H01L21/84

摘要： To provide a semiconductor substrate in which a semiconductor element having favorable crystallinity and high performance can be formed. A single crystal semiconductor substrate having an embrittlement layer and a base substrate are bonded with an insulating layer interposed therebetween; the single crystal semiconductor substrate is separated along the embrittlement layer by heat treatment; a single crystal semiconductor layer is fixed to the base substrate; the single crystal semiconductor layer is irradiated with a laser beam; the single crystal semiconductor layer is in a partially melted state to be recrystallized; and crystal defects are repaired. In addition, the energy density of a laser beam with which the best crystallinity of the single crystal semiconductor layer is obtained is detected by a microwave photoconductivity decay method.

摘要翻译： 提供可以形成具有良好的结晶性和高性能的半导体元件的半导体衬底。 具有脆化层的单晶半导体衬底和基底衬底之间的绝缘层接合; 通过热处理沿着脆化层分离单晶半导体衬底; 单晶半导体层固定在基底基板上; 用激光束照射单晶半导体层; 单晶半导体层处于部分熔融状态以进行再结晶; 并修复晶体缺陷。 此外，通过微波光电导衰减法检测获得了单晶半导体层的最佳结晶度的激光束的能量密度。

公开(公告)号：US20100084734A1

公开(公告)日：2010-04-08

申请号：US12568761

申请日：2009-09-29

申请人： Junpei Momo ,  Kosei Nei ,  Hiroaki Honda ,  Masaki Koyama ,  Akihisa Shimomura

发明人： Junpei Momo ,  Kosei Nei ,  Hiroaki Honda ,  Masaki Koyama ,  Akihisa Shimomura

IPC分类号： H01L27/12 ,  H01L21/762

CPC分类号： H01L29/78603 ,  H01L21/76254 ,  H01L21/84

摘要： To provide a semiconductor substrate in which a semiconductor element having favorable crystallinity and high performance can be formed. A single crystal semiconductor substrate having an embrittlement layer and a base substrate are bonded with an insulating layer interposed therebetween; the single crystal semiconductor substrate is separated along the embrittlement layer by heat treatment; a single crystal semiconductor layer is fixed to the base substrate; the single crystal semiconductor layer is irradiated with a laser beam; the single crystal semiconductor layer is in a partially melted state to be recrystallized; and crystal defects are repaired. In addition, the energy density of a laser beam with which the best crystallinity of the single crystal semiconductor layer is obtained is detected by a microwave photoconductivity decay method.

摘要翻译： 提供可以形成具有良好的结晶性和高性能的半导体元件的半导体衬底。 具有脆化层的单晶半导体衬底和基底衬底之间的绝缘层接合; 通过热处理沿着脆化层分离单晶半导体衬底; 单晶半导体层固定在基底基板上; 用激光束照射单晶半导体层; 单晶半导体层处于部分熔融状态以进行再结晶; 并修复晶体缺陷。 此外，通过微波光电导衰减法检测获得了单晶半导体层的最佳结晶度的激光束的能量密度。

公开(公告)号：US07939426B2

公开(公告)日：2011-05-10

申请号：US12844856

申请日：2010-07-28

申请人： Fumito Isaka ,  Sho Kato ,  Kosei Nei ,  Ryu Komatsu ,  Tatsuya Mizoi ,  Akihisa Shimomura

发明人： Fumito Isaka ,  Sho Kato ,  Kosei Nei ,  Ryu Komatsu ,  Tatsuya Mizoi ,  Akihisa Shimomura

IPC分类号： H01L21/46

CPC分类号： H01L21/76254

摘要： An SOI substrate is manufactured by a method in which a first insulating film is formed over a first substrate over which a plurality of first single crystal semiconductor films is formed; the first insulating film is planarized; heat treatment is performed on a single crystal semiconductor substrate attached to the first insulating film; a second single crystal semiconductor film is formed; a third single crystal semiconductor film is formed using the first single crystal semiconductor films and the second single crystal semiconductor films as seed layers; a fragile layer is formed by introducing ions into the third single crystal semiconductor film; a second insulating film is formed over the third single crystal semiconductor film; heat treatment is performed on a second substrate superposed on the second insulating film; and a part of the third single crystal semiconductor film is fixed to the second substrate.

摘要翻译： 通过在形成有多个第一单晶半导体膜的第一基板上形成第一绝缘膜的方法制造SOI衬底; 第一绝缘膜被平坦化; 对附着在第一绝缘膜上的单晶半导体衬底进行热处理; 形成第二单晶半导体膜; 使用第一单晶半导体膜和第二单晶半导体膜作为晶种层形成第三单晶半导体膜; 通过将离子引入第三单晶半导体膜中形成脆性层; 在第三单晶半导体膜上形成第二绝缘膜; 在叠置在第二绝缘膜上的第二基板上进行热处理; 并且第三单晶半导体膜的一部分固定到第二基板。

公开(公告)号：US08383487B2

公开(公告)日：2013-02-26

申请号：US13198171

申请日：2011-08-04

申请人： Hideomi Suzawa ,  Shinya Sasagawa ,  Akihisa Shimomura ,  Junpei Momo ,  Motomu Kurata ,  Taiga Muraoka ,  Kosei Nei

发明人： Hideomi Suzawa ,  Shinya Sasagawa ,  Akihisa Shimomura ,  Junpei Momo ,  Motomu Kurata ,  Taiga Muraoka ,  Kosei Nei

IPC分类号： H01L21/76

CPC分类号： H01L21/76254

摘要： Forming an insulating film on a surface of the single crystal semiconductor substrate, forming a fragile region in the single crystal semiconductor substrate by irradiating the single crystal semiconductor substrate with an ion beam through the insulating film, forming a bonding layer over the insulating film, bonding a supporting substrate to the single crystal semiconductor substrate by interposing the bonding layer between the supporting substrate and the single crystal semiconductor substrate, dividing the single crystal semiconductor substrate at the fragile region to separate the single crystal semiconductor substrate into a single crystal semiconductor layer attached to the supporting substrate, performing first dry etching treatment on a part of the fragile region remaining on the single crystal semiconductor layer, performing second dry etching treatment on a surface of the single crystal semiconductor layer subjected to the first etching treatment, and irradiating the single crystal semiconductor layer with laser light.

