Method for manufacturing iridium complex

    公开(公告)号:US10125158B2

    公开(公告)日:2018-11-13

    申请号:US15503822

    申请日:2015-08-28

    Abstract: A method for manufacturing tris(β-diketonato)iridium by reacting β-diketone with an iridium compound, in which an activation treatment including (a) an alkali treatment and (b) an acid treatment described below is applied to the iridium compound to activate the iridium compound, and to subsequently react the β-diketone, (a) an alkali treatment: a treatment of adding alkali to a solution of the iridium compound to raise pH of the solution to a more alkaline side than that before the alkali addition and to not less than 10, and (b) an acid treatment: a treatment of adding acid to the solution subjected to the alkali treatment to lower pH of the solution to a more acidic side than that before the acid addition and to make the pH difference between solutions before and after the acid addition be not less than 0.1 and not more than 10. The present invention allows manufacture of tris(β-diketonato)iridium utilizing a wide variety of β-diketones.

    SUBSTRATE PROCESSING METHOD FOR SUPPORTING A CATALYST PARTICLE FOR PLATING PROCESS
    8.
    发明申请
    SUBSTRATE PROCESSING METHOD FOR SUPPORTING A CATALYST PARTICLE FOR PLATING PROCESS 有权
    用于支撑用于镀层工艺的催化剂颗粒的基板处理方法

    公开(公告)号:US20150237742A1

    公开(公告)日:2015-08-20

    申请号:US14429702

    申请日:2013-09-27

    Abstract: The present invention provides a method for treating a substrate that supports metal fine particles for forming a plating layer on a circuit pattern or TSVs in various substrates, in which further micronization treatment is enabled compared with the conventional methods, and the formation of a stable plating layer is enabled. The present invention is a method for treating a substrate, the method including bringing a substrate into contact with a colloidal solution containing metal particles in order to support the metal particles that serve as a catalyst for forming a plating layer on the substrate, in which the colloidal solution contains metal particles formed of Pd and having a particle size of 0.6 nm to 4.0 nm and a face-to-face dimension of the (111) plane of 2.254 Å or more. When an organic layer such as SAM is formed on a surface of the substrate before this treatment, the binding force of the Pd particles can be increased.

    Abstract translation: 本发明提供一种处理基板的方法,该基板用于在各种基板上的电路图形或TSV上支撑用于形成镀层的金属微粒,与常规方法相比,能够进一步进行微粉化处理,并形成稳定的电镀 层被启用。 本发明是一种处理基板的方法,该方法包括使基板与含有金属颗粒的胶体溶液接触,以便支撑用作在基板上形成镀层的催化剂的金属颗粒,其中 胶体溶液含有由Pd形成的并且具有0.6nm至4.0nm的粒径和(111)面的面对面尺寸为2.254或更大的金属颗粒。 当在该处理之前在基板的表面上形成诸如SAM的有机层时,可以增加Pd颗粒的结合力。

    Method for manufacturing silver particles

    公开(公告)号:US09901985B2

    公开(公告)日:2018-02-27

    申请号:US14891725

    申请日:2014-05-20

    Abstract: The present invention provides a method for producing silver particles, the method capable of adjusting the particle diameter to be within the range of several tens of nanometers to several hundreds of nanometers and also producing silver particles with a uniform particle diameter. The present invention relates to a method for producing silver particles by heating of a reaction system containing a thermally-decomposable silver-amine complex precursor, including a process of producing a silver-amine complex, a process of adding an organic compound having an amide (carboxylic amide) as a skeleton to a reaction system, and a process of heating the reaction system, in which a water content in the reaction system before the heating is 20 to 100 parts by weight relative to 100 parts by weight of the silver compound. The present invention can produce uniform silver particles while the particle diameter is controlled.

    Method for treating substrate that support catalyst particles for plating processing
    10.
    发明授权
    Method for treating substrate that support catalyst particles for plating processing 有权
    用于处理支撑用于电镀处理的催化剂颗粒的基材的方法

    公开(公告)号:US09565776B2

    公开(公告)日:2017-02-07

    申请号:US14429702

    申请日:2013-09-27

    Abstract: The present invention provides a method for treating a substrate that supports metal fine particles for forming a plating layer on a circuit pattern or TSVs in various substrates, in which further micronization treatment is enabled compared with the conventional methods, and the formation of a stable plating layer is enabled. The present invention is a method for treating a substrate, the method including bringing a substrate into contact with a colloidal solution containing metal particles in order to support the metal particles that serve as a catalyst for forming a plating layer on the substrate, in which the colloidal solution contains metal particles formed of Pd and having a particle size of 0.6 nm to 4.0 nm and a face-to-face dimension of the (111) plane of 2.254 Å or more. When an organic layer such as SAM is formed on a surface of the substrate before this treatment, the binding force of the Pd particles can be increased.

    Abstract translation: 本发明提供一种处理基板的方法,该基板用于在各种基板上的电路图形或TSV上支撑用于形成镀层的金属微粒,与常规方法相比,能够进一步进行微粉化处理,并形成稳定的电镀 层被启用。 本发明是一种处理基板的方法,该方法包括使基板与含有金属颗粒的胶体溶液接触,以便支撑用作在基板上形成镀层的催化剂的金属颗粒,其中 胶体溶液含有由Pd形成的并且具有0.6nm至4.0nm的粒径和(111)面的面对面尺寸为2.254或更大的金属颗粒。 当在该处理之前在基板的表面上形成诸如SAM的有机层时,可以增加Pd颗粒的结合力。

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