公开(公告)号：US07173693B2

公开(公告)日：2007-02-06

申请号：US11042173

申请日：2005-01-26

申请人： Yukihiro Shibata ,  Shunji Maeda ,  Yukio Kembo

发明人： Yukihiro Shibata ,  Shunji Maeda ,  Yukio Kembo

IPC分类号： G01N21/00 ,  G06K9/00

CPC分类号： G01N21/956 ,  G01N21/9501

摘要： A method for inspecting a specimen includes obtaining an image of a specimen through a first optical system, displaying the obtained image of the specimen on a display screen; dividing the displayed image of the specimen into plural regions and setting defect detection sensitivity for each of the plural divided regions, transferring the specimen from the first optical system to a second optical system, obtaining an image of the specimen through the second optical system, detecting defects on the specimen by processing the image obtained through the second optical system using the defect detection sensitivity set for a respective region, and displaying information of the detected defects on the display screen.

摘要翻译： 用于检查样本的方法包括通过第一光学系统获得样本的图像，将获得的样本图像显示在显示屏上; 将样本的显示图像分割成多个区域，并且对多个分割区域中的每一个分割区域设置缺陷检测灵敏度，将样本从第一光学系统传送到第二光学系统，通过第二光学系统获得样本的图像，检测 通过使用针对各个区域设置的缺陷检测灵敏度处理通过第二光学系统获得的图像，并在显示屏幕上显示检测到的缺陷的信息，来检查样本上的缺陷。

公开(公告)号：US20050128472A1

公开(公告)日：2005-06-16

申请号：US11042173

申请日：2005-01-26

申请人： Yukihiro Shibata ,  Shunji Maeda ,  Yukio Kembo

发明人： Yukihiro Shibata ,  Shunji Maeda ,  Yukio Kembo

IPC分类号： G01B11/30 ,  G01N21/95 ,  G01N21/956 ,  G01N23/205 ,  H01L21/66 ,  G01N21/88

CPC分类号： G01N21/956 ,  G01N21/9501

摘要： A method for inspecting a specimen includes obtaining an image of a specimen through a first optical system, displaying the obtained image of the specimen on a display screen; dividing the displayed image of the specimen into plural regions and setting defect detection sensitivity for each of the plural divided regions, transferring the specimen from the first optical system to a second optical system, obtaining an image of the specimen through the second optical system, detecting defects on the specimen by processing the image obtained through the second optical system using the defect detection sensitivity set for a respective region, and displaying information of the detected defects on the display screen.

摘要翻译： 用于检查样本的方法包括通过第一光学系统获得样本的图像，将获得的样本图像显示在显示屏上; 将样本的显示图像分割成多个区域，并且对多个分割区域中的每一个分割区域设置缺陷检测灵敏度，将样本从第一光学系统传送到第二光学系统，通过第二光学系统获得样本的图像，检测 通过使用针对各个区域设置的缺陷检测灵敏度处理通过第二光学系统获得的图像，以及在显示屏幕上显示检测到的缺陷的信息，来检查样本上的缺陷。

公开(公告)号：US06850320B2

公开(公告)日：2005-02-01

申请号：US09906678

申请日：2001-07-18

申请人： Yukihiro Shibata ,  Shunji Maeda ,  Yukio Kembo

发明人： Yukihiro Shibata ,  Shunji Maeda ,  Yukio Kembo

IPC分类号： G01B11/30 ,  G01N21/95 ,  G01N21/956 ,  G01N23/205 ,  H01L21/66 ,  G01N21/00 ,  G06K9/00

CPC分类号： G01N21/956 ,  G01N21/9501

摘要： The present invention provides a highly sensitive inspection technology that prevents false detections. The present invention includes means for detecting an image of an entire chip. Using this image, inspection regions are defined based on criticality. Detection sensitivities can be set for each of these inspection sensitivities. Alternatively, false detections can be eliminated in post-inspection processing by recording characteristic values used to evaluate defects, e.g., concentration differences, in the inspection results. Furthermore, by providing a system that allows sharing of inspection conditions and the like needed by multiple inspection devices, the time required for determining inspection conditions can be shortened and stability and reliability can be monitored.

