公开(公告)号：US20120180912A1

公开(公告)日：2012-07-19

申请号：US13498057

申请日：2010-09-24

申请人： Yoshihiro Gotoh ,  Shinji Tanaka ,  Tsukasa Azuma

发明人： Yoshihiro Gotoh ,  Shinji Tanaka ,  Tsukasa Azuma

IPC分类号： C21D6/00 ,  C22C38/44

CPC分类号： C22C38/44 ,  C21D6/00 ,  C21D6/001 ,  C22C38/001 ,  C22C38/008 ,  C22C38/02 ,  C22C38/04 ,  C22C38/46

摘要： A high strength and high toughness cast steel material of the invention has a composition comprising 0.10 to 0.20% by mass of C, 0.10 to 0.50% by mass of Si, 0.40 to 1.20% by mass of Mn, 2.00 to 3.00% by mass of Ni, 0.20 to 0.70% by mass of Cr, and 0.10 to 0.50% by mass of Mo, and further comprising Fe and unavoidable impurities. The high strength and high toughness cast steel material of the invention is produced by subjecting an ingot having the above composition to annealing at 1,000 to 1,100° C., quenching at 850 to 950° C., tempering at 610 to 670° C., and then, if desired, stress-relief annealing at less than 610° C.

摘要翻译： 本发明的高强度，高韧性的铸钢材料，具有C：0.10〜0.20质量％，Si：0.10〜0.50质量％，Mn：0.40〜1.20质量％，2.00〜3.00质量％ Ni，0.20〜0.70质量％的Cr和0.10〜0.50质量％的Mo，还含有Fe和不可避免的杂质。 本发明的高强度高韧性铸钢材料是通过对上述组成的锭进行1000〜1100℃的退火，在850〜950℃淬火，在610〜670℃回火， 然后如果需要，在小于610℃的应力消除退火

公开(公告)号：US09797034B2

公开(公告)日：2017-10-24

申请号：US13498057

申请日：2010-09-24

申请人： Yoshihiro Gotoh ,  Shinji Tanaka ,  Tsukasa Azuma

发明人： Yoshihiro Gotoh ,  Shinji Tanaka ,  Tsukasa Azuma

IPC分类号： C22C38/02 ,  C22C38/04 ,  C22C38/44 ,  C22C38/08 ,  C21D6/00 ,  C22C38/46 ,  C22C38/00

CPC分类号： C22C38/44 ,  C21D6/00 ,  C21D6/001 ,  C22C38/001 ,  C22C38/008 ,  C22C38/02 ,  C22C38/04 ,  C22C38/46

摘要： A high strength and high toughness cast steel material of the invention has a composition comprising 0.10 to 0.20% by mass of C, 0.10 to 0.50% by mass of Si, 0.40 to 1.20% by mass of Mn, 2.00 to 3.00% by mass of Ni, 0.20 to 0.70% by mass of Cr, and 0.10 to 0.50% by mass of Mo, and further comprising Fe and unavoidable impurities. The high strength and high toughness cast steel material of the invention is produced by subjecting an ingot having the above composition to annealing at 1,000 to 1,100° C., quenching at 850 to 950° C., tempering at 610 to 670° C., and then, if desired, stress-relief annealing at less than 610° C.

公开(公告)号：US20120160373A1

公开(公告)日：2012-06-28

申请号：US13336437

申请日：2011-12-23

申请人： Masayuki YAMADA ,  Reki Takaku ,  Haruki Ohnishi ,  Kenichi Okuno ,  Kenichi Imai ,  Kazuhiro Miki ,  Tsukasa Azuma ,  Satoru Ohsaki

发明人： Masayuki YAMADA ,  Reki Takaku ,  Haruki Ohnishi ,  Kenichi Okuno ,  Kenichi Imai ,  Kazuhiro Miki ,  Tsukasa Azuma ,  Satoru Ohsaki

IPC分类号： C21D8/00 ,  C22C38/54 ,  C22C38/46 ,  C22C38/00 ,  C22C38/44

CPC分类号： C22C38/44 ,  C21D1/25 ,  C21D6/02 ,  C21D7/13 ,  C21D2211/004 ,  C21D2211/008 ,  C22C38/46 ,  C22C38/48 ,  C22C38/52 ,  C22C38/54

摘要： A forging heat resistant steel of an embodiment contains in percent by mass C: 0.05-0.2, Si: 0.01-0.1, Mn: 0.01-0.15, Ni: 0.05-1, Cr: 8 or more and less than 10, Mo: 0.05-1, V: 0.05-0.3, Co: 1-5, W: 1-2.2, N: 0.01 or more and less than 0.015, Nb: 0.01-0.15, B: 0.003-0.03, and a remainder comprising Fe and unavoidable impurities.

