公开(公告)号：US5934542A

公开(公告)日：1999-08-10

申请号：US842515

申请日：1997-04-24

申请人： Tsutomu Nakamura ,  Hiroshi Kawauchi ,  Tetsuo Nakai

发明人： Tsutomu Nakamura ,  Hiroshi Kawauchi ,  Tetsuo Nakai

IPC分类号： B23K20/02

CPC分类号： B23K20/025 ,  H01L2924/0002

摘要： The present invention provides a thermocompression tool, i.e. high strength bonding tool used for mounting a semiconductor device or element such as IC, LSI, etc. on a substrate, for example, a tool of pulse heating type used for soldering, and a mounting tool (bonding tool) used for heating, melting and bonding or thermocompression bonding in a lump a number of workpieces to be bonded, making up a part of electronic parts, in particular, a high precision tool called outer lead bonding tool. The high strength bonding tool comprises a substrate consisting of a cemented carbide having microscopic protrusions of hard carbides and/or hard carbonitrides on at least one surface and a coefficient of linear expansion of 4.0.times.10.sup.-6 to 5.5.times.10.sup.-6 /.degree. C. at room temperature to 400.degree. C. and a polycrystalline diamond coating formed on the above described surface having microscopic protrusions by a gaseous phase synthesis method, the surface coated with the polycrystalline diamond coating being used as a tool end surface.

摘要翻译： 本发明提供一种热压工具，即用于将诸如IC，LSI等的半导体器件或元件安装在基板上的高强度焊接工具，例如用于焊接的脉冲加热型工具，以及安装工具 （接合工具），用于加热，熔化和粘合或热压接合一批待接合的工件，构成电子部件的一部分，特别是称为外引线接合工具的高精度工具。 高强度粘合工具包括由在至少一个表面上具有硬质碳化物和/或硬质碳氮化物的微观突起的硬质合金构成的基体，线性膨胀系数为4.0×10 -6至5.5×10 -6 /℃。 室温至400℃，通过气相合成法在上述具有微小突起的表面上形成多晶金刚石涂层，涂覆有多晶金刚石涂层的表面用作工具端面。

公开(公告)号：US5653376A

公开(公告)日：1997-08-05

申请号：US414787

申请日：1995-03-31

申请人： Tsutomu Nakamura ,  Hiroshi Kawauchi ,  Tetsuo Nakai

发明人： Tsutomu Nakamura ,  Hiroshi Kawauchi ,  Tetsuo Nakai

IPC分类号： B23K20/02 ,  B23K3/03 ,  H01L21/603

CPC分类号： B23K20/025 ,  H01L2924/0002

摘要： The present invention provides a thermocompression tool, i.e. high strength bonding tool used for mounting a semiconductor device or element such as IC, LSI, etc. on a substrate, for example, a tool of pulse heating type used for soldering, and a mounting tool (bonding tool). The tool is used for heating, melting and bonding or thermocompression bonding in a lump a number of workpieces to be bonded, making up a part of electronic parts, in particular, a high precision tool called outer lead bonding tool. The high strength bonding tool has a substrate that is composed of a cemented carbide having microscopic protrusions of hard carbides and/or hard carbonitrides on at least one surface and having a coefficient of linear expansion of 4.0.times.10.sup.-6 to 5.5.times.10.sup.-6 /.degree.C. at room temperature to 400.degree. C. Furthermore, a polycrystalline diamond coating is formed on the surface having microscopic protrusions by a gaseous phase synthesis method, the surface coated with the polycrystalline diamond coating being used as a tool end surface.

