公开(公告)号：US20210166918A1

公开(公告)日：2021-06-03

申请号：US17105938

申请日：2020-11-27

Applicant: TOKYO ELECTRON LIMITED

Inventor： Mayo UDA ,  Manabu TSURUTA ,  Keigo TOYODA

IPC: H01J37/32 ,  H01J37/20

Abstract: A plasma processing apparatus includes a chamber having a sidewall and a plasma processing space surrounded by the sidewall, and a first side gas inlet line and a second side gas inlet line configured to introduce at least one gas from the sidewall into the plasma processing space. The first side gas inlet line includes a plurality of first side gas injectors symmetrically arranged along a circumferential direction on the sidewall and configured to introduce the gas in a first direction into the plasma processing space. Further, the second side gas inlet line includes a plurality of second side gas injectors symmetrically arranged along the circumferential direction on the sidewall and configured to introduce the gas in a second direction different from the first direction into the plasma processing space.

公开(公告)号：US20200266034A1

公开(公告)日：2020-08-20

申请号：US16868849

申请日：2020-05-07

Applicant: TOKYO ELECTRON LIMITED

Inventor： Yuki HOSAKA ,  Yoshihiro UMEZAWA ,  Toshiki NAKAJIMA ,  Mayo UDA

IPC: H01J37/32 ,  C23C16/50 ,  C23C16/455 ,  C23C16/44

Abstract: A plasma processing apparatus includes a processing container; a placement table provided in the processing container and including a placement region on which a workpiece is placed for a plasma processing; a baffle structure that defines a first space and a second space, and including a first member and at least one second member; a gas supply portion connected to the first space; a first pressure gauge connected to the first space; an exhaust apparatus connected to the second space; a second pressure gauge connected to the second space; a driving mechanism that moves the at least one second member in a vertical direction; a displacement gauge configured to measure a position or a distance of the second member; and a controller that controls the driving mechanism. The controller controls the driving mechanism such that a pressure of the first space becomes a predetermined pressure designated by a recipe.

公开(公告)号：US20190098740A1

公开(公告)日：2019-03-28

申请号：US16144714

申请日：2018-09-27

Applicant: TOKYO ELECTRON LIMITED

Inventor： Yohei YAMAZAWA ,  Takehisa SAITO ,  Mayo UDA ,  Keigo TOYODA ,  Alok RANJAN ,  Toshiki NAKAJIMA

IPC: H05H1/46 ,  H05H1/24 ,  H01J37/305 ,  H01J37/32 ,  H01L21/67

Abstract: A plasma processing apparatus includes an antenna configured to generate plasma of a processing gas in a chamber. The antenna includes: an inner coil provided around the gas supply unit to surround a gas supply unit; and an outer coil provided around the gas supply unit and the inner coil to surround them. The outer coil is configured such that both ends of a wire forming the outer coil are opened; power is supplied from a power supply unit to a central point of the wire; the vicinity of the central point of the wire is grounded; and the outer coil resonates at a wavelength that is a half of a wavelength of the high frequency power. The inner coil is configured such that both ends of a wire forming the inner coil are connected through a capacitor and the inner coil is inductively coupled with the inner coil.

公开(公告)号：US20160260582A1

公开(公告)日：2016-09-08

申请号：US15055783

申请日：2016-02-29

Applicant: TOKYO ELECTRON LIMITED

Inventor： Yuki HOSAKA ,  Yoshihiro UMEZAWA ,  Toshiki NAKAJIMA ,  Mayo UDA

IPC: H01J37/32 ,  C23C16/44 ,  C23C16/455 ,  C23C16/50

CPC classification number: H01J37/3244 ,  C23C16/4412 ,  C23C16/455 ,  C23C16/50 ,  H01J37/32009 ,  H01J37/32091 ,  H01J37/32633 ,  H01J37/32834

Abstract: A baffle structure of a plasma processing apparatus includes a first member and at least one second member. The first member includes a cylindrical portion extending between a placement table and a processing container. A plurality of vertically elongated through holes are formed in the cylindrical portion to be arranged in the circumferential direction. The at least one second member is disposed in the outside of the cylindrical portion of the first member in the radial direction. The at least one second member is arranged to form a cylindrical body having an inner diameter larger than the outer diameter of the cylindrical portion. The vertical positions of a plurality of second members may be individually changed. Or, the horizontal position of a single second member may be changed. Or, the single second member may be made to be inclined.

