Second harmonic generator and laser applied units
    2.
    发明授权
    Second harmonic generator and laser applied units 失效
    二次谐波发生器和激光应用单元

    公开(公告)号:US6047010A

    公开(公告)日:2000-04-04

    申请号:US598846

    申请日:1996-02-09

    IPC分类号: H01S3/109 H01S3/10

    摘要: A second harmonic generator comprising a semiconductor laser as an excitation light source and a resonator having a solid laser crystal excited by the excitation light source, a control element for controlling the wavelength of a first oscillation wave generated from the solid laser crystal and a nonlinear crystal for wavelength converting the first oscillation wave as a fundamental wave into a second harmonic wave as a second oscillation wave, wherein the components of the resonator are arranged in the order of a first laser mirror, solid laser crystal, wavelength control element, nonlinear crystal and second laser mirror from the input side of the excitation light.

    摘要翻译: 一种二次谐波发生器,包括作为激发光源的半导体激光器和由激发光源激发的固体激光晶体的谐振器,用于控制从固体激光晶体产生的第一振荡波的波长的控制元件和非线性晶体 用于将作为基波的第一振荡波波长转换成作为第二振荡波的二次谐波,其中谐振器的分量按照第一激光镜,固体激光晶体,波长控制元件,非线性晶体和 第二激光镜从激励光的输入侧。

    Second harmonic generating apparatus and apparatus employing laser
    3.
    发明授权
    Second harmonic generating apparatus and apparatus employing laser 失效
    二次谐波发生装置及采用激光的装置

    公开(公告)号:US5757827A

    公开(公告)日:1998-05-26

    申请号:US839388

    申请日:1997-04-18

    摘要: A second harmonic generating apparatus including a semiconductor laser serving as a pumping source, a resonator structure for oscillating a first radiation wave generated by LiSAF (Cr:LiSrAlF.sub.6 : Lithium strontium aluminum fluoride with chromium added) crystal which is a solid-state laser crystal which is excited by the pumping source, a control element for controlling the wavelength of the first oscillation wave, and a nonlinear crystal for performing wavelength conversion into second harmonic which is a second oscillation wave, with the first oscillation wave serving as a fundamental wave, the nonlinear crystal being provided in the resonator. A higher efficiency and reliability of the second harmonic generating apparatus is achieved.

    摘要翻译: 一种二次谐波发生装置,包括用作泵浦源的半导体激光器,用于振荡由LiSAF(Cr:LiSrAlF6:添加了铬的锂锶氟化铝)产生的第一辐射波的谐振器结构晶体,该晶体是固体激光晶体, 被泵浦源激励,用于控制第一振荡波的波长的控制元件和用第二振荡波进行波长转换成二次谐波的非线性晶体,第一振荡波用作基波, 在谐振器中提供非线性晶体。 实现二次谐波发生装置的更高的效率和可靠性。

    Harmonics generation element
    6.
    发明授权
    Harmonics generation element 失效
    谐波发生元件

    公开(公告)号:US5150252A

    公开(公告)日:1992-09-22

    申请号:US841789

    申请日:1992-03-02

    IPC分类号: G02F1/355

    CPC分类号: G02F1/3551

    摘要: A harmonics generation element which comprises a nonlinear optical element having single-crystals of lithium niobate containing magnesium of less than 5 atomic per cent. The nonlinear optical element has 3 ppm or less of impurity Fe and is configured so that a primary laser beam is made incident into the nonlinear optical element and a secondary output light having a wavelength of higher-order harmonics is emitted therefrom.

    摘要翻译: 一种谐波产生元件,其包括具有小于5原子%的镁的铌酸锂单晶的非线性光学元件。 非线性光学元件具有3ppm以下的杂质Fe,并且被配置为使得初级激光束入射到非线性光学元件中,并且从其发射具有高次谐波波长的次级输出光。

    Optically functional device, single crystal substrate for the device and method for its use
    7.
    发明授权
    Optically functional device, single crystal substrate for the device and method for its use 有权
    光功能器件,单晶衬底的器件及其使用方法

    公开(公告)号:US06747787B2

    公开(公告)日:2004-06-08

    申请号:US09797596

    申请日:2001-03-05

    IPC分类号: G02F1355

    摘要: An optically functional device comprising a ferroelectric single crystal substrate and polarization-inverted structures formed at portions of the substrate at a temperature of not higher than the Curie temperature by an electron beam scanning irradiation method or a voltage application method and designed to control light passed through the polarization-inverted portions, wherein a LiNbO3 crystal having a molar ratio of Li/Nb within a range of from 0.95 to 1.01, is used as the substrate, so that the propagation loss of light passed through the polarization-inverted portions immediately after formation of the polarization-inverted structures, is not more than 2%.

