公开(公告)号：US07883999B2

公开(公告)日：2011-02-08

申请号：US12020094

申请日：2008-01-25

申请人： Yan Shao ,  Thomas G. Tetreault ,  John J. Hautala

发明人： Yan Shao ,  Thomas G. Tetreault ,  John J. Hautala

IPC分类号： H01L21/265

CPC分类号： H01L21/26513 ,  H01J2237/0812 ,  H01L21/26506 ,  H01L21/26566

摘要： A method for infusing material below the surface of a substrate is described. The method comprises modifying a surface condition of a surface on a substrate to produce a modified surface layer, and thereafter, infusing material into the modified surface in the substrate by exposing the substrate to a gas cluster ion beam (GCIB) comprising the material.

摘要翻译： 描述了在衬底表面下方注入材料的方法。 该方法包括改变基板上的表面的表面状态以产生改性表面层，然后通过将基板暴露于包含该材料的气体簇离子束（GCIB）而将材料注入到基板中的改性表面中。

公开(公告)号：US20090191696A1

公开(公告)日：2009-07-30

申请号：US12020094

申请日：2008-01-25

申请人： Yan Shao ,  Thomas G. Tetreault ,  John J. Hautala

发明人： Yan Shao ,  Thomas G. Tetreault ,  John J. Hautala

IPC分类号： H01L21/425

CPC分类号： H01L21/26513 ,  H01J2237/0812 ,  H01L21/26506 ,  H01L21/26566

摘要： A method for infusing material below the surface of a substrate is described. The method comprises modifying a surface condition of a surface on a substrate to produce a modified surface layer, and thereafter, infusing material into the modified surface in the substrate by exposing the substrate to a gas cluster ion beam (GCIB) comprising the material.

摘要翻译： 描述了在衬底表面下方注入材料的方法。 该方法包括改变基板上的表面的表面状态以产生改性表面层，然后通过将基板暴露于包含该材料的气体簇离子束（GCIB）而将材料注入到基板中的改性表面中。

公开(公告)号：US09103031B2

公开(公告)日：2015-08-11

申请号：US12144968

申请日：2008-06-24

申请人： John J. Hautala ,  Michael Graf ,  Yan Shao ,  Brian S. Freer

发明人： John J. Hautala ,  Michael Graf ,  Yan Shao ,  Brian S. Freer

IPC分类号： C23C14/00 ,  C23C14/48 ,  H01J27/02 ,  C23C14/10 ,  C23C14/22 ,  H01J27/00

CPC分类号： C23C14/48 ,  C23C14/10 ,  C23C14/221 ,  H01J27/026 ,  H01J2237/0812

摘要： A method of forming a thin film on a substrate is described. The method comprises providing a substrate in a reduced-pressure environment, and generating a gas cluster ion beam (GCIB) in the reduced-pressure environment from a pressurized gas mixture. A beam acceleration potential and a beam dose are set to achieve a thickness of the thin film ranging up to about 300 angstroms and to achieve a surface roughness of an upper surface of the thin film that is less than about 20 angstroms. The GCIB is accelerated according to the beam acceleration potential, and the accelerated GCIB is irradiated onto at least a portion of the substrate according to the beam dose. By doing so, the thin film is grown on the at least a portion of the substrate to achieve the thickness and the surface roughness.

摘要翻译： 描述了在基板上形成薄膜的方法。 该方法包括在减压环境中提供衬底，以及在减压环境中从加压气体混合物产生气体簇离子束（GCIB）。 设置光束加速电位和光束剂量以实现高达约300埃的薄膜厚度，并且实现薄膜上表面的表面粗糙度小于约20埃。 GCIB根据光束加速电位被加速，并且根据光束剂量将加速的GCIB照射到基底的至少一部分上。 通过这样做，薄膜在衬底的至少一部分上生长以获得厚度和表面粗糙度。

公开(公告)号：US20090317564A1

公开(公告)日：2009-12-24

申请号：US12144968

申请日：2008-06-24

申请人： John J. Hautala ,  Michael Graf ,  Yan Shao ,  Brian S. Freer

发明人： John J. Hautala ,  Michael Graf ,  Yan Shao ,  Brian S. Freer

IPC分类号： B05D3/14

CPC分类号： C23C14/48 ,  C23C14/10 ,  C23C14/221 ,  H01J27/026 ,  H01J2237/0812

摘要： A method of forming a thin film on a substrate is described. The method comprises providing a substrate in a reduced-pressure environment, and generating a gas cluster ion beam (GCIB) in the reduced-pressure environment from a pressurized gas mixture. A beam acceleration potential and a beam dose are set to achieve a thickness of the thin film ranging up to about 300 angstroms and to achieve a surface roughness of an upper surface of the thin film that is less than about 20 angstroms. The GCIB is accelerated according to the beam acceleration potential, and the accelerated GCIB is irradiated onto at least a portion of the substrate according to the beam dose. By doing so, the thin film is grown on the at least a portion of the substrate to achieve the thickness and the surface roughness.