Abstract translation: 等离子体处理装置的挡板结构包括第一构件和至少一个第二构件。 第一构件包括在放置台和处理容器之间延伸的圆柱形部分。 在圆筒形部分上形成多个垂直细长的通孔，沿圆周方向布置。 所述至少一个第二构件在径向方向上设置在所述第一构件的圆柱形部分的外侧。 至少一个第二构件被布置成形成具有大于圆柱形部分的外径的内径的圆柱体。 多个第二构件的垂直位置可以单独改变。 或者，可以改变单个第二构件的水平位置。 或者，可以使单个第二构件倾斜。

公开(公告)号：US20240049379A1

公开(公告)日：2024-02-08

申请号：US18382062

申请日：2023-10-20

Applicant: Tokyo Electron Limited

Inventor： Yohei YAMAZAWA ,  Takehisa SAITO ,  Mayo UDA ,  Keigo TOYODA ,  Alok RANJAN ,  Toshiki NAKAJIMA

IPC: H05H1/46 ,  H01J37/32 ,  H01L21/67

CPC classification number: H05H1/46 ,  H01J37/32495 ,  H01L21/67069 ,  H01J37/3211 ,  H01J37/3244 ,  H05H1/4652

Abstract: A plasma processing apparatus includes an antenna configured to generate plasma of a processing gas in a chamber. The antenna includes: an inner coil provided around the gas supply unit to surround a gas supply unit; and an outer coil provided around the gas supply unit and the inner coil to surround them. The outer coil is configured such that both ends of a wire forming the outer coil are opened; power is supplied from a power supply unit to a central point of the wire; the vicinity of the central point of the wire is grounded; and the outer coil resonates at a wavelength that is a half of a wavelength of the high frequency power. The inner coil is configured such that both ends of a wire forming the inner coil are connected through a capacitor and the inner coil is inductively coupled with the inner coil.

公开(公告)号：US20190131136A1

公开(公告)日：2019-05-02

申请号：US16061434

申请日：2016-12-02

Applicant: TOKYO ELECTRON LIMITED

Inventor： Yuki HOSAKA ,  Yoshihiro UMEZAWA ,  Toshiki NAKAJIMA ,  Mayo UDA

IPC: H01L21/3065 ,  H01J37/32 ,  H05H1/46

Abstract: A plasma processing apparatus includes a baffle plate, a shutter, and a driving device. The baffle plate has a cylindrical shape, and has a plurality of through holes formed in a sidewall thereof. The shutter has a cylindrical shape and is provided around the baffle plate to be movable in an axial direction of the baffle plate along the sidewall of the baffle plate. The driving device moves the shutter along the sidewall of the baffle plate. The plurality of through holes are disposed in the sidewall of the baffle plate so that synthesized conductance of the through holes, which are not covered by the shutter, is increased with respect to a movement amount of the shutter as the shutter is moved downward.

