公开(公告)号：US20110189384A1

公开(公告)日：2011-08-04

申请号：US12995595

申请日：2009-06-03

申请人： Yasuo Shimizu ,  Hideyuki Ogata ,  Koichi Matsumoto ,  Takafumi Noguchi ,  Jouji Wakamori ,  Satohiro Okayama ,  Yawara Morioka ,  Noriyasu Sugiyama ,  Takashi Shigeta ,  Hiroyuki Kurihara ,  Kazuya Saito

发明人： Yasuo Shimizu ,  Hideyuki Ogata ,  Koichi Matsumoto ,  Takafumi Noguchi ,  Jouji Wakamori ,  Satohiro Okayama ,  Yawara Morioka ,  Noriyasu Sugiyama ,  Takashi Shigeta ,  Hiroyuki Kurihara ,  Kazuya Saito

IPC分类号： B05D5/12

CPC分类号： H01L21/67167 ,  C23C16/5096 ,  C23C16/54 ,  H01J37/32743 ,  H01L21/67161 ,  H01L21/67173 ,  H01L21/67754 ,  H01L21/67781 ,  H01L31/18

摘要： A thin-film solar cell manufacturing apparatus includes a film forming chamber that is evacuated to a reduced pressure and forms a film on a substrate using a CVD method; a loading-ejecting chamber that is connected to the film forming chamber via a first opening-closing part and that is switchable between atmospheric pressure and reduced pressure; a first carrier that holds a pre-processed substrate; and a second carrier that holds a post-processed substrate, wherein the loading-ejecting chamber simultaneously stores the first carrier and the second carrier.

摘要翻译： 薄膜太阳能电池制造装置包括：成膜室，其被抽真空至减压，并使用CVD方法在基板上形成膜; 一个卸载室，其经由第一开闭部分连接到成膜室，并可在大气压和减压之间切换; 保持预处理衬底的第一载体; 以及保持后处理基板的第二载体，其中所述装载取出室同时存储所述第一载体和所述第二载体。

公开(公告)号：US20110100296A1

公开(公告)日：2011-05-05

申请号：US12995574

申请日：2009-06-05

申请人： Yasuo Shimizu ,  Hideyuki Ogata ,  Koichi Matsumoto ,  Takafumi Noguchi ,  Jouji Wakamori ,  Satohiro Okayama ,  Yawara Morioka ,  Noriyasu Sugiyama ,  Takashi Shigeta ,  Hiroyuki Kurihara

发明人： Yasuo Shimizu ,  Hideyuki Ogata ,  Koichi Matsumoto ,  Takafumi Noguchi ,  Jouji Wakamori ,  Satohiro Okayama ,  Yawara Morioka ,  Noriyasu Sugiyama ,  Takashi Shigeta ,  Hiroyuki Kurihara

IPC分类号： C23C16/44

CPC分类号： C23C16/4587 ,  C23C16/24 ,  C23C16/54 ,  H01L21/67161 ,  H01L21/67173 ,  H01L21/67712 ,  H01L21/67736 ,  H01L21/67754 ,  H01L31/076 ,  H01L31/1804 ,  Y02E10/547 ,  Y02E10/548 ,  Y02P70/521

摘要： A film formation apparatus includes: a film forming chamber in which a desired film is formed on a substrate in a vacuum; a loading-ejecting chamber fixed to the film forming chamber with a first opening-closing section interposed therebetween, being capable of reducing a pressure inside the loading-ejecting chamber so as to form a vacuum atmosphere; a second opening-closing section provided at a face opposite to the face of the loading-ejecting chamber on which the first opening-closing section is provided; and a carrier holding the substrate so that a film formation face of the substrate is substantially parallel to a direction of gravitational force, wherein the carrier or the substrate passes through the second opening-closing section, and is transported to the loading-ejecting chamber and is transported from the loading-ejecting chamber; a plurality of carriers is disposed in the loading-ejecting chamber in parallel to each other; the plurality of carriers is transported in parallel between the loading-ejecting chamber and the film forming chamber; and a film is simultaneously formed on a plurality of substrates that is held by the plurality of carriers in the film forming chamber.

