公开(公告)号：US06794723B2

公开(公告)日：2004-09-21

申请号：US10212466

申请日：2002-08-05

申请人： Yukihisa Takeuchi ,  Masashi Watanabe ,  Koji Kimura ,  Tatsuo Kawaguchi

发明人： Yukihisa Takeuchi ,  Masashi Watanabe ,  Koji Kimura ,  Tatsuo Kawaguchi

IPC分类号： H01L2982

CPC分类号： G02B6/12004 ,  G02B26/0858 ,  H01J5/54 ,  H01L27/20 ,  H01L41/0986 ,  H01L41/338 ,  H01L41/43 ,  Y10T29/42

摘要： A matrix type piezoelectric/electrostrictive device in which a plurality of piezoelectric/electrostrictive elements almost in a pillar shape, each having a piezoelectric/electrostrictive substance and at least a pair of electrodes being formed on the sides of the substance, are vertically provided on a thick ceramic substrate. It is driven by displacement of the piezoelectric/electrostrictive substance. In this device, a plurality of piezoelectric/electrostrictive elements are integrally bonded to the ceramic substrate and independently arranged in two dimensions. The percentage of transgranularly fractured crystal grains on at least the sides of the piezoelectric/electrostrictive substance on which the electrodes are formed is 10% or less. The unit forms a curved surface near a joined section between the substance and the substrate. The present device can show excellent performances such as large displacement at a low voltage with pushing, distorting, moving, striking (impacting), or mixing an object of action and the like.

摘要翻译： 一种矩阵型压电/电致伸缩器件，其中多个具有压电/电致伸缩物质的柱状的压电/电致伸缩元件和形成在该物质的侧面上的至少一对电极垂直设置在 厚陶瓷衬底。 它由压电/电致伸缩物质的位移驱动。 在该装置中，多个压电/电致伸缩元件一体地结合到陶瓷基板上，并且二维地独立地布置。 在形成电极的压电/电致伸缩物质的至少两侧的晶粒间断裂的晶粒的百分比为10％以下。 该单元在物质和基底之间的接合部分附近形成弯曲表面。 本装置可以显示出优异的性能，例如在推动，扭曲，移动，撞击（冲击）或混合动作对象等时在低电压下的大位移。

公开(公告)号：US07192799B2

公开(公告)日：2007-03-20

申请号：US10834297

申请日：2004-04-28

申请人： Yukihisa Takeuchi ,  Masashi Watanabe ,  Koji Kimura ,  Tatsuo Kawaguchi

发明人： Yukihisa Takeuchi ,  Masashi Watanabe ,  Koji Kimura ,  Tatsuo Kawaguchi

IPC分类号： H01L41/00 ,  H01L21/44 ,  H01L41/047 ,  H01L41/083

CPC分类号： G02B6/12004 ,  G02B26/0858 ,  H01J5/54 ,  H01L27/20 ,  H01L41/0986 ,  H01L41/338 ,  H01L41/43 ,  Y10T29/42

摘要： A method of making a matrix type piezoelectric/electrostrictive device having a plurality of pillar shaped piezoelectric/electrostrictive elements, each having a piezoelectric/electrostrictive substance and at least a pair of electrodes being formed on the sides of the substance, are vertically provided on a thick ceramic substrate, such that the device is driven by displacement of the piezoelectric/electrostrictive substance. In this device, the piezoelectric/electrostrictive elements are integrally bonded to the ceramic substrate and independently arranged in two dimensions. The percentage of transgranularly fractured crystal grains on at least the sides of the piezoelectric/electrostrictive substance on which the electrodes are formed is 10% or less. The unit forms a curved surface near a joined section between the substance and the substrate.

