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公开(公告)号：US5207759A
公开(公告)日：1993-05-04
申请号：US763228
申请日：1991-09-20
CPC分类号： B24B37/04
摘要： A method for texturing a disc substrate, and a particle slurry for use in the method. The slurry includes two populations of different-size particles, preferably one population containing particles in a 3 micron size range, and a second population containing particles in a 1 micron size range. The particles, when used to abrade the surface of a disc, create a surface texture characterized by a low peak/peak-to-valley ratio.
摘要翻译： 一种盘基片的纹理化方法和用于该方法的颗粒浆料。 浆料包括两个不同大小的颗粒群，优选一个含有3微米尺寸范围的颗粒的群体，以及含有1微米尺寸范围的颗粒的第二群体。 当用于研磨盘表面时，颗粒产生以峰值/峰谷比低的特征的表面纹理。
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公开(公告)号：US5718942A
公开(公告)日：1998-02-17
申请号：US673338
申请日：1996-06-28
IPC分类号： C10M111/04 , C10M169/04 , G11B5/725 , B05D5/12
CPC分类号： C10M111/04 , C10M169/04 , G11B5/725 , C10M2211/0206 , C10M2211/022 , C10M2211/0225 , C10M2211/0245 , C10M2211/06 , C10M2213/00 , C10M2213/023 , C10M2213/04 , C10M2213/043 , C10M2213/06 , C10M2213/0606 , C10M2213/0623 , C10M2223/003 , C10M2223/02 , C10M2223/023 , C10M2223/0405 , C10M2223/049 , C10M2223/0495 , C10M2223/0603 , C10M2223/08 , C10M2223/083 , C10M2223/103 , C10N2240/20 , C10N2240/201 , C10N2240/202 , C10N2240/203 , C10N2240/204 , C10N2240/205
摘要： A composite lubricant for thin-film magnetic discs comprising perfluoropolyether (PFPE) lubricant and an anti-oxidant, cyclophosphazene lubricant dispersed in a fluoropentane solvent.
摘要翻译： 一种用于薄膜磁盘的复合润滑剂，包括分散在氟戊烷溶剂中的全氟聚醚（PFPE）润滑剂和抗氧化剂环磷腈润滑剂。
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3.发明授权Method for controlling lubricant thickness on thin film, magnetic disk media 失效用于控制薄膜，磁盘介质上的润滑剂厚度的方法
公开(公告)号：US5851601A
公开(公告)日：1998-12-22
申请号：US921297
申请日：1997-08-29
CPC分类号： B05D5/08 , B05D3/00 , G11B5/725 , G11B5/84 , G11B5/8408
摘要： A method for controlling the application of lubricant to thin film, magnetic disk media entailing ultrasonic vibration of heated disk lubricant.
摘要翻译： 控制润滑剂对薄膜的应用的方法，磁盘介质需要加热盘式润滑剂的超声波振动。
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公开(公告)号：US5074983A
公开(公告)日：1991-12-24
申请号：US341936
申请日：1989-04-21
CPC分类号： C23C14/0605 , C23C14/54 , G01N3/56
摘要： A method of evaluating the start/stop lifetime of a thin-film magnetic medium having an overcoat formed by sputtering a carbon-containing overcoat on a magnetic-film substrate. Resistance to erosion of the medium is evaluated by the time required to wear away the overcoat during a high-speed abrasion treatment. Lubricity is measured either in terms of the coefficient of friction of the disc, or in terms or surface hydrophobicity, as gauged by one of a number of measurable surface properties. The method allows for rapid assessment of disc wear properties, and can be used to optimize sputtering conditions required to achieve selected hardness and lubricity properties in a disc overcoat.
摘要翻译： 一种评价具有通过在含有磁性膜的基材上溅射含碳外涂层形成的外涂层的薄膜磁性介质的起始/终止寿命的方法。 通过在高速磨损处理期间磨损外涂层所需的时间评估介质的耐腐蚀性。 润滑性以盘的摩擦系数或按照表面疏水性测量，如通过许多可测量的表面性质之一所测量的。 该方法允许快速评估圆盘磨损性能，并且可用于优化在圆盘外涂层中获得选定硬度和润滑性能所需的溅射条件。
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公开(公告)号：US5012618A
公开(公告)日：1991-05-07
申请号：US454284
申请日：1989-12-21
摘要： Method and apparatus for treating the surface of a magnetic disc to remove surface asperities and loosely bound material. The disc is alternatively treated by contact with a pair of moving belt-like tapes, a pair of flying heads, and second contact with the belt-like tape, with the disc carried at a fixed position for rotation in a vertical plane throughout, but rotated at a higher speed during the intermediate flying waffling step. The first and/or second tape-treatment steps can be used to apply a lubricant film to the disc surface.
