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72 条记录 (耗时 0.019 秒)

    Method for the manufacture of resist structures
    1.
    发明授权
    Method for the manufacture of resist structures 失效
    抗蚀剂结构的制造方法

    公开(公告)号：US4395481A

    公开(公告)日：1983-07-26

    申请号：US305798

    申请日：1981-09-25

    申请人： Siegfried Birkle ,  Roland Rubner ,  Hans Hauschildt ,  Eva-Maria Rissel

    发明人： Siegfried Birkle ,  Roland Rubner ,  Hans Hauschildt ,  Eva-Maria Rissel

    IPC分类号： C08F220/10 ,  C08F222/32 ,  G03F7/038 ,  G03F7/039 ,  G03F7/20 ,  G05F1/577 ,  G03C5/00

    CPC分类号： G03F7/039 ,  G05F1/577

    摘要： The invention relates to a method for the manufacture of positive resist structures by means of short-wave UV rays and has the objective to develop such a method in a manner such that increased sensitivity and resolution as well as high thermal stability and, in addition, transparency in the wave-length range above 260 nm can be achieved. According to the invention, it is provided for this purpose to use as the resist material copolymers of 1 to 70 mol % alkylmethacrylate with an alkyl radical having 1 to 4 C atoms, and 99 to 30 mol % of an ethylenically unsaturated monomer with chlorine and/or cyan substituents. The method according to the invention is particularly well suited for producing resist structures about 0.5 to 2 .mu.m thick by means of UV rays in the wave-length range between about 180 to 260 nm.

    摘要翻译： 本发明涉及通过短波紫外线制造正型抗蚀剂结构的方法，其目的是以增加灵敏度和分辨率以及高热稳定性的方式开发这种方法，另外， 可以实现260nm以上的波长范围的透明度。 根据本发明，为此目的提供了使用1至70摩尔％甲基丙烯酸烷基酯与具有1-4个碳原子的烷基的抗蚀剂材料共聚物和99至30摩尔％的具有氯的烯属不饱和单体的抗蚀剂材料共聚物，以及 /或青色取代基。 根据本发明的方法特别适用于通过在约180至260nm之间的波长范围内的紫外线生产约0.5至2μm厚的抗蚀剂结构。

    Electrophotographic recording material and method for the manufacture thereof
    3.
    发明授权
    Electrophotographic recording material and method for the manufacture thereof 失效
    电子记录记录材料及其制造方法

    公开(公告)号：US5108860A

    公开(公告)日：1992-04-28

    申请号：US552524

    申请日：1990-07-16

    申请人： Siegfried Birkle ,  Johann Kammermaier ,  Roland Rubner

    发明人： Siegfried Birkle ,  Johann Kammermaier ,  Roland Rubner

    IPC分类号： G03G5/147 ,  G03G5/08 ,  G03G5/082

    CPC分类号： G03G5/08285

    摘要： An electrophotographic recording material is applied on a plate-shaped or drum-shaped substrate in a layer structure of superposed layers which comprises a photoconductive layer and at least the uppermost layer is fashioned of amorphous, hydrogen-containing carbon. The amorphous, hydrogen-containing carbon layer is deposited from a radio frequency excited low-pressure plasma with gaseous hydrocarbon as a reaction gas and in which a self-bias DC voltage is superimposed on the radio frequency field. The a-c:H material obtained in this manner is semiconducting and has photoconductive properties so that it can be employed for the photoconductive layer of the electrophotographic recording material.

    摘要翻译： 将电子照相记录材料以包含光电导层的重叠层的层结构施加在板状或鼓形衬底上，并且至少最上层由无定形含氢碳形成。 从具有气态碳氢化合物的射频激发低压等离子体作为反应气体沉积无定形含氢碳层，其中自偏压直流电压叠加在射频场上。 以这种方式获得的a-c：H材料是半导体的并且具有光电导性质，使得其可用于电子照相记录材料的光电导层。

    Method of producing relief structures for integrated semiconductor circuits
    4.
    发明授权
    Method of producing relief structures for integrated semiconductor circuits 失效
    集成半导体电路的浮雕结构的制造方法

    公开(公告)号：US4405707A

    公开(公告)日：1983-09-20

    申请号：US284099

    申请日：1981-07-16

    申请人： Hartwig Bierhenke ,  Siegfried Birkle ,  Roland Rubner

    发明人： Hartwig Bierhenke ,  Siegfried Birkle ,  Roland Rubner

    IPC分类号： H01L21/027 ,  G03F7/09 ,  G03F7/095 ,  H01L21/312 ,  B05D3/06

    CPC分类号： G03F7/095 ,  G03F7/094 ,  H01L21/312

    摘要： Relief structures comprised of double lacquer layers on substrates already having relief structures for integrated semiconductor circuits are produced by applying a lower lacquer layer onto such substrate and which is composed of a material which does not cross-link or decompose due to radiation energy and which has only relatively slight sensitivity at the radiation energy dosage range utilized for structuring; applying an upper lacquer layer onto the lower lacquer layer and which upper layer is thinner relative to the thickness of the lower layer by a factor of at least 2 and is composed of a highly sensitive negative lacquer material; generating desired relief structures in the upper lacquer layer and removing those portions of the lower lacquer which are not covered by the upper negative lacquer layer.

