Cleaning sheet, transfer member provided with cleaning function, and method for cleaning substrate processing apparatus
    2.
    发明授权
    Cleaning sheet, transfer member provided with cleaning function, and method for cleaning substrate processing apparatus 失效
    具有清洁功能的清洁片,转印部件以及清洗基板处理装置的方法

    公开(公告)号:US08524007B2

    公开(公告)日:2013-09-03

    申请号:US12977762

    申请日:2010-12-23

    IPC分类号: B08B7/00 B32B3/30 B32B17/10

    摘要: A cleaning sheet including a cleaning layer which has a microasperity shape having an arithmetic average roughness Ra of 0.05 μm or less and a maximum height Rz of 1.0 μm or less. Preferably, a substantial surface area of the cleaning layer per a flat surface of 1 mm2 is 150% or more of a substantial surface area of a silicon wafer mirror surface per a flat area of 1 mm2. The cleaning sheet may be provided on at least one surface of a transfer member so that the transfer member has a cleaning function. When the cleaning sheet or the transfer member having a cleaning function is transferred in a substrate processing apparatus in place of a substrate to be processed therein, the cleaning sheet contacts and cleans a site of the substrate processing apparatus.

    摘要翻译: 一种清洁片,包括具有0.05微米以下的算术平均粗糙度Ra和1.0mum以下的最大高度Rz的微细度形状的清洁层。 优选地,每1mm平坦表面的清洁层的基本表面积为1mm 2的平坦区域的硅晶片镜表面的基本表面积的150%或更多。 清洁片可以设置在转印构件的至少一个表面上,使得转印构件具有清洁功能。 当清洁片或具有清洁功能的转印元件在衬底处理设备中转移以代替待处理衬底时,清洁片接触并清洁衬底处理设备的位置。

    Light-sensitive composition
    5.
    发明授权
    Light-sensitive composition 失效
    感光组合物

    公开(公告)号:US5427887A

    公开(公告)日:1995-06-27

    申请号:US106699

    申请日:1993-08-16

    IPC分类号: G03F7/021 G03C1/60

    CPC分类号: G03F7/021 Y10S430/111

    摘要: Disclosed is a light-sensitive composition which comprises(A) a diazo resin and(B) an alkali-soluble and swellable polymer compound, said polymer compound being a vinyl copolymer containing, as a constitutional unit, 0.1 to 10 mole % of a structure derived from an ester of acrylic acid or methacrylic acid having an alkyl group with 8 or more carbon atoms.

    摘要翻译: 公开了一种感光性组合物,其包含(A)重氮树脂和(B)碱溶性和可溶胀的聚合物化合物,所述高分子化合物是含有作为结构单元的结构的0.1〜10摩尔% 衍生自具有8个或更多个碳原子的烷基的丙烯酸或甲基丙烯酸的酯。

    CLEANING SHEET, TRANSFER MEMBER PROVIDED WITH CLEANING FUNCTION, AND METHOD FOR CLEANING SUBSTRATE PROCESSING APPARATUS
    8.
    发明申请
    CLEANING SHEET, TRANSFER MEMBER PROVIDED WITH CLEANING FUNCTION, AND METHOD FOR CLEANING SUBSTRATE PROCESSING APPARATUS 失效
    清洁片,具有清洁功能的转移构件以及清洁基板处理装置的方法

    公开(公告)号:US20090263153A1

    公开(公告)日:2009-10-22

    申请号:US12067235

    申请日:2006-10-12

    IPC分类号: G03G21/00 B32B3/00

    摘要: There are provided a transfer member provided with a cleaning function, which have excellent foreign matter removing performance and transfer performance, and which can remove foreign matters having a predetermined particle diameter with especially high efficiency.The transfer member provided with a cleaning function includes a transfer member and the cleaning layer provided on at least one surface of the transfer member. The cleaning layer has a microasperity shape having an arithmetic average roughness Ra of 0.05 μm or less and a maximum height Rz of 1.0 μm or less. Preferably, a substantial surface area of the cleaning layer per a flat surface of 1 mm2 is 150% or more of a substantial surface area of a silicon wafer mirror surface per a flat area of 1 mm2.

    摘要翻译: 提供具有清除功能的转印构件,其具有优异的异物去除性能和转印性能,并且可以以特别高的效率去除具有预定粒径的异物。 设置有清洁功能的传送构件包括传送构件和设置在传送构件的至少一个表面上的清洁层。 清洁层具有0.05微米以下的算术平均粗糙度Ra和1.0μm以下的最大高度Rz的微细度形状。 优选地,每1mm平坦表面的清洁层的基本表面积为1mm 2的平坦区域的硅晶片镜表面的基本表面积的150%或更多。