摘要翻译： 用于处理磁盘表面以去除表面粗糙度和松散结合的材料的方法和设备。 通过与一对移动的带状带，一对飞头和与带状带的第二接触接触来处理该盘，该盘被带入固定位置，以便在整个垂直平面中旋转，但是 在中间飞行华夫饼步骤期间以更高的速度旋转。 第一和/或第二带处理步骤可以用于将润滑剂膜施加到盘表面。
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6.发明授权
公开(公告)号：US5227211A
公开(公告)日：1993-07-13
申请号：US664932
申请日：1991-03-05
CPC分类号： C23C14/0605 , C23C14/54 , G01N3/56 , Y10S428/90 , Y10T428/12854 , Y10T428/265 , Y10T428/30 , Y10T428/31544
摘要： A thin film magnetic disc having a carbon overcoat which is characterized by (a) a thickness of less than about 500 .ANG. and (b) surface nitrogen atoms having a nitrogen (1s) electron principle binding energy, as determined by electron spectroscopy for chemical analysis (ESCA), of about 399.4 eV. The nitrogen atoms enhance lubricant adhesion to the overcoat. In a preferred embodiment, the overcoat is formed by sputtering under an argon/hydrocarbon/nitrogen gas atmosphere to produce long resistance-to-erosion times, and high lubricity properties.
摘要翻译： 具有碳外涂层的薄膜磁盘，其特征在于（a）小于约500的厚度和（b）具有氮（1s）电子原子结合能的表面氮原子，通过用于化学分析的电子光谱测定 （ESCA），约399.4 eV。 氮原子增强润滑剂对外涂层的粘附性。 在优选的实施方案中，外涂层通过在氩/烃/氮气气氛下溅射而形成，以产生长的抗侵蚀时间和高的润滑性能。
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公开(公告)号：US20110030733A1
公开(公告)日：2011-02-10
申请号：US12139383
申请日：2008-06-13
申请人： Dave Frost , Mike Rogowski , Yassin Mehmandoust , Tom Poplawski , Stan Young
发明人： Dave Frost , Mike Rogowski , Yassin Mehmandoust , Tom Poplawski , Stan Young
CPC分类号： H01L21/6719 , H01L21/67028 , H01L21/67051
摘要： In one embodiment, a method for cleaning a substrate in a cleaning module is disclosed. The method includes an operation that receives the substrate into a first level of the cleaning module. In another operation, the substrate is spun while contemporaneously applying a cleaning fluid to top and bottom surfaces of the substrate. In yet another operation, the substrate is spun at a second level of the cleaning module. The method also includes an operation to dry the substrate in an enclosed cavity at a third level of the cleaning module.
摘要翻译： 在一个实施例中，公开了一种用于清洁清洁模块中的基板的方法。 该方法包括将衬底接收到清洁模块的第一级中的操作。 在另一种操作中，将基材同时喷涂到基材的顶表面和底表面上。 在另一个操作中，衬底在清洁模块的第二级旋转。 该方法还包括在清洁模块的第三级别的封闭空腔中干燥基板的操作。
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公开(公告)号：US07516507B1
公开(公告)日：2009-04-14
申请号：US10984321
申请日：2004-11-08
IPC分类号： B08B11/02
CPC分类号： B08B1/04 , B08B3/12 , G11B23/505 , H01L21/67046
摘要： Substrate preparation systems comprising multi-zone cascade brush scrubbers having sonic assemblies disposed between one or more of the scrubber zones for cleaning of disk-shaped substrates, including silicon wafers and disks for data storage devices, such as hard disk drives (HDD), compact discs (CD) and digital video discs (DVD). The system method combines a sonic particle dislodgement/removal assembly into a cascade brush scrubber line comprising a longi-tudinal array of brush pairs in which the substrates process through preparation zones defined by each pair of brushes, the substrates being transited longitudinally through the zones while rotating on an axis normal to their faces. Piezoelectric transducer arrays transmit sound energy to one or both face(s) of the substrate to dislodge and/or remove particles, and the scrubber simultaneously or thereafter sweeps away the particulates. The sonic energy may be ultrasonic, megasonic, or both, applied to the substrate surface(s) in alternating or sequential process steps.
