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    Vertical light emitting device and manufacturing method
    1.
    发明授权
    Vertical light emitting device and manufacturing method 有权
    垂直发光装置及其制造方法

    公开(公告)号：US08861562B2

    公开(公告)日：2014-10-14

    申请号：US13530255

    申请日：2012-06-22

    申请人： Toshihito Suzuki ,  Keishi Takaki ,  Suguru Imai ,  Yasumasa Kawakita

    发明人： Toshihito Suzuki ,  Keishi Takaki ,  Suguru Imai ,  Yasumasa Kawakita

    IPC分类号： H01S5/00

    CPC分类号： H01S5/18327 ,  H01S5/18311 ,  H01S5/18333 ,  H01S5/18341 ,  H01S5/18358 ,  H01S5/18369 ,  H01S2301/02 ,  H01S2301/166

    摘要： Provided is a vertical light emitting device comprising an upper multilayer reflective film and a lower multilayer reflective film that are formed facing each other and oscillate light; an intermediate layer that is formed below the upper multilayer reflective film and includes a layer having a different composition than the upper multilayer reflective film; and an electrode portion that is formed to sandwich the intermediate layer in a cross-sectional plane parallel to an oscillation direction of the light and to have a top end that is higher than a top surface of the intermediate layer. After the electrode portion is formed to sandwich the intermediate layer, the upper multilayer reflective film is layered on the intermediate layer.

    摘要翻译： 提供一种垂直发光装置，其包括彼此面对并且使光振荡的上部多层反射膜和下部多层反射膜; 形成在上层多层反射膜的下方的中间层，具有与上层多层反射膜不同的组成的层; 以及电极部，其形成为将所述中间层夹在与所述光的振荡方向平行的横截面中，并且具有高于所述中间层的顶面的顶端。 在形成电极部以夹持中间层之后，将上部多层反射膜层叠在中间层上。

    SURFACE EMITTING LASER, LIGHT SOURCE, AND OPTICAL MODULE
    2.
    发明申请
    SURFACE EMITTING LASER, LIGHT SOURCE, AND OPTICAL MODULE 有权
    表面发射激光，光源和光学模块

    公开(公告)号：US20120020383A1

    公开(公告)日：2012-01-26

    申请号：US13187838

    申请日：2011-07-21

    申请人： Hitoshi SHIMIZU ,  Yasumasa KAWAKITA

    发明人： Hitoshi SHIMIZU ,  Yasumasa KAWAKITA

    IPC分类号： H01S5/42

    CPC分类号： H01S5/18311 ,  G02B6/4214 ,  H01S5/02292 ,  H01S5/18341 ,  H01S5/18347 ,  H01S5/18358 ,  H01S5/18369 ,  H01S5/3054 ,  H01S5/3215

    摘要： A surface emitting laser includes lower and upper multilayer mirrors, first-conductivity-type and second-conductivity-type contact layers formed between the lower and the upper multilayer mirrors, an active layer formed between the first-conductivity-type and the second-conductivity-type contact layers, a current confinement layer formed between the second-conductivity-type contact layer and the active layer, and first and second composition gradient layers formed facing each other across the current confinement layer. The first composition gradient layer and the second composition gradient layer are formed such that bandgap energy of each of the layers is monotonically decreased from the current confinement layer to an adjacent layer and approach bandgap energy of the adjacent layer in a growth direction.

    摘要翻译： 表面发射激光器包括下层和上层多层反射镜，形成在下层和上层多层反射镜之间的第一导电型和第二导电型接触层，形成在第一导电型和第二导电型之间的有源层 型接触层，形成在第二导电型接触层和有源层之间的电流限制层以及横跨电流限制层彼此形成的第一和第二组成梯度层。 形成第一组成梯度层和第二组成梯度层，使得每个层的带隙能量从电流限制层单调减小到相邻层，并且在生长方向上接近相邻层的带隙能量。

    SURFACE EMITTING LASER
    3.
    发明申请
    SURFACE EMITTING LASER 有权
    表面发射激光

    公开(公告)号：US20120008659A1

    公开(公告)日：2012-01-12

    申请号：US13176921

    申请日：2011-07-06

    申请人： Yasumasa KAWAKITA ,  Hitoshi SHIMIZU ,  Takeo KAGEYAMA

    发明人： Yasumasa KAWAKITA ,  Hitoshi SHIMIZU ,  Takeo KAGEYAMA

    IPC分类号： H01S5/323 ,  H01S5/18

    CPC分类号： H01S5/18311 ,  H01S5/02208 ,  H01S5/02284 ,  H01S5/02288 ,  H01S5/0425 ,  H01S5/18322 ,  H01S5/18369 ,  H01S2304/04

