-
公开(公告)号:US20200258672A1
公开(公告)日:2020-08-13
申请号:US16860337
申请日:2020-04-28
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Hsiao-Tsung Yen , Huan-Neng Chen , Yu-Ling Lin , Chin-Wei Kuo , Mei-Show Chen , Ho-Hsiang Chen , Min-Chie Jeng
IPC: H01F27/28 , H01L23/522 , H01F17/00
Abstract: A device includes a substrate, and a vertical inductor over the substrate. The vertical inductor includes a plurality of parts formed of metal, wherein each of the parts extends in one of a plurality of planes perpendicular to a major surface of the substrate. Metal lines interconnect neighboring ones of the plurality of parts of the vertical inductor.
-
公开(公告)号:US09905897B2
公开(公告)日:2018-02-27
申请号:US15455530
申请日:2017-03-10
Applicant: Taiwan Semiconductor Manufacturing CO., LTD.
Inventor: Hsiao-Tsung Yen , Cheng-Wei Luo
CPC classification number: H01P1/2007 , H01F17/0006 , H01F37/00 , H01F2017/0073 , H01P1/203 , H01P3/081 , H03H7/0123 , H03H7/0138
Abstract: A device includes a transmission plate, a conductive plate, a first capacitive unit, and electrodes. The transmission plate is configured to be electrically coupled between an input source and a load. The conductive plate includes a winding structure and is configured to be electrically coupled to ground. The first capacitive unit is electrically coupled between the conductive plate and the transmission plate. The electrodes are interdigitated with the winding structure of the conductive plate.
-
公开(公告)号:US09530705B2
公开(公告)日:2016-12-27
申请号:US13864376
申请日:2013-04-17
Applicant: Taiwan Semiconductor Manufacturing Co. Ltd.
Inventor: Hsiao-Tsung Yen , Chin-Wei Kuo , Chih-Yuan Chang , Min-Chie Jeng
CPC classification number: H01L22/30 , G01R31/2607 , G01R31/27 , H01L22/34
Abstract: Some embodiments relate to a wafer. The wafer includes a first dummy component comprising two or more first dummy component transmission lines. One of the first dummy component transmission lines operably couples a first signal test pad to a second signal test pad, and an other of the first dummy component transmission lines operably couples a third signal test pad to a fourth signal test pad. A second dummy component comprises two or more second dummy component transmission lines. One of the second dummy component transmission lines operably couples a fifth signal test pad to a sixth signal test pad, and an other of the second dummy component transmission lines operably couples a seventh signal test pad to an eighth signal test pad. Other embodiments are also disclosed.
Abstract translation: 一些实施例涉及晶片。 该晶片包括包含两个或更多个第一虚拟部件传输线的第一虚拟部件。 第一虚拟部件传输线之一可操作地将第一信号测试焊盘耦合到第二信号测试焊盘,并且第一虚设部件传输线中的另一个可操作地将第三信号测试焊盘耦合到第四信号测试焊盘。 第二虚拟部件包括两个或更多个第二虚拟部件传输线。 第二虚拟部件传输线之一可操作地将第五信号测试焊盘耦合到第六信号测试焊盘,并且第二虚设部件传输线中的另一个可操作地将第七信号测试焊盘耦合到第八信号测试焊盘。 还公开了其他实施例。
-
公开(公告)号:US09472513B2
公开(公告)日:2016-10-18
申请号:US14049516
申请日:2013-10-09
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Hsiao-Tsung Yen
CPC classification number: H01L23/66 , H01L21/76877 , H01L23/5226 , H01L23/5283 , H01L2924/0002 , H01P3/08 , H01P3/082 , H01P3/088 , H01L2924/00
Abstract: A semiconductor transmission line substructure and methods of transmitting RF signals are described. The semiconductor transmission line substructure can include a substrate; a first signal line over the substrate; a first ground line over the substrate; and a second semiconductor substrate over the substrate. The first signal line, the first ground line and the second semiconductor substrate are each vertically spaced apart from one another and can be separated from one another by at least one electrically insulating layer.