摘要翻译： 本发明提供了一种防止错误检测的高灵敏度检测技术。 本发明包括用于检测整个芯片的图像的装置。 使用该图像，基于关键性定义检查区域。 可以对这些检测灵敏度设置检测灵敏度。 或者，通过在检查结果中记录用于评估缺陷的特征值，例如浓度差异，可以在检查后处理中消除错误检测。 此外，通过提供允许多个检查装置所需的检查条件等的共享的系统，可以缩短确定检查条件所需的时间，并且可以监视稳定性和可靠性。

公开(公告)号：US20080087820A1

公开(公告)日：2008-04-17

申请号：US11867476

申请日：2007-10-04

申请人： Toru KURENUMA ,  Hiroaki Yanagimoto ,  Yukio Kembo ,  Yuichi Kunitomo ,  Takafumi Morimoto ,  Satoshi Sekino

发明人： Toru KURENUMA ,  Hiroaki Yanagimoto ,  Yukio Kembo ,  Yuichi Kunitomo ,  Takafumi Morimoto ,  Satoshi Sekino

IPC分类号： G01N23/00

CPC分类号： G01Q10/06 ,  G01Q30/06

摘要： This probe control method is applied to the scanning probe microscope having a probe section with a probe pointed at a sample, a detection section for detecting physical quantity between the sample and the probe, a measurement section for measuring the surface of the sample to obtain the surface information on the basis of the physical quantity when scanning the sample surface by the probe, and a movement mechanism with at least two degree of freedom. The probe control method has steps of moving the probe in a scanning direction different from the contact direction while making the probe come into contact with the sample surface, detecting the torsional state of the probe during the movement of the probe, and adjusting either or both of the rate in the scanning direction and the force in the contact direction on the basis of the detected value obtained by the detection step.

摘要翻译： 将该探针控制方法应用于具有探针指向样品的探针部的扫描探针显微镜，用于检测样品与探针之间的物理量的检测部，测定样品表面的测定部， 基于通过探针扫描样品表面时的物理量的表面信息，以及具有至少两个自由度的移动机构。 探针控制方法具有使探针沿着与接触方向不同的扫描方向移动的步骤，同时使探针与样品表面接触，检测探针移动期间探针的扭转状态，并且调节任一或两者 基于通过检测步骤获得的检测值，扫描方向上的速率和接触方向上的力。

公开(公告)号：US07177020B2

公开(公告)日：2007-02-13

申请号：US11128352

申请日：2005-05-13

申请人： Hiroshi Morioka ,  Minori Noguchi ,  Yoshimasa Ohshima ,  Yukio Kembo ,  Hidetoshi Nishiyama ,  Kazuhiko Matsuoka ,  Yoshiharu Shigyo

发明人： Hiroshi Morioka ,  Minori Noguchi ,  Yoshimasa Ohshima ,  Yukio Kembo ,  Hidetoshi Nishiyama ,  Kazuhiko Matsuoka ,  Yoshiharu Shigyo

IPC分类号： G01J3/00

CPC分类号： H01L21/681 ,  B82Y15/00 ,  G01N21/94 ,  G01N21/9501 ,  G01N21/95623 ,  G01N2021/8822 ,  G01R31/308 ,  H01J37/00 ,  H01J2237/022 ,  H01J2237/0225 ,  H01L21/67253 ,  H01L21/67288 ,  H01L22/12

摘要： An apparatus and method for detecting defects on a specimen includes an illumination optical unit which obliquely projects a laser onto a region which is longer in one direction on a surface of a specimen than in a transverse direction, a table unit which mounts the specimen and which is movable, a detection optical unit which detects light from the specimen illuminated by the laser with an image sensor while the table is moving, and a signal processor. The signal processor processes a signal outputted from the image sensor of the detection optical unit and converted to a digital signal and extracts defects of the specimen by comparing the converted digital signal with a reference digital signal. A display unit displays information of defects extracted by the signal processor.

