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    Apparatus for detecting an end point of etching
    1.
    发明授权
    Apparatus for detecting an end point of etching 失效
    用于检测蚀刻终点的装置

    公开(公告)号：US5118378A

    公开(公告)日：1992-06-02

    申请号：US751677

    申请日：1991-08-23

    申请人： Tatsuo Moroi ,  Keiji Tada ,  Noriaki Yamamoto ,  Tetsunori Kaji ,  Gen Marumoto ,  Yuzou Ohhirabaru

    发明人： Tatsuo Moroi ,  Keiji Tada ,  Noriaki Yamamoto ,  Tetsunori Kaji ,  Gen Marumoto ,  Yuzou Ohhirabaru

    IPC分类号： H01J37/32

    CPC分类号： H01J37/32935 ,  H01J37/32963

    摘要： A method of detecting an end point of etching by emission spectroscopy. Using a constant ratio between emission intensities in the course of etching and after the termination thereof, a correction value is computed with data of a waveform already adjusted to be capable of detecting an end point of etching and the corresponding emission intensity in the course of etching treatment thereafter, and the waveform of corresponding emission intensity in the course of etching treatment is processed so that the detection can be conducted on the same level as in the end point detection already adjusted to be capable of detecting the end point of etching at the time of treatment. Thus, irrespective of the reduction of the quantity of emission for an emission detection at each time of treatment, a constant electric signal of the same detecting level can be obtained, making it possible to detect an end point of etching with the same accuracy as in the initial treatment.

    摘要翻译： 通过发射光谱法检测蚀刻终点的方法。 在蚀刻过程中和在其终止之后使用发射强度之间的恒定比率，通过已经调节为能够检测蚀刻终点的蚀刻波形和蚀刻过程中的相应发射强度的数据来计算校正值 然后进行处理，并且处理在蚀刻处理过程中相应的发射强度的波形，使得可以在与已经调节为能够检测该刻蚀终点的终点检测相同的水平上进行检测 的治疗。 因此，不管每次处理时发射检测的发射量是否减少，都可以获得相同检测电平的恒定电信号，使得可以以与以下相同的精度来检测蚀刻终点 初步治疗。

    MICROCHIP SOLUTION SENDING SYSTEM
    2.
    发明申请
    MICROCHIP SOLUTION SENDING SYSTEM 有权
    MICROCHIP解决方案发送系统

    公开(公告)号：US20140099236A1

    公开(公告)日：2014-04-10

    申请号：US14116219

    申请日：2012-05-08

    申请人： Noriaki Yamamoto ,  Youichi Aoki

    发明人： Noriaki Yamamoto ,  Youichi Aoki

    IPC分类号： G01N33/543

    CPC分类号： G01N33/54373 ,  B01L3/502715 ,  B01L2200/0605 ,  B01L2300/0877 ,  B01L2400/0487 ,  G01N2035/106

    摘要： A microchip solution sending system may include a flow passage assembly that is at least provided with a fine flow passage that is provided with a detection region including a formed reaction field to which an antibody that reacts with a specific antigen is fixed; and a micro pump that is connected to the flow passage assembly and that is configured to send a specimen material solution that includes the specific antigen in a reciprocating manner. The specimen material solution that has been sent may pass through the detection region in a repetitive manner in the case in which the micro pump sends the specimen material solution in a reciprocating manner,

    摘要翻译： 微芯片溶液传送系统可以包括至少具有细流路的流动通道组件，该流动通道设置有检测区域，该检测区域包括与特定抗原反应的抗体固定的形成的反应场; 以及微型泵，其与所述流路组件连接并且被配置为以往复方式发送包括所述特定抗原的样品材料溶液。 在微型泵以往复方式发送样品材料溶液的情况下，已经送出的样品材料溶液可以重复地通过检测区域，

    Method, system and program for evaluating reliability on component
    4.
    发明授权
    Method, system and program for evaluating reliability on component 有权
    用于评估组件可靠性的方法，系统和程序

    公开(公告)号：US07437269B2

    公开(公告)日：2008-10-14

    申请号：US11392693

    申请日：2006-03-30

    申请人： Noriyasu Ninagawa ,  Noriaki Yamamoto ,  Yuzo Hiroshige

    发明人： Noriyasu Ninagawa ,  Noriaki Yamamoto ,  Yuzo Hiroshige

    IPC分类号： G06F11/30 ,  G06F19/00 ,  G21C17/00

    CPC分类号： G06F17/50

    摘要： The present invention provides a system which is capable of supporting a designer in confirming constituent information of a component at early stages of design. The system has a functional configuration, in which constituents contained in a target component and a content of each of the constituents are calculated referring to a constituent information table based on identification information of the target component. Conformity of the constituent to environmental regulations is evaluated based on the content. A component similar to the target component is extracted referring to an environmental qualification information table to calculate constituents contained in the similar component and a content of each of the constituents; and credibility of evaluation of the conformity to environmental regulations is evaluated based on a difference between the content of the constituent in the target component and the content of the constituent in the similar component.