摘要翻译： 成膜装置包括：在真空中在基板上形成期望的膜的成膜室; 一个装载取出室，其固定在成膜室上，其中插入有第一开闭部分，能够减小装载取出室内部的压力，形成真空气氛; 第二开闭部，设置在与设置有所述第一开闭部的所述装卸取出室的面相反的面上; 以及保持基板的载体，使得基板的成膜面基本上平行于重力方向，其中载体或基板通过第二打开 - 关闭部分，并被运送到装载 - 取出室， 从卸载室输送; 多个载体彼此平行地设置在装载取出室中; 多个载体在装载取出室和成膜室之间平行地输送; 并且在由成膜室中的多个载体保持的多个基板上同时形成膜。

公开(公告)号：US20110120370A1

公开(公告)日：2011-05-26

申请号：US12995277

申请日：2009-06-03

申请人： Yasuo Shimizu ,  Hideyuki Ogata ,  Koichi Matsumoto ,  Takafumi Noguchi ,  Jouji Wakamori ,  Satohiro Okayama ,  Yawara Morioka ,  Noriyasu Sugiyama ,  Takashi Shigeta ,  Hiroyuki Kurihara

发明人： Yasuo Shimizu ,  Hideyuki Ogata ,  Koichi Matsumoto ,  Takafumi Noguchi ,  Jouji Wakamori ,  Satohiro Okayama ,  Yawara Morioka ,  Noriyasu Sugiyama ,  Takashi Shigeta ,  Hiroyuki Kurihara

IPC分类号： C23C16/52 ,  C23C16/00

CPC分类号： H01L21/67754 ,  C23C16/4401 ,  C23C16/4587 ,  C23C16/509 ,  C23C16/54 ,  H01L21/67161 ,  H01L21/67167 ,  H01L21/67173 ,  H01L21/67781 ,  H01L31/0687 ,  H01L31/182 ,  H01L31/1824 ,  Y02E10/545 ,  Y02E10/546 ,  Y02P70/521

摘要： A thin-film solar cell manufacturing apparatus includes a film forming chamber which stores a substrate; and an electrode unit which performs film formation using a CVD method on the substrate in the film forming chamber. The electrode unit has an anode and a cathode; and a side wall portion which holds the anode and the cathode and forms a part of a wall portion of the film forming chamber, and is attachable to and detachable from the film forming chamber.

摘要翻译： 薄膜太阳能电池制造装置包括：存储基板的成膜室; 以及电极单元，其在成膜室中的基板上使用CVD法进行成膜。 电极单元具有阳极和阴极; 以及侧壁部分，其保持阳极和阴极并形成成膜室的壁部分的一部分，并且可附接到成膜室并从膜形成室拆卸。

公开(公告)号：US20110100297A1

公开(公告)日：2011-05-05

申请号：US12995779

申请日：2009-06-03

申请人： Yasuo Shimizu ,  Hideyuki Ogata ,  Koichi Matsumoto ,  Takafumi Noguchi ,  Jouji Wakamori ,  Satohiro Okayama ,  Yawara Morioka ,  Noriyasu Sugiyama ,  Takashi Shigeta ,  Hiroyuki Kurihara

发明人： Yasuo Shimizu ,  Hideyuki Ogata ,  Koichi Matsumoto ,  Takafumi Noguchi ,  Jouji Wakamori ,  Satohiro Okayama ,  Yawara Morioka ,  Noriyasu Sugiyama ,  Takashi Shigeta ,  Hiroyuki Kurihara

IPC分类号： C23C16/503 ,  C23C16/458

CPC分类号： H01L31/1824 ,  C23C16/4587 ,  H01L21/67161 ,  H01L21/67167 ,  H01L21/67173 ,  H01L21/67754 ,  H01L21/67781 ,  H01L31/077 ,  Y02E10/545 ,  Y02P70/521

摘要： A thin-film solar cell manufacturing apparatus includes a film forming chamber that is evacuated to a reduced pressure and forms a film on a substrate using a CVD method; a loading-ejecting chamber that is connected to the film forming chamber via a first opening-closing part and that is switchable between atmospheric pressure and reduced pressure; transfer rail that is laid at the film forming chamber and the loading-ejecting chamber; a carrier that holds the substrate and moves along the transfer rail; and a carrier transfer mechanism that transfers the carrier, wherein, the carrier transfer mechanism is provided in the loading-ejecting chamber to transfer the carrier between the film forming chamber and the loading-ejecting chamber.

摘要翻译： 薄膜太阳能电池制造装置包括：成膜室，其被抽真空至减压，并使用CVD方法在基板上形成膜; 一个卸载室，其经由第一开闭部分连接到成膜室，并可在大气压和减压之间切换; 传送轨道，其设置在成膜室和装卸室; 保持基板并沿着传送轨道移动的载体; 以及传送载体的载体传送机构，其中，所述载体传送机构设置在所述装载取出室中，以在所述成膜室和所述装载取出室之间传送载体。

公开(公告)号：US20110107969A1

公开(公告)日：2011-05-12

申请号：US12995304

申请日：2009-06-04

申请人： Yasuo Shimizu ,  Hideyuki Ogata ,  Koichi Matsumoto ,  Takafumi Noguchi ,  Jouji Wakamori ,  Satohiro Okayama ,  Yawara Morioka ,  Noriyasu Sugiyama ,  Takashi Shigeta ,  Hiroyuki Kurihara

