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    PROCESS FOR PRODUCING CEO2 FINE PARTICLES AND POLISHING SLURRY CONTAINING SUCH FINE PARTICLES
    1.
    发明申请
    PROCESS FOR PRODUCING CEO2 FINE PARTICLES AND POLISHING SLURRY CONTAINING SUCH FINE PARTICLES 失效
    生产含有这种细颗粒的CEO2微粒和抛光浆的方法

    公开(公告)号：US20070204519A1

    公开(公告)日：2007-09-06

    申请号：US11745024

    申请日：2007-05-07

    申请人： Yoshihisa Beppu ,  Tomohiro Sakai ,  Satoshi Kashiwabara ,  Kazuo Sunahara

    发明人： Yoshihisa Beppu ,  Tomohiro Sakai ,  Satoshi Kashiwabara ,  Kazuo Sunahara

    IPC分类号： B24D3/02 ,  C01F17/00

    CPC分类号： C09K3/1427 ,  B82Y30/00 ,  C01F17/0043 ,  C01P2002/60 ,  C01P2002/72 ,  C01P2004/62 ,  C01P2004/64 ,  C09G1/02 ,  C09K3/1463 ,  H01L21/31053

    摘要： To provide a process for producing CeO2 fine particles having high crystallinity, being excellent in uniformity of composition and particle size and having a small particle size, and a polishing slurry containing such fine particles. A process for producing CeO2 fine particles, which comprises a step of obtaining a melt containing, as represented by mol % based on oxides, from 5 to 50% of CeO2, from 10 to 50% of RO (wherein R is at least one member selected from the group consisting of Mg, Ca, Sr and Ba) and from 30 to 75% of B2O3, a step of quenching the melt to obtain an amorphous material, a step of precipitating CeO2 crystals from the amorphous material, and a step of separating the CeO2 crystals from the obtained crystallized product, in this order. A polishing slurry containing from 0.1 to 20 mass % of such fine particles.

    摘要翻译： 为了提供一种制备具有高结晶度的CeO 2 细小颗粒的方法，组合物的均匀性和粒径均匀性以及粒径小的抛光浆料和含有这种细颗粒的研磨浆料。 一种制备CeO 2 细颗粒的方法，其包括以下步骤：获得含有以氧化物的摩尔％表示的含有5至50％CeO 2的熔体的熔体， ，RO为10〜50％（其中R为选自Mg，Ca，Sr和Ba中的至少1种）和30〜75％的B 2 O 2， 3，淬火熔体以获得无定形材料的步骤，从无定形材料中沉淀CeO 2结晶的步骤，以及分离CeO 2 / 从得到的结晶产物中按此顺序。 含有0.1〜20质量％的这种微粒的研磨浆料。

    Process for producing CeO2 fine particles and polishing slurry containing such fine particles
    3.
    发明授权
    Process for producing CeO2 fine particles and polishing slurry containing such fine particles 失效
    用于制备CeO 2微粒和含有这种细颗粒的抛光浆料的方法

    公开(公告)号：US07381232B2

    公开(公告)日：2008-06-03

    申请号：US11745024

    申请日：2007-05-07

    申请人： Yoshihisa Beppu ,  Tomohiro Sakai ,  Satoshi Kashiwabara ,  Kazuo Sunahara

    发明人： Yoshihisa Beppu ,  Tomohiro Sakai ,  Satoshi Kashiwabara ,  Kazuo Sunahara

    IPC分类号： B24D3/02 ,  C09C1/68 ,  C09K3/14

    CPC分类号： C09K3/1427 ,  B82Y30/00 ,  C01F17/0043 ,  C01P2002/60 ,  C01P2002/72 ,  C01P2004/62 ,  C01P2004/64 ,  C09G1/02 ,  C09K3/1463 ,  H01L21/31053

    摘要： To provide a process for producing CeO2 fine particles having high crystallinity, being excellent in uniformity of composition and particle size and having a small particle size, and a polishing slurry containing such fine particles.A process for producing CeO2 fine particles, which comprises a step of obtaining a melt containing, as represented by mol % based on oxides, from 5 to 50% of CeO2, from 10 to 50% of RO (wherein R is at least one member selected from the group consisting of Mg, Ca, Sr and Ba) and from 30 to 75% of B2O3, a step of quenching the melt to obtain an amorphous material, a step of precipitating CeO2 crystals from the amorphous material, and a step of separating the CeO2 crystals from the obtained crystallized product, in this order. A polishing slurry containing from 0.1 to 20 mass % of such fine particles.

