LOW CONTACT RESISTANCE GRAPHENE DEVICE INTEGRATION

    公开(公告)号:US20200211849A1

    公开(公告)日:2020-07-02

    申请号:US16810891

    申请日:2020-03-06

    Abstract: A method, e.g. of forming an electronic device, includes forming a carbon-doped metal layer over a substrate. The carbon-doped metal layer is heated and cooled such that a first graphene layer is formed on a top surface of the carbon-doped metal layer, and a second graphene layer is formed between the carbon-doped metal layer and the substrate. A portion of the first graphene layer is removed and a portion of the carbon-doped metal layer is removed, thereby forming first and second spaced-apart contact layers on the second graphene layer.

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