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公开(公告)号：US5470681A
公开(公告)日：1995-11-28
申请号：US173394
申请日：1993-12-23
申请人： Timothy A. Brunner , Derek B. Dove , Louis L. Hsu
发明人： Timothy A. Brunner , Derek B. Dove , Louis L. Hsu
IPC分类号： G03F1/30 , H01L21/027 , G03F9/00
CPC分类号： G03F1/30
摘要： Selective deposition of silica from a liquid phase solution of silica in hydrofluorosilicic acid through openings in a pattern of polyimide or similar organic material provides an optically improved phase shift mask structure for making lithographic exposures since deposition can be made substantially anisotropic to yield deposits of substantially uniform thickness. Deposition from the liquid phase is readily controlled and highly predictable control of deposition rate can be achieved by control of temperature of a low temperature deposition process. Therefore the optical quality of the mask need not be compromised by other structures, such as etch stop layers, otherwise necessary to achieve high phase shift accuracy and the deposits of phase shift material are substantially homogeneous. The process of deposition from the liquid phase can be stopped and started at will and the mask can be fabricated by a process which is substantially free from material-dependent or material-based process restrictions. The index of refraction of the deposited material can also be adjusted by annealing.
摘要翻译： 从二氧化硅的液相溶液中选择性沉积二氧化硅在氢氟硅酸中通过聚酰亚胺或类似有机材料图案的开口提供光学改进的相移掩模结构，用于制备平版印刷曝光，因为沉积可以基本上是各向异性的，以产生基本均匀的沉积物 厚度。 易于控制液相的沉积，可以通过控制低温沉积工艺的温度来实现沉积速率的高度可预测的控制。 因此，掩模的光学质量不需要被其它结构（例如蚀刻停止层）所影响，否则为实现高相移精度而必需，并且相移材料的沉积基本上是均匀的。 可以停止从液相沉积的过程并且随意开始，并且可以通过基本上不含材料依赖或基于材料的工艺限制的方法来制造掩模。 沉积材料的折射率也可以通过退火进行调整。
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公开(公告)号：US5532089A
公开(公告)日：1996-07-02
申请号：US173383
申请日：1993-12-23
IPC分类号： G03F1/29 , H01L21/027 , G03F9/00
CPC分类号： G03F1/29 , Y10T428/24322
摘要： A simplified method of forming a phase shift structure for a lithographic mask includes the conformal deposition of a phase shift material, preferably having an index of refraction similar to that of the mask substrate, over a patterned layer of opaque material and exposed areas of the mask substrate corresponding to the pattern. The thickness of the opaque patterned layer, in combination with the conformal deposition preferably establishes a differentially altered optical path length to produce a phase shift which enhances contrast and increases illumination and resolution in fine patterns. In variant forms of the invention, the conformal deposition of either phase shift material or a sidewall spacer material is followed by an anisotropic removal of material to form the phase shift structure. The application of phase shift material over the mask surface increases durability of the mask and also enhances contrast of images produced with other phase-shift mask feature structures, such as Levenson-type shifters.
摘要翻译： 形成用于光刻掩模的相移结构的简化方法包括在不透明材料的图案化层和掩模的暴露区域上的相移材料的共形沉积，优选地具有类似于掩模衬底的折射率的相移材料 衬底对应于图案。 不透明图案层的厚度与保形沉积结合优选地建立差异改变的光路长度以产生增强对比度并增加精细图案中的照明和分辨率的相移。 在本发明的变体形式中，相移材料或侧壁间隔物材料的共形沉积之后是材料的各向异性去除以形成相移结构。 在掩模表面上施加相移材料增加了掩模的耐久性，并且还增强了与其他相移掩模特征结构（例如莱文森型移位器）产生的图像的对比度。
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公开(公告)号：US5675164A
公开(公告)日：1997-10-07
申请号：US486221
申请日：1995-06-07
IPC分类号： G03F7/20 , H01L21/027 , H01L21/28 , H01L21/308 , H01L21/336 , H01L29/423 , H01L29/51 , H01L29/78
CPC分类号： H01L21/28185 , H01L21/0273 , H01L21/3086 , H01L21/3088 , H01L29/42368 , H01L29/6659 , H01L29/66795 , H01L29/785 , G03F7/2022 , H01L21/28194 , H01L21/28202 , H01L21/28211 , H01L29/518 , H01L29/7833
摘要： A high performance transistor includes mesa structures in a conduction region, favoring corner conduction, together with lightly doped mesa structures and mid-gap gate material also favoring operation in a fully depleted mode. Mesa structures are formed at sub-lithographic size and pitch as recesses or by epitaxial growth together with exposure of a resist by an interference pattern generation with illuminating radiation and multiple exposures using a mask shifted by a sub-lithographic distance. For an NFET, conduction electron and hole distribution profiles in the mesa structures and gate capacitance are adjusted with dielectric thickness, including deposition of oxide from a liquid solution at room temperature. Transconductance may be altered by change of the aspect ratio of the mesa structures. Lightly doped drain structures are also formed at sub-lithographic sizes by self-aligned processes.