摘要翻译： 本发明提供一种热压工具，即用于将诸如IC，LSI等的半导体器件或元件安装在基板上的高强度焊接工具，例如用于焊接的脉冲加热型工具，以及安装工具 （接合工具）。 该工具用于加热，熔化和粘合或热压接在一起的多个待接合的工件，构成电子部件的一部分，特别是称为外引线接合工具的高精度工具。 高强度粘合工具具有基材，该基材由在至少一个表面上具有硬质碳化物和/或硬质碳氮化物的微观突起的硬质合金构成，线膨胀系数为4.0×10 -6至5.5×10 -6 /℃ C.在室温至400℃下进行。此外，通过气相合成法在具有微观突起的表面上形成多晶金刚石涂层，涂覆有多晶金刚石涂层的表面用作工具端面。

公开(公告)号：US5366522A

公开(公告)日：1994-11-22

申请号：US970798

申请日：1992-11-03

申请人： Tsutomu Nakamura ,  Yasuyuki Kanada ,  Tetsuo Nakai

发明人： Tsutomu Nakamura ,  Yasuyuki Kanada ,  Tetsuo Nakai

IPC分类号： B23B27/14 ,  C04B37/00 ,  C23C16/01 ,  C23C16/27 ,  B24D3/00

CPC分类号： C04B37/026 ,  B23B27/145 ,  C23C16/01 ,  C23C16/271 ,  C23C16/272 ,  C23C16/274 ,  C23C16/277 ,  B23B2226/315 ,  B23B2240/08 ,  C04B2235/6586 ,  C04B2235/667 ,  C04B2235/963 ,  C04B2237/083 ,  C04B2237/12 ,  C04B2237/122 ,  C04B2237/123 ,  C04B2237/124 ,  C04B2237/125 ,  C04B2237/30 ,  C04B2237/363 ,  C04B2237/401 ,  C04B2237/704 ,  C04B2237/708 ,  C04B2237/72 ,  C04B2237/82

摘要： A polycrystalline diamond cutting tool comprises a tool material of polycrystalline diamond formed by low-pressure vapor deposition, which is bonded to a shank of cemented carbide through a brazing layer. The thickness of the polycrystalline diamond layer is set at 0.1 to 1.0 mm, while that of the brazing layer is set at 10 to 50 .mu.m. The brazing layer is made of a material having a melting point of 950.degree. to 1300.degree. C., which is in the form of an alloy layer containing at least one material selected from metals belonging to the groups IVa, Va, VIa and VIIa of the periodic table and carbides thereof and at least one material selected from Au, Ag, Cu, Pt, Pd and Ni. The polycrystalline diamond cutting tool is improved in heat resistance and tool strength. In order to improve deposition resistance of the cutting tool, the surface roughness of a tool rake face is set to be not more than 0.2 .mu.m in Rmax. A portion of the polycrystalline diamond layer up to a depth of 10 .mu.m from the rake face contains 99 to 100 atomic percent of carbon elements, and 99 to 100% of carbon atoms are diamond-bonded. A surface of the polycrystalline diamond layer which has been in contact with the substrate during formation of the polycrystalline diamond layer defines the rake face, whose surface is subjected to ion beam machining and thereafter treated in the atmosphere at a temperature of 300.degree. to 500.degree. C.

摘要翻译： 多晶金刚石切割工具包括通过低压气相沉积形成的多晶金刚石的工具材料，其通过钎焊层粘合到硬质合金的柄上。 多晶金刚石层的厚度设定为0.1〜1.0mm，钎焊层的厚度设定为10〜50μm。 钎焊层由熔点为950℃至1300℃的材料制成，其为含有至少一种选自属于IVa，Va，VIa和VIIa族的金属的材料的合金层的形式 周期表及其碳化物和选自Au，Ag，Cu，Pt，Pd和Ni中的至少一种材料。 多晶金刚石切削工具的耐热性和刀具强度提高。 为了提高切削工具的耐沉积性，将工具前刀面的表面粗糙度设定为Rmax以下0.2μm以下。 距离前刀面10μm深的多晶金刚石层的一部分含有99〜100原子％的碳元素，99〜100％的碳原子金刚石键合。 在形成多晶金刚石层期间已经与基板接触的多晶金刚石层的表面限定了表面进行离子束加工的后刀面，然后在大气中在300〜500℃的温度下进行处理 C。