摘要翻译： 制造具有多个柱状压电/电致伸缩元件的矩阵型压电/电致伸缩元件的方法，每个具有压电/电致伸缩物质和至少一对电极形成在物质的侧面上，垂直地设置在 使得该器件由压电/电致伸缩物质的位移驱动。 在该装置中，压电/电致伸缩元件一体地结合到陶瓷基板上，并且二维地独立地布置。 在形成电极的压电/电致伸缩物质的至少两侧的晶粒间断裂的晶粒的百分比为10％以下。 该单元在物质和基底之间的接合部分附近形成弯曲表面。

公开(公告)号：US07161281B2

公开(公告)日：2007-01-09

申请号：US10678849

申请日：2003-10-03

申请人： Yukihisa Takeuchi ,  Koji Kimura ,  Tatsuo Kawaguchi

发明人： Yukihisa Takeuchi ,  Koji Kimura ,  Tatsuo Kawaguchi

IPC分类号： H01L41/08

CPC分类号： H01L41/0986 ,  H01L27/20 ,  H01L41/338 ,  H01L41/43

摘要： There is disclosed a piezoelectric/electrostrictive device being less-particle-generative and capable of continuously realizing a stable displacement operation over a long period of time or being large in displacement amount and high in generative force and the like. This less-dust-generative piezoelectric/electrostrictive device 1 comprises a plurality of piezoelectric/electrostrictive elements 31 including a plurality of piezoelectric/electrostrictive members 4 and at least one pair of electrodes formed on the side surface of each piezoelectric/electrostrictive member 4, and the members are set up on a thick ceramic substrate 2. In this less-dust-generative matrix-type piezoelectric/electrostrictive device 1, a plurality of piezoelectric/electrostrictive elements 31 substantially having pillar shapes are set up in a matrix form. The ceramic substrate 2 is formed integrally with the piezoelectric/electrostrictive elements 31. The side surface of each piezoelectric/electrostrictive member 4 on which the electrodes 18, 19 are formed are formed as a fired, but unprocessed face.

摘要翻译： 公开了一种压电/电致伸缩装置，其具有较少的颗粒生成能力并且能够在长时间段内连续实现稳定的位移操作或具有大的位移量和高的生成力等。 这种小生成压电/电致伸缩器件1包括多个压电/电致伸缩元件31，包括多个压电/电致伸缩元件4和形成在每个压电/电致伸缩元件4的侧表面上的至少一对电极， 将构件设置在厚陶瓷基板2上。 在这种较少粉尘的矩阵型压电/电致伸缩装置1中，基本上具有柱形的多个压电/电致伸缩元件31被设置成矩阵形式。 陶瓷基板2与压电/电致伸缩元件31一体形成。 形成有电极18,19的各压电/电致伸缩构件4的侧表面形成为烧制但未加工的面。

公开(公告)号：US20070226975A1

公开(公告)日：2007-10-04

申请号：US11756758

申请日：2007-06-01

申请人： Yukihisa Takeuchi ,  Koji Kimura ,  Koichi Iwata

发明人： Yukihisa Takeuchi ,  Koji Kimura ,  Koichi Iwata

IPC分类号： H02N2/04

CPC分类号： B41J2/14209 ,  B41J2202/11 ,  F04B17/003 ,  F04B43/046 ,  G02B6/3538 ,  G02B6/3546 ,  G02B6/3564 ,  G02B6/3578 ,  H01L27/20 ,  H01L41/0831 ,  H01L41/273 ,  Y10T29/42 ,  Y10T29/49155 ,  Y10T156/107

摘要： A piezoelectric actuator capable of being driven with a high electric field intensity, obtaining a larger displacement and being high in electric conducting reliability of electrodes, and comprising: at least one cell defined by two side walls, a substrate and a ceiling wall; the two side walls being disposed on the substrate and being covered with the ceiling wall to define one cell, at least the two side walls comprising piezoelectric/electrostrictive devices, and the piezoelectric/electrostrictive devices being capable of changing a volume of the cell by displacement of the walls. Each of the piezoelectric/electrostrictive devices comprises a plurality of layered piezoelectric/electrostrictive bodies and electrodes which are alternately stacked, and end portions of the electrodes are embedded in the piezoelectric/electrostrictive bodies in at least the internal side of the cell.