摘要翻译： 高性能晶体管包括传导区域中的台面结构，有利于拐角传导，以及轻掺杂的台面结构和中间间隙栅极材料，还有利于在完全耗尽模式下的操作。 Mesa结构以亚光刻尺寸和间距形成为凹陷，或通过外延生长形成，同时通过具有照射辐射的干涉图案生成以及使用偏移了亚光刻距离的掩模的多次曝光来曝光抗蚀剂。 对于NFET，通过介电厚度调整台面结构和栅极电容中的导电电子和空穴分布特征，包括在室温下从液体溶液中沉积氧化物。 跨导可以通过台面结构的纵横比的变化来改变。 轻掺杂漏极结构也通过自对准工艺以亚光刻尺寸形成。
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4.发明申请ON-PRODUCT FOCUS OFFSET METROLOGY FOR USE IN SEMICONDUCTOR CHIP MANUFACTURING 有权半导体芯片制造中使用的产品焦点偏移量纲公开(公告)号：US20140071415A1
公开(公告)日：2014-03-13
申请号：US13608455
申请日：2012-09-10
申请人： Timothy A. Brunner
发明人： Timothy A. Brunner
IPC分类号： G03B27/52
CPC分类号： G03F1/50 , G03F1/44 , G03F7/70641
摘要： A focus monitor structure on a reticle includes a lithographic feature region, a horizontal grating region including a horizontal grating located on one side of the lithographic feature region, and a vertical grating region including a vertical grating located on the opposite side of the lithographic feature region. A polarized illumination beam causes a printed image of the lithographic feature region to shift either toward the direction of the horizontal grating region or toward the direction of the vertical grating region in a manner that depends on the sign of the focus offset of the photoresist layer relative to the lens of an exposure tool. The magnitude and sign of the focus offset can be monitored to provide a real-time feedback on the focus offset of the exposure tool by measuring the shift of the printed image of the lithographic feature region.
摘要翻译： 掩模版上的聚焦监视器结构包括光刻特征区域，包括位于光刻特征区域的一侧的水平光栅的水平光栅区域和包括位于光刻特征区域相对侧的垂直光栅的垂直光栅区域 。 偏振照明光束使得光刻特征区域的印刷图像朝向水平光栅区域的方向或朝向垂直光栅区域的方向移动，其方式取决于光致抗蚀剂层相对的聚焦偏移的符号 到曝光工具的镜头。 可以通过测量光刻特征区域的打印图像的移动来监视聚焦偏移的幅度和符号，以提供对曝光工具的聚焦偏移的实时反馈。
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公开(公告)号：US08582078B2
公开(公告)日：2013-11-12
申请号：US13098723
申请日：2011-05-02
CPC分类号： G03B27/52 , G01N21/956 , G01N2021/95676 , G03F1/84
摘要： Methods, systems and apparatus for monitoring the state of a reticle by providing a reticle having a device exposure region in an imaging tool, defining one or more image fields across the device exposure region, and transmitting energy through the device exposure region. A detector detects the energy in the image field(s) at one or more testing intervals and a system control generates a transmission profile of average energy transmissions for each image field. Using this transmission profile, the state of the reticle is then determined at each testing interval followed by taking action based on the reticle state. The state of the reticle identifies whether the device exposure region has been deleteriously degraded, and as such, the reticle is no longer suitable for use. This is accomplished by determining if any average energy transmission of any image field across the reticle exceeds an allowable energy transmission threshold.
