摘要:
An optical structure observation apparatus which acquires a plurality of pieces of optical structure information of a measured object having a layer structure obtained by scanning a scan surface including a first direction which is a depth direction of the measured object and a second direction orthogonal to the first direction, using a low coherence light, while shifting a position along a third direction which is a direction orthogonal to the scan surface, and constructs an optical stereoscopic structure image based on the acquired plurality of pieces of the optical structure information, comprising: a calculation region setting device which sets a plurality of calculation regions in the optical stereoscopic structure image; a region characteristic information calculating device which performs prescribed processing on each calculation region, and calculates region characteristic information of the optical structure information; a characteristic amount extracting device which extracts a characteristic amount in the calculation region based on the region characteristic information; and a stereoscopic characteristic image generating device which generates a stereoscopic characteristic image based on the characteristic amount.
摘要:
In the optical structure observation apparatus according to an aspect of the present invention, a middle layer of a measured object having a layer structure at least including a surface layer and the middle layer is extracted and flattened to be a same flat plane, the optical stereoscopic structure image is reconstructed with the flattened middle layer as the reference layer, the three-dimensional converted optical structure image is generated, and at least the three-dimensional converted optical structure image is imaged and displayed on the display device, whereby the structure information with the middle layer in the measured object having the layer structure as a basal plate can be visually determined.
摘要:
An object of the present invention is to provide an exposure apparatus which is capable of obtaining high illumination efficiency and performing uniform exposure. In accordance with the exposure apparatus that includes a light source, an optical integrator to which light is supplied from the light source and a two-dimensional spatial light modulator illuminated by light which has transmitted the optical integrator, an optical fiber bundle end portion for emitting light to the optical integrator is provided in the light source, and the light-emitting area of the optical fiber bundle end portion is, as seen from the light-emitting side, substantially similar to the contour configuration of light-emitting surface of the optical integrator. Thus, most of the light emitted from the optical fiber bundle end portion can be illuminated onto a set illumination area. As a result, high illumination efficiency can be obtained and uniform exposure can be realized.
摘要:
An exposure image is accurately projected. An exposure apparatus includes a light source for emitting exposure light, a DMD, which includes a plurality of two-dimensionally-arranged pixel portions, and a telecentric optical system for collimating principal rays of the exposure light. The telecentric optical system is positioned in an optical path of the exposure light that enters the DMD. The DMD performs, based on an image signal, spatial light modulation on exposure light, which has been emitted from the light source, and that has entered the plurality of pixel portions, for each of the plurality of pixel portions.
摘要:
The fuel in a compression pump chamber, defined by a compression plunger, is expelled by the compression plunger driven synchronously with the rotation of an engine. An injection plunger is driven by the expelled fuel, thus injecting fuel into an injection pump chamber defined by the injection plunger. A timing passage, closed by the compression plunger, is formed in the compression pump chamber, and a metering passage is formed in the injection pump chamber. The timing and metering passages communicate with a timing valve and a quantity control valve respectively arranged in an electromagnetic valve. The timing and quantity control valves are driven by an energization current such that they operate in cooperation with each other, i.e., when the timing valve is open, the quantity control valve is closed. When the timing valve is closed and the compression plunger returns, the injection plunger also returns and fuel is supplied to the injection pump chamber through the quantity control valve, which is open. The quantity of fuel filled in the injection pump chamber is controlled by the time interval during which the quantity control valve is open. The time interval during which the fuel is supplied to the pump chamber through the quantity control valve is calculated so as to correspond with engine conditions.
摘要:
The fuel injection apparatus of the invention comprises a unit injector for injecting fuel to a combustion chamber of an internal combustion engine. An injection pump chamber and a timing chamber are defined in the unit injector, a quantity of fuel, adjusted in accordance with a drive condition of an engine, being supplied to these chambers. Fuel in the injection pump chamber and the timing chamber can be pressurized by an injection plunger and a timing plunger operated by pressure from the same pressure source. When the fuel in the injection pump chamber is pressurized to a predetermined injection pressure, fuel in the injection pump chamber is injected to the corresponding combustion chamber of the engine. The timing chamber is connected to a relief path, and a check valve, which can be opened at a pressure lower than the injection pressure, is provided in the relief path.
摘要:
A reduction in utilization efficiency of laser beams emitted from laser emission portions of illumination means is limited and an exposure surface is exposed by beam spots with desired spot diameters and spot forms. At an exposure head, first microlenses are arranged in a two dimensional manner so as to correspond to micromirrors at a DMD, and apertures are arranged in a two dimensional manner at back side focusing positions of the first microlenses. With this exposure head, light source images, which are formed to be very small at back side focusing positions of the first microlenses by the first microlenses, are projected onto the exposure surface, and these light source images serve as beam spots BS and expose the exposure surface.
摘要:
A linear light source having a relatively large numerical aperture emits reading light of a substantially fully diffused light intensity distribution toward a film original that is held between support glass panels. The reading light passes through the film original and then through a slit that is disposed as a field stop between the film original and a reading lens and positioned closely to the film original for limiting a field of view with respect to the reading light. The reading light that has passed through the slit is converged by the reading lens onto CCD line sensors each having the same field of view as that of the slit.
摘要:
Disclosed is a solenoid valve assembly for use in an fuel injection pump of a motor vehicle basically comprising an electromagnetic actuator section including a stator, a core and a winding and a valve section having a valve for interrupting flow of fuel in a fuel passage. A rod-like member is coupled between the valve and the core and is movable within a guide hole made at the center of the stator so that the movement of the core is transmitted to the valve. The valve is biased by a spring in a direction closing the fuel passage. The valve is actuated to open the fuel passage in response to energization of the winding and is actuated to close the fuel passage in response to deenergization of the winding, the opening degree of the valve being regulated and adjusted by a stopper. The spring and the stopper is provided at a high pressure side of the fuel passage communicating with a compression chamber of the fuel injection pump.