    摘要翻译： 本发明提供一种系统，其能够支持设计者在设计的早期阶段确认组件的构成信息。 系统具有功能配置，其中，基于目标组件的识别信息，参考构成信息表来计算包含在目标组件中的组成部分和每个组成部分的内容。 根据内容对成分与环境法规的一致性进行评估。 提取与目标成分相似的成分，参照环境资格信息表，计算出相似成分中含有的成分和各成分的含量; 基于目标成分中的成分的含量与相似成分的成分的含量之间的差异来评价对环境规定的一致性的评价的可信度。

    Process for etching
    7.
    发明授权
    Process for etching 失效
    蚀刻工艺

    公开(公告)号：US5110408A

    公开(公告)日：1992-05-05

    申请号：US658254

    申请日：1991-02-20

    申请人： Takashi Fujii ,  Hironobu Kawahara ,  Kazuo Takata ,  Masaharu Nishiumi ,  Noriaki Yamamoto

    发明人： Takashi Fujii ,  Hironobu Kawahara ,  Kazuo Takata ,  Masaharu Nishiumi ,  Noriaki Yamamoto

    IPC分类号： H01L21/302 ,  H01L21/28 ,  H01L21/3065 ,  H01L21/308 ,  H01L21/3213

    CPC分类号： H01L21/3065 ,  H01L21/30655 ,  H01L21/3085 ,  H01L21/32136 ,  H01L21/32137 ,  H01L21/32139

    摘要： The present invention relates to the etching of a gate film, a tungsten film, a silicon film, etc. In the present invention, use is made of an etching gas comprising a mixture composed of a reductive fluoride gas, a hydrocarbon gas and a halogen gas having a larger atomic diameter than a material to be etched, or a mixture composed of a reductive fluoride gas and a Cl-containing hydrocarbon gas, and the process comprises the step of conducting anisotropic etching of a material to be etched with an etching gas (a reductive fluoride gas), the step of forming a protective film by a depositing gas (a hydrocarbon gas), and the step of removing excess deposits formed as the protective film by means of a gas reactive with the protective film (a halogen gas or a Cl-containing hydrogen gas), wherein anisotropic etching is conducted by forming a protective film on a side wall while removing excess deposits formed as the protective film, thus enabling the anisotropic etching to be conducted with good accuracy.

    摘要翻译： 本发明涉及栅极膜，钨膜，硅膜等的蚀刻。在本发明中，使用包括由还原氟化物气体，烃气体和卤素组成的混合物的蚀刻气体 具有比待蚀刻材料更大的原子直径的气体或由还原性氟化物气体和含Cl的烃气体组成的混合物，该方法包括用蚀刻气体进行各向异性腐蚀蚀刻的步骤 （还原氟化物气体），通过沉积气体（烃气体）形成保护膜的步骤，以及通过与保护膜反应的气体（卤素气体）除去形成为保护膜的多余的沉积物的步骤 或含Cl的氢气），其中通过在侧壁上形成保护膜进行各向异性蚀刻，同时除去形成为保护膜的多余的沉积物，从而能够进行各向异性蚀刻 准确度好

    Microchip solution sending system
    8.
    发明授权
    Microchip solution sending system 有权

    公开(公告)号：US09952210B2

    公开(公告)日：2018-04-24

    申请号：US14116219

    申请日：2012-05-08

    申请人： Noriaki Yamamoto ,  Youichi Aoki

    发明人： Noriaki Yamamoto ,  Youichi Aoki

    IPC分类号： B01L3/00 ,  G01N33/543 ,  G01N35/10

    CPC分类号： G01N33/54373 ,  B01L3/502715 ,  B01L2200/0605 ,  B01L2300/0877 ,  B01L2400/0487 ,  G01N2035/106

    摘要： A microchip solution sending system may include a flow passage assembly that is at least provided with a fine flow passage that is provided with a detection region including a formed reaction field to which an antibody that reacts with a specific antigen is fixed; and a micro pump that is connected to the flow passage assembly and that is configured to send a specimen material solution that includes the specific antigen in a reciprocating manner. The specimen material solution that has been sent may pass through the detection region in a repetitive manner in the case in which the micro pump sends the specimen material solution in a reciprocating manner.

    Nanohole sensor chip with reference sections
    9.
    发明授权
    Nanohole sensor chip with reference sections 有权

    公开(公告)号：US09851350B2

    公开(公告)日：2017-12-26

    申请号：US14357548

    申请日：2012-11-21

    申请人： Noriaki Yamamoto

    发明人： Noriaki Yamamoto

    IPC分类号： G01N21/552 ,  G01N33/543 ,  G01N33/553

    CPC分类号： G01N33/54373 ,  G01N21/554 ,  G01N33/553

    摘要： A device and method for detecting and assessing the quantity of a biological, biochemical, or chemical analyte in a test sample using a simple light source and the naked eye are disclosed. In one embodiment, the device comprises a nanohole sensor chip with two sections, the first of which is a test section, upon which capture agents for a particular analyte are immobilized, and the second of which is a reference section, upon which capture agents conjugated with known quantities of the analyte are immobilized. In another embodiment of the invention, a nanohole sensor chip with a test section and a plurality of reference sections is disclosed. The sensor utilizes light intensity changes exhibited by Fano resonances in the nanoholes for detection of analytes, and allows comparison between the light intensity changes between the reference sections and the test sections for assessing the quantity of the analyte in the sample.