摘要翻译： 通过在成像工具中提供具有装置曝光区域的掩模版来限定掩模版的状态的方法，系统和装置，其限定穿过装置曝光区域的一个或多个图像场，以及通过装置曝光区域传输能量。 检测器以一个或多个测试间隔检测图像场中的能量，并且系统控制为每个图像场生成平均能量传输的传输轮廓。 使用该传输配置文件，然后在每个测试间隔确定掩模版的状态，随后基于掩模版状态采取动作。 掩模版的状态识别设备曝光区域是否被有害降解，因此，掩模版不再适合使用。 这是通过确定跨越掩模版的任何图像场的任何平均能量传输是否超过允许的能量传输阈值来实现的。
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6.发明授权Method for producing self-aligned mask, articles produced by same and composition for same 有权用于生产自对准面罩的方法，由相同制造的制品及其组合物公开(公告)号：US08119322B2
公开(公告)日：2012-02-21
申请号：US12107889
申请日：2008-04-23
CPC分类号： H01L21/76834 , G03F7/0035 , G03F7/2022 , H01L21/76849 , Y10S430/146
摘要： A method for forming a self-aligned pattern on an existing pattern on a substrate comprising applying a coating of a solution containing a masking material in a carrier, the masking material being either photo or thermally sensitive; performing a blanket exposure of the substrate; and allowing at least a portion of the masking material to preferential develop in a fashion that is replicates the existing pattern of the substrate. The existing pattern may be comprised of a first set of regions of the substrate having a first reflectivity and a second set of regions of the substrate having a second reflectivity different from the first composition. The first set of regions may include one or more metal elements and the second set of regions may include a dielectric. Structures made in accordance with the method.
摘要翻译： 一种用于在衬底上的现有图案上形成自对准图案的方法，包括在载体中涂覆含有掩蔽材料的溶液的涂层，所述掩蔽材料是光敏的或热敏感的; 进行基板的覆盖曝光; 并且允许至少一部分掩模材料以复制衬底的现有图案的方式优先显影。 现有图案可以由具有第一反射率的第一组基底区域和第二组区域组成，该第二组区域具有不同于第一组成的第二反射率。 第一组区域可以包括一个或多个金属元件，并且第二组区域可以包括电介质。 按照该方法制造的结构。
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公开(公告)号：US08023102B2
公开(公告)日：2011-09-20
申请号：US12105311
申请日：2008-04-18
CPC分类号： G03B27/52 , G01N21/956 , G01N2021/95676 , G03F1/84
摘要： Methods, systems and apparatus for monitoring the state of a reticle by providing a reticle having a device exposure region in an imaging tool, defining one or more image fields across the device exposure region, and transmitting energy through the device exposure region. A detector detects the energy in the image field(s) at one or more testing intervals and a system control generates a transmission profile of average energy transmissions for each image field. Using this transmission profile, the state of the reticle is then determined at each testing interval followed by taking action based on the reticle state. The state of the reticle identifies whether the device exposure region has been deleteriously degraded, and as such, the reticle is no longer suitable for use. This is accomplished by determining if any average energy transmission of any image field across the reticle exceeds an allowable energy transmission threshold.
摘要翻译： 通过在成像工具中提供具有装置曝光区域的掩模版来限定掩模版的状态的方法，系统和装置，其限定穿过装置曝光区域的一个或多个图像场，以及通过装置曝光区域传输能量。 检测器以一个或多个测试间隔检测图像场中的能量，并且系统控制为每个图像场生成平均能量传输的传输轮廓。 使用该传输配置文件，然后在每个测试间隔确定掩模版的状态，随后基于掩模版状态采取动作。 掩模版的状态识别设备曝光区域是否被有害降解，因此，掩模版不再适合使用。 这是通过确定跨越掩模版的任何图像场的任何平均能量传输是否超过允许的能量传输阈值来实现的。
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公开(公告)号：US20090262317A1
公开(公告)日：2009-10-22
申请号：US12105311
申请日：2008-04-18
CPC分类号： G03B27/52 , G01N21/956 , G01N2021/95676 , G03F1/84
摘要： Methods, systems and apparatus for monitoring the state of a reticle by providing a reticle having a device exposure region in an imaging tool, defining one or more image fields across the device exposure region, and transmitting energy through the device exposure region. A detector detects the energy in the image field(s) at one or more testing intervals and a system control generates a transmission profile of average energy transmissions for each image field. Using this transmission profile, the state of the reticle is then determined at each testing interval followed by taking action based on the reticle state. The state of the reticle identifies whether the device exposure region has been deleteriously degraded, and as such, the reticle is no longer suitable for use. This is accomplished by determining if any average energy transmission of any image field across the reticle exceeds an allowable energy transmission threshold.