    摘要： A surface emitting laser includes a cavity region formed on a group-III-V compound substrate, which includes an active layer and a current confinement layer that has an aluminum oxide compound and confines a current path through which a current is injected into the active layer, an upper DBR mirror and a lower DBR mirror formed on the substrate, sandwiching the cavity region, and a graded-composition layer disposed to contact the current confinement layer, which has an aluminum composition ratio decreasing monotonically as a distance from the current confinement layer increases. The graded-composition layer includes a first region that contacts the current confinement layer and an oxidation stop layer that contacts the first region and that has a change rate of the aluminum composition ratio larger than that of the first region. The graded-composition layer is oxidized from an interface with the current confinement layer to at least a portion of the oxidation stop layer.

    摘要翻译： 表面发射激光器包括形成在III-V族化合物衬底上的空腔区域，该腔体区域包括有源层和具有氧化铝化合物的电流限制层，并限制电流通过该电流通路流入有源层 ，形成在基板上的上DBR镜和下DBR镜，夹着腔区，以及设置成接触电流限制层的渐变组成层，其具有与当前限制层距离单调减小的铝组成比 增加 渐变组成层包括接触电流限制层的第一区域和与第一区域接触的氧化停止层，并且其铝组成比的变化率大于第一区域的变化率。 梯度组合物层从与电流限制层的界面氧化成氧化停止层的至少一部分。

    SURFACE EMITTING LASER ELEMENT AND METHOD OF FABRICATING THE SAME
    4.
    发明申请
    SURFACE EMITTING LASER ELEMENT AND METHOD OF FABRICATING THE SAME 有权
    表面发射激光元件及其制造方法

    公开(公告)号：US20090310637A1

    公开(公告)日：2009-12-17

    申请号：US12056790

    申请日：2008-03-27

    申请人： Takeo Kageyama ,  Norihiro Iwai ,  Yasumasa Kawakita

    发明人： Takeo Kageyama ,  Norihiro Iwai ,  Yasumasa Kawakita

    IPC分类号： H01S5/00

    CPC分类号： H01S5/18311 ,  H01S5/0425 ,  H01S5/18327 ,  H01S5/18341 ,  H01S5/18369 ,  H01S2301/18

    摘要： A convex-portion forming layer is formed between a current-confinement aperture and a multilayer mirror, and forms a convex portion on each boundary between layers forming the multilayer mirror. The convex portion includes a plane equal to or larger than a spot size of the laser light, where the spot size is decided by a diameter of the current-confinement aperture, a predetermined diffraction angle of the laser light due to the current-confinement aperture, and a distance from the current-confinement aperture.

    摘要翻译： 在电流限制孔和多层反射镜之间形成凸部形成层，并且在形成多层反射镜的层之间的每个边界上形成凸部。 凸部包括等于或大于激光的光斑尺寸的平面，其中光点尺寸由电流限制孔径的直径决定，由于电流限制孔径引起的激光的预定衍射角 ，距离电流限制孔径的距离。

    Surface emitting laser
    6.
    发明授权
    Surface emitting laser 有权
    表面发射激光

    公开(公告)号：US08300671B2

    公开(公告)日：2012-10-30

    申请号：US13176921

    申请日：2011-07-06

    申请人： Yasumasa Kawakita ,  Hitoshi Shimizu ,  Takeo Kageyama

    发明人： Yasumasa Kawakita ,  Hitoshi Shimizu ,  Takeo Kageyama

    IPC分类号： H01S5/00

    CPC分类号： H01S5/18311 ,  H01S5/02208 ,  H01S5/02284 ,  H01S5/02288 ,  H01S5/0425 ,  H01S5/18322 ,  H01S5/18369 ,  H01S2304/04

    摘要： A surface emitting laser includes a cavity region formed on a group-III-V compound substrate, which includes an active layer and a current confinement layer that has an aluminum oxide compound and confines a current path through which a current is injected into the active layer, an upper DBR mirror and a lower DBR mirror formed on the substrate, sandwiching the cavity region, and a graded-composition layer disposed to contact the current confinement layer, which has an aluminum composition ratio decreasing monotonically as a distance from the current confinement layer increases. The graded-composition layer includes a first region that contacts the current confinement layer and an oxidation stop layer that contacts the first region and that has a change rate of the aluminum composition ratio larger than that of the first region. The graded-composition layer is oxidized from an interface with the current confinement layer to at least a portion of the oxidation stop layer.

