VAPOR-DEPOSITED COATING FOR BARRIER FILMS AND METHODS OF MAKING AND USING THE SAME
    10.
    发明申请
    VAPOR-DEPOSITED COATING FOR BARRIER FILMS AND METHODS OF MAKING AND USING THE SAME 审中-公开
    用于障壁膜的蒸气沉积涂层及其制造和使用方法

    公开(公告)号:US20130302627A1

    公开(公告)日:2013-11-14

    申请号:US13643006

    申请日:2012-01-27

    IPC分类号: H01L23/29

    摘要: A barrier film including a substrate, a base polymer layer applied on a major surface of the substrate, an oxide layer applied on the base polymer layer, and a protective polymer layer applied on the oxide layer. The protective polymer layer is formed as the reaction product of a first (meth)acryloyl compound and a (meth)acryl-silane compound derived from a Michael reaction between a second (meth)acryloyl compound and an aminosilane. The first and second (meth)acryloyl compounds may be the same. In some embodiments, a multiplicity of alternating layers of the oxide layer and the protective polymer layer may be used. An oxide layer can be applied over the top protective polymer layer. The barrier films provide, in some embodiments, enhanced resistance to moisture and improved peel strength adhesion of the protective polymer layer(s) to the underlying layers. A process of making, and methods of using the barrier film are also described.

    摘要翻译: 包含衬底,施加在衬底的主表面上的基底聚合物层,施加在基底聚合物层上的氧化物层和施加在氧化物层上的保护性聚合物层的阻挡膜。 保护性聚合物层形成为第一(甲基)丙烯酰基化合物和衍生自第二(甲基)丙烯酰基化合物与氨基硅烷之间的迈克尔反应的(甲基)丙烯酰基 - 硅烷化合物)的反应产物。 第一和第二(甲基)丙烯酰基化合物可以相同。 在一些实施例中,可以使用氧化物层和保护性聚合物层的多个交替层。 可以在顶部保护性聚合物层上施加氧化物层。 在一些实施方案中,阻挡膜提供增强的耐湿性和提高的保护性聚合物层与下层的剥离强度粘合性。 还描述了制造方法和使用阻挡膜的方法。