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1.发明授权Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel 有权具有介电真空容器的环形低场反应气体和等离子体源公开(公告)号：US07501600B2
公开(公告)日：2009-03-10
申请号：US11058620
申请日：2005-02-15
申请人： William M. Holber , Xing Chen , Andrew B. Cowe , Matthew M. Besen , Ronald W. Collins, Jr. , Susan C. Trulli , Shouqian Shao
发明人： William M. Holber , Xing Chen , Andrew B. Cowe , Matthew M. Besen , Ronald W. Collins, Jr. , Susan C. Trulli , Shouqian Shao
IPC分类号： B23K10/00
CPC分类号： H01J37/32357 , H01J37/32009 , H01J37/32091 , H01J37/321 , H01J37/32449 , H01J37/32467 , H01J37/32522
摘要： Plasma ignition and cooling apparatus and methods for plasma systems are described. An apparatus can include a vessel and at least one ignition electrode adjacent to the vessel. A total length of a dimension of the at least one ignition electrode is greater than 10% of a length of the vessel's channel. The apparatus can include a dielectric toroidal vessel, a heat sink having multiple segments urged toward the vessel by a spring-loaded mechanism, and a thermal interface between the vessel and the heat sink. A method can include providing a gas having a flow rate and a pressure and directing a portion of the flow rate of the gas into a vessel channel. The gas is ignited in the channel while the remaining portion of the flow rate is directed away from the channel.
摘要翻译： 描述了等离子体点火和冷却装置和等离子体系统的方法。 装置可以包括容器和与容器相邻的至少一个点火电极。 所述至少一个点火电极的尺寸的总长度大于所述容器通道的长度的10％。 该装置可以包括介质环形容器，具有通过弹簧加载机构朝向容器推动的多个部分的散热器以及容器和散热器之间的热界面。 一种方法可以包括提供具有流速和压力的气体并将气体的一部分流量引导到容器通道中。 气体在通道中被点燃，而流量的剩余部分被引导离开通道。
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2.发明授权Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel 有权具有介电真空容器的环形低场反应气体和等离子体源公开(公告)号：US06872909B2
公开(公告)日：2005-03-29
申请号：US10417408
申请日：2003-04-16
申请人： William M. Holber , Xing Chen , Andrew B. Cowe , Matthew M. Besen , Ronald W. Collins, Jr. , Susan C. Trulli , Shouqian Shao
发明人： William M. Holber , Xing Chen , Andrew B. Cowe , Matthew M. Besen , Ronald W. Collins, Jr. , Susan C. Trulli , Shouqian Shao
CPC分类号： H01J37/32357 , H01J37/32009 , H01J37/32091 , H01J37/321 , H01J37/32449 , H01J37/32467 , H01J37/32522
摘要： Plasma ignition and cooling apparatus and methods for plasma systems are described. An apparatus can include a vessel and at least one ignition electrode adjacent to the vessel. A total length of a dimension of the at least one ignition electrode is greater than 10% of a length of the vessel's channel. The apparatus can include a dielectric toroidal vessel, a heat sink having multiple segments urged toward the vessel by a spring-loaded mechanism, and a thermal interface between the vessel and the heat sink. A method can include providing a gas having a flow rate and a pressure and directing a portion of the flow rate of the gas into a vessel channel. The gas is ignited in the channel while the remaining portion of the flow rate is directed away from the channel.
摘要翻译： 描述了等离子体点火和冷却装置和等离子体系统的方法。 装置可以包括容器和与容器相邻的至少一个点火电极。 所述至少一个点火电极的尺寸的总长度大于所述容器通道的长度的10％。 该装置可以包括介质环形容器，具有通过弹簧加载机构朝向容器推动的多个部分的散热器以及容器和散热器之间的热界面。 一种方法可以包括提供具有流速和压力的气体并将气体的一部分流量引导到容器通道中。 气体在通道中被点燃，而流量的剩余部分被引导离开通道。
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3.发明授权Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel 有权具有介电真空容器的环形低场反应气体和等离子体源公开(公告)号：US07659489B2
公开(公告)日：2010-02-09
申请号：US11684916
申请日：2007-03-12
申请人： William M. Holber , Xing Chen , Andrew B. Cowe , Matthew M. Besen , Ronald W. Collins, Jr. , Susan C. Trulli , Shouquian Shao
发明人： William M. Holber , Xing Chen , Andrew B. Cowe , Matthew M. Besen , Ronald W. Collins, Jr. , Susan C. Trulli , Shouquian Shao
IPC分类号： B23K10/00
CPC分类号： H01J37/32357 , H01J37/32009 , H01J37/32091 , H01J37/321 , H01J37/32449 , H01J37/32467 , H01J37/32522
摘要： Plasma ignition and cooling apparatus and methods for plasma systems are described. An apparatus can include a vessel and at least one ignition electrode adjacent to the vessel. A total length of a dimension of the at least one ignition electrode is greater than 10% of a length of the vessel's channel. The apparatus can include a dielectric toroidal vessel, a heat sink having multiple segments urged toward the vessel by a spring-loaded mechanism, and a thermal interface between the vessel and the heat sink. A method can include providing a gas having a flow rate and a pressure and directing a portion of the flow rate of the gas into a vessel channel. The gas is ignited in the channel while the remaining portion of the flow rate is directed away from the channel.