摘要翻译： 描述了在基板上形成薄膜的方法。 该方法包括在减压环境中提供衬底，以及在减压环境中从加压气体混合物产生气体簇离子束（GCIB）。 设置光束加速电位和光束剂量以实现高达约300埃的薄膜厚度，并且实现薄膜上表面的表面粗糙度小于约20埃。 GCIB根据光束加速电位被加速，并且根据光束剂量将加速的GCIB照射到基底的至少一部分上。 通过这样做，薄膜在衬底的至少一部分上生长以获得厚度和表面粗糙度。

公开(公告)号：US07745520B2

公开(公告)日：2010-06-29

申请号：US11655324

申请日：2007-01-18

申请人： Yan Shao ,  Guillermo C. Bazan ,  Alan J. Heeger

发明人： Yan Shao ,  Guillermo C. Bazan ,  Alan J. Heeger

IPC分类号： C08K5/19 ,  C08K5/3415 ,  C08K5/3445

CPC分类号： H01L51/5032 ,  C08K5/19 ,  C08K5/42 ,  H01L51/0038

摘要： Mixtures and light-emitting devices that incorporate such mixtures are disclosed in which a soluble phenyl-substituted poly(para-phenylene vinylene) (PPV) copolymer (“superyellow”) is used as the host light-emitting polymer and methyltrioctylammonium trifluoromethanesulfonate, an ionic liquid, is used to introduce a dilute concentration of mobile ions into the emitting polymer layer. These mixtures and devices incorporating them are able to combine some of the characteristics of polymer light emitting diodes (PLEDs) and polymer light-emitting electrochemical cells (PLECs).

摘要翻译： 公开了掺入这种混合物的混合物和发光装置，其中使用可溶性苯基取代的聚（对亚苯基亚乙烯基）（PPV）共聚物（“超滤”）作为主发光聚合物和甲基三辛基铵三氟甲磺酸盐，离子 液体，用于将稀释的移动离子浓度引入到发射聚合物层中。 这些混合物和结合它们的装置能够组合聚合物发光二极管（PLED）和聚合物发光电化学电池（PLECs）的一些特征。

公开(公告)号：US20060134317A1

公开(公告)日：2006-06-22

申请号：US10542791

申请日：2004-01-29

申请人： Yang Yang ,  Yan Shao

发明人： Yang Yang ,  Yan Shao

IPC分类号： B05D5/12 ,  B05D5/06

CPC分类号： C23C14/12 ,  B05D1/60 ,  H01L51/0008 ,  H01L51/0037 ,  H01L51/005 ,  H01L51/0052 ,  H01L51/0059 ,  H01L51/0062 ,  H01L51/0081 ,  H01L51/5036 ,  H01L51/56 ,  Y02E10/549 ,  Y02P70/521

摘要： A method for use in making electronic and photonic devices wherein said devices include at least one multifunctional organic layer. The method involves first providing a substrate having a surface onto which a multifunctional organic layer is to be deposited. A single evaporation source is provided that includes a mixture of at least two organic compounds. The organic compounds can be matrix materials, and dopants if desired, that are used in making electronic and photonic devices. The single evaporation source is heated for a sufficient time and at a sufficient temperature to provide deposition of the organic compounds onto the surface of the substrate to form the multifunctional organic layer.

摘要翻译： 一种用于制造电子和光子器件的方法，其中所述器件包括至少一个多功能有机层。 该方法首先提供具有其上要沉积多功能有机层的表面的基底。 提供了包括至少两种有机化合物的混合物的单一蒸发源。 有机化合物可以是用于制造电子和光子器件的基质材料和需要的掺杂剂。 将单个蒸发源加热足够的时间和足够的温度以提供有机化合物沉积到基材的表面上以形成多官能有机层。

公开(公告)号：US10277102B2

公开(公告)日：2019-04-30

申请号：US15403486

申请日：2017-01-11

申请人： Tao Zhang ,  Hongfu Xu ,  Jinquan Huang ,  Yan Shao

发明人： Tao Zhang ,  Hongfu Xu ,  Jinquan Huang ,  Yan Shao

IPC分类号： H02K41/02 ,  H02K33/00 ,  H02K33/16

摘要： A vibration motor is disclosed. The vibration motor includes a housing; a fixed component accommodated in the housing; a vibrating component comprising a counterweight and a pole plate; and an elastic connecting piece for suspending the vibrating component in the housing. One of the fixed component and the vibrating component includes coils, and the other includes a magnet component. The pole plate includes a pole plate body part adhered to the counterweight and a fixation part positioned on two sides of the pole plate body, further, the fixation part is at least partially inserted into the counterweight.