摘要翻译： 衬底制备系统包括多区级联刷洗涤器，其具有设置在一个或多个洗涤器区域之间的用于清洁盘形基底的声波组件，包括用于数据存储设备的硅晶片和盘，例如硬盘驱动器（HDD），紧凑型 光盘（CD）和数字视频光盘（DVD）。 系统方法将声波粒子移动/移除组件组合成级联刷洗涤器管线，其包括刷子对的纵向阵列，其中衬底通过由每对刷子限定的制备区域进行处理，衬底沿纵向穿过区域，而 在垂直于其脸部的轴上旋转。 压电换能器阵列将声能传递到衬底的一个或两个面，以移除和/或去除颗粒，并且洗涤器同时或此后扫除颗粒。 声波能量可以是超声波，兆声波或两者，以交替或顺序的工艺步骤施加到衬底表面。
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公开(公告)号：US5167096A
公开(公告)日：1992-12-01
申请号：US485278
申请日：1990-02-26
CPC分类号： G11B5/84 , B24B37/04 , B24B7/16 , Y10S977/724 , Y10S977/932
摘要： Method and apparatus for texturing a substrate for use in a magnetic recording disc. A texturing pad used in the invention has inner and outer coaxial regions, with the outer region being more compressible. When the pad and a substrate are rotated about parallel, offset axes, and pressed against one another in the presence of a particle slurry, the inner, less compressible region of the pad produces a deeper-groove texturing on an inner annular surface region of the disc.
摘要翻译： 用于纹理化用于磁记录盘的衬底的方法和装置。 本发明中使用的纹理衬垫具有内部和外部同轴区域，外部区域是更可压缩的。 当衬垫和衬底围绕平行的，偏移的轴线旋转并且在存在颗粒浆料时彼此压靠时，衬垫的内部不太可压缩的区域在衬垫的内部环形表面区域上产生更深的槽纹理 光盘。
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公开(公告)号：US06477786B1
公开(公告)日：2002-11-12
申请号：US09579837
申请日：2000-05-26
申请人： Oliver David Jones , Kenneth C. McMahon , Jonathan Borkowski , Scott Petersen , Donald Stephens , Yassin Mehmandoust , James M. Olivas
发明人： Oliver David Jones , Kenneth C. McMahon , Jonathan Borkowski , Scott Petersen , Donald Stephens , Yassin Mehmandoust , James M. Olivas
IPC分类号： F26B1900
CPC分类号： H01L21/67057 , H01L21/67034 , H01L21/67046 , H01L21/6776
摘要： Liquid is removed from batches of substrates by apparatus and methods for drying substrates that have been wet in an elongated liquid bath. The substrates are moved relative to the bath and an elongated gas-filled volume at rates of movement selected according to the location of the batches of substrates in the bath or the volume. As an example, the substrates and the bath are separated at a controlled rate to form a thin layer of liquid on each substrate as each substrate enters the gas-filled volume. The gas-filled volume is defined by an elongated hot chamber and hot gas directed into the volume and across the substrates and out of the volume continuously transfers thermal energy to the substrates . The flow rate of the gas into the volume is related to introduction of the substrates into the bath to avoid disturbing the liquid in the bath. The thermal energy transferred to the substrates in the volume evaporates the thin layer from the substrates without decreasing the rate of separation of the substrates and the bath below the maximum rate of such separation at which a meniscus will form between the bath and the surface of one of the substrates during such separation. Relative humidity in the volume is controlled by sensing the relative humidity and regulating the speed of a fan that draws gas from the volume.
摘要翻译： 通过用于干燥在细长液体浴中润湿的基底的装置和方法从批次的基底中除去液体。 衬底相对于浴移动，并且根据衬底批次在浴中的位置或体积选择移动速率的细长气体填充体积。 作为示例，基板和浴以受控的速率分离，以在每个基板进入气体填充体积时在每个基板上形成薄层的液体。 气体填充体积由细长的热室和引导到体积中并跨过衬底的热气体限定，并且在体积之外连续地将热能传递到衬底。 进入体积的气体的流速与将基底引入浴中以避免干扰浴中的液体有关。 在体积中转移到基底的热能从衬底中蒸发薄层，而不会降低衬底和浴的分离速率低于这种分离的最大速率，其中在浴和表面之间形成弯液面 在这种分离过程中。 通过感测相对湿度并调节从体积吸取气体的风扇的速度来控制体积中的相对湿度。
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