摘要翻译： 用于检测试样缺陷的装置和方法包括照射光学单元，其将激光倾斜地突出到在一个方向上在一个方向上比在横向方向上更长的区域，安装样本的台单元， 可移动的检测光学单元，检测光学单元，其在桌子移动时利用图像传感器检测由激光照射的样本的光，以及信号处理器。 信号处理器处理从检测光学单元的图像传感器输出的信号并转换为数字信号，并通过将转换的数字信号与参考数字信号进行比较来提取样本的缺陷。 显示单元显示由信号处理器提取的缺陷的信息。

公开(公告)号：US07037735B2

公开(公告)日：2006-05-02

申请号：US10170378

申请日：2002-06-14

申请人： Minori Noguchi ,  Yoshimasa Ohshima ,  Hidetoshi Nishiyama ,  Shunichi Matsumoto ,  Yukio Kembo ,  Ryouji Matsunaga ,  Keiji Sakai ,  Takanori Ninomiya ,  Tetsuya Watanabe ,  Hisato Nakamura ,  Takahiro Jingu ,  Yoshio Morishige ,  Shuichi Chikamatsu

发明人： Minori Noguchi ,  Yoshimasa Ohshima ,  Hidetoshi Nishiyama ,  Shunichi Matsumoto ,  Yukio Kembo ,  Ryouji Matsunaga ,  Keiji Sakai ,  Takanori Ninomiya ,  Tetsuya Watanabe ,  Hisato Nakamura ,  Takahiro Jingu ,  Yoshio Morishige ,  Shuichi Chikamatsu

IPC分类号： H01L21/66 ,  G01R31/26

CPC分类号： B82Y15/00 ,  G01N21/94 ,  G01N21/95623 ,  G01N21/95684 ,  G01N2021/8822 ,  G01R31/308 ,  H01J37/00 ,  H01J2237/022 ,  H01J2237/0225 ,  H01L21/67253 ,  H01L21/67288 ,  H01L21/681 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

摘要： A defect inspection method includes radiating an illumination slit-shaped beam having lights substantially parallel to a longitudinal direction to a substrate having circuit patterns in a direction inclined at a predetermined gradient relative to the direction of a line normal to the substrate and inclined at a predetermined gradient on a surface with respect to a group of main straight lines of the circuit patterns with its longitudinal direction oriented almost perpendicularly to a direction of a movement of the substrate. Scattered light reflected by a defect such as a foreign particle existing on the illuminated substrate is received and converted into a detection signal by using an image sensor, and defect judging is effected of an extracted a signal indicating a defect such as a foreign particle on the basis of the detection signal output.

公开(公告)号：US4708484A

公开(公告)日：1987-11-24

申请号：US789778

申请日：1985-10-21

申请人： Yoshihiro Komeyama ,  Yukio Kembo ,  Asahiro Kuni ,  Ryuuichi Funatsu ,  Akira Inagaki ,  Minoru Ikeda ,  Keiichi Okamoto

发明人： Yoshihiro Komeyama ,  Yukio Kembo ,  Asahiro Kuni ,  Ryuuichi Funatsu ,  Akira Inagaki ,  Minoru Ikeda ,  Keiichi Okamoto