摘要翻译： 一种压电致动器，其能够以高电场强度驱动，获得较大的位移并且电极的导电可靠性高，并且包括：由两个侧壁，基板和顶壁限定的至少一个单元; 所述两个侧壁设置在所述基板上并被顶壁覆盖以限定一个单元，所述至少两个侧壁包括压电/电致伸缩装置，并且所述压电/电致伸缩装置能够通过位移来改变所述电池的体积 的墙壁。 压电/电致伸缩器件中的每一个包括交替堆叠的多个分层压电/电致伸缩体和电极，电极的端部至少在电池的内侧嵌入到压电/电致伸缩体中。

公开(公告)号：US20050145032A1

公开(公告)日：2005-07-07

申请号：US11060988

申请日：2005-02-18

申请人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

发明人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

IPC分类号： B06B1/06 ,  G01G3/16 ,  G01H11/08 ,  G01N35/00 ,  G01P15/09 ,  G02B26/02 ,  H01L41/09 ,  H01L41/113 ,  H01L41/187 ,  G01H13/00 ,  G01G3/13 ,  G01G9/00

CPC分类号： G01P15/0922 ,  B06B1/06 ,  B06B1/0648 ,  G01G3/16 ,  G01H11/08 ,  G01N2035/00217 ,  G01N2035/00237 ,  G01N2291/02827 ,  G01P15/09 ,  G01P2015/0814 ,  H01L41/0973 ,  H01L41/1132

摘要： A mass sensor in which a connection plate and a diaphragm are joined together at their respective sides; a sensing plate is joined to the connection plate at their respective sides in the direction perpendicular to the direction where the diaphragm is joined to the connection plate; a piezoelectric element consisting of a piezoelectric film and an electrode is installed on at least either one of plate surfaces of the sensing plate; and a resonating portion consisting of the diaphragm, the sensing plate, the connection plate, and the piezoelectric element is joined to a sensor substrate. Change in the mass of the diaphragm is measured by measuring change in the resonant frequency of the resonating portion accompanying the change in the mass of the diaphragm.

摘要翻译： 质量传感器，其中连接板和隔膜在其各自的侧面接合在一起; 感测板在垂直于隔膜接合方向的连接板的相应侧面处连接到连接板; 由压电膜和电极构成的压电元件安装在感测板的板表面的至少任一个上; 并且由隔膜，感测板，连接板和压电元件组成的谐振部分接合到传感器基板。 通过测量伴随隔膜质量变化的谐振部分的谐振频率的变化来测量隔膜质量的变化。

公开(公告)号：US20050082946A1

公开(公告)日：2005-04-21

申请号：US10896769

申请日：2004-07-22

申请人： Yukihisa Takeuchi ,  Tsutomu Nanataki ,  Koji Kimura ,  Natsumi Shimogawa ,  Takayoshi Akao

发明人： Yukihisa Takeuchi ,  Tsutomu Nanataki ,  Koji Kimura ,  Natsumi Shimogawa ,  Takayoshi Akao

IPC分类号： B81B3/00 ,  G02B26/08 ,  H01L41/04 ,  H01L41/09

CPC分类号： B81B3/0018 ,  B81B2201/032 ,  G02B26/0841 ,  G02B26/0858 ,  H01L41/0474 ,  H01L41/0973 ,  H04R17/005 ,  H04R2201/003

摘要： An actuator element has a plate member, a piezoelectric/electrostrictive body disposed in facing, relation to the plate member, and a beam disposed between the plate member and the piezoelectric/electrostrictive body and fixing the piezoelectric/electrostrictive body to the plate member. The piezoelectric/electrostrictive body has a piezoelectric/electrostrictive layer, an upper electrode formed on a surface of the piezoelectric/electrostrictive layer which faces the plate member, and a lower electrode formed on a surface of the piezoelectric/electrostrictive layer which is opposite to the surface thereof facing the plate member. When an electric field is applied to the upper electrode and the lower electrode, a portion of the piezoelectric/electrostrictive body is displaced toward or away from the plate member.