公开(公告)号：US5495126A

公开(公告)日：1996-02-27

申请号：US181680

申请日：1994-01-14

申请人： Takahisa Iguchi ,  Tsutomu Nakamura ,  Tetsuo Nakai

发明人： Takahisa Iguchi ,  Tsutomu Nakamura ,  Tetsuo Nakai

IPC分类号： H01L21/48 ,  H01L23/373 ,  H01L23/34 ,  H01L31/0312

CPC分类号： H01L21/4803 ,  H01L23/3732 ,  H01L2924/0002

摘要： A polycrystalline diamond is prepared by chemical vapor deposition (step 101). A surface of the polycrystalline diamond is metallized (step 102). The metallized surface of the polycrystalline diamond is grooved with a YAG laser (step 103). A wedge or the like is driven into the grooves of the polycrystalline diamond to pressurize the same, whereby the polycrystalline diamond is divided along the grooves (step 104). Alternatively, a surface of a polycrystalline diamond prepared by chemical vapor deposition is grooved with a YAG laser (step 112), and the surface of the polycrystalline diamond is metallized (step 113) after the grooving. The obtained diamond heat sink (10) includes a first layer (11a) grooved with a laser, and a mechanically divided second layer (11b). Graphite adheres to the outer peripheral surface of the first layer (11a). The outer peripheral surface of the second layer (11b) has a greater surface roughness than that of the first layer (11a).

摘要翻译： 通过化学气相沉积制备多晶金刚石（步骤101）。 多晶金刚石的表面被金属化（步骤102）。 多晶金刚石的金属化表面用YAG激光器开槽（步骤103）。 将楔形物等驱动到多晶金刚石的槽中以对其加压，由此多晶金刚石沿凹槽分开（步骤104）。 或者，通过化学气相沉积制备的多晶金刚石的表面用YAG激光器（步骤112）开槽，并且在开槽之后多晶金刚石的表面被金属化（步骤113）。 所获得的金刚石散热器（10）包括用激光器沟槽的第一层（11a）和机械分割的第二层（11b）。 石墨粘附到第一层（11a）的外周表面。 第二层（11b）的外周面比第一层（11a）具有更大的表面粗糙度。

公开(公告)号：US5020394A

公开(公告)日：1991-06-04

申请号：US420483

申请日：1989-10-12

申请人： Tsutomu Nakamura ,  Tetsuo Nakai

发明人： Tsutomu Nakamura ,  Tetsuo Nakai

IPC分类号： B23B51/00 ,  B23C5/00 ,  B23C5/10 ,  B23D77/02 ,  B23P5/00 ,  B23P15/32

CPC分类号： B23C5/00 ,  B23B51/00 ,  B23C5/1081 ,  B23D77/02 ,  B23P15/32 ,  B23B2226/315 ,  B23B2240/08 ,  B23B2251/50 ,  B23C2226/315 ,  B23C2240/08 ,  B23D2277/245 ,  B23D2277/54 ,  Y10S76/11 ,  Y10S76/12 ,  Y10T407/26 ,  Y10T407/27 ,  Y10T408/78

摘要： A polycrystal diamond fluted tool is provided which is capable of effecting working with much higher accuracy and longer life as compared with the sintered diamond straight fluted tool of the prior art, and is particularly suitable for finishing working with high accuracy. The tool is produced by forming, by a vapor phase synthesis method, a polycrystal diamond film on the surface of a substrate which has been subjected to helical grinding, then subjecting the product to a chemical treatment to dissolve and remove only the substrate, brazing the resulting polycrystal diamond film in a fluted form to at least a part of the rake face of a tool base metal which has been subjected to helical grinding in a similar manner to the substrate, and then subjecting the brazed tool base metal to working of a flank face to form a cutting edge.

公开(公告)号：US5759216A

公开(公告)日：1998-06-02

申请号：US786114

申请日：1997-01-17

申请人： Yasuyuki Kanada ,  Hirohumi Mizusuna ,  Tsutomu Nakamura ,  Tetsuo Nakai

发明人： Yasuyuki Kanada ,  Hirohumi Mizusuna ,  Tsutomu Nakamura ,  Tetsuo Nakai

IPC分类号： B01J3/06 ,  C22C26/00 ,  C09C1/08

CPC分类号： B01J3/062 ,  C22C26/00 ,  B01J2203/062 ,  B01J2203/0655 ,  B01J2203/0685

摘要： A method of manufacturing a diamond sintered body includes the following steps: preparing a diamond powder having a particle size within a range of 0.1 to 10 .mu.m, coating the surface of each particle of the diamond powder with a sintering assistant agent including Pd within a range of 0.01 to 40 percent by weight and at least one iron family metal as a remainder, and liquid-phase sintering the coated diamond powder under a high pressure and high temperature condition. In this manner, a diamond sintered body having high strength and high wear-resistance, and containing diamond particles of 80 to 96 percent by volume, can be obtained.