    摘要翻译： 表面发射激光器包括形成在III-V族化合物衬底上的空腔区域，该腔体区域包括有源层和具有氧化铝化合物的电流限制层，并限制电流通过该电流通路流入有源层 ，形成在基板上的上DBR镜和下DBR镜，夹着腔区，以及设置成接触电流限制层的渐变组成层，其具有与当前限制层距离单调减小的铝组成比 增加 渐变组成层包括接触电流限制层的第一区域和与第一区域接触的氧化停止层，并且其铝组成比的变化率大于第一区域的变化率。 梯度组合物层从与电流限制层的界面氧化成氧化停止层的至少一部分。

    Surface emitting laser, light source, and optical module
    8.
    发明授权
    Surface emitting laser, light source, and optical module 有权
    表面发射激光，光源和光学模块

    公开(公告)号：US08755422B2

    公开(公告)日：2014-06-17

    申请号：US13187838

    申请日：2011-07-21

    申请人： Hitoshi Shimizu ,  Yasumasa Kawakita

    发明人： Hitoshi Shimizu ,  Yasumasa Kawakita

    IPC分类号： H01S5/183

    CPC分类号： H01S5/18311 ,  G02B6/4214 ,  H01S5/02292 ,  H01S5/18341 ,  H01S5/18347 ,  H01S5/18358 ,  H01S5/18369 ,  H01S5/3054 ,  H01S5/3215

    摘要： A surface emitting laser includes lower and upper multilayer mirrors, first-conductivity-type and second-conductivity-type contact layers formed between the lower and the upper multilayer mirrors, an active layer formed between the first-conductivity-type and the second-conductivity-type contact layers, a current confinement layer formed between the second-conductivity-type contact layer and the active layer, and first and second composition gradient layers formed facing each other across the current confinement layer. The first composition gradient layer and the second composition gradient layer are formed such that bandgap energy of each of the layers is monotonically decreased from the current confinement layer to an adjacent layer and approach bandgap energy of the adjacent layer in a growth direction.

    摘要翻译： 表面发射激光器包括下层和上层多层反射镜，形成在下层和上层多层反射镜之间的第一导电型和第二导电型接触层，形成在第一导电型和第二导电型之间的有源层 型接触层，形成在第二导电型接触层和有源层之间的电流限制层以及横跨电流限制层彼此形成的第一和第二组成梯度层。 形成第一组成梯度层和第二组成梯度层，使得每个层的带隙能量从电流限制层单调减小到相邻层，并且在生长方向上接近相邻层的带隙能量。

    Vertical-cavity surface emitting laser
    10.
    发明授权
    Vertical-cavity surface emitting laser 失效
    垂直腔表面发射激光

    公开(公告)号：US08355421B2

    公开(公告)日：2013-01-15

    申请号：US12560875

    申请日：2009-09-16

    申请人： Yasumasa Kawakita ,  Kageyama Takeo ,  Hitoshi Shimizu

    发明人： Yasumasa Kawakita ,  Kageyama Takeo ,  Hitoshi Shimizu

    IPC分类号： H01S5/10 ,  H01S5/183 ,  H01S5/323

    CPC分类号： H01S5/18311 ,  H01S5/0207 ,  H01S5/3201 ,  H01S5/32366

    摘要： A vertical cavity surface emitting laser element as described herein can suppress of any dislocation, when a distributed Bragg reflector (DBR) mirror is formed on the onto a substrate (1). The vertical cavity surface emitting laser can be designed so that an average of strain in the DBR mirror (2) and a layer thickness of the DBR mirror (2) are in reference to a curvature of the substrate (1) in order to satisfy a predetermined condition, and then nitrogen can be added into the DBR mirror (2) with a composition that corresponds to a designed average of strain in the DBR mirror (2). For example, the average composition of nitrogen can be designed to be between 0.028% and 0.390%.

    摘要翻译： 当分布式布拉格反射镜（DBR）反射镜形成在基板（1）上时，如本文所述的垂直腔表面发射激光器元件可以抑制任何位错。 可以设计垂直腔表面发射激光器，使得DBR反射镜（2）中的应变平均值和DBR反射镜（2）的层厚度参考基板（1）的曲率，以满足 预定条件，然后氮气可以以对应于DBR反射镜（2）中设计的应变平均值的组成添加到DBR反射镜（2）中。 例如，氮的平均组成可以设计在0.028％和0.390％之间。