摘要翻译： 致动器元件具有板构件，与板构件相对设置的面对的压电/电致伸缩体，以及设置在板构件和压电/电致伸缩体之间的梁，并将压电/电致伸缩体固定到板构件。 压电/电致伸缩体具有压电/电致伸缩层，形成在压电/电致伸缩层的面向板构件的表面上的上电极和形成在与压电/电致伸缩层相对的压电/电致伸缩层的表面上的下电极 其表面面向板构件。 当电场施加到上电极和下电极时，压电/电致伸缩体的一部分朝向或远离板构件移动。

公开(公告)号：US20050016277A1

公开(公告)日：2005-01-27

申请号：US10925514

申请日：2004-08-25

申请人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

发明人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

IPC分类号： B06B1/06 ,  G01G3/16 ,  G01H11/08 ,  G01N35/00 ,  G01P15/09 ,  G02B26/02 ,  H01L41/09 ,  H01L41/113 ,  H01L41/187 ,  G01H13/00

CPC分类号： G01P15/0922 ,  B06B1/06 ,  B06B1/0648 ,  G01G3/16 ,  G01H11/08 ,  G01N2035/00217 ,  G01N2035/00237 ,  G01N2291/02827 ,  G01P15/09 ,  G01P2015/0814 ,  H01L41/0973 ,  H01L41/1132

摘要： A mass sensor in which a connection plate and a diaphragm are joined together at their respective sides; a sensing plate is joined to the connection plate at their respective sides in the direction perpendicular to the direction where the diaphragm is joined to the connection plate; a piezoelectric element consisting of a piezoelectric film and an electrode is installed on at least either one of plate surfaces of the sensing plate; and a resonating portion consisting of the diaphragm, the sensing plate, the connection plate, and the piezoelectric element is joined to a sensor substrate. Change in the mass of the diaphragm is measured by measuring change in the resonant frequency of the resonating portion accompanying the change in the mass of the diaphragm.

公开(公告)号：US06476539B1

公开(公告)日：2002-11-05

申请号：US09642861

申请日：2000-08-21

申请人： Yukihisa Takeuchi ,  Tsutomu Nanataki ,  Masato Komazawa ,  Koji Kimura

发明人： Yukihisa Takeuchi ,  Tsutomu Nanataki ,  Masato Komazawa ,  Koji Kimura

IPC分类号： H01L4108

CPC分类号： H01L41/43 ,  H01L41/0946

摘要： Provided is a piezoelectric/electrostrictive device comprising a driving portion to be driven by a displacement of a piezoelectric/electrostrictive element, a movable portion to be operated based on a drive of the driving portion, and a fixing portion for holding the driving portion and the movable portion, the fixing portion and the movable portions being coupled via the driving portion, and a hole being formed by an inner wall of the driving portion, inner wall of the movable portion, and inner walls of the fixing portion. The driving portion comprises a pair of mutually opposing thin plate portions and at least two piezoelectric/electrostrictive elements each comprising at least one or more pairs of electrodes and a piezoelectric/electrostrictive layer provided on the thin plate portions.