公开(公告)号：US20090084977A1

公开(公告)日：2009-04-02

申请号：US11864302

申请日：2007-09-28

申请人： Michael E. Mack ,  Yan Shao

发明人： Michael E. Mack ,  Yan Shao

IPC分类号： H01J49/02

CPC分类号： H01J37/08 ,  H01J37/305 ,  H01J2237/045 ,  H01J2237/061 ,  H01J2237/0812 ,  H01J2237/083

摘要： A method and device for adjusting a beam property, such as a beam size, a beam shape or a beam divergence angle, in a gas cluster beam prior to ionization of the gas cluster beam is described. A gas cluster ion beam (GCIB) source is provided, comprising a nozzle assembly having a gas source, a stagnation chamber and a nozzle that is configured to introduce under high pressure one or more gases through the nozzle to a vacuum vessel in order to produce a gas cluster beam. Additionally, the GCIB source comprises a gas skimmer positioned downstream from the nozzle assembly that is configured to reduce the number of energetic, smaller particles in the gas cluster beam. Furthermore, the GCIB source comprises a beam adjustment device positioned downstream from the gas skimmer that is configured to adjust at least one beam property of the gas cluster beam, and an ionizer positioned downstream from the beam adjustment device that is configured to ionize the gas cluster beam to produce a GCIB.

摘要翻译： 描述了在气体簇束离子化之前在气体簇束中调整光束特性（诸如光束大小，光束形状或光束发散角）的方法和装置。 提供了一种气体簇离子束（GCIB）源，其包括具有气体源，停滞室和喷嘴的喷嘴组件，其构造成在高压下将一种或多种气体通过喷嘴引入真空容器以产生 气体束束。 另外，GCIB源包括位于喷嘴组件下游的气体分离器，该气体分离器构造成减少气体簇束中能量较小的颗粒的数量。 此外，GCIB源包括位于气体分离器下游的光束调节装置，其配置成调整气体束束的至少一个光束特性，以及位于光束调节装置的下游的离子发生器，该离子发生器配置成电离气体团 光束产生GCIB。

公开(公告)号：US07696495B2

公开(公告)日：2010-04-13

申请号：US11864302

申请日：2007-09-28

申请人： Michael E. Mack ,  Yan Shao

发明人： Michael E. Mack ,  Yan Shao

IPC分类号： H01J37/317 ,  H01J37/08

CPC分类号： H01J37/08 ,  H01J37/305 ,  H01J2237/045 ,  H01J2237/061 ,  H01J2237/0812 ,  H01J2237/083

摘要： A method and device for adjusting a beam property, such as a beam size, a beam shape or a beam divergence angle, in a gas cluster beam prior to ionization of the gas cluster beam is described. A gas cluster ion beam (GCIB) source is provided, comprising a nozzle assembly having a gas source, a stagnation chamber and a nozzle that is configured to introduce under high pressure one or more gases through the nozzle to a vacuum vessel in order to produce a gas cluster beam. Additionally, the GCIB source comprises a gas skimmer positioned downstream from the nozzle assembly that is configured to reduce the number of energetic, smaller particles in the gas cluster beam. Furthermore, the GCIB source comprises a beam adjustment device positioned downstream from the gas skimmer that is configured to adjust at least one beam property of the gas cluster beam, and an ionizer positioned downstream from the beam adjustment device that is configured to ionize the gas cluster beam to produce a GCIB.

摘要翻译： 描述了在气体簇束离子化之前在气体簇束中调整光束特性（诸如光束大小，光束形状或光束发散角）的方法和装置。 提供了一种气体簇离子束（GCIB）源，其包括具有气体源，停滞室和喷嘴的喷嘴组件，其构造成在高压下将一种或多种气体通过喷嘴引入真空容器以产生 气体束束。 另外，GCIB源包括位于喷嘴组件下游的气体分离器，该气体分离器构造成减少气体簇束中能量较小的颗粒的数量。 此外，GCIB源包括位于气体分离器下游的光束调节装置，其配置成调整气体束束的至少一个光束特性，以及位于光束调节装置的下游的离子发生器，该离子发生器配置成电离气体团 光束产生GCIB。

公开(公告)号：US20090084436A1

公开(公告)日：2009-04-02

申请号：US11921236

申请日：2006-06-01

申请人： Yang Yang ,  Yan Shao

发明人： Yang Yang ,  Yan Shao

IPC分类号： H01L31/00 ,  B05D5/12

CPC分类号： H01L51/424 ,  B82Y10/00 ,  B82Y30/00 ,  H01L51/0036 ,  H01L51/0037 ,  H01L51/0046 ,  H01L51/0087 ,  H01L51/426 ,  H01L2251/308 ,  Y02E10/549 ,  Y02P70/521

摘要： A photovoltaic device has a first electrode, a second electrode spaced apart from the first electrode, and a layer of light responsive material disposed between the first electrode and the second electrode. The layer of light responsive material includes a material that has a triplet exciton state which can be excited by incident electromagnetic radiation to provide collectable free charged particles at one of the first and second electrodes.

摘要翻译： 光伏器件具有第一电极，与第一电极间隔开的第二电极和设置在第一电极和第二电极之间的光响应材料层。 光反应材料层包括具有三线态激子状态的材料，其可以被入射电磁辐射激发，以在第一和第二电极之一提供可收集的自由带电粒子。