Abstract translation: 描述了半导体传输线子结构和发射RF信号的方法。 半导体传输线子结构可以包括衬底; 衬底上的第一信号线; 衬底上的第一个接地线; 以及在所述衬底上的第二半导体衬底。 第一信号线,第一接地线和第二半导体衬底各自彼此垂直间隔开并且可以通过至少一个电绝缘层彼此分离。
-
公开(公告)号:US20210082848A1
公开(公告)日:2021-03-18
申请号:US17098602
申请日:2020-11-16
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Chin-Wei Kuo , Hsiao-Tsung Yen , Min-Chie Jeng , Yu-Ling Lin
IPC: H01L23/00 , H01L23/525 , H01L23/498 , H01L23/66 , H01L23/522 , H01L21/56 , H01L25/065
Abstract: Methods and apparatus for forming a semiconductor device package with a transmission line using a micro-bump layer are disclosed. The micro-bump layer may comprise micro-bumps and micro-bump lines, formed between a top device and a bottom device. A signal transmission line may be formed using a micro-bump line above a bottom device. A ground plane may be formed using a redistribution layer (RDL) within the bottom device, or using additional micro-bump lines. The RDL formed ground plane may comprise open slots. There may be RDLs at the bottom device and the top device above and below the micro-bump lines to form parts of the ground planes.
-
公开(公告)号:US09425735B2
公开(公告)日:2016-08-23
申请号:US14701175
申请日:2015-04-30
Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Inventor: Ying-Ta Lu , Hsien-Yuan Liao , Chi-Hsien Lin , Hsiao-Tsung Yen , Ho-Hsiang Chen , Chewn-Pu Jou
IPC: H03B5/12
CPC classification number: H03B5/1212 , H03B5/1215 , H03B5/1228 , H03B5/1243 , H03B5/1296
Abstract: An apparatus is disclosed that includes a first cross-coupled transistor pair, a second cross-coupled transistor pair, at least one capacitance unit, and a first, second, third, and fourth inductive elements. The first cross-coupled transistor pair and second cross-coupled transistor pair are coupled to a pair of first output nodes and a pair of second output nodes, respectively. The at least one capacitance unit is coupled to at least one of the pair of first output nodes and the pair of second output nodes. The first and second inductive elements are electrically coupled to the first output nodes, respectively. The third inductive element is electrically coupled to one of the second output nodes and DC-biased and magnetically coupled to the first inductive element. The fourth inductive element is electrically coupled to the other of the second output nodes and DC-biased and magnetically coupled to the second inductive element.
Abstract translation: 公开了一种装置,其包括第一交叉耦合晶体管对,第二交叉耦合晶体管对,至少一个电容单元以及第一,第二,第三和第四电感元件。 第一交叉耦合晶体管对和第二交叉耦合晶体管对分别耦合到一对第一输出节点和一对第二输出节点。 所述至少一个电容单元耦合到所述一对第一输出节点和所述一对第二输出节点中的至少一个。 第一和第二电感元件分别电耦合到第一输出节点。 第三感应元件电耦合到第二输出节点中的一个并被直流偏置并且磁耦合到第一电感元件。 第四电感元件电耦合到第二输出节点中的另一个并且被直流偏置并且磁耦合到第二电感元件。
-
公开(公告)号:US08941212B2
公开(公告)日:2015-01-27
申请号:US13760551
申请日:2013-02-06
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Hsiao-Tsung Yen , Cheng-Wei Luo , Chin-Wei Kuo , Min-Chie Jeng
CPC classification number: H01L27/08 , H01F17/0013 , H01F2017/002 , H01F2017/0086 , H01L21/82 , H01L23/5227 , H01L23/645 , H01L24/05 , H01L24/13 , H01L24/16 , H01L24/32 , H01L24/73 , H01L24/81 , H01L25/0657 , H01L28/10 , H01L2224/0401 , H01L2224/05548 , H01L2224/05552 , H01L2224/05553 , H01L2224/05554 , H01L2224/05568 , H01L2224/0566 , H01L2224/06181 , H01L2224/13147 , H01L2224/13184 , H01L2224/16225 , H01L2224/16227 , H01L2224/16235 , H01L2224/32145 , H01L2224/32225 , H01L2224/73204 , H01L2224/81203 , H01L2225/06513 , H01L2225/06527 , H01L2924/15311 , H01L2924/19015 , H01L2924/19042 , H01L2924/00
Abstract: The present disclosure relates to a multi-level integrated inductor that provides for a good inductance and Q-factor. In some embodiments, the integrated inductor has a first inductive structure with a first metal layer disposed in a first spiral pattern onto a first IC die and a second inductive structure with a second metal layer disposed in a second spiral pattern onto a second IC die. The first IC die is vertically stacked onto the second IC die. A conductive interconnect structure is located vertically between the first and second IC die and electrically connects the first metal layer to the second metal layer. The conductive interconnect structure provides for a relatively large distance between the first and second inductive structures that provides for an inductance having a high Q-factor over a large range of frequencies.