摘要翻译： 制造金刚石烧结体的方法包括以下步骤：制备粒度在0.1至10μm范围内的金刚石粉末，用包含Pd的烧结助剂将金刚石粉末的每个颗粒的表面涂覆在 范围为0.01〜40重量％，以及至少一种铁族金属作为其余部分，并在高压和高温条件下液相烧结涂覆的金刚石粉末。 以这种方式，可以获得具有高强度和高耐磨性并且含有80至96体积％的金刚石颗粒的金刚石烧结体。

公开(公告)号：US5299214A

公开(公告)日：1994-03-29

申请号：US905241

申请日：1992-06-26

申请人： Tsutomu Nakamura ,  Takahisa Iguchi ,  Tetsuo Nakai

发明人： Tsutomu Nakamura ,  Takahisa Iguchi ,  Tetsuo Nakai

IPC分类号： H01L23/373 ,  H01L23/433 ,  H01L23/495 ,  H01S3/04

CPC分类号： H01L23/49513 ,  H01L23/3732 ,  H01L23/3736 ,  H01L23/4334 ,  H01L24/32 ,  H01L2224/2908 ,  H01L2224/29083 ,  H01L2224/29111 ,  H01L2224/32245 ,  H01L2224/48091 ,  H01L2224/48247 ,  H01L2224/73265 ,  H01L24/48 ,  H01L24/73 ,  H01L2924/0001 ,  H01L2924/00014 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01015 ,  H01L2924/01018 ,  H01L2924/01019 ,  H01L2924/01023 ,  H01L2924/01029 ,  H01L2924/01032 ,  H01L2924/01033 ,  H01L2924/0104 ,  H01L2924/01041 ,  H01L2924/01042 ,  H01L2924/01046 ,  H01L2924/01047 ,  H01L2924/0105 ,  H01L2924/01072 ,  H01L2924/01073 ,  H01L2924/01074 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/0132 ,  H01L2924/0133 ,  H01L2924/10329 ,  H01L2924/12042 ,  H01L2924/157 ,  H01L2924/15787 ,  H01L2924/181

摘要： A semiconductor laser is provided with a heat radiating component for radiating or dissipating heat which is generated in operation. In this heat radiating component, a polycrystalline diamond layer (3) synthesized by vapor deposition is formed on an upper surface of a stem (4). A semiconductor laser element (1) is bonded, e.g. by brazing to the surface of the vapor-deposited polycrystalline diamond layer (3) through a brazing filler metal (2). The heat radiating component has a thermal expansion coefficient which is the same as that of an LSI chip to be mounted thereon to provide an excellent heat radiating property.

摘要翻译： 半导体激光器设置有用于在工作中产生的散热或散热的散热部件。 在该散热部件中，通过气相沉积合成的多晶金刚石层（3）形成在杆（4）的上表面上。 半导体激光元件（1），例如， 通过钎焊金属（2）钎焊到气相沉积的多晶金刚石层（3）的表面。 散热部件具有与要安装在其上的LSI芯片相同的热膨胀系数，以提供优异的散热性能。

公开(公告)号：US5294381A

公开(公告)日：1994-03-15

申请号：US964390

申请日：1992-10-29

申请人： Takahisa Iguchi ,  Tsutomu Nakamura ,  Tetsuo Nakai

发明人： Takahisa Iguchi ,  Tsutomu Nakamura ,  Tetsuo Nakai

IPC分类号： H01L21/48 ,  H01L23/373 ,  H01L21/302

CPC分类号： H01L21/4803 ,  H01L23/3732 ,  H01L2924/0002

摘要： A polycrystalline diamond is prepared by chemical vapor deposition (step 101). A surface of the polycrystalline diamond is metallized (step 102). The metallized surface of the polycrystalline diamond is grooved with a YAG laser (step 103). A wedge or the like is driven into the grooves of the polycrystalline diamond to pressurize the same, whereby the polycrystalline diamond is divided along the grooves (step 104). Alternatively, a surface of a polycrystalline diamond prepared by chemical vapor deposition is grooved with a YAG laser (step 112), so that the surface of the polycrystalline diamond is metallized (step 113) after the grooving.