摘要翻译： 本实施例的锻造耐热钢以质量％计含有C：0.05〜0.2，Si：0.01-0.1，Mn：0.01-0.15，Ni：0.05-1，Cr：8以上且小于10，Mo：0.05 -1，V：0.05-0.3，Co：1-5，W：1-2.2，N：0.01以上且小于0.015，Nb：0.01-0.15，B：0.003-0.03，余量包含Fe和不可避免的 杂质。

公开(公告)号：US5712698A

公开(公告)日：1998-01-27

申请号：US610770

申请日：1996-03-04

申请人： Bernhard Poschenrieder ,  Takashi Sato ,  Tsukasa Azuma

发明人： Bernhard Poschenrieder ,  Takashi Sato ,  Tsukasa Azuma

IPC分类号： G03F7/20 ,  H01L21/027 ,  G03B27/72

CPC分类号： G03F7/70091 ,  G03F7/701

摘要： New types of apertures to vary the size and shape of the aperture area without the need to change the whole aperture plate in off axis lithography. The off axis illumination apertures allow the size and shape of apertures to be changed without having to change the aperture plates for each step in the lithographic process. The aperture plate is fitted with simple shutter mechanisms that allow the ready adjustment of the aperture openings.

摘要翻译： 新型的孔径，以改变开口面积的大小和形状，而不需要在离轴光刻中改变整个孔板。 离轴照明孔允许改变孔的尺寸和形状，而不必改变光刻工艺中每个步骤的孔板。 孔板配有简单的快门机构，允许准备调整孔径开口。

公开(公告)号：US09108342B2

公开(公告)日：2015-08-18

申请号：US13414754

申请日：2012-03-08

申请人： Tsukasa Azuma

发明人： Tsukasa Azuma

IPC分类号： H01L21/302 ,  B29C33/38 ,  G03F7/00 ,  H01L21/67 ,  B82Y10/00 ,  B82Y40/00

CPC分类号： B29C33/3842 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  H01L21/67092

摘要： According to an embodiment, a method of forming a film is provided. In the method of forming a film, a reversed pattern which is the reverse of a desired layout pattern is formed on a first substrate. Subsequently, a pattern material of the desired layout pattern is supplied to a second substrate as a reversal material. Thereafter, the reversed pattern is brought into contact with the reversal material such that the reversed pattern faces the reversal material, so that the reversed pattern is filled with the reversal material by a capillary phenomenon.

摘要翻译： 根据实施例，提供了一种形成膜的方法。 在形成膜的方法中，在第一基板上形成与期望的布局图案相反的反转图案。 随后，将所需布局图案的图案材料作为反转材料提供给第二基板。 此后，使反转图案与反转材料接触，使得反转图案面向反转材料，使得反转图案通过毛细管现象被反转材料填充。

公开(公告)号：US08808973B2

公开(公告)日：2014-08-19

申请号：US13402400

申请日：2012-02-22

申请人： Satoshi Mikoshiba ,  Koji Asakawa ,  Hiroko Nakamura ,  Shigeki Hattori ,  Atsushi Hieno ,  Tsukasa Azuma ,  Yuriko Seino ,  Masahiro Kanno

发明人： Satoshi Mikoshiba ,  Koji Asakawa ,  Hiroko Nakamura ,  Shigeki Hattori ,  Atsushi Hieno ,  Tsukasa Azuma ,  Yuriko Seino ,  Masahiro Kanno

IPC分类号： G03F7/26

CPC分类号： H01L21/0337 ,  B81C1/00031 ,  B81C2201/0149 ,  G03F7/0757 ,  G03F7/165 ,  G03F7/26 ,  H01L21/3086

摘要： According to one embodiment, there is provided a method of forming a pattern including forming a polymer layer on a substrate, the polymer layer including a first and second regions, selectively irradiating either of the first and second regions with energy rays or irradiating the first and second regions with energy rays under different conditions to cause a difference in surface free energy between the first and second regions, thereafter, forming a block copolymer layer on the polymer layer, and causing microphase separation in the block copolymer layer to simultaneously form first and second microphase-separated structures on the first and second regions, respectively.