摘要翻译： 在单晶半导体基板的表面上形成绝缘膜，在单晶半导体基板中通过用离子束照射单晶半导体基板通过绝缘膜形成脆性区域，在绝缘膜上形成接合层， 通过将支撑基板和单晶半导体基板之间的接合层插入到单晶半导体基板的支撑基板上，将单晶半导体基板分割为脆性区域，将单晶半导体基板分离成单晶半导体层， 所述支撑基板对残留在所述单晶半导体层上的所述易碎区域的一部分进行第一干蚀刻处理，对经过所述第一蚀刻处理的所述单晶半导体层的表面进行第二干蚀刻处理， 具有激光的晶体半导体层。

公开(公告)号：US07767547B2

公开(公告)日：2010-08-03

申请号：US12360419

申请日：2009-01-27

申请人： Fumito Isaka ,  Sho Kato ,  Kosei Nei ,  Ryu Komatsu ,  Tatsuya Mizoi ,  Akihisa Shimomura

发明人： Fumito Isaka ,  Sho Kato ,  Kosei Nei ,  Ryu Komatsu ,  Tatsuya Mizoi ,  Akihisa Shimomura

IPC分类号： H01L21/46

CPC分类号： H01L21/76254

摘要： An SOI substrate is manufactured by a method in which a first insulating film is formed over a first substrate over which a plurality of first single crystal semiconductor films is formed; the first insulating film is planarized; heat treatment is performed on a single crystal semiconductor substrate attached to the first insulating film; a second single crystal semiconductor film is formed; a third single crystal semiconductor film is formed using the first single crystal semiconductor films and the second single crystal semiconductor films as seed layers; a fragile layer is formed by introducing ions into the third single crystal semiconductor film; a second insulating film is formed over the third single crystal semiconductor film; heat treatment is performed on a second substrate superposed on the second insulating film; and a part of the third single crystal semiconductor film is fixed to the second substrate.

摘要翻译： 通过在形成有多个第一单晶半导体膜的第一基板上形成第一绝缘膜的方法制造SOI衬底; 第一绝缘膜被平坦化; 对附着在第一绝缘膜上的单晶半导体衬底进行热处理; 形成第二单晶半导体膜; 使用第一单晶半导体膜和第二单晶半导体膜作为晶种层形成第三单晶半导体膜; 通过将离子引入第三单晶半导体膜中形成脆性层; 在第三单晶半导体膜上形成第二绝缘膜; 在叠置在第二绝缘膜上的第二基板上进行热处理; 并且第三单晶半导体膜的一部分固定到第二基板。

公开(公告)号：US07985604B2

公开(公告)日：2011-07-26

申请号：US12324065

申请日：2008-11-26

申请人： Fumito Isaka ,  Sho Kato ,  Kosei Nei ,  Ryu Komatsu ,  Akihisa Shimomura ,  Koji Dairiki

发明人： Fumito Isaka ,  Sho Kato ,  Kosei Nei ,  Ryu Komatsu ,  Akihisa Shimomura ,  Koji Dairiki

IPC分类号： H01L21/00

CPC分类号： H01L31/1804 ,  H01L31/077 ,  Y02E10/547 ,  Y02P70/521

摘要： A photoelectric conversion device having an excellent photoelectric conversion characteristic is provided while effectively utilizing limited resources. A fragile layer is formed in a region at a depth of less than 1000 nm from one surface of a single crystal semiconductor substrate, and a first impurity semiconductor layer, a first electrode, and an insulating layer are formed on the one surface side of the single crystal semiconductor substrate. After bonding the insulating layer to a supporting substrate, the single crystal semiconductor substrate is separated with the fragile layer or its vicinity used as a separation plane, thereby forming a first single crystal semiconductor layer over the supporting substrate. A second single crystal semiconductor layer is formed by epitaxially growing a semiconductor layer on the first single crystal semiconductor layer in accordance with a plasma CVD method in which a silane based gas and hydrogen with a flow rate 50 times or more that of the silane gas are used as a source gas. A second impurity semiconductor layer which has a conductivity type opposite to that of the first impurity semiconductor layer is formed over the second single crystal semiconductor layer. A second electrode is formed over the second impurity semiconductor layer.

摘要翻译： 提供具有优异的光电转换特性的光电转换装置，同时有效地利用有限的资源。 在单晶半导体衬底的一个表面的深度小于1000nm的区域形成脆性层，在第一杂质半导体层，第一电极和绝缘层上形成有脆性层 单晶半导体衬底。 在将绝缘层粘合到支撑基板上之后，将单晶半导体基板与用作分离平面的易碎层或其附近分离，从而在支撑基板上形成第一单晶半导体层。 第二单晶半导体层是通过以等离子体CVD法在第一单晶半导体层上外延生长半导体层而形成的，其中硅烷气体和氢气的流量为硅烷气体的50倍以上 用作源气体。 在第二单晶半导体层上形成具有与第一杂质半导体层相反的导电类型的第二杂质半导体层。 在第二杂质半导体层上形成第二电极。