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公开(公告)号：US07881353B2
公开(公告)日：2011-02-01
申请号：US12414610
申请日：2009-03-30
申请人： Takeo Kageyama , Keishi Takaki , Naoki Tsukiji , Norihiro Iwai , Hitoshzi Shimizu , Yasumasa Kawakita , Suguru Imai
发明人： Takeo Kageyama , Keishi Takaki , Naoki Tsukiji , Norihiro Iwai , Hitoshzi Shimizu , Yasumasa Kawakita , Suguru Imai
IPC分类号： H01S5/00
CPC分类号： H01S5/423 , H01S5/0422 , H01S5/18311 , H01S5/18341 , H01S5/18369 , H01S5/3054
摘要： Provided is a surface emitting laser element array of low cost and high reliability. The surface emitting laser element array has a substrate having a semiconductor of a first conduction type; and a plurality of surface emitting laser elements each having, above the substrate, an active layer sandwiched between a first conduction type semiconductor layer area and a second conduction type semiconductor layer area and disposed between a upper reflective mirror and a lower reflective mirror, the surface emitting laser elements being separated from each other by an electric separation structure formed having such a depth as to reach the substrate. The first conduction type semiconductor layer area is arranged between the substrate and the active layer. The surface emitting laser element array further has a current blocking layer arranged between the substrate and the first conduction type semiconductor layer area; and two electrodes connected to the first conduction type semiconductor layer area and the second conduction type semiconductor layer area, respectively, and arranged on a side of the current blocking layer opposite to the substrate.
摘要翻译： 提供了一种低成本，高可靠性的表面发射激光元件阵列。 表面发射激光元件阵列具有具有第一导电类型的半导体的衬底; 以及多个表面发射激光器元件，每个表面发射激光器元件在衬底之上具有夹在第一导电类型半导体层区域和第二导电类型半导体层区域之间并且设置在上反射镜和下反射镜之间的有源层， 发射激光元件通过形成为具有到达衬底的深度的电分离结构彼此分离。 第一导电类型半导体层区域布置在衬底和有源层之间。 表面发射激光元件阵列还具有布置在衬底和第一导电类型半导体层区域之间的电流阻挡层; 以及分别连接到第一导电类型半导体层区域和第二导电类型半导体层区域并且布置在与衬底相对的电流阻挡层的一侧上的两个电极。
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公开(公告)号：US20090245312A1
公开(公告)日：2009-10-01
申请号：US12414610
申请日：2009-03-30
申请人： Takeo Kageyama , Keishi Takaki , Naoki Tsukiji , Norihiro Iwai , Hitoshzi Shimizu , Yasumasa Kawakita , Suguru Imai
发明人： Takeo Kageyama , Keishi Takaki , Naoki Tsukiji , Norihiro Iwai , Hitoshzi Shimizu , Yasumasa Kawakita , Suguru Imai
CPC分类号： H01S5/423 , H01S5/0422 , H01S5/18311 , H01S5/18341 , H01S5/18369 , H01S5/3054
摘要： Provided is a surface emitting laser element array of low cost and high reliability. The surface emitting laser element array has a substrate having a semiconductor of a first conduction type; and a plurality of surface emitting laser elements each having, above the substrate, an active layer sandwiched between a first conduction type semiconductor layer area and a second conduction type semiconductor layer area and disposed between a upper reflective mirror and a lower reflective mirror, the surface emitting laser elements being separated from each other by an electric separation structure formed having such a depth as to reach the substrate. The first conduction type semiconductor layer area is arranged between the substrate and the active layer. The surface emitting laser element array further has a current blocking layer arranged between the substrate and the first conduction type semiconductor layer area; and two electrodes connected to the first conduction type semiconductor layer area and the second conduction type semiconductor layer area, respectively, and arranged on a side of the current blocking layer opposite to the substrate.
摘要翻译： 提供了一种低成本，高可靠性的表面发射激光元件阵列。 表面发射激光元件阵列具有具有第一导电类型的半导体的衬底; 以及多个表面发射激光器元件，每个表面发射激光器元件在衬底之上具有夹在第一导电类型半导体层区域和第二导电类型半导体层区域之间并且设置在上反射镜和下反射镜之间的有源层， 发射激光元件通过形成为具有到达衬底的深度的电分离结构彼此分离。 第一导电类型半导体层区域布置在衬底和有源层之间。 表面发射激光元件阵列还具有布置在衬底和第一导电类型半导体层区域之间的电流阻挡层; 以及分别连接到第一导电类型半导体层区域和第二导电类型半导体层区域并且布置在与衬底相对的电流阻挡层的一侧上的两个电极。
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公开(公告)号：US07801198B2
公开(公告)日：2010-09-21
申请号：US12057538
申请日：2008-03-28
IPC分类号： H01S5/00
CPC分类号： H01S5/18369 , B82Y20/00 , H01S5/0425 , H01S5/18311 , H01S5/18341 , H01S5/34306
摘要： A surface emitting laser element includes an active layer and a dielectric multilayer mirror formed with a plurality of dielectric layers having different refractive indices for reflecting a light generated in the active layer. At least one of boundaries between the dielectric layers is formed to have a predetermined surface roughness to obtain a desired target reflectance of the dielectric multilayer mirror.