IPC分类号： G01R31/26 ,  G03F9/00 ,  H01L21/30 ,  G01B11/26

CPC分类号： G03F9/7023 ,  G03F9/7049 ,  G03F9/7076

摘要： The present invention relates, in a projection aligner wherein a mask and a wafer are held proximate to one another and wherein a circuit pattern depicted on the mask is transferred onto the wafer, to a method of detecting the respective positions of the mask and the wafer for the relative positioning between the mask and the wafer. To the end of dispensing with the withdrawal of a microscope objective in such a way that the objective of a microscope for detecting the mask and the wafer and projection light, for example, an X-ray, are prevented from interfering, thereby to achieve the enhancement of throughput and to permit the detection of the positions of the mask and the wafer even during projection, the present invention consists in that the objective of the microscope is inclined with respect to a perpendicular to the plane of the mask or the plane of the wafer being a plane to-be-detected, so as not to interfere with the projection light, for example, the X-ray, whereby the circuit pattern can be transferred while the relative positions of the mask and the wafer are being detected.

摘要翻译： 本发明涉及一种投影对准器，其中掩模和晶片彼此靠近地保持，并且其中将掩模上描绘的电路图案转印到晶片上，以检测掩模和晶片的相应位置的方法 用于掩模和晶片之间的相对定位。 以这样的方式分配显微镜物镜的取出的结束，使得防止用于检测掩模和晶片的显微镜和例如X射线的投射光的目的被干扰，从而实现 增加吞吐量并且即使在投影期间也能够检测掩模和晶片的位置，本发明的目的在于，显微镜的目的是相对于掩模的平面垂直于或平面的倾斜 晶片是要被检测的平面，以便不干涉诸如X射线的投影光，由此可以在检测掩模和晶片的相对位置的同时传输电路图案。

公开(公告)号：US4447731A

公开(公告)日：1984-05-08

申请号：US327191

申请日：1981-12-03

申请人： Asahiro Kuni ,  Yukio Kembo ,  Nobuyuki Akiyama ,  Nobuhiko Aoki

发明人： Asahiro Kuni ,  Yukio Kembo ,  Nobuyuki Akiyama ,  Nobuhiko Aoki

IPC分类号： G01B11/02 ,  G01B21/00 ,  G01Q20/02 ,  G01Q20/04 ,  G01Q30/02 ,  G01Q30/04 ,  H01J37/20 ,  H01J37/22 ,  H01J37/28

CPC分类号： H01J37/226 ,  H01J37/20

摘要： An exterior view examination apparatus comprising a movable sample stage provided in a sample chamber of a scanning type electron microscope; a sample mounted on the stage; and an optical microscope which can observe the sample from an exterior of the chamber, mounted on the chamber in parallel with the scanning type electron microscope, the position of a surface part of the sample (mounted on the sample stage) to be observed, measured or analyzed being preliminary defined by the optical microscope, and the sample stage being moved by a certain amount thereby to bring the sample at the center of the visual field of the electron microscope.

摘要翻译： 一种外观检查装置，包括设置在扫描型电子显微镜的样品室中的可移动样品台; 样品安装在舞台上; 和可以与扫描型电子显微镜平行地安装在室上的室外观察样品的光学显微镜，测量样品表面部分（安装在样品台上）的位置，测量 或者通过光学显微镜进行初步定义，并且将样品台移动一定量，从而将样品置于电子显微镜的视野的中心。

公开(公告)号：US07631548B2

公开(公告)日：2009-12-15

申请号：US11737779

申请日：2007-04-20

申请人： Shuichi Baba ,  Masahiro Watanabe ,  Toshihiko Nakata ,  Toru Kurenuma ,  Hiroshi Kuroda ,  Takafumi Morimoto ,  Yukio Kembo ,  Manabu Edamura

发明人： Shuichi Baba ,  Masahiro Watanabe ,  Toshihiko Nakata ,  Toru Kurenuma ,  Hiroshi Kuroda ,  Takafumi Morimoto ,  Yukio Kembo ,  Manabu Edamura