摘要翻译： 根据一个实施方案，提供了一种形成图案的方法，包括在基底上形成聚合物层，聚合物层包括第一和第二区域，用能量射线选择性地照射第一和第二区域中的任一个，或者照射第一和第二区域 在不同条件下具有能量射线的第二区域引起第一和第二区域之间的表面自由能的差异，此后在聚合物层上形成嵌段共聚物层，并且使嵌段共聚物层中的微相分离同时形成第一和第二 分别在第一和第二区域上的微相分离结构。

公开(公告)号：US08512488B2

公开(公告)日：2013-08-20

申请号：US11836900

申请日：2007-08-10

申请人： Shinya Imano ,  Hirotsugu Kawanaka ,  Hiroyuki Doi ,  Tatsuya Takahashi ,  Tsukasa Azuma ,  Koji Kajikawa

发明人： Shinya Imano ,  Hirotsugu Kawanaka ,  Hiroyuki Doi ,  Tatsuya Takahashi ,  Tsukasa Azuma ,  Koji Kajikawa

IPC分类号： C22F1/10 ,  C22C19/05 ,  F01D5/14

CPC分类号： C22C19/05 ,  C22F1/10

摘要： An Ni—Fe based superalloy forging material including 30 to 40 wt % of Fe, 14 to 16 wt % of Cr, 1.2 to 1.7 wt % of Ti, 1.1 to 1.5 wt % of Al, 1.9 to 2.2 wt % of Nb, 0.05 wt % or less of C and the remainder of Ni and inevitable impurities is solution-treated and aged, and thereby γ′ phase (Ni3Al) having an initial mean particle size of about 50 to about 100 nm is precipitated. This superalloy is excellent in high-temperature strength and high-temperature ductility and can produce a large forged product of 10 ton or more. Therefore, this material is suitable for use as the material of a steam turbine rotor having a main steam temperature of 650° C. or more.

摘要翻译： 包含Fe：30〜40重量％，Cr：14〜16重量％，Ti：1.2〜1.7重量％，Al：1.1〜1.5重量％，Nb：1.9〜2.2重量％，Ni： 重量％以下的C和余量的Ni和不可避免的杂质进行溶液处理和老化，由此沉淀出初始平均粒度为约50〜约100nm的γ'相（Ni3Al）。 该超合金具有优异的高温强度和高温延展性，可生产10吨以上的大型锻造产品。 因此，该材料适用于主蒸汽温度为650℃以上的汽轮机转子的材料。

公开(公告)号：US07820098B2

公开(公告)日：2010-10-26

申请号：US10181318

申请日：2001-08-16

申请人： Masahiko Morinaga ,  Yoshinori Murata ,  Tsukasa Azuma ,  Kazuhiro Miki ,  Tohru Ishiguro ,  Ryokichi Hashizume

发明人： Masahiko Morinaga ,  Yoshinori Murata ,  Tsukasa Azuma ,  Kazuhiro Miki ,  Tohru Ishiguro ,  Ryokichi Hashizume

IPC分类号： C22C38/30 ,  C22C38/22 ,  C22C38/24 ,  C22C38/26

CPC分类号： C22C38/005 ,  C22C38/001 ,  C22C38/22 ,  C22C38/24 ,  C22C38/26 ,  C22C38/30 ,  C22C38/32

摘要： In the thermal power system, the electricity production efficiency may be improved by providing turbine members having the improved high temperature characteristic over the corresponding prior art turbine members. Turbine members may be provided by using high resistant steels composed of any one or ones selected from the group consisting of the components, including 0.08 to 0.13% of carbon (C), 8.5 to 9.8% of chromium (Cr), 0 to 1.5% of molybdenum (Mo), 0.10 to 0.25% of vanadium (V), 0.03 to 0.08% of niobium (Nb), 0.2 to 5.0% of tungsten (W), 1.5 to 6.0% of cobalt (Co), 0.002 to 0.015% of boron (B), 0.015 to 0.025% of nitrogen (N), and optionally, 0.01 to 3.0% of rhenium (Re), 0.1 to 0.50% of silicon (Si), 0.1 to 1.0% of manganese (Mo), 0.05 to 0.8% of nickel (Ni) and 0.1 to 1.3% of cupper. The long-time creep strength may be improved by using those high resistant steels for turbine rotors, turbine members and the like, which enable the steam temperature to be higher, thereby improving the electricity production efficiency in the thermal power system. The accelerated creep inhibitor parameter is provided for controlling the reduction in the creep strength so that the high creep strength can be maintained for the extended period of time.