公开(公告)号：US20170301568A1

公开(公告)日：2017-10-19

申请号：US15484389

申请日：2017-04-11

Applicant: TOKYO ELECTRON LIMITED

Inventor： Yuki HOSAKA ,  Yoshihiro UMEZAWA ,  Toshiki NAKAJIMA ,  Mayo UDA ,  Kenichi SHIMONO

IPC: H01L21/67 ,  H01J37/32

CPC classification number: H01L21/67069 ,  F16K5/0442 ,  F16K31/086 ,  H01J37/3244 ,  H01J37/32449 ,  H01J37/32834 ,  H01J2237/334

Abstract: The mechanism includes a pipe and a valve provided in the pipe. The pipe is configured to connect a gas source and a semiconductor manufacturing apparatus. The valve is configured to control a flow rate of the gas. The valve includes a housing and a columnar shaft. The housing includes an inlet and an outlet. A gas flows from the gas source into the internal space through the inlet. A gas flows from the internal space to the semiconductor manufacturing apparatus through the outlet. A gap is provided between an outer peripheral surface of the shaft and an inner wall surface of the housing. The shaft is accommodated in the internal space of the housing and is rotatable. A through hole which penetrates the shaft is formed on the outer peripheral surface of the shaft. Both ends of the through hole correspond to the inlet and the outlet.

公开(公告)号：US20210320009A1

公开(公告)日：2021-10-14

申请号：US17357006

申请日：2021-06-24

Applicant: TOKYO ELECTRON LIMITED

Inventor： Yuki HOSAKA ,  Yoshihiro UMEZAWA ,  Toshiki NAKAJIMA ,  Mayo UDA

IPC: H01L21/3065 ,  H05H1/46 ,  H01J37/32

Abstract: A plasma processing apparatus includes a baffle plate, a shutter, and a driving device. The baffle plate has a cylindrical shape, and has a plurality of through holes formed in a sidewall thereof. The shutter has a cylindrical shape and is provided around the baffle plate to be movable in an axial direction of the baffle plate along the sidewall of the baffle plate. The driving device moves the shutter along the sidewall of the baffle plate. The plurality of through holes are disposed in the sidewall of the baffle plate so that synthesized conductance of the through holes, which are not covered by the shutter, is increased with respect to a movement amount of the shutter as the shutter is moved downward.

公开(公告)号：US20210193439A1

公开(公告)日：2021-06-24

申请号：US17130770

申请日：2020-12-22

Applicant: TOKYO ELECTRON LIMITED

Inventor： Mayo UDA ,  Mitsunori OHATA

IPC: H01J37/32

Abstract: A plasma processing apparatus includes a chamber, an antenna assembly, a primary coil, a radio frequency (RF) power supply and a gas shower. The chamber includes a sidewall and a ceiling plate having a central opening. The the sidewall and the ceiling plate define a plasma processing space. The antenna assembly is disposed above the ceiling plate. The antenna assembly includes a central region, a first peripheral region surrounding the central region, and a second peripheral region surrounding the first peripheral region. The central region and the first peripheral region vertically overlap the central opening. The primary coil is disposed in the second peripheral region. The RF power supply is configured to supply an RF signal to the primary coil. The gas shower is disposed in the central opening and has a bottom portion exposed to the plasma processing space, the bottom portion having bottom gas injection holes.

公开(公告)号：US20170301518A1

公开(公告)日：2017-10-19

申请号：US15508054

申请日：2015-09-24

Applicant: TOKYO ELECTRON LIMITED

Inventor： Yuki HOSAKA ,  Yoshihiro UMEZAWA ,  Mayo UDA ,  Takashi KUBO

IPC: H01J37/32 ,  F16K31/04 ,  C23C16/455 ,  F16K3/08 ,  H01L21/67

Abstract: According to an aspect, a gas supply mechanism for supplying a gas to a semiconductor manufacturing apparatus is provided. The gas supply mechanism includes a pipe connecting a gas source and the semiconductor manufacturing apparatus to each other, and a valve which is provided on the pipe. The valve includes a plate rotatable about an axis, the axis extending in a plate thickness direction, and a housing provided along the plate without contacting the plate to accommodate the plate, the housing providing a gas supply path along with the pipe. A through hole is formed in the plate, the through hole penetrating the plate at a position on a circle which extends around the axis and intersects the gas supply path.