发明人： Yasuo Shimizu ,  Hideyuki Ogata ,  Koichi Matsumoto ,  Takafumi Noguchi ,  Jouji Wakamori ,  Satohiro Okayama ,  Yawara Morioka ,  Noriyasu Sugiyama ,  Takashi Shigeta ,  Hiroyuki Kurihara

IPC分类号： H01L31/18

CPC分类号： H01L21/67173 ,  C23C16/24 ,  C23C16/45565 ,  C23C16/4587 ,  C23C16/509 ,  C23C16/54 ,  H01L21/67161 ,  H01L21/67167 ,  H01L21/67754 ,  H01L21/67781 ,  H01L31/202 ,  H01L31/206 ,  Y02E10/50 ,  Y02P70/521

摘要： An apparatus for manufacturing a thin film solar cell of the present invention has a film forming chamber in which a substrate is arranged so that the film formation face of the substrate is substantially parallel to the direction of gravitational force and a film is formed on the film formation face by a CVD method; an electrode unit including a cathode unit having cathodes to which voltages are to be applied arranged on both sides thereof, and a pair of anodes each of which is arranged to face the cathodes, respectively, at a separation distance therefrom; and a conveying part which supports the substrate and conveys the substrate to between the cathode and the anode facing the cathode. The separation distance is variable.

摘要翻译： 本发明的薄膜太阳能电池的制造装置具有：成膜室，其中配置基板，使得基板的成膜面基本上平行于重力方向，并且在膜上形成膜 通过CVD法形成表面; 包括阴极单元的电极单元，阴极单元具有施加电压的阴极布置在其两侧，以及一对阳极，每个阳极分别与阴极隔开距离; 以及输送部，其支撑所述基板并将所述基板输送到所述阴极和面向所述阴极的所述阳极之间。 分离距离是可变的。

公开(公告)号：US20110094445A1

公开(公告)日：2011-04-28

申请号：US12995295

申请日：2009-06-04

申请人： Yasuo Shimizu ,  Hideyuki Ogata ,  Koichi Matsumoto ,  Takafumi Noguchi ,  Jouji Wakamori ,  Satohiro Okayama ,  Yawara Morioka ,  Noriyasu Sugiyama ,  Takashi Shigeta ,  Hiroyuki Kurihara ,  Masanori Hashimoto ,  Sadatsugu Wakamatsu

发明人： Yasuo Shimizu ,  Hideyuki Ogata ,  Koichi Matsumoto ,  Takafumi Noguchi ,  Jouji Wakamori ,  Satohiro Okayama ,  Yawara Morioka ,  Noriyasu Sugiyama ,  Takashi Shigeta ,  Hiroyuki Kurihara ,  Masanori Hashimoto ,  Sadatsugu Wakamatsu

IPC分类号： H01L31/18

CPC分类号： H01L21/67781 ,  C23C16/24 ,  C23C16/45565 ,  C23C16/4587 ,  H01J37/32532 ,  H01L21/67161 ,  H01L21/67167 ,  H01L21/67173 ,  H01L21/67754 ,  H01L31/202 ,  H01L31/206 ,  Y02E10/50 ,  Y02P70/521

摘要： An apparatus for manufacturing a thin film solar cell of the present invention includes a film forming chamber in which a film is formed on a film formation face of a substrate using a CVD method; an electrode unit including a cathode unit having cathodes to which voltages are to be applied arranged on both sides thereof, and a pair of anodes each of which is arranged to face a different one of the cathodes, at a separation distance therefrom; a mask for covering a peripheral edge portion of the substrate; and a discharge duct installed around the cathode unit. A film formation space is formed between the cathode unit and the substrate installed on the side of the anode, an evacuation passage is formed between the mask and the cathode unit, the discharge duct and the film formation space are connected together via the evacuation passage, and a film forming gas introduced into the film formation space is evacuated from the discharge duct through the evacuation passage.

摘要翻译： 本发明的薄膜太阳能电池的制造装置包括使用CVD法在基板的成膜面上形成膜的成膜室; 包括阴极单元的电极单元，阴极单元具有要施加电压的阴极布置在其两侧，以及一对阳极，每个阳极以与其间隔开的距离与其他阴极对齐; 掩模，用于覆盖基板的周边部分; 以及安装在阴极单元周围的排放管​​。 在阴极单元和安装在阳极侧的基板之间形成膜形成空间，在掩模和阴极单元之间形成排气通道，排出管和成膜空间经由排气通道连接在一起， 并且从成膜空间引入的成膜气体通过排气通道从排出管排出。