摘要翻译： 通过在成像工具中提供具有装置曝光区域的掩模版来限定掩模版的状态的方法，系统和装置，其限定穿过装置曝光区域的一个或多个图像场，以及通过装置曝光区域传输能量。 检测器以一个或多个测试间隔检测图像场中的能量，并且系统控制为每个图像场生成平均能量传输的传输轮廓。 使用该传输配置文件，然后在每个测试间隔确定掩模版的状态，随后基于掩模版状态采取动作。 掩模版的状态识别设备曝光区域是否被有害降解，因此，掩模版不再适合使用。 这是通过确定跨越掩模版的任何图像场的任何平均能量传输是否超过允许的能量传输阈值来实现的。
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9.发明申请PHOTOLITHOGRAPHY FOCUS IMPROVEMENT BY REDUCTION OF AUTOFOCUS RADIATION TRANSMISSION INTO SUBSTRATE 审中-公开通过减少自适应辐射传输到基板中的光刻技术改进公开(公告)号：US20090208865A1
公开(公告)日：2009-08-20
申请号：US12033303
申请日：2008-02-19
申请人： Timothy A. Brunner , Sean D. Burns , Kuang-Jung Chen , Wu-Song Huang , Kafai Lai , Wai-Kin Li , Bernhard R. Liegl
发明人： Timothy A. Brunner , Sean D. Burns , Kuang-Jung Chen , Wu-Song Huang , Kafai Lai , Wai-Kin Li , Bernhard R. Liegl
CPC分类号： G03F7/091 , G03F7/70216 , Y10S430/127
摘要： An anti-reflective coating material, a microelectronic structure that includes an anti-reflective coating layer formed from the anti-reflective coating material and a related method for exposing a resist layer located over a substrate while using the anti-reflective coating layer provide for attenuation of secondary reflected vertical alignment beam radiation when aligning the substrate including the resist layer located thereover. Such enhanced vertical alignment provides for improved dimensional integrity of a patterned resist layer formed from the resist layer, as well as additional target layers that may be fabricated while using the resist layer as a mask.
摘要翻译： 防反射涂层材料，包括由抗反射涂层材料形成的抗反射涂层的微电子结构和用于在使用抗反射涂层的同时使位于基板上的抗蚀剂层曝光的相关方法提供衰减 当对准包括位于其上的抗蚀剂层的衬底时，二次反射垂直取向束辐射。 这种增强的垂直对准提供了由抗蚀剂层形成的图案化抗蚀剂层的改进的尺寸完整性，以及可以在使用抗蚀剂层作为掩模时制造的附加目标层。
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10.发明授权Phase shifted test pattern for monitoring focus and aberrations in optical projection systems 失效用于监测光学投影系统中的聚焦和像差的相移测试图案公开(公告)号：US06842237B2
公开(公告)日：2005-01-11
申请号：US10035061
申请日：2001-12-28
CPC分类号： G01M11/0264
摘要： A method is described for determining lens aberrations using a test reticle and a standard metrology tool. The method provides test patterns, preferably in the form of standard overlay metrology test patterns, that include blazed gratings having orientation and pitch selected to sample desired portions of the lens pupil. The method measures relative shifts in the imaged test patterns using standard metrology tools to provide both magnitude and sign of the aberrations. The metrology tools need not be modified if standard test patterns are used, but can be adapted to obtain additional information. The test reticles may be formed with multiple test patterns having a range of orientations and pitch in order to compute any desired order of lens aberration. Alternatively, single test patterns may be used to determine both the magnitude and sign of lower order lens aberrations, such as defocus or coma.
摘要翻译： 描述了使用测试掩模版和标准测量工具确定透镜像差的方法。 该方法提供测试图案，优选地以标准覆盖度量测试图案的形式，其包括具有选择的取向和间距的闪耀光栅以对透镜光瞳的所需部分进行采样。 该方法使用标准计量工具测量成像测试图案中的相对位移，以提供像差的幅度和符号。 如果使用标准测试模式，则不需要修改计量工具，但可以调整以获取其他信息。 为了计算任何所需的镜片像差顺序，测试光罩可以形成有具有取向范围和间距的多个测试图案。 或者，可以使用单个测试图案来确定低阶透镜像差的大小和符号，例如散焦或昏迷。
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