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26 条记录 (耗时 0.021 秒)

    Preserving Filled Features when Vacuum Wiping
    1.
    发明申请
    Preserving Filled Features when Vacuum Wiping 审中-公开
    真空擦拭时保存填充特性

    公开(公告)号：US20070228608A1

    公开(公告)日：2007-10-04

    申请号：US11694193

    申请日：2007-03-30

    申请人： Steven Shackleton ,  Pankaj Lad ,  Ian McMackin ,  Frank Xu ,  Sidlgata Sreenivasan

    发明人： Steven Shackleton ,  Pankaj Lad ,  Ian McMackin ,  Frank Xu ,  Sidlgata Sreenivasan

    IPC分类号： B29C35/08 ,  B29C43/02

    CPC分类号： G03F7/0002 ,  B29C43/003 ,  B29C43/021 ,  B29C43/34 ,  B29C2043/025 ,  B29C2043/142 ,  B29C2043/3438 ,  B29K2105/0002 ,  B82Y10/00 ,  B82Y40/00

    摘要： A method/process for curing imprint on a template prior to contact with a substrate. A curing process is used to adhere the imprint to a wafer or substrate. Monomer is deposited on a template and then partially cured using a UV exposure. The exposure is controlled so that the imprint is cured past the gel point, but still retains a thin liquid layer of uncured monomer at the surface that will bond with the wafer. Further, this partially cured layer enables the alignment adjustments between the template and the substrate to be performed after contact between the two without pulling any monomer out of the features.

    摘要翻译： 在与基底接触之前在模板上固化印模的方法/方法。 使用固化过程将印记粘附到晶片或基板上。 将单体沉积在模板上，然后使用UV曝光部分固化。 控制曝光使得印迹经过凝胶点固化，但仍然保留在将与晶片结合的表面上的未固化单体的薄液体层。 此外，这种部分固化的层使得能够在两者之间接触之后进行模板和基板之间的对准调整，而不将任何单体拉出特征。

    System for controlling a volume of material on a mold
    4.
    发明申请
    System for controlling a volume of material on a mold 有权
    用于控制模具上的材料体积的系统

    公开(公告)号：US20060121141A1

    公开(公告)日：2006-06-08

    申请号：US11101139

    申请日：2005-04-07

    申请人： Steven Shackleton ,  Ian McMackin ,  Pankaj Lad ,  Van Truskett

    发明人： Steven Shackleton ,  Ian McMackin ,  Pankaj Lad ,  Van Truskett

    IPC分类号： B29C35/08

    CPC分类号： G03F7/0002 ,  B82Y10/00 ,  B82Y40/00 ,  Y10S977/887

    摘要： A system for controlling a volume of liquid on a mold that features a body defining a volume with an aperture formed into the body and positioned proximate to the mold. A pump system is in fluid communication with the body, and the aperture and the pump system are established to create a stream of fluid moving between the mold and the volume. In this manner a quantity of fluid is removed while retained upon the mold is a desired portion of the fluid to undertake imprint lithographic processes.

    摘要翻译： 一种用于控制模具上的液体体积的系统，其特征在于，具有限定体积的主体，所述体积具有形成在所述主体中并且定位成靠近所述模具的孔。 泵系统与主体流体连通，并且孔和泵系统被建立以产生在模具和体积之间移动的流体流。 以这种方式，除去一定量的流体，同时保留在模具上是流体的期望部分以进行压印光刻工艺。

    Method of providing desirable wetting and release characterstics between a mold and a polymerizable composition
    6.
    发明申请
    Method of providing desirable wetting and release characterstics between a mold and a polymerizable composition 有权
    在模具和可聚合组合物之间提供所需的润湿和释放特性的方法

    公开(公告)号：US20060175736A1

    公开(公告)日：2006-08-10

    申请号：US11244428

    申请日：2005-10-05

    申请人： Frank Xu ,  Pankaj Lad ,  Ian McMackin ,  Van Truskett ,  Edward Fletcher

    发明人： Frank Xu ,  Pankaj Lad ,  Ian McMackin ,  Van Truskett ,  Edward Fletcher

    IPC分类号： B28B7/36

    CPC分类号： G03F7/0002 ,  B41C1/10 ,  B41M7/0072 ,  B41M7/0081 ,  B82Y10/00 ,  B82Y30/00 ,  B82Y40/00 ,  Y10S977/887

    摘要： The present invention provides a method that features improved wetting characteristics while allowing preferential adhesion and release characteristics with respect to a substrate and a mold having imprinting material disposed therebetween. The method includes coating a surface of the mold with a volume of surfactant containing solution. The surfactant in the solution includes a hydrophobic component consisting essentially of a plurality of fluorine-containing molecules. The distribution of the plurality of the fluorine atoms in the fluorine-containing molecules, as well as the fluorine-containing molecules throughout the volume provides a desired contact angle with respect to a polymerizable composition disposed on the substrate. The contact angle is in a range of 50° or less.

    摘要翻译： 本发明提供了一种具有改进的润湿特性的方法，同时允许相对于基材和在其之间设置有压印材料的模具的优先粘合和释放特性。 该方法包括用一定体积的含表面活性剂的溶液涂覆模具的表面。 溶液中的表面活性剂包括基本上由多个含氟分子组成的疏水组分。 含氟分子中的多个氟原子的分布以及整个体积中的含氟分子相对于设置在基材上的可聚合组合物提供期望的接触角。 接触角在50°以下的范围内。

    METHOD FOR CONTROLLING DISTRIBUTION OF FLUID COMPONENTS ON A BODY
    10.
    发明申请
    METHOD FOR CONTROLLING DISTRIBUTION OF FLUID COMPONENTS ON A BODY 有权
    控制流体成分在体内分布的方法

    公开(公告)号：US20070141271A1

    公开(公告)日：2007-06-21

    申请号：US11608374

    申请日：2006-12-08

    申请人： Frank Xu ,  Ian McMackin ,  Pankaj Lad ,  Michael Watts

    发明人： Frank Xu ,  Ian McMackin ,  Pankaj Lad ,  Michael Watts

    IPC分类号： C08F2/48

    CPC分类号： G03F7/0002 ,  B82Y10/00 ,  B82Y40/00

    摘要： The present invention provides a method of controlling the distribution of a fluid on a body that features compensating for varying distribution of constituent components of a composition that moved over a surface of a substrate. To that end, the method includes generating a sequence of patterns of liquid upon a substrate, each of which includes a plurality of spaced-apart liquid regions, with voids being defined between adjacent liquid regions. A second of the patterns of liquid of the sequence is arranged so that the liquid regions associated therewith are in superimposition with the voids of a first of the patterns of liquid of the sequence.

    摘要翻译： 本发明提供一种控制流体在体上的分布的方法，其特征在于补偿在衬底的表面上移动的组合物的组成成分的变化分布。 为此，该方法包括在衬底上产生一系列液体图案，每个衬底包括多个间隔开的液体区域，空隙位于相邻的液体区域之间。 布置了序列液体的第二种图案，使得与其相关联的液体区域与序列的第一种液体图案的空隙重叠。