Microvalve
    2.
    发明授权
    Microvalve 失效
    微型阀门

    公开(公告)号:US5681024A

    公开(公告)日:1997-10-28

    申请号:US556911

    申请日:1995-11-20

    CPC分类号: F15C3/04

    摘要: The present invention relates to a microvalve usable primarily as a pilot lve in pneumatic controls. The prior art solenoid valves used in this field can be miniaturized only at considerably high cost. The microvalve of the invention consists of a first part (1), on the pressure side, with a diaphragm structure (3) as the movable closing component and a second part (2) with an outlet aperture (7) and a seat (5). The diaphragm structure has heating elements and is coated on one side with a material with differing coefficients of heat expansion, in such a way that heating causes the diaphragm to bend against the pressure applied on it. At least one of the two parts has a recess (6) of defined depth arranged in such a way that with the valve closed hollows are formed which are heated by the heating elements. The microvalve described can economically produced with semiconductor technology means and has improved switching properties on account of its combined thermo-mechanical/thermo-pneumatic method of operation.

    Microsensor for measuring the position of liquids in capillaries
    3.
    发明授权
    Microsensor for measuring the position of liquids in capillaries 有权
    用于测量毛细血管液体位置的微量传感器

    公开(公告)号:US06748804B1

    公开(公告)日:2004-06-15

    申请号:US10088200

    申请日:2002-07-22

    IPC分类号: G01F2300

    CPC分类号: G01F23/242

    摘要: A sensor element for electrically measuring the position of liquid levels, comprising a substrate (2) and a plurality of electrodes (3) that can be contacted individually and that are mounted on the substrate, characterized in that the electrodes comprise sensor-active partial electrodes (5) that are networked with electrical connections (7), with the partial electrodes of two respective electrodes always being positioned opposite one another, separated by a distance, as partial electrode pairs (11) and with the electrode pairs (8) thus formed recurring periodically over the length of the sensor. Quasi-digital measuring methods are derived from the behavior of the impedance of the electrode pairs, whereby the liquid level is measured by detecting a conductivity boundary in a capillary filling.

    摘要翻译: 一种用于电测量液面位置的传感器元件,包括可单独接触并且被安装在基片上的多个电极(3)的基片(2)和电极(3),其特征在于,电极包括传感器 - 有源部分电极 (5),其中两个相应电极的部分电极总是彼此相对定位,间隔开一段距离,作为部分电极对(11)和由此形成的电极对(8) 在传感器的长度上周期性地循环。 准数字测量方法源自电极对的阻抗的行为,由此通过检测毛细管填充物中的电导率边界来测量液位。

    Micromechanic pump
    5.
    发明授权
    Micromechanic pump 有权
    微机械泵

    公开(公告)号:US06655923B1

    公开(公告)日:2003-12-02

    申请号:US09979138

    申请日:2002-03-22

    IPC分类号: F04F1100

    摘要: A micromechanical pump has a membrane (2) positioned above a substrate (1). The substrate is provided with a cavity (8) which is formed in an endlessly continuous shape (e.g., circular) to provide a channel for a drive fluid. A cover (9) is positioned above the substrate with the membrane being between the substrate and cover. The cover is provided with an inlet (11) and outlet (10). Electrodes (3, 4) are provided around the floor of the cavity. The electrodes are selectively actuated so as to attract selected areas of the membrane resulting in a gap forming between the cover and the selected areas of the membrane. The areas of the membrane above the non-selected electrodes form a seal with the cover. By selectively actuating the electrodes a peristaltic pumping action results in a pumped fluid traveling from the inlet, through the gaps and out the outlet.

    摘要翻译: 微机械泵具有位于基板(1)上方的膜(2)。 衬底设置有空腔(8),其形成为环形连续形状(例如,圆形),以提供用于驱动流体的通道。 覆盖物(9)位于衬底上方,膜位于衬底和覆盖层之间。 盖设有入口(11)和出口(10)。 电极(3,4)设置在空腔的地板周围。 选择性地致动电极以吸引膜的选定区域,从而在盖和膜的选定区域之间形成间隙。 未选择的电极上方的膜的区域与盖形成密封。 通过选择性地致动电极,蠕动泵送动作导致泵送的流体从入口行进通过间隙并从出口出来。

    Micromechanical Hf switching element and method for the production thereof
    6.
    发明授权
    Micromechanical Hf switching element and method for the production thereof 有权
    微机械Hf开关元件及其制造方法

    公开(公告)号:US07939993B2

    公开(公告)日:2011-05-10

    申请号:US11628246

    申请日:2005-05-27

    IPC分类号: H01L41/08

    摘要: The present invention relates to a micromechanical HF switching element, in which a freestanding movable element is situated above a metallic surface on a substrate in such way that it is drawn to the metallic surface, to which a dielectric layer is applied, by applying an electrical voltage between the metallic surface and the movable element. The present invention also relates to a method for producing micromechanical HF switching elements of this type, in which the dielectric layer is deposited on the metal surface. The present method is distinguished in that a piezoelectric AlN layer having a columnar, polycrystalline structure and a texture is deposited on the metallic surface as the dielectric layer. Significantly reduced charging of the dielectric material and increased long-term stability of the switching element are achieved by the present method and the HF switching element thus produced.