    摘要翻译： 为了提供一种制备具有高结晶度的CeO 2 细小颗粒的方法，组合物的均匀性和粒径均匀性以及粒径小的抛光浆料和含有这种细颗粒的研磨浆料。 一种制备CeO 2 细颗粒的方法，其包括以下步骤：获得含有以氧化物的摩尔％表示的含有5至50％CeO 2的熔体的熔体， ，RO为10〜50％（其中R为选自Mg，Ca，Sr和Ba中的至少1种）和30〜75％的B 2 O 2， 3，淬火熔体以获得无定形材料的步骤，从无定形材料中沉淀CeO 2结晶的步骤，以及分离CeO 2 / 从得到的结晶产物中按此顺序。 含有0.1〜20质量％的这种微粒的研磨浆料。

    FINE PARTICLES OF OXIDE CRYSTAL AND SLURRY FOR POLISHING WHICH CONTAINS THE FINE PARTICLES
    5.
    发明申请
    FINE PARTICLES OF OXIDE CRYSTAL AND SLURRY FOR POLISHING WHICH CONTAINS THE FINE PARTICLES 审中-公开
    氧化物晶体和浆料的精细颗粒，用于含有细颗粒的抛光

    公开(公告)号：US20090113809A1

    公开(公告)日：2009-05-07

    申请号：US12258106

    申请日：2008-10-24

    申请人： Tomohiro Sakai ,  Yoshihisa Beppu ,  Kazuo Sunahara

    发明人： Tomohiro Sakai ,  Yoshihisa Beppu ,  Kazuo Sunahara

    IPC分类号： C09K3/14 ,  B32B1/00 ,  C01F17/00

    CPC分类号： H01L21/31053 ,  B82Y30/00 ,  C01F17/0043 ,  C01P2002/60 ,  C01P2004/04 ,  C01P2004/62 ,  C01P2004/64 ,  C01P2006/10 ,  C09K3/1409 ,  C09K3/1454 ,  H01L21/3212 ,  Y10T428/2982

    摘要： To provide a slurry for polishing which is excellent in polishing properties, can suppress scratches and is appropriate for accurate polishing in semiconductor production steps, and fine particles of oxide crystal for it.Fine particles of oxide crystal, characterized in that the ratio of the crystallite size measured by X-ray diffraction method and calculated by Scherrer method to the average primary particle size equivalent to sphere from the specific surface area measured by BET is the crystallite size: the average primary particle size=1:0.8 to 1:2.5. A slurry for polishing, characterized in that the fine particles of oxide crystal are dispersed in a liquid medium, and from 0.1 to 40 mass % of the fine particles of oxide crystal are contained, per the total mass of the slurry for polishing.

    摘要翻译： 为了提供抛光性能优异的抛光用浆料，可以抑制划痕，适用于半导体制造工序中的精确研磨以及氧化物结晶用微粒。 氧化物晶体的细颗粒，其特征在于，通过X射线衍射法测量并通过Scherrer方法计算的微晶尺寸与通过BET测量的比表面积相当于球体的平均一次粒径的比率为微晶尺寸： 平均一次粒径= 1:0.8至1:2.5。 一种用于抛光的浆料，其特征在于，将氧化物晶体的细颗粒分散在液体介质中，并且相对于用于抛光的浆料的总质量，含有0.1〜40质量％的氧化物结晶微粒。

    Liquid composition for forming ferroelectric thin film and process for producing ferroelectric thin film
    6.
    发明申请
    Liquid composition for forming ferroelectric thin film and process for producing ferroelectric thin film 审中-公开
    用于形成铁电薄膜的液体组合物和用于制备铁电薄膜的方法

    公开(公告)号：US20060124890A1

    公开(公告)日：2006-06-15

    申请号：US11340548

    申请日：2006-01-27

    申请人： Kazuo Sunahara ,  Hiroyuki Tomonaga ,  Yoshihisa Beppu

    发明人： Kazuo Sunahara ,  Hiroyuki Tomonaga ,  Yoshihisa Beppu

    IPC分类号： H01L41/18

    CPC分类号： H01L21/02197 ,  B82Y30/00 ,  C01G23/003 ,  C01G29/00 ,  C01P2004/64 ,  C01P2006/40 ,  H01B1/22 ,  H01L21/02282 ,  H01L21/316 ,  H01L21/31691

    摘要： The present invention provides a liquid composition for forming a thin film, with which a ferroelectric thin film having excellent characteristics can be prepared even by baking at a low temperature, and a process for producing a ferroelectric thin film using it. A liquid composition for forming a ferroelectric thin film is used, which is characterized by comprising a liquid medium, crystalline ferroelectric oxide particles represented by the formula (Bi2O2)2+(Bim-1TimO3.5m-0.5)2− (wherein m is an integer of from 1 to 5) or (Bi2O2)2+(Am-1TimO3.5m-0.5)2− (wherein A is Bi3+ or La3+, the La3+/Bi3+ ratio is from 0.05 to 0.5, and m is an integer of from 1 to 5) and having an average primary particle diameter of at most 100 nm, dispersed in the liquid medium, and a soluble metal compound capable of forming a ferroelectric oxide by heating, dissolved in the liquid medium.