IPC分类号： G01B5/28

CPC分类号： G01Q60/28 ,  G01Q10/06 ,  G01Q30/04

摘要： With a scanning probe microscope, if a plurality of sample properties are measured using a scanning scheme of allowing a probe to approach and withdraw from a sample, the sample properties need to be accurately and reliably detected in the minimum required measurement time. Further, the acting force between the probe and the sample varies depending on the type of the probe and the wear condition of a probe tip. Thus, disadvantageously, property values acquired using different probes cannot be compared with one another unless the artifactual effect of the measuring probes are eliminated. In accordance with the present invention, with a scanning probe microscope, the probe is brought into intermittent contact with the sample, while driving means repeatedly allows the probe to approach and withdraw from the sample with a variable amplitude. The sample property is thus acquired at a high speed. Further, a calibration sample is used in a given environment (given temperature and humidity) to acquire a force curve for at least one point. Information obtained from the force curve is used to correct measurements to display the distribution of the sample property.

摘要翻译： 使用扫描探针显微镜，如果使用允许探针进入和退出样本的扫描方案测量多个样品特性，则需要在最小所需测量时间内精确可靠地检测样品性质。 此外，探针和样品之间的作用力根据探针的类型和探针尖端的磨损情况而变化。 因此，不利的是，使用不同探针获得的特性值不能相互比较，除非消除了测量探针的人为影响。 根据本发明，利用扫描探针显微镜，使探针与样品间歇接触，同时驱动装置反复允许探针以可变的幅度从样品接近和退出。 因此，以高速度获取样品特性。 此外，在给定的环境（给定的温度和湿度）中使用校准样品以获得至少一个点的力曲线。 从力曲线获得的信息用于校正测量值以显示样品属性的分布。

公开(公告)号：US20070266780A1

公开(公告)日：2007-11-22

申请号：US11737779

申请日：2007-04-20

申请人： SHUICHI BABA ,  Masahiro Watanabe ,  Toshihiko Nakata ,  Toru Kurenuma ,  Hiroshi Kuroda ,  Takafumi Morimoto ,  Yukio Kembo ,  Manabu Edamura

发明人： SHUICHI BABA ,  Masahiro Watanabe ,  Toshihiko Nakata ,  Toru Kurenuma ,  Hiroshi Kuroda ,  Takafumi Morimoto ,  Yukio Kembo ,  Manabu Edamura

IPC分类号： G01N13/10

CPC分类号： G01Q60/28 ,  G01Q10/06 ,  G01Q30/04

摘要： With a scanning probe microscope, if a plurality of sample properties are measured using a scanning scheme of allowing a probe to approach and withdraw from a sample, the sample properties need to be accurately and reliably detected in the minimum required measurement time. Further, the acting force between the probe and the sample varies depending on the type of the probe and the wear condition of a probe tip. Thus, disadvantageously, property values acquired using different probes cannot be compared with one another unless the artifactual effect of the measuring probes are eliminated. In accordance with the present invention, with a scanning probe microscope, the probe is brought into intermittent contact with the sample, while driving means repeatedly allows the probe to approach and withdraw from the sample with a variable amplitude. The sample property is thus acquired at a high speed. Further, a calibration sample is used in a given environment (given temperature and humidity) to acquire a force curve for at least one point. Information obtained from the force curve is used to correct measurements to display the distribution of the sample property.

摘要翻译： 使用扫描探针显微镜，如果使用允许探针进入和退出样本的扫描方案测量多个样品特性，则需要在最小所需测量时间内精确可靠地检测样品性质。 此外，探针和样品之间的作用力根据探针的类型和探针尖端的磨损情况而变化。 因此，不利的是，使用不同探针获得的特性值不能相互比较，除非消除了测量探针的人为影响。 根据本发明，利用扫描探针显微镜，使探针与样品间歇接触，同时驱动装置反复允许探针以可变的幅度从样品接近和退出。 因此，以高速度获取样品特性。 此外，在给定的环境（给定的温度和湿度）中使用校准样品以获得至少一个点的力曲线。 从力曲线获得的信息用于校正测量值以显示样品属性的分布。