    摘要翻译: 微机械HF开关元件技术领域本发明涉及一种微机械式HF开关元件,其中独立式可移动元件位于基板上的金属表面上方,使得其被拉到金属表面,施加电介质层,通过施加电 金属表面和可动元件之间的电压。 本发明还涉及这种类型的微机械HF开关元件的制造方法,其中介电层沉积在金属表面上。 本方法的特征在于具有柱状,多晶结构和纹理的压电AlN层作为电介质层沉积在金属表面上。 通过本发明的方法和由此产生的HF开关元件可以实现显着降低介电材料的充电和提高开关元件的长期稳定性。

    Device For Pipetting a Liquid
    7.
    发明申请
    Device For Pipetting a Liquid 失效
    用于移液的装置

    公开(公告)号:US20080184822A1

    公开(公告)日:2008-08-07

    申请号:US10484740

    申请日:2002-07-24

    申请人: Thomas Lisec

    发明人: Thomas Lisec

    IPC分类号: B01L3/02

    摘要: Disclosed is a device for pipetting a liquid, comprising a pipette body enclosing a pipette volume, into which a fluid medium can be placed and in which an actuator that controllably displaces the medium in the pipette volume is provided, as well as a pipette tip, which can be connected to the pipette volume in an fluid-tight manner.The present invention is distinguished by the pipette volume and the pipette tip being connected via a fluid-tight connecting means directly or indirectly to each other in such a manner that the pipette tip is moveable relative to the pipette volume

    摘要翻译: 公开了一种用于移液的装置,包括一个包含移液管容积的移液管体,流体介质可以放置在该移液管体内,并且其中提供了可控地移动移液管容积中的介质的致动器,以及移液管尖端, 其可以以流体密封的方式连接到移液管体积。 本发明的特征在于移液管体积和移液管尖端通过流体密封连接装置直接或间接地彼此连接,使得移液管吸头相对于移液管容积可移动

    Method for producing a three-dimensional structure and three-dimensional structure
    8.
    发明授权
    Method for producing a three-dimensional structure and three-dimensional structure 有权
    三维结构和三维结构的制造方法

    公开(公告)号:US09221217B2

    公开(公告)日:2015-12-29

    申请号:US13983637

    申请日:2012-02-03

    摘要: The invention relates to a method for producing a three-dimensional structure. The method according to the invention comprises the following steps: applying to or introducing into a carrier element (1; 7; 16) particles (2), a plurality of at least partially interlinked cavities being formed between the particles (2) and the particles (2) coming into contact in points of contact, and interconnecting the particles (2) in the points of contact by coating the system consisting of particles and the carrier element, the coat (4) produced during coating penetrating the cavities at least to some extent. The method according to the invention allows the production of three-dimensional structures with little effort.

    摘要翻译: 本发明涉及三维结构的制造方法。 根据本发明的方法包括以下步骤:向载体元件(1; 7; 16)施加或引入颗粒(2),在颗粒(2)和颗粒之间形成多个至少部分互连的空腔 (2)以接触点接触,并且通过涂覆由颗粒和载体元件组成的系统将接触点中的颗粒(2)互连,在涂覆期间产生的涂层(4)至少渗透到空腔中 程度。 根据本发明的方法允许以很小的努力生产三维结构。

    Device for pipetting a liquid
    10.
    发明授权
    Device for pipetting a liquid 失效
    用于移液的装置

    公开(公告)号:US07526968B2

    公开(公告)日:2009-05-05

    申请号:US10484740

    申请日:2002-07-24

    申请人: Thomas Lisec

    发明人: Thomas Lisec

    IPC分类号: B01L3/02

    摘要: A device is disclosed for pipetting a liquid, comprising a pipette body enclosing a pipette volume, into which a fluid medium can be placed and in which an actuator that controllably displaces the medium in the pipette volume is provided, as well as a pipette tip, which can be connected to the pipette volume in a fluid-tight manner. The present invention is distinguished by the pipette volume and the pipette tip being connected via a fluid-tight connecting means directly or indirectly to each other in such a manner that the pipette tip is moveable relative to the pipette volume.

    摘要翻译: 公开了一种用于吸移液体的装置,其包括包围移液管体积的移液管体,流体介质可以放置在该移液管体中,并且其中设置有可控地移动移液管容积中的介质的致动器,以及移液管尖端, 其可以以流体密封的方式连接到移液管体积。 本发明的特征在于移液管体积和移液管尖端通过流体密封连接装置直接或间接地彼此连接,使得移液管吸头相对于移液管体积是可移动的。