Micro-electromechanical switch
    1.
    发明授权
    Micro-electromechanical switch 有权
    微机电开关

    公开(公告)号:US06307169B1

    公开(公告)日:2001-10-23

    申请号:US09495664

    申请日:2000-02-01

    IPC分类号: H01H5700

    摘要: A Micro-Electromechanical System (MEMS) switch (100) having a single, center hinge (120) which supports a membrane-type electrode (104) on a substrate (101). The single, center hinge (120) has a control electrode (104) coupled to the substrate (101) by an anchor (113), a hinge collar (121), a set of hinge arms (122, 123). The control electrode (104) has a shorting bar (106) coupled thereto and is electrically isolated from another control electrode (105), which is formed on the substrate (101). A travel stop (130) is positioned between the substrate and the control electrode (104). Another aspect of the present invention is a Single Pole, Double Throw (SPDT) switch (160) into which is incorporated the single, center hinge (170) and the travel stop (185, 186).

    摘要翻译: 具有在基板(101)上支撑膜型电极(104)的单个中心铰链(120)的微机电系统(MEMS)开关(100)。 单个中心铰链(120)具有通过锚固件(113),铰链轴环(121),一组铰链臂(122,123)联接到基板(101)的控制电极(104)。 控制电极(104)具有与其耦合的短路棒(106),并与形成在基板(101)上的另一个控制电极(105)电隔离。 移动停止件(130)位于基板和控制电极(104)之间。 本发明的另一方面是单杆双掷(SPDT)开关(160),其中并入有单个中心铰链(170)和行驶停止件(185,186)。

    MEMS variable capacitor with stabilized electrostatic drive and method therefor
    3.
    发明授权
    MEMS variable capacitor with stabilized electrostatic drive and method therefor 有权
    具有稳定静电驱动的MEMS可变电容器及其方法

    公开(公告)号:US06441449B1

    公开(公告)日:2002-08-27

    申请号:US09981014

    申请日:2001-10-16

    IPC分类号: H01L2100

    CPC分类号: H01H59/0009 H01G5/16

    摘要: A micro electro-mechanical systems device having variable capacitance is controllable over the full dynamic range and not subject to the “snap effect” common in the prior art. The device features an electrostatic driver (120) having a driver capacitor of fixed capacitance (121) in series with a second driver capacitor of variable capacitance (126). A MEMS variable capacitor (130) is controlled by applying an actuation voltage potential to the electrostatic driver (120). The electrostatic driver (120) and MEMS variable capacitor (130) are integrated in a single, monolithic device.

    摘要翻译: 具有可变电容的微机电系统装置在整个动态范围内是可控的,并且不受现有技术中常见的“卡扣效应”的制约。 该装置具有静电驱动器(120),其具有与可变电容(126)的第二驱动电容器串联的具有固定电容的驱动电容器(121)。 通过向静电驱动器(120)施加致动电压电位来控制MEMS可变电容器(130)。 静电驱动器(120)和MEMS可变电容器(130)集成在单个单片器件中。

    Method for fabricating MEMS variable capacitor with stabilized electrostatic drive
    4.
    发明授权
    Method for fabricating MEMS variable capacitor with stabilized electrostatic drive 有权
    用于制造具有稳定静电驱动的MEMS可变电容器的方法

    公开(公告)号:US06362018B1

    公开(公告)日:2002-03-26

    申请号:US09496930

    申请日:2000-02-02

    IPC分类号: H01L2100

    CPC分类号: H01H59/0009 H01G5/16

    摘要: A micro electro-mechanical systems device having variable capacitance is controllable over the full dynamic range and not subject to the “snap effect” common in the prior art. The device features an electrostatic driver (120) having a driver capacitor of fixed capacitance (121) in series with a second driver capacitor of variable capacitance (126). A MEMS variable capacitor (130) is controlled by applying an actuation voltage potential to the electrostatic driver (120). The electrostatic driver (120) and MEMS variable capacitor (130) are integrated in a single, monolithic device.

    摘要翻译: 具有可变电容的微机电系统装置在整个动态范围内是可控的,并且不受现有技术中常见的“卡扣效应”的制约。 该装置具有静电驱动器(120),其具有与可变电容(126)的第二驱动电容器串联的具有固定电容的驱动电容器(121)。 通过向静电驱动器(120)施加致动电压电位来控制MEMS可变电容器(130)。 静电驱动器(120)和MEMS可变电容器(130)集成在单个单片器件中。

    Switchable and tunable coplanar waveguide filters
    5.
    发明授权
    Switchable and tunable coplanar waveguide filters 失效
    可切换和可调共面波导滤波器

    公开(公告)号:US06606017B1

    公开(公告)日:2003-08-12

    申请号:US09652614

    申请日:2000-08-31

    IPC分类号: H01P1203

    CPC分类号: H01P1/2013

    摘要: A series of switchable and tunable filters is provided. The filters are manufactured using coplanar waveguide fabrication techniques and micro-electro-mechanical (MEM) system switches. By making a MEM switch conductive to connect two portions of a filter element, a filter inductor is implemented. By making the MEM switch non-conductive, a filter capacitor is implemented. This results in smaller filters that can be either switched between a band pass filter and a low pass filter or switched between operating ranges.