    摘要翻译： 通过在这样的基板上施加较低的漆层并由不受辐射能量而不会交联或分解的材料构成的具有用于集成半导体电路的已经具有用于集成半导体电路的浮雕结构的基板上的双层漆层的浮雕结构 在用于结构的辐射能量剂量范围内只有相对轻微的敏感性; 将上漆层施加到下漆层上，并且上层相对于下层的厚度更薄，至少为2倍，并由高度敏感的负漆材料构成; 在上漆层中产生所需的浮雕结构并去除未被上部负漆层覆盖的下部漆的那些部分。

    High-voltage capacitor
    5.
    发明申请
    High-voltage capacitor 审中-公开
    高压电容器

    公开(公告)号：US20090168300A1

    公开(公告)日：2009-07-02

    申请号：US11661390

    申请日：2005-08-09

    申请人： Siegfried Birkle ,  Stefan Hain ,  Norbert Koch ,  Guenter Trojan

    发明人： Siegfried Birkle ,  Stefan Hain ,  Norbert Koch ,  Guenter Trojan

    IPC分类号： H01G4/38

    CPC分类号： H01G4/38 ,  H01G4/385

    摘要： A high-voltage capacitor is used to transmit energy and has an insulator housing, wherein at least two serially connected capacitors, which are mounted in parallel, are arranged. Said capacitors are made of, respectively, a serial connection of individual capacitors which are embodied as stackable capacitor elements. The resulting high-voltage capacitor is compact and economical. Each capacitor element comprises several individual capacitors which are maintained in an isolated manner, whereby the number corresponds to the number of serially connected capacitors, such that said serially connected capacitors are formed by one stack of capacitor elements.

    摘要翻译： 高压电容器用于传输能量并具有绝缘体外壳，其中并联安装有至少两个串联的电容器。 所述电容器分别由独立电容器的串联连接构成，其实现为可堆叠的电容器元件。 所得到的高压电容器紧凑而经济。 每个电容器元件包括以隔离方式保持的几个单独的电容器，由此该数量对应于串联连接的电容器的数量，使得所述串联电容器由一堆电容器元件形成。

    System for supplying electrical power to a load by a transmission path which has been split into two parts
    6.
    发明授权
    System for supplying electrical power to a load by a transmission path which has been split into two parts 失效
    通过被分成两部分的传输路径向负载供电的系统

    公开(公告)号：US07026728B2

    公开(公告)日：2006-04-11

    申请号：US10478187

    申请日：2003-03-14

    申请人： Siegfried Birkle ,  Stefan Hain

    发明人： Siegfried Birkle ,  Stefan Hain

    IPC分类号： H02M1/12 ,  H01H33/59

    CPC分类号： G01R15/14 ,  H02J17/00 ,  H02J50/10 ,  Y10T307/944

    摘要： The system is intended to provide an isolated power supply for an electrical load. It contains a generator for producing a supply signal, and a transmission path having two separate branch elements. The first branch element is designed for transmission of the supply signal (S1) in the forward direction, and the second branch element is designed for transmission of the supply signal in the backward direction, so that this results in a closed circuit for the supply signal. The two branch elements contain means for isolation. The load can be supplied by the supply signal with an electrical power of at most 100 mW.

    摘要翻译： 该系统旨在为电力负载提供隔离电源。 它包含用于产生电源信号的发生器和具有两个分开的分支元件的传输路径。 第一分支元件被设计用于向前传输供给信号（S1），并且第二分支元件被设计成用于沿向后方向传输供给信号，从而导致供电闭合电路 信号。 两个分支元素包含隔离的手段。 负载可以通过电源信号提供，功率最大为100 mW。

    Vibrating conveyor device dipping into a liquid with damping of vibration transmission
    9.
    发明授权
    Vibrating conveyor device dipping into a liquid with damping of vibration transmission 失效
    振动传送装置浸入具有阻尼振动传播的液体中

    公开(公告)号：US5496456A

    公开(公告)日：1996-03-05

    申请号：US447902

    申请日：1995-05-23

    申请人： Ju/ rgen Fischer ,  Siegfried Birkle ,  Werner Elsel ,  Johann Gehring ,  Arnolf Maurer ,  Waldemar Nippe

    发明人： Ju/ rgen Fischer ,  Siegfried Birkle ,  Werner Elsel ,  Johann Gehring ,  Arnolf Maurer ,  Waldemar Nippe

    IPC分类号： B65G49/04 ,  B65G27/02 ,  C25D17/16

    CPC分类号： B65G49/0427

    摘要： Known large vibrating conveyors are not readily suitable as such for conveying bulk materials or small articles into or out of a liquid bath, because the liquid transmits the vibrations to other structural parts, for example a vessel for the liquid, as a result of the incompressibility of the liquid. In order to remedy this, the vibrating conveyor device according to the invention has a compressible space or chamber underneath the vibrating part which damps the vibrations, when suitably coordinated with the liquid bath. The space is preferably gas-filled and its damping properties can be varied by feeding additional gas through a line which can be shut off by a member, or by bleeding some of the filling through a further line which can likewise be shut off by a member.

    摘要翻译： 已知的大振动输送机不容易适合于将散装材料或小物品输入或流出液槽，因为由于不可压缩性，液体将振动传递到其它结构部件，例如用于液体的容器 的液体。 为了解决这个问题，根据本发明的振动输送装置在振动部分下方具有可压缩的空间或室，当与液槽适当地配合时，其可以抑制振动。 该空间优选是充气的，并且其阻尼特性可以通过将额外的气体通过可由构件切断的管线进给而变化，或者通过将一些填充物通过另外的管线排出，该管线同样可被构件 。