摘要翻译： 表面发射激光器元件包括有源层和形成有多个具有不同折射率的电介质层的电介质多层反射镜，用于反射在有源层中产生的光。 电介质层之间的边界中的至少一个形成为具有预定的表面粗糙度以获得电介质多层反射镜的所需目标反射率。
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公开(公告)号：US20080240192A1
公开(公告)日：2008-10-02
申请号：US12057538
申请日：2008-03-28
CPC分类号： H01S5/18369 , B82Y20/00 , H01S5/0425 , H01S5/18311 , H01S5/18341 , H01S5/34306
摘要： A surface emitting laser element includes an active layer and a dielectric multilayer mirror formed with a plurality of dielectric layers having different refractive indices for reflecting a light generated in the active layer. At least one of boundaries between the dielectric layers is formed to have a predetermined surface roughness to obtain a desired target reflectance of the dielectric multilayer mirror.
摘要翻译： 表面发射激光器元件包括有源层和形成有多个具有不同折射率的电介质层的电介质多层反射镜，用于反射在有源层中产生的光。 电介质层之间的边界中的至少一个形成为具有预定的表面粗糙度以获得电介质多层反射镜的所需目标反射率。
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公开(公告)号：US08861562B2
公开(公告)日：2014-10-14
申请号：US13530255
申请日：2012-06-22
IPC分类号： H01S5/00
CPC分类号： H01S5/18327 , H01S5/18311 , H01S5/18333 , H01S5/18341 , H01S5/18358 , H01S5/18369 , H01S2301/02 , H01S2301/166
摘要： Provided is a vertical light emitting device comprising an upper multilayer reflective film and a lower multilayer reflective film that are formed facing each other and oscillate light; an intermediate layer that is formed below the upper multilayer reflective film and includes a layer having a different composition than the upper multilayer reflective film; and an electrode portion that is formed to sandwich the intermediate layer in a cross-sectional plane parallel to an oscillation direction of the light and to have a top end that is higher than a top surface of the intermediate layer. After the electrode portion is formed to sandwich the intermediate layer, the upper multilayer reflective film is layered on the intermediate layer.
摘要翻译： 提供一种垂直发光装置，其包括彼此面对并且使光振荡的上部多层反射膜和下部多层反射膜; 形成在上层多层反射膜的下方的中间层，具有与上层多层反射膜不同的组成的层; 以及电极部，其形成为将所述中间层夹在与所述光的振荡方向平行的横截面中，并且具有高于所述中间层的顶面的顶端。 在形成电极部以夹持中间层之后，将上部多层反射膜层叠在中间层上。
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公开(公告)号：US20090310637A1
公开(公告)日：2009-12-17
申请号：US12056790
申请日：2008-03-27
申请人： Takeo Kageyama , Norihiro Iwai , Yasumasa Kawakita
发明人： Takeo Kageyama , Norihiro Iwai , Yasumasa Kawakita
IPC分类号： H01S5/00
CPC分类号： H01S5/18311 , H01S5/0425 , H01S5/18327 , H01S5/18341 , H01S5/18369 , H01S2301/18
摘要： A convex-portion forming layer is formed between a current-confinement aperture and a multilayer mirror, and forms a convex portion on each boundary between layers forming the multilayer mirror. The convex portion includes a plane equal to or larger than a spot size of the laser light, where the spot size is decided by a diameter of the current-confinement aperture, a predetermined diffraction angle of the laser light due to the current-confinement aperture, and a distance from the current-confinement aperture.
摘要翻译： 在电流限制孔和多层反射镜之间形成凸部形成层，并且在形成多层反射镜的层之间的每个边界上形成凸部。 凸部包括等于或大于激光的光斑尺寸的平面，其中光点尺寸由电流限制孔径的直径决定，由于电流限制孔径引起的激光的预定衍射角 ，距离电流限制孔径的距离。
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公开(公告)号：US07778297B2
公开(公告)日：2010-08-17
申请号：US12056790
申请日：2008-03-27
申请人： Takeo Kageyama , Norihiro Iwai , Yasumasa Kawakita
发明人： Takeo Kageyama , Norihiro Iwai , Yasumasa Kawakita
IPC分类号： H01S5/00
CPC分类号： H01S5/18311 , H01S5/0425 , H01S5/18327 , H01S5/18341 , H01S5/18369 , H01S2301/18
摘要： A convex-portion forming layer is formed between a current-confinement aperture and a multilayer mirror, and forms a convex portion on each boundary between layers forming the multilayer mirror. The convex portion includes a plane equal to or larger than a spot size of the laser light, where the spot size is decided by a diameter of the current-confinement aperture, a predetermined diffraction angle of the laser light due to the current-confinement aperture, and a distance from the current-confinement aperture.