    摘要翻译： 本发明提供了一种用于形成薄膜的液体组合物，即使通过低温烘烤也可制备出具有优异特性的铁电薄膜，以及使用该薄膜制造铁电薄膜的方法。 使用用于形成铁电薄膜的液体组合物，其特征在于包括液体介质，由式（Bi 2 O 2 O 2）表示的结晶铁电氧化物颗粒， （2-m-1）Ti 3 O 3 3.5m-0.5 3）2 - / SUP >（其中m是1至5的整数）或（Bi 2 O 2 O 2）2 +（A m- 1 3 3 （其中A是Bi 3+ 或La 3+，La 3+ / Bi 3+比为0.05至0.5，m为1至 5），分散在液体介质中的平均一次粒径为100nm以下，溶解在液体介质中的能够通过加热形成铁电氧化物的可溶性金属化合物。

    Ceria-zirconia solid solution crystal fine particles and their production process
    7.
    发明授权
    Ceria-zirconia solid solution crystal fine particles and their production process 失效
    二氧化铈 - 氧化锆固溶体晶体细颗粒及其生产工艺

    公开(公告)号：US08133836B2

    公开(公告)日：2012-03-13

    申请号：US12796492

    申请日：2010-06-08

    申请人： Yoshihisa Beppu ,  Kazuo Sunahara

    发明人： Yoshihisa Beppu ,  Kazuo Sunahara

    IPC分类号： B01J21/02 ,  B01J23/10

    CPC分类号： C01F17/0043 ,  B82Y30/00 ,  C01G25/00 ,  C01G25/02 ,  C01P2002/50 ,  C01P2002/72 ,  C01P2002/77 ,  C01P2004/10 ,  C01P2004/16 ,  C01P2004/20 ,  C01P2004/64 ,  C01P2006/12 ,  C01P2006/13

    摘要： To provide a process for producing ceria-zirconia solid solution crystal fine particles having high crystallinity, being excellent in uniformity of composition and particle size, having a small particle size and a high specific surface area and being excellent in heat resistance, and such solid solution crystal fine particles.A process comprises a step of obtaining a melt containing, as represented by mol % based on oxides, from 5 to 50% of (ZrO2+CeO2), from 10 to 60% of RO (wherein R is at least one member selected from the group consisting of Mg, Ca, Sr and Ba) and from 25 to 70% of B2O3, a step of quenching the melt to obtain an amorphous material, a step of heating the amorphous material at a temperature of from 550 to 1000° C. to precipitate a ceria-zirconia solid solution crystal in the amorphous material, and a step of separating components other than the ceria-zirconia solid solution crystal from the obtained precipitates to obtain the ceria-zirconia solid solution crystal fine particles, in this order.

    摘要翻译： 为了提供具有高结晶度的二氧化铈 - 氧化锆固溶体结晶微粒的制造方法，组成和粒度均匀性优异，粒径小，比表面积小，耐热性优异的固溶体 晶体细颗粒。 一种方法包括以下步骤：获得含有以氧化物为基准的摩尔％为5〜50％的（ZrO 2 + CeO 2），10〜60％的RO（其中，R为至少1种选自 由Mg，Ca，Sr和Ba组成的组）和25〜70％的B 2 O 3，使熔融物淬火以获得无定形材料的步骤，在550〜1000℃的温度下加热无定形材料的工序。 在无定型材料中析出二氧化铈 - 氧化锆固溶体晶体，以及从得到的析出物中分离除二氧化铈 - 氧化锆固溶体结晶以外的成分的工序，得到氧化铈 - 氧化锆固溶体结晶微粒。

    Process for producing fine particles of bismuth titanate
    8.
    发明申请
    Process for producing fine particles of bismuth titanate 有权
    生产钛酸铋微粒的方法