摘要翻译： 本发明提供一种压电/电致伸缩器件，其特征在于，包括：驱动部，其通过压电/电致伸缩元件的位移驱动;基于所述驱动部的驱动而被驱动的可动部，以及用于保持所述驱动部和 可动部分，固定部分和可动部分经由驱动部分联接，以及由驱动部分的内壁，可移动部分的内壁和固定部分的内壁形成的孔。 驱动部分包括一对相互相对的薄板部分和至少两个压电/电致伸缩元件，每个压电/电致伸缩元件包括至少一对或多对电极和设置在薄板部分上的压电/电致伸缩层。

公开(公告)号：US06457361B1

公开(公告)日：2002-10-01

申请号：US09387012

申请日：1999-08-31

申请人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

发明人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

IPC分类号： G01H1300

CPC分类号： G01G3/13

摘要： A mass sensor including: a connecting plate having one or more slit(s) and/or opening portion(s) formed therein and/or having a thin-walled portion and a thick-walled portion formed therein; a diaphragm joined with the connecting plate at respective side surfaces; a piezoelectric element; a sensing plate with the piezoelectric element being provided at least at one part on at least one surface of the sensing plate, which has its side surface joined with a side surface of the connecting plate in the direction perpendicular to the joining direction of the diaphragm and the connecting plate; and a sensor substrate with which at least a part of side surfaces of the connecting plate as well as the sensing plate are joined, and the diaphragm, the connecting plate, the sensing plate, and the piezoelectric element form a resonating portion. The mass sensor can conveniently be used for determining the mass of a substance to be sensed by measuring changes in resonant frequencies caused by changes in the mass of the diaphragm on which a catching substance for catching a substance to be sensed by reacting only with the object of sensing is applied.

摘要翻译： 一种质量传感器，包括：连接板，其中形成有一个或多个狭缝和/或开口部分，和/或具有形成在其中的薄壁部分和厚壁部分; 在相应的侧表面处连接有连接板的隔膜; 压电元件; 具有压电元件的检测板至少在传感板的至少一个表面上的一个部分上设置，其侧表面在垂直于隔膜的接合方向的方向上与连接板的侧表面接合， 连接板; 以及传感器基板，连接板的至少一部分的侧面以及感测板与其连接，隔膜，连接板，感测板和压电元件形成谐振部。 质量传感器可以方便地用于通过测量由通过仅与物体反应而捕获待检测物质的捕获物质的膜片的质量变化引起的谐振频率的变化来确定待感测物质的质量 的感应。

公开(公告)号：US06455984B1

公开(公告)日：2002-09-24

申请号：US09671587

申请日：2000-09-27

申请人： Yukihisa Takeuchi ,  Tsutomu Nanataki ,  Masahiko Namerikawa ,  Koji Kimura ,  Kazuyoshi Shibata

发明人： Yukihisa Takeuchi ,  Tsutomu Nanataki ,  Masahiko Namerikawa ,  Koji Kimura ,  Kazuyoshi Shibata

IPC分类号： H01L4108

CPC分类号： H01L41/0946 ,  H01L41/273 ,  Y10T29/42 ,  Y10T29/435 ,  Y10T29/49078 ,  Y10T29/49126

摘要： A piezoelectric/electrostrictive device includes a pair of mutually opposing thin plate sections, a movable section, and a fixing section for supporting the thin plate sections and the movable section. Piezoelectric/electrostrictive elements are arranged on at least one thin plate section of the pair of thin plate sections. A hole is formed by both inner walls of the pair of thin plate sections, an inner wall of the movable section, and an inner wall of the fixing section. The piezoelectric/electrostrictive device has a mechanism for restricting amplitude of the thin plate sections. The mechanism includes a cavity portion formed in the inner wall of the movable section and a stopper member provided on the inner wall of the fixing section, wherein the forward end of the stopper member extends into the cavity portion.

摘要翻译： 压电/电致伸缩装置包括一对相互相对的薄板部分，可移动部分和用于支撑薄板部分和可移动部分的固定部分。 压电/电致伸缩元件布置在该对薄板部分的至少一个薄板部分上。 一对薄壁部分的内壁，可移动部分的内壁和固定部分的内壁都由一个孔形成。 压电/电致伸缩装置具有用于限制薄板部分的振幅的机构。 该机构包括形成在可动部分的内壁中的空腔部分和设置在固定部分的内壁上的止动部件，其中止动件的前端延伸到空腔部分中。