摘要翻译： 在电流限制孔和多层反射镜之间形成凸部形成层，并且在形成多层反射镜的层之间的每个边界上形成凸部。 凸部包括等于或大于激光的光斑尺寸的平面，其中光点尺寸由电流限制孔径的直径决定，由于电流限制孔径引起的激光的预定衍射角 ，距离电流限制孔径的距离。
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8.发明授权Laser device, method of manufacturing the same, laser device array, light source and light module 有权激光装置及其制造方法，激光装置阵列，光源和光模块公开(公告)号：US09300114B2
公开(公告)日：2016-03-29
申请号：US13435061
申请日：2012-03-30
CPC分类号： H01S5/18311 , B82Y20/00 , H01S5/0021 , H01S5/18333 , H01S5/18358 , H01S5/34306 , H01S5/423 , H01S2301/176
摘要： Provided is a laser device comprising a substrate, an active layer, and a current confinement layer. The current confinement layer includes an oxide layer that is formed extending from a edge of the current confinement layer in a parallel plane parallel to a surface of the substrate, toward a center of the current confinement layer along the parallel plane, and that does not have an inflection point between the edge and a tip portion formed closer to the center or has a plurality of inflection points formed between the edge and the tip portion.
摘要翻译： 提供了一种激光器件，其包括衬底，有源层和电流限制层。 电流限制层包括从平行于衬底表面的平行平面中的电流限制层边缘形成的氧化物层沿着平行平面向电流限制层的中心延伸，并且不具有 所述边缘和形成在所述中心附近的尖端部分之间的拐点或在所述边缘和所述尖端部分之间形成有多个拐点。
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公开(公告)号：US08300671B2
公开(公告)日：2012-10-30
申请号：US13176921
申请日：2011-07-06
IPC分类号： H01S5/00
CPC分类号： H01S5/18311 , H01S5/02208 , H01S5/02284 , H01S5/02288 , H01S5/0425 , H01S5/18322 , H01S5/18369 , H01S2304/04
摘要： A surface emitting laser includes a cavity region formed on a group-III-V compound substrate, which includes an active layer and a current confinement layer that has an aluminum oxide compound and confines a current path through which a current is injected into the active layer, an upper DBR mirror and a lower DBR mirror formed on the substrate, sandwiching the cavity region, and a graded-composition layer disposed to contact the current confinement layer, which has an aluminum composition ratio decreasing monotonically as a distance from the current confinement layer increases. The graded-composition layer includes a first region that contacts the current confinement layer and an oxidation stop layer that contacts the first region and that has a change rate of the aluminum composition ratio larger than that of the first region. The graded-composition layer is oxidized from an interface with the current confinement layer to at least a portion of the oxidation stop layer.
摘要翻译： 表面发射激光器包括形成在III-V族化合物衬底上的空腔区域，该腔体区域包括有源层和具有氧化铝化合物的电流限制层，并限制电流通过该电流通路流入有源层 ，形成在基板上的上DBR镜和下DBR镜，夹着腔区，以及设置成接触电流限制层的渐变组成层，其具有与当前限制层距离单调减小的铝组成比 增加 渐变组成层包括接触电流限制层的第一区域和与第一区域接触的氧化停止层，并且其铝组成比的变化率大于第一区域的变化率。 梯度组合物层从与电流限制层的界面氧化成氧化停止层的至少一部分。
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10.发明授权Vertical cavity surface emitting laser element, vertical cavity surface emitting laser array element, vertical cavity surface emitting laser device, light source device, and optical module 有权垂直腔表面发射激光元件，垂直腔表面发射激光器阵列元件，垂直腔表面发射激光器件，光源器件和光学模块公开(公告)号：US08472492B2
公开(公告)日：2013-06-25
申请号：US12726668
申请日：2010-03-18
IPC分类号： H01S5/00
CPC分类号： H01S5/18341 , B82Y20/00 , G11B7/123 , G11B7/127 , H01L2224/48091 , H01L2224/48137 , H01S5/0014 , H01S5/0071 , H01S5/0208 , H01S5/02228 , H01S5/02248 , H01S5/02284 , H01S5/02288 , H01S5/02292 , H01S5/18311 , H01S5/18369 , H01S5/305 , H01S5/3201 , H01S5/34306 , H01S5/423 , H01L2924/00014
摘要： Included are: an active layer provided between an upper multilayer film reflecting mirror and a lower multilayer film reflecting mirror formed on a GaAs substrate and formed of a periodic structure of a low-refractive-index layer formed of AlxGa1-xAs (0.8≦x≦1) and a high-refractive-index layer formed of AlyGa1-yAs (0≦y≦x), at least one of the low-refractive-index layer and the high-refractive-index layer being of n-type; and a lower electrode provided between the lower multilayer film reflecting mirror and the active layer and configured to inject an electric current into the active layer.
摘要翻译： 包括：在上层多层膜反射镜和形成在GaAs衬底上的下层多层膜反射镜之间形成的有源层，其由Al x Ga 1-x As（0.8 @ x @ x As）形成的低折射率层的周期性结构形成， 1）和由AlyGa1-yAs（0 @ y @ x）形成的高折射率层，低折射率层和高折射率层中的至少一个为n型; 以及下电极，设置在所述下多层膜反射镜和所述有源层之间，并且被配置为向所述有源层注入电流。
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