摘要翻译： 通过化学气相沉积制备多晶金刚石（步骤101）。 将多晶金刚石的表面金属化（步骤102）。 多晶金刚石的金属化表面用YAG激光器开槽（步骤103）。 将楔形物等驱动到多晶金刚石的槽中以对其加压，由此多晶金刚石沿凹槽分开（步骤104）。 或者，通过化学气相沉积制备的多晶金刚石的表面用YAG激光器（步骤112）开槽，使得在开槽之后多晶金刚石的表面被金属化（步骤113）。

公开(公告)号：US5178645A

公开(公告)日：1993-01-12

申请号：US772268

申请日：1991-10-07

申请人： Tsutomu Nakamura ,  Tetsuo Nakai

发明人： Tsutomu Nakamura ,  Tetsuo Nakai

IPC分类号： B23B27/14 ,  C23C16/01 ,  C23C16/02 ,  C23C16/27

CPC分类号： C23C16/272 ,  B23B27/145 ,  B23B27/148 ,  C23C16/01 ,  C23C16/0254 ,  C23C16/271 ,  C23C16/274 ,  B23B2226/315 ,  B23B2260/092 ,  Y10T407/27

摘要： A polycrystalline diamond cutting tool is prepared by employing polycrystalline diamond which is synthesized on a mirror-finished surface of a base material by a low-pressure vapor phase method, as a tool material. A surface, which has been in contact with the base material, of the polycrystalline diamond layer is utilized as a tool rake face. A flank of the tool is formed by laser processing. The flank is covered with a graphite coating layer in one embodiment, while such a graphite coating layer is removed by acid treatment or the like in another embodiment. In still another embodiment, a flank is formed by grinding, and a cutting edge portion is honed by laser processing.

公开(公告)号：US06737178B2

公开(公告)日：2004-05-18

申请号：US09729149

申请日：2000-12-01

申请人： Michiko Ota ,  Tomohiro Fukaya ,  Junichi Shiraishi ,  Tetsuo Nakai ,  Hisanori Ohara ,  Haruyo Fukui

发明人： Michiko Ota ,  Tomohiro Fukaya ,  Junichi Shiraishi ,  Tetsuo Nakai ,  Hisanori Ohara ,  Haruyo Fukui

IPC分类号： B23B2714

CPC分类号： C04B41/009 ,  C04B41/52 ,  C04B41/89 ,  C23C30/005 ,  Y10T407/26 ,  Y10T407/27 ,  Y10T428/24364 ,  Y10T428/252 ,  Y10T428/265 ,  C04B41/4529 ,  C04B41/5068 ,  C04B41/5133 ,  C04B41/522 ,  C04B41/5061 ,  C04B41/524 ,  C04B35/5831

摘要： A coated sintered body can be used for a cutting tool for precision machining of hardened steel. The coated PCBN cutting tool includes a substrate which contains not less than 35 volume % and not more than 85 volume % of CBN, and a hard coated layer formed on the substrate. The hard coated layer comprises at least one compound layer consisting of at least one element selected from the group 4a, 5a, and 6a elements of the periodic table and Al, and at least one element selected from C, N and O. The thickness of the layer is not less than 0.3 &mgr;m and not more than 10 &mgr;m. The center-line mean roughness of the hard coated layer is not more than 0.1 &mgr;m.

摘要翻译： 涂层烧结体可用于硬化钢精密加工的切削刀具。 涂布的PCBN切割工具包括含有不小于35体积％且不大于85体积％的CBN的基底和形成在基底上的硬涂层。 硬涂层包含至少一种由选自元素周期表4a，5a和6a元素中的至少一种元素和Al组成的化合物层，以及选自C，N和O中的至少一种元素。 该层不小于0.3μm且不大于10μm。 硬涂层的中心线平均粗糙度不大于0.1μm。