摘要翻译： 在火力发电系统中，通过提供相对于现有技术的涡轮机构件具有改进的高温特性的涡轮机构，可以提高电力生产效率。 涡轮机构可以通过使用由选自组分组成的组中的任何一种或其组成的高抗性钢提供，包括碳（C）的0.08〜0.13％，铬（Cr）的8.5〜9.8％，铬（Cr）的0〜1.5％ 的钼（Mo），0.10〜0.25％的钒（V），0.03〜0.08％的铌（Nb），0.2〜5.0％的钨（W），1.5〜6.0％的钴（Co），0.002〜0.015％ 的硼（B），0.015〜0.025％的氮（N）和任选的0.01〜3.0％的铼（Re），0.1〜0.50％的硅（Si），0.1〜1.0％的锰（Mo） 至0.8％的镍（Ni）和0.1至1.3％的铜。 可以通过使用用于涡轮转子，涡轮机构等的高耐用性钢来提高长时间的蠕变强度，这使得蒸汽温度更高，从而提高火力发电系统的电力生产效率。 提供了加速蠕变抑制剂参数，用于控制蠕变强度的降低，使得能够在较长时间内保持高蠕变强度。

公开(公告)号：US08609014B2

公开(公告)日：2013-12-17

申请号：US13150961

申请日：2011-06-01

申请人： Tsukasa Azuma ,  Tatsuhiko Higashiki ,  Kyoichi Suguro

发明人： Tsukasa Azuma ,  Tatsuhiko Higashiki ,  Kyoichi Suguro

IPC分类号： B29C67/20

CPC分类号： G03F7/0002 ,  B82Y10/00 ,  B82Y40/00

摘要： According to one embodiment, a template manufacturing method is a method for manufacturing a template for use in an imprint processing in which a pattern having irregularities are formed on a principal surface, and the pattern is brought into contact with a resist member formed on a substrate to be processed, to transfer the pattern to the resist member, the method including implanting charged particles at least into the bottoms of concave portions of the template.

摘要翻译： 根据一个实施例，模板制造方法是用于制造在压印处理中使用的模板的方法，其中在主表面上形成具有凹凸的图案，并且图案与形成在基板上的抗蚀剂部件接触 要被处理以将图案转印到抗蚀剂构件上，该方法包括将带电粒子至少注入到模板的凹部的底部中。

公开(公告)号：US20100227262A1

公开(公告)日：2010-09-09

申请号：US12696142

申请日：2010-01-29

申请人： Katsutoshi KOBAYASHI ,  Daizo Muto ,  Koutarou Sho ,  Tsukasa Azuma

发明人： Katsutoshi KOBAYASHI ,  Daizo Muto ,  Koutarou Sho ,  Tsukasa Azuma

IPC分类号： G03F7/20

CPC分类号： G03F7/162 ,  G03F7/70341

摘要： A method for manufacturing a semiconductor device, includes: supplying a liquid resist containing a water-repellent additive to a surface of a rotating semiconductor wafer fixed to a rotary support to form a resist film to a design thickness on the surface of the semiconductor wafer; spin drying the resist film; bringing a liquid into contact with the resist film and exposing the resist film through the liquid after the spin drying; developing the resist film to form a resist pattern; and performing processing on the semiconductor wafer.A condition for adjusting contact angle between the resist film surface and the liquid is controlled so that the contact angle assumes a desired value, the condition including at least one selected from the group consisting of spin drying time for the resist film, resist temperature during the supplying, pressure of an atmosphere above the semiconductor wafer surface, and humidity of the atmosphere above the semiconductor wafer surface.

摘要翻译： 一种半导体装置的制造方法，其特征在于，包括：向固定于旋转支撑体的旋转半导体晶片的表面供给含有防水添加剂的液体抗蚀剂，以形成半导体晶片表面的设计厚度的抗蚀剂膜; 旋转干燥抗蚀膜; 使液体与抗蚀剂膜接触，并且在旋转干燥后使抗蚀膜暴露于液体中; 显影抗蚀剂膜以形成抗蚀剂图案; 并对半导体晶片进行处理。 控制用于调节抗蚀剂膜表面和液体之间的接触角的条件使得接触角呈现期望值，该条件包括选自抗蚀剂膜的旋转干燥时间，抗蚀剂膜的抗蚀剂温度 提供半导体晶片表面之上的气氛的压力，以及半导体晶片表面之上的气氛的湿度。