    摘要翻译: 提供一系列可切换和可调滤波器。 滤波器使用共面波导制造技术和微机电(MEM)系统开关制造。 通过使MEM开关导通以连接滤波器元件的两个部分,实现滤波电感器。 通过使MEM开关不导通,实现滤波电容器。 这导致较小的滤波器可以在带通滤波器和低通滤波器之间切换或者在操作范围之间切换。

    Electrode structure for transistors, non-volatile memories and the like
    8.
    发明授权
    Electrode structure for transistors, non-volatile memories and the like 失效
    晶体管的电极结构,非易失性存储器等

    公开(公告)号:US06262451B1

    公开(公告)日:2001-07-17

    申请号:US08816707

    申请日:1997-03-13

    IPC分类号: H01L29788

    摘要: An electrode structure for semiconductor devices includes first electrode material positioned in overlying relationship to the surface of a substrate so as to define a first side wall perpendicular thereto. A nonconductive side wall spacer is formed on the first side wall and defines a second side wall parallel to and spaced from the first side wall. Second electrode material is formed in overlying relationship to the substrate and on the second side wall so as to define a third side wall parallel to and spaced from the second side wall. The first and second electrode materials are connected as first and second electrodes in a common semiconductor device. Additional electrodes can be formed by forming electrode material on additional side walls.

    摘要翻译: 用于半导体器件的电极结构包括以与衬底的表面相重叠的方式定位的第一电极材料,以便限定与其垂直的第一侧壁。 在第一侧壁上形成非导电侧壁隔离件并且限定平行于第一侧壁并与第一侧壁间隔开的第二侧壁。 第二电极材料以与衬底和第二侧壁重叠的关系形成,以便限定与第二侧壁平行并与第二侧壁间隔开的第三侧壁。 第一和第二电极材料在公共半导体器件中作为第一和第二电极连接。 可以通过在另外的侧壁上形成电极材料来形成附加的电极。

    Current confinement via defect generator and hetero-interface interaction
    9.
    发明授权
    Current confinement via defect generator and hetero-interface interaction 失效
    通过缺陷发生器和异质界面相互作用的电流限制

    公开(公告)号:US5831295A

    公开(公告)日:1998-11-03

    申请号:US566388

    申请日:1995-12-01

    CPC分类号: H01L23/62 H01L2924/0002

    摘要: A semiconductor device including a plurality of layers of material defining a diffusion barrier. A defect generator positioned on the plurality of layers in overlying relationship to the diffusion barrier so as to produce a collection of defects at the diffusion barrier that operates as a current restriction. In a typical example, an ohmic contact is positioned around the mesa of a ridge VCSEL, which ohmic contact generates defects that accumulate at a hetero-interface near the active area and confine the current flow to a lasing volume of the VCSEL.

    摘要翻译: 一种包括限定扩散阻挡层的多层材料的半导体器件。 一种缺陷发生器,其以与扩散阻挡层重叠的关系位于多个层上,以便在作为电流限制的扩散阻挡层产生缺陷的集合。 在典型的示例中,欧姆接触定位在脊VCSEL的台面周围,该欧姆接触产生在有源区附近的异质界面处积累的缺陷,并将电流限制到VCSEL的激光体积。

    Method of making a III-V complementary heterostructure device with
compatible non-gold ohmic contacts
    10.
    发明授权
    Method of making a III-V complementary heterostructure device with compatible non-gold ohmic contacts 失效
    制造具有兼容​​的非金欧姆接触的III-V互补异质结构器件的方法

    公开(公告)号:US5480829A

    公开(公告)日:1996-01-02

    申请号:US83755

    申请日:1993-06-25

    摘要: The present invention encompasses a complementary semiconductor device having the same type of material providing the ohmic contacts (117, 119) to both the N-type and P-type devices. In a preferred embodiment, P-source and P -drain regions ( 80, 82 ) are heavily doped with a P-type impurity (81, 83) so that an ohmic with N-type impurity can be used as an ohmic contact. One ohmic material that may be used is nickel-germanium-tungsten. Nickel-germanium-tungsten is etchable, and therefore does not require lift-off processing. Furthermore, a preferred complementary semiconductor device made in accordance with the present invention is compatible with modern aluminum based VLSI interconnection processes.

    摘要翻译: 本发明包括具有向N型和P型器件提供欧姆接触(117,119)的相同类型材料的互补半导体器件。 在优选实施例中,P源极和P区域(80,82)被P型杂质(81,83)重掺杂,使得具有N型杂质的欧姆可以用作欧姆接触。 可以使用的一种欧姆材料是镍 - 锗 - 钨。 镍锗钨是可蚀刻的,因此不需要剥离处理。 此外,根据本发明制造的优选的互补半导体器件与现代的基于铝的VLSI互连工艺兼容。