摘要翻译： 描述了等离子体点火和冷却装置和等离子体系统的方法。 装置可以包括容器和与容器相邻的至少一个点火电极。 所述至少一个点火电极的尺寸的总长度大于所述容器通道的长度的10％。 该装置可以包括介质环形容器，具有通过弹簧加载机构朝向容器推动的多个部分的散热器以及容器和散热器之间的热界面。 一种方法可以包括提供具有流速和压力的气体并将气体的一部分流量引导到容器通道中。 气体在通道中被点燃，而流量的剩余部分被引导离开通道。
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公开(公告)号：US07914603B2
公开(公告)日：2011-03-29
申请号：US12147078
申请日：2008-06-26
申请人： Ali Shajii , Xing Chen , Andrew Cowe , David Burtner , William Robert Entley , ShouQian Shao
发明人： Ali Shajii , Xing Chen , Andrew Cowe , David Burtner , William Robert Entley , ShouQian Shao
IPC分类号： B01D46/46
CPC分类号： H01J37/32357 , H01J37/32871 , Y10S55/15 , Y10T29/4935
摘要： A particle trap for a remote plasma source includes a body structure having an inlet for coupling to a chamber of a remote plasma source and an outlet for coupling to a process chamber inlet. The particle trap for a remote plasma source also includes a gas channel formed in the body structure and in fluid communication with the body structure inlet and the body structure outlet. The gas channel can define a path through the body structure that causes particles in a gas passing from a first portion of the channel to strike a wall that defines a second portion of the gas channel at an angle relative to a surface of the wall. A coolant member can be in thermal communication with the gas channel.
摘要翻译： 用于远程等离子体源的颗粒捕集器包括具有用于耦合到远程等离子体源的室的入口和用于耦合到处理室入口的出口的主体结构。 用于远程等离子体源的颗粒捕获器还包括形成在主体结构中并与主体结构入口和主体结构出口流体连通的气体通道。 气体通道可以限定穿过主体结构的路径，其使得从通道的第一部分通过的气体中的颗粒撞击限定气体通道的第二部分的壁，该壁相对于壁的表面成一定角度。 冷却剂构件可以与气体通道热连通。
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5.发明申请Toroidal Low-Field Reactive Gas and Plasma Source Having a Dielectric Vacuum Vessel 有权具有介质真空容器的环形低场反应气体和等离子体源公开(公告)号：US20070145023A1
公开(公告)日：2007-06-28
申请号：US11684916
申请日：2007-03-12
申请人： William Holber , Xing Chen , Andrew Cowe , Matthew Besen , Ronald Collins , Susan Trullin , Shouqian Shao
发明人： William Holber , Xing Chen , Andrew Cowe , Matthew Besen , Ronald Collins , Susan Trullin , Shouqian Shao
IPC分类号： B23K9/00
CPC分类号： H01J37/32357 , H01J37/32009 , H01J37/32091 , H01J37/321 , H01J37/32449 , H01J37/32467 , H01J37/32522
摘要： Plasma ignition and cooling apparatus and methods for plasma systems are described. An apparatus can include a vessel and at least one ignition electrode adjacent to the vessel. A total length of a dimension of the at least one ignition electrode is greater than 10% of a length of the vessel's channel. The apparatus can include a dielectric toroidal vessel, a heat sink having multiple segments urged toward the vessel by a spring-loaded mechanism, and a thermal interface between the vessel and the heat sink. A method can include providing a gas having a flow rate and a pressure and directing a portion of the flow rate of the gas into a vessel channel. The gas is ignited in the channel while the remaining portion of the flow rate is directed away from the channel.
摘要翻译： 描述了等离子体点火和冷却装置和等离子体系统的方法。 装置可以包括容器和与容器相邻的至少一个点火电极。 所述至少一个点火电极的尺寸的总长度大于所述容器通道的长度的10％。 该装置可以包括介质环形容器，具有通过弹簧加载机构朝向容器推动的多个部分的散热器以及容器和散热器之间的热界面。 一种方法可以包括提供具有流速和压力的气体并将气体的一部分流量引导到容器通道中。 气体在通道中被点燃，而流量的剩余部分被引导离开通道。
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公开(公告)号：US20050145173A1
公开(公告)日：2005-07-07
申请号：US11058620
申请日：2005-02-15
申请人： William Holber , Xing Chen , Andrew Cowe , Matthew Besen , Ronald Collins , Susan Trulli , Shouqian Shao
发明人： William Holber , Xing Chen , Andrew Cowe , Matthew Besen , Ronald Collins , Susan Trulli , Shouqian Shao
CPC分类号： H01J37/32357 , H01J37/32009 , H01J37/32091 , H01J37/321 , H01J37/32449 , H01J37/32467 , H01J37/32522
摘要： Plasma ignition and cooling apparatus and methods for plasma systems are described. An apparatus can include a vessel and at least one ignition electrode adjacent to the vessel. A total length of a dimension of the at least one ignition electrode is greater than 10% of a length of the vessel's channel. The apparatus can include a dielectric toroidal vessel, a heat sink having multiple segments urged toward the vessel by a spring-loaded mechanism, and a thermal interface between the vessel and the heat sink. A method can include providing a gas having a flow rate and a pressure and directing a portion of the flow rate of the gas into a vessel channel. The gas is ignited in the channel while the remaining portion of the flow rate is directed away from the channel.