Abstract translation: 本公开涉及提供良好的电感和Q因子的多电平集成电感器。 在一些实施例中,集成电感器具有第一电感结构,其中第一金属层以第一螺旋图案设置在第一IC管芯上,第二电感结构具有以第二螺旋图案设置在第二IC管芯上的第二金属层。 第一IC芯片垂直堆叠在第二IC芯片上。 导电互连结构垂直地位于第一和第二IC芯片之间并将第一金属层电连接到第二金属层。 导电互连结构提供在第一和第二电感结构之间相对较大的距离,其提供在大范围频率上具有高Q因子的电感。
-
公开(公告)号:US11978712B2
公开(公告)日:2024-05-07
申请号:US17098602
申请日:2020-11-16
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Chin-Wei Kuo , Hsiao-Tsung Yen , Min-Chie Jeng , Yu-Ling Lin
IPC: H01L21/768 , H01L21/56 , H01L23/00 , H01L23/31 , H01L23/367 , H01L23/495 , H01L23/498 , H01L23/522 , H01L23/525 , H01L23/528 , H01L23/532 , H01L23/66 , H01L25/065 , H01P5/02
CPC classification number: H01L24/11 , H01L21/563 , H01L23/49811 , H01L23/49822 , H01L23/5225 , H01L23/525 , H01L23/66 , H01L24/16 , H01L24/81 , H01L25/0657 , H01L23/53223 , H01L23/53238 , H01L23/53257 , H01L23/5329 , H01L2223/6627 , H01L2924/0002 , H01L2924/01028 , H01L2924/01029 , H01L2924/014 , H01P5/028 , Y10T29/49124 , H01L2924/0002 , H01L2924/0001 , H01L2924/0002 , H01L2924/00
Abstract: Methods and apparatus for forming a semiconductor device package with a transmission line using a micro-bump layer are disclosed. The micro-bump layer may comprise micro-bumps and micro-bump lines, formed between a top device and a bottom device. A signal transmission line may be formed using a micro-bump line above a bottom device. A ground plane may be formed using a redistribution layer (RDL) within the bottom device, or using additional micro-bump lines. The RDL formed ground plane may comprise open slots. There may be RDLs at the bottom device and the top device above and below the micro-bump lines to form parts of the ground planes.
-
公开(公告)号:US11145767B2
公开(公告)日:2021-10-12
申请号:US16834312
申请日:2020-03-30
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Hsiao-Tsung Yen , Yu-Ling Lin , Chin-Wei Kuo , Ho-Hsiang Chen , Chewn-Pu Jou , Min-Chie Jeng
IPC: H01L31/00 , H01L21/00 , H01L29/94 , H01L29/66 , H01L21/66 , H01L27/06 , H01L49/02 , H01L23/48 , H01L23/58
Abstract: A semiconductor structure is provided. The semiconductor structure includes a floating substrate; and a capacitor grounded and connected to the floating substrate. A method of manufacturing a semiconductor structure is also provided.
-
公开(公告)号:US20170187344A1
公开(公告)日:2017-06-29
申请号:US15455530
申请日:2017-03-10
Applicant: Taiwan Semiconductor Manufacturing CO., LTD.
Inventor: Hsiao-Tsung Yen , Cheng-Wei Luo
IPC: H03H7/01
CPC classification number: H01P1/2007 , H01F17/0006 , H01F37/00 , H01F2017/0073 , H01P1/203 , H01P3/081 , H03H7/0123 , H03H7/0138
Abstract: A device includes a transmission plate, a conductive plate, a first capacitive unit, and electrodes. The transmission plate is configured to be electrically coupled between an input source and a load. The conductive plate includes a winding structure and is configured to be electrically coupled to ground. The first capacitive unit is electrically coupled between the conductive plate and the transmission plate. The electrodes are interdigitated with the winding structure of the conductive plate.
-
-
-
-
-
-
-
-
-