    公开(公告)号：US20060008928A1

    公开(公告)日：2006-01-12

    申请号：US11223984

    申请日：2005-09-13

    申请人： Yoshihisa Beppu ,  Kazuo Sunahara ,  Hiroyuki Tomonaga ,  Kumiko Takahashi

    发明人： Yoshihisa Beppu ,  Kazuo Sunahara ,  Hiroyuki Tomonaga ,  Kumiko Takahashi

    IPC分类号： H01L21/00

    CPC分类号： C01G29/00 ,  B82Y30/00 ,  C01P2004/10 ,  C01P2004/20 ,  C01P2004/52 ,  C01P2004/54 ,  C01P2004/62 ,  C01P2004/64 ,  Y10S977/775 ,  Y10S977/776 ,  Y10S977/90

    摘要： It is an object to provide fine particles of bismuth titanate having excellent dielectric characteristics, high crystallinity and a small particle diameter, and a process for their production. The object is accomplished by a process which comprises a step of obtaining a melt comprising, as represented by mol % based on oxides, from 23 to 72% of Bi2O3, from 4 to 64% of TiO2 and from 6 to 50% of B2O3, a step of quickly quenching this melt to obtain an amorphous material, a step of crystallization of bismuth titanate crystals from the above amorphous material, and a step of separating the bismuth titanate crystals from the obtained crystallized material, in this order.

    摘要翻译： 本发明的目的是提供具有优异的介电特性，高结晶度和小粒径的钛酸铋微粒及其生产方法。 该目的通过一种方法来实现，该方法包括获得熔体的步骤，其包含以氧化物计的摩尔％表示的23％至72％的Bi 2 O 3 ，4〜64％的TiO 2和6〜50％的B 2 O 3 3，将该熔体迅速骤冷至 获得无定形材料，从上述无定形材料中结晶钛酸铋晶体的步骤，以及从获得的结晶材料中依次分离钛酸铋晶体的步骤。

    CERIA-ZIRCONIA SOLID SOLUTION CRYSTAL FINE PARTICLES AND THEIR PRODUCTION PROCESS
    10.
    发明申请
    CERIA-ZIRCONIA SOLID SOLUTION CRYSTAL FINE PARTICLES AND THEIR PRODUCTION PROCESS 失效
    CERIA-ZIRCONIA固体溶液水晶微粒及其生产工艺

    公开(公告)号：US20100298127A1

    公开(公告)日：2010-11-25

    申请号：US12796492

    申请日：2010-06-08

    申请人： Yoshihisa Beppu ,  Kazuo Sunahara

    发明人： Yoshihisa Beppu ,  Kazuo Sunahara

    IPC分类号： B01J21/02 ,  B01J23/10

    CPC分类号： C01F17/0043 ,  B82Y30/00 ,  C01G25/00 ,  C01G25/02 ,  C01P2002/50 ,  C01P2002/72 ,  C01P2002/77 ,  C01P2004/10 ,  C01P2004/16 ,  C01P2004/20 ,  C01P2004/64 ,  C01P2006/12 ,  C01P2006/13

    摘要： To provide a process for producing ceria-zirconia solid solution crystal fine particles having high crystallinity, being excellent in uniformity of composition and particle size, having a small particle size and a high specific surface area and being excellent in heat resistance, and such solid solution crystal fine particles.A process comprises a step of obtaining a melt containing, as represented by mol % based on oxides, from 5 to 50% of (ZrO2+CeO2), from 10 to 60% of RO (wherein R is at least one member selected from the group consisting of Mg, Ca, Sr and Ba) and from 25 to 70% of B2O3, a step of quenching the melt to obtain an amorphous material, a step of heating the amorphous material at a temperature of from 550 to 1000° C. to precipitate a ceria-zirconia solid solution crystal in the amorphous material, and a step of separating components other than the ceria-zirconia solid solution crystal from the obtained precipitates to obtain the ceria-zirconia solid solution crystal fine particles, in this order.

    摘要翻译： 为了提供具有高结晶度的二氧化铈 - 氧化锆固溶体结晶微粒的制造方法，组成和粒度均匀性优异，粒径小，比表面积小，耐热性优异的固溶体 晶体细颗粒。 一种方法包括以下步骤：获得含有以氧化物为基准的摩尔％为5〜50％的（ZrO 2 + CeO 2），10〜60％的RO（其中，R为至少1种选自 由Mg，Ca，Sr和Ba组成的组）和25〜70％的B 2 O 3，使熔融物淬火以获得无定形材料的步骤，在550〜1000℃的温度下加热无定形材料的工序。 在无定型材料中析出二氧化铈 - 氧化锆固溶体晶体，以及从得到的析出物中分离除二氧化铈 - 氧化锆固溶体结晶以外的成分的工序，得到氧化铈 - 氧化锆固溶体结晶微粒。