    摘要翻译: 一种光功能元件,其特征在于,具有强电介质单晶基板和通过电子束扫描照射法或电压施加方法在不高于居里温度的温度下在基板的部分形成的偏振反转结构,并设计成控制通过的光 使用其中Li / Nb的摩尔比在0.95〜1.01的范围内的LiNbO 3晶体作为基板,使得在形成之后立即通过偏振反转部分的光的传播损耗为偏振反转部分 的极化反转结构不大于2%。

    Single crystal of lithium niobate or tantalate and its optical element, and process and apparatus for producing an oxide single crystal
    8.
    发明授权
    Single crystal of lithium niobate or tantalate and its optical element, and process and apparatus for producing an oxide single crystal 有权
    铌酸锂或钽酸锂的单晶及其光学元件,以及用于生产氧化物单晶的工艺和设备

    公开(公告)号:US06673330B1

    公开(公告)日:2004-01-06

    申请号:US09521899

    申请日:2000-03-09

    IPC分类号: C01D1500

    摘要: A single crystal of lithium niobate or lithium tantalate may be grown from a melt of a composition having a molar excess of Li compared to a melt having the stoichiometric amount of lithium, and having a molar fraction of Li2O/(Nb2O5+Li2O) or Li2O/(Ta2O5+Li2O) within a range of at least 0.490 and less than 0.500. The single crystal also has at least one element selected from the group consisting of Mg, Zn, Sc and In, in an amount of from 0.1 to 3.0 mol % based on the total amount of the elements, Nb and Li, or the total amount of the elements, Ta and Li.

    摘要翻译: 铌酸锂或钽酸锂的单晶可以从具有摩尔过量的Li的组合物的熔体与具有化学计量的锂的熔体相比生长,并且具有Li 2 O /(Nb 2 O 5 + Li 2 O)或Li 2 O的摩尔分数 /(Ta2O5 + Li2O)在0.490以上且小于0.500的范围内。 单晶还具有选自Mg,Zn,Sc和In中的至少一种元素,相对于元素的总量,Nb和Li为0.1〜3.0摩尔%,或者总量 的元素,Ta和Li。

    MEASURING DEVICE, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
    10.
    发明申请
    MEASURING DEVICE, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD 审中-公开
    测量装置,曝光装置和装置制造方法

    公开(公告)号:US20100112733A1

    公开(公告)日:2010-05-06

    申请号:US12580875

    申请日:2009-10-16

    申请人: Yasunori Furukawa

    发明人: Yasunori Furukawa

    IPC分类号: H01L21/66 G01B9/02 H01L21/26

    摘要: A measuring device configured to measure a wave aberration of an optical system to be measured includes a reflection optical element for reflecting light, having passed through a mask and the optical system to be measured, into the optical system to be measured, and a detector for detecting an interference fringe of light having passed through pinholes and openings. The mask has at least three pinhole-opening pairs, each including one pinhole and one opening having a larger diameter than the pinhole that are arranged point-symmetrically, the three pinhole-opening pairs having the common center of symmetry. The light to be measured formed in two of the three pairs is made to interfere with the reference light formed in the remaining pair, or, the light to be measured formed in one of the three pairs is made to interfere with the reference light formed in the other two pairs.

    摘要翻译: 被配置为测量待测光学系统的波像差的测量装置包括用于将已经通过掩模和待测量的光学系统的光反射到待测量的光学系统中的反射光学元件,以及用于 检测穿过针孔和开口的光的干涉条纹。 掩模具有至少三个针孔开口对,每个针孔开口对包括一个针孔和一个开口,其具有比针对对称布置的针孔更大的直径,三个针孔开口对具有共同的对称中心。 使被测量的光被形成为三对中的两对,使得与剩下的一对中形成的基准光干涉,或者使三对中的一个中形成的被测量的光与第一对中形成的基准光干涉 另外两对。