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公开(公告)号：US20090320677A1
公开(公告)日：2009-12-31
申请号：US12147078
申请日：2008-06-26
申请人： Ali Shajii , Xing Chen , Andrew Cowe , David Burtner , William Robert Entley , ShouQian Shao
发明人： Ali Shajii , Xing Chen , Andrew Cowe , David Burtner , William Robert Entley , ShouQian Shao
CPC分类号： H01J37/32357 , H01J37/32871 , Y10S55/15 , Y10T29/4935
摘要： A particle trap for a remote plasma source includes a body structure having an inlet for coupling to a chamber of a remote plasma source and an outlet for coupling to a process chamber inlet. The particle trap for a remote plasma source also includes a gas channel formed in the body structure and in fluid communication with the body structure inlet and the body structure outlet. The gas channel can define a path through the body structure that causes particles in a gas passing from a first portion of the channel to strike a wall that defines a second portion of the gas channel at an angle relative to a surface of the wall. A coolant member can be in thermal communication with the gas channel.
摘要翻译： 用于远程等离子体源的颗粒捕集器包括具有用于耦合到远程等离子体源的室的入口和用于耦合到处理室入口的出口的主体结构。 用于远程等离子体源的颗粒捕获器还包括形成在主体结构中并与主体结构入口和主体结构出口流体连通的气体通道。 气体通道可以限定穿过主体结构的路径，其使得从通道的第一部分通过的气体中的颗粒撞击限定气体通道的第二部分的壁，该壁相对于壁的表面成一定角度。 冷却剂构件可以与气体通道热连通。
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公开(公告)号：US08779322B2
公开(公告)日：2014-07-15
申请号：US13336616
申请日：2011-12-23
申请人： William M. Holber , John A. Smith , Xing Chen , Donald K. Smith
发明人： William M. Holber , John A. Smith , Xing Chen , Donald K. Smith
CPC分类号： H01J37/32174 , H01J37/321
摘要： A method and apparatus for processing metal bearing gases involves generating a toroidal plasma in a plasma chamber. A metal bearing gas is introduced into the plasma chamber to react with the toroidal plasma. The interaction between the toroidal plasma and the metal bearing gas produces at least one of a metallic material, a metal oxide material or a metal nitride material.
摘要翻译： 用于处理金属轴承气体的方法和装置涉及在等离子体室中产生环形等离子体。 将金属轴承气体引入到等离子体室中以与环形等离子体反应。 环形等离子体和金属承载气体之间的相互作用产生金属材料，金属氧化物材料或金属氮化物材料中的至少一种。
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公开(公告)号：US20120160059A1
公开(公告)日：2012-06-28
申请号：US13336616
申请日：2011-12-23
申请人： William M. Holber , John A. Smith , Xing Chen , Donald K. Smith
发明人： William M. Holber , John A. Smith , Xing Chen , Donald K. Smith
CPC分类号： H01J37/32174 , H01J37/321
摘要： A method and apparatus for processing metal bearing gases involves generating a toroidal plasma in a plasma chamber. A metal bearing gas is introduced into the plasma chamber to react with the toroidal plasma. The interaction between the toroidal plasma and the metal bearing gas produces at least one of a metallic material, a metal oxide material or a metal nitride material.
摘要翻译： 用于处理金属轴承气体的方法和装置涉及在等离子体室中产生环形等离子体。 将金属轴承气体引入到等离子体室中以与环形等离子体反应。 环形等离子体和金属承载气体之间的相互作用产生金属材料，金属氧化物材料或金属氮化物材料中的至少一种。
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公开(公告)号：US20090288772A1
公开(公告)日：2009-11-26
申请号：US12511785
申请日：2009-07-29
申请人： William M. Holber , John A. Smith , Xing Chen , Donald K. Smith
发明人： William M. Holber , John A. Smith , Xing Chen , Donald K. Smith
IPC分类号： C23C16/54
CPC分类号： H01J37/32174 , H01J37/321 , H05H1/46 , H05H2001/4667
摘要： A method and apparatus for processing metal bearing gases involves generating a toroidal plasma in a plasma chamber. A metal bearing gas is introduced into the plasma chamber to react with the toroidal plasma. The interaction between the toroidal plasma and the metal bearing gas produces at least one of a metallic material, a metal oxide material or a metal nitride material.
摘要翻译： 用于处理金属轴承气体的方法和装置涉及在等离子体室中产生环形等离子体。 将金属轴承气体引入到等离子体室中以与环形等离子体反应。 环形等离子体和金属承载气体之间的相互作用产生金属材料，金属氧化物材料